MX2010014141A - Modulo compacto de irradiacion uv. - Google Patents

Modulo compacto de irradiacion uv.

Info

Publication number
MX2010014141A
MX2010014141A MX2010014141A MX2010014141A MX2010014141A MX 2010014141 A MX2010014141 A MX 2010014141A MX 2010014141 A MX2010014141 A MX 2010014141A MX 2010014141 A MX2010014141 A MX 2010014141A MX 2010014141 A MX2010014141 A MX 2010014141A
Authority
MX
Mexico
Prior art keywords
compact
irradiation module
irradiation
substrate
irradiating
Prior art date
Application number
MX2010014141A
Other languages
English (en)
Inventor
Thomas Arnold
Sven Linow
Ralf Pretsch
Original Assignee
Heraeus Noblelight Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Noblelight Gmbh filed Critical Heraeus Noblelight Gmbh
Publication of MX2010014141A publication Critical patent/MX2010014141A/es

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/025—Associated optical elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V7/00—Reflectors for light sources
    • F21V7/22—Reflectors for light sources characterised by materials, surface treatments or coatings, e.g. dichroic reflectors
    • F21V7/24—Reflectors for light sources characterised by materials, surface treatments or coatings, e.g. dichroic reflectors characterised by the material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/35—Vessels; Containers provided with coatings on the walls thereof; Selection of materials for the coatings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/70—Lamps with low-pressure unconstricted discharge having a cold pressure < 400 Torr
    • H01J61/72—Lamps with low-pressure unconstricted discharge having a cold pressure < 400 Torr having a main light-emitting filling of easily vaporisable metal vapour, e.g. mercury
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/82—Lamps with high-pressure unconstricted discharge having a cold pressure > 400 Torr

Abstract

La invención trata de un dispositivo para la irradiación de por lo menos un sustrato, que consta de una unidad de irradiación para irradiar el sustrato con luz ultravioleta, en donde la unidad de irradiación es una lámpara de descarga con reflector integrado y un método para producir un módulo de irradiación para irradiar un sustrato utilizando luz ultravioleta.
MX2010014141A 2008-06-16 2009-06-15 Modulo compacto de irradiacion uv. MX2010014141A (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008028233A DE102008028233A1 (de) 2008-06-16 2008-06-16 Kompaktes UV-Bestrahlungsmodul
PCT/EP2009/004296 WO2010003511A2 (de) 2008-06-16 2009-06-15 Kompaktes uv bestrahlungsmodul

Publications (1)

Publication Number Publication Date
MX2010014141A true MX2010014141A (es) 2011-09-28

Family

ID=41317790

Family Applications (1)

Application Number Title Priority Date Filing Date
MX2010014141A MX2010014141A (es) 2008-06-16 2009-06-15 Modulo compacto de irradiacion uv.

Country Status (10)

Country Link
US (1) US8330341B2 (es)
EP (1) EP2289091A2 (es)
JP (1) JP2011524616A (es)
KR (1) KR20110030455A (es)
CN (1) CN102084454B (es)
BR (1) BRPI0914786B1 (es)
CA (1) CA2727170C (es)
DE (1) DE102008028233A1 (es)
MX (1) MX2010014141A (es)
WO (1) WO2010003511A2 (es)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2474032B (en) * 2009-10-01 2016-07-27 Heraeus Noblelight Gmbh Flash lamp or gas discharge lamp with integrated reflector
US8960235B2 (en) 2011-10-28 2015-02-24 Applied Materials, Inc. Gas dispersion apparatus
DE202013101906U1 (de) * 2012-05-04 2013-05-27 Heraeus Noblelight Gmbh Vorrichtung zum Absaugen von Aerosolen
KR101402236B1 (ko) * 2012-05-25 2014-06-02 국제엘렉트릭코리아 주식회사 노즐 유닛 및 그 노즐 유닛을 갖는 기판 처리 설비
DE102015104932B3 (de) * 2015-03-31 2016-06-02 Heraeus Noblelight Gmbh Vorrichtung zur Wärmebehandlung
DE102015107129B3 (de) * 2015-05-07 2016-07-07 Heraeus Noblelight Gmbh Vorrichtung zum Aushärten einer Beschichtung auf einer Innenwandung eines Kanals mit ovalem Querschnitt
JP7248954B2 (ja) * 2019-08-29 2023-03-30 岩崎電気株式会社 低圧水銀ランプユニット
CN116940055A (zh) * 2022-04-08 2023-10-24 贺利氏特种光源有限公司 冷却的红外线或uv模块

