EP2257855A1 - Physikalisches pendel und herstellungsverfahren dafür - Google Patents

Physikalisches pendel und herstellungsverfahren dafür

Info

Publication number
EP2257855A1
EP2257855A1 EP09721945A EP09721945A EP2257855A1 EP 2257855 A1 EP2257855 A1 EP 2257855A1 EP 09721945 A EP09721945 A EP 09721945A EP 09721945 A EP09721945 A EP 09721945A EP 2257855 A1 EP2257855 A1 EP 2257855A1
Authority
EP
European Patent Office
Prior art keywords
balance
substrate
metal
additional portion
pendulum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP09721945A
Other languages
English (en)
French (fr)
Other versions
EP2257855B1 (de
Inventor
Pierre-André Bühler
Marco Verardo
Thierry Conus
Jean-Philippe Thiébaud
Jean-Bernard Peters
Pierre Cusin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nivarox Far SA
Nivarox SA
Original Assignee
Nivarox Far SA
Nivarox SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nivarox Far SA, Nivarox SA filed Critical Nivarox Far SA
Priority to EP12164386.0A priority Critical patent/EP2485095B1/de
Priority to EP09721945A priority patent/EP2257855B1/de
Publication of EP2257855A1 publication Critical patent/EP2257855A1/de
Application granted granted Critical
Publication of EP2257855B1 publication Critical patent/EP2257855B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G04HOROLOGY
    • G04BMECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B17/00Mechanisms for stabilising frequency
    • G04B17/04Oscillators acting by spring tension
    • G04B17/06Oscillators with hairsprings, e.g. balance
    • G04B17/063Balance construction
    • GPHYSICS
    • G04HOROLOGY
    • G04DAPPARATUS OR TOOLS SPECIALLY DESIGNED FOR MAKING OR MAINTAINING CLOCKS OR WATCHES
    • G04D3/00Watchmakers' or watch-repairers' machines or tools for working materials
    • G04D3/0002Watchmakers' or watch-repairers' machines or tools for working materials for mechanical working other than with a lathe
    • G04D3/0035Watchmakers' or watch-repairers' machines or tools for working materials for mechanical working other than with a lathe for components of the regulating mechanism
    • G04D3/0038Watchmakers' or watch-repairers' machines or tools for working materials for mechanical working other than with a lathe for components of the regulating mechanism for balances
    • GPHYSICS
    • G04HOROLOGY
    • G04DAPPARATUS OR TOOLS SPECIALLY DESIGNED FOR MAKING OR MAINTAINING CLOCKS OR WATCHES
    • G04D3/00Watchmakers' or watch-repairers' machines or tools for working materials
    • G04D3/0069Watchmakers' or watch-repairers' machines or tools for working materials for working with non-mechanical means, e.g. chemical, electrochemical, metallising, vapourising; with electron beams, laser beams