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3305173A1 (de) 1983-02-15 1984-08-16 Technigraf GmbH, 6394 Grävenwiesbach Durch zwangsluftstroemung kuehlbarer uv-strahler mit einer langbogenentladungslampe
JPS63176535U (es) * 1986-06-18 1988-11-16
JPH02150610U (es) * 1989-05-23 1990-12-27
JPH0343378U (es) * 1989-08-31 1991-04-23
JPH0451755U (es) * 1990-09-05 1992-04-30
JP2542952Y2 (ja) * 1991-03-28 1997-07-30 ウシオ電機株式会社 マイクロ波無電極発光装置
ATE246844T1 (de) * 1996-05-31 2003-08-15 Fusion Lighting Inc Mehrfachreflektion elektrodenlose lampe mit einer schwefel oder selen enthaltenden füllung und verfahren zur strahlungserzeugung mit einer solchen lampe
JP3702850B2 (ja) 2002-01-24 2005-10-05 ウシオ電機株式会社 誘電体バリヤ放電ランプを使用した処理方法
JP4221561B2 (ja) * 2002-10-02 2009-02-12 株式会社ジーエス・ユアサコーポレーション エキシマランプ
DE202004006274U1 (de) 2004-04-21 2004-06-17 Technigraf Gmbh UV-Lampe
WO2005105448A2 (de) 2004-05-04 2005-11-10 Advanced Photonics Technologies Ag Bestrahlungseinrichtung
CN101023040B (zh) * 2004-08-23 2011-08-03 赫罗伊斯石英玻璃股份有限两合公司 涂覆的石英玻璃组件和制造所述组件的方法
DE102004051846B4 (de) 2004-08-23 2009-11-05 Heraeus Quarzglas Gmbh & Co. Kg Bauteil mit einer Reflektorschicht sowie Verfahren für seine Herstellung
DE102005016732A1 (de) * 2004-10-26 2006-10-12 Heraeus Quarzglas Gmbh & Co. Kg Bauteil mit einer Reflektorschicht
JP4424296B2 (ja) * 2005-10-13 2010-03-03 ウシオ電機株式会社 紫外線照射装置
JP4857939B2 (ja) * 2006-06-19 2012-01-18 ウシオ電機株式会社 放電ランプ
JP4788534B2 (ja) * 2006-09-07 2011-10-05 ウシオ電機株式会社 エキシマランプ
DE102006062166B4 (de) * 2006-12-22 2009-05-14 Heraeus Quarzglas Gmbh & Co. Kg Quarzglas-Bauteil mit Reflektorschicht sowie Verfahren zur Herstellung desselben

Also Published As

Publication number Publication date
DE102008028233A1 (de) 2009-12-17
US20110163651A1 (en) 2011-07-07
US8330341B2 (en) 2012-12-11
CN102084454B (zh) 2013-10-30
JP2011524616A (ja) 2011-09-01
CA2727170A1 (en) 2010-01-14
WO2010003511A2 (de) 2010-01-14
WO2010003511A3 (de) 2010-03-11
KR20110030455A (ko) 2011-03-23
CN102084454A (zh) 2011-06-01
BRPI0914786B1 (pt) 2019-07-02
EP2289091A2 (de) 2011-03-02
BRPI0914786A2 (pt) 2016-07-19
CA2727170C (en) 2015-04-07

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