Definitions

  • the invention relates to a pendulum and its manufacturing method and, more particularly, to a composite pendulum.
  • the regulating member of a timepiece generally comprises an inertia flywheel called a balance wheel and a resonator called a spiral. These pieces are decisive for the running quality of the timepiece. Indeed, they regulate the movement, that is to say they control the frequency of the movement.
  • the balance and the hairspring are different in nature, which makes it extremely difficult to perfect the regulating organ, which includes the own fabrications of the balance and the hairspring and their assembly substantially in resonance.
  • the pendulum in particular has been manufactured in various materials without the difficulties of isochronism related to the influence of a temperature change of the regulating organ on which it depends, do not disappear.
  • the object of the present invention is to overcome all or part of the drawbacks mentioned above by proposing a composite balance whose characteristics as a function of temperature are more easily adjustable and which is obtained using a method manufacturing that has fewer steps.
  • the invention relates to a composite rocker formed in a layer of silicon-based material and having a hub connected to a serge by at least one arm, characterized in that the serge comprises at least one additional portion substantially in the form of a crenellated ring of greater density than said silicon-based material for increasing the inertia of said balance.
  • said at least one additional part is mounted on one of the main faces of the serge, which makes it possible to amplify the inertia adjustment; said at least one additional portion is mounted in a recess made in one of the main faces of the serge;
  • said at least one additional portion projects from one of the main faces of the serge
  • said at least one additional portion comprises a succession of studs spaced apart at regular intervals to compensate for the thermal expansion of said at least one additional part;
  • said at least one additional portion is formed from a metallic material such as gold which has a density much higher than that of silicon;
  • the hub comprises at least a second additional portion for receiving by driving the balance shaft;
  • said at least one additional second portion is mounted on one of the main faces of the hub;
  • said at least one second additional portion is mounted in a recess made in one of the main faces of the hub;
  • said at least one second additional portion projects from one of the main faces of the hub
  • said at least one additional second portion is substantially cylinder-shaped
  • said at least one additional second portion is formed from a metallic material said at least one arm is slender in order to allow its axial and / or radial deformation in the event of shock transmitted on the balance.
  • the invention also relates to a timepiece characterized in that it comprises a balance according to one of the preceding variants.
  • the invention relates to a method of manufacturing a balance comprising the following steps: a) providing a substrate made of a silicon-based material; characterized in that it further comprises the steps of: b) selectively depositing at least one metal layer on the substrate to define the pattern of at least one metal portion of said balance; c) selectively etching at least one cavity in the substrate to define the pendulum pattern comprising said at least one layer of metal. d) release the balance of the substrate.
  • step b) comprises step e): growing said deposition by successive metal layers at least partially on the surface of the substrate in order to form a metal part intended to increase the weight of the balance and / or a metal part intended to to receive by driving an axis;
  • step b) comprises the steps f): selectively etching at least one cavity in the substrate intended to receive said at least one metal part; and g): growing said deposition by successive metallic layers at least partially in said at least one a cavity for forming a metal portion for increasing the mass of said third silicon part and / or a metal part for receiving a shaft by driving.
  • step b) comprises the last step h): polishing the metal deposit; - AT -
  • FIG. 1 and 2 show views of the successive steps of the method according to a first embodiment
  • FIG. 3 to 5 show views of the successive steps of the method according to a second embodiment
  • FIGS. 6 and 7 are perspective representations of a composite balance according to a first embodiment
  • FIGS. 8 and 9 are perspective representations of a composite balance according to a second embodiment; - Figure 10 shows a block diagram of the method according to the invention.
  • the invention relates to a generally annotated method 1 and which is intended to manufacture a balance 45, 45 'for a timepiece movement.
  • the method 1 comprises successive steps intended to form at least one type of composite balance, that is to say which is preferably formed by two different materials, such as, for example, silicon and metal.
  • the first step 3 consists in providing a substrate 21 comprising a silicon layer.
  • the substrate 21 is chosen so that, as shown in Figures 1 and 3, its thickness corresponds substantially to the desired thickness of the silicon portion of the balance 45, 45 '.
  • the thickness of the substrate 21 may be, for example, between 100 and 400 microns.
  • the method 1 may comprise two embodiments 19, 20 as illustrated in FIG.
  • the method 1 comprises the implementation of a process of the LIGA type (also known by the German terms
  • “Rendering, Galvanoformung & Abformung”) comprising a succession of steps for electrodepositing, in a particular form, a metal on the substrate 21 with a selectively photostructured resin.
  • the deposited metal may be, for example, gold or nickel or one of their alloys.
  • step 5 may consist of depositing a crenellated ring 23 and / or a cylinder 25.
  • the ring 23 comprises a series of pads 22 substantially in an arc and is intended to advantageously increase the mass of the future beam 45.
  • one of the advantages of silicon is its low sensitivity to temperature variations. However, it has the disadvantage of having a low density.
  • a first characteristic of the invention is therefore to increase the mass of the balance 45 with the aid of metal obtained by electrodeposition in order to increase the inertia of the future balance beam 45.
  • the metal deposited on the substrate 21 has a spacing between each pad 22 adapted to compensate for the thermal expansion of the ring 23 by avoiding transmitting silicon constraints related to these dilations.
  • the cylinder 25 is intended to receive, advantageously, by driving a balance shaft.
  • another disadvantage of silicon lies in its very weak elastic and plastic zones which makes it very brittle.
  • Another characteristic of The invention thus consists in effecting the clamping of the balance shaft not against the silicon but on the inside diameter 24 of the metal cylinder 25 electrodeposited during step 5.
  • the cylinder 25 obtained by electroplating leaves full freedom as to its geometry.
  • the inner diameter 24 is not necessarily circular but, for example, polygonal which could improve the transmission of force in rotation with a corresponding shape of the axis.
  • cavities 26 to 34 are selectively etched, for example, by a deep reactive ion etching process (also known by the acronym DRIE), in the silicon substrate 21.
  • DRIE deep reactive ion etching process
  • the cavities 26 to 34 make it possible to form the pattern 35 of the future balance 45.
  • the pattern 35 obtained comprises a serge 37 connected to the hub 39 by four arms 40 to 43.
  • the etching on the substrate 21 leaves all freedom on the geometry of the pattern 35.
  • the number and the geometry of the arms can be different just as the rim is not necessarily circular but, for example , elliptical.
  • the arms may be slender in order to allow their axial and / or radial deformation in the event of shock transmitted on the balance 45.
  • the cavity 34 formed in the hub 39 forms with the inner diameter 24 of the metal cylinder 25 a hollow space adapted to receive an axis.
  • material bridges 36 are formed in order to maintain the pattern 35 on the substrate 21.
  • step 9 is simply performed by providing a force to the balance 45 able to break its material bridges 36.
  • This effort can, for example, be generated by machining or manually by an operator.
  • rocker 45 formed mainly of silicon with one or two parts 23, 25 of metal. It is thus clear that the rocker 45 is of the composite type in that it comprises at least two types of material and monoblock in that the element 35 and the elements 23 and / or
  • the balance 45 comprises a hub 39 connected radially to the seam 37 by four arms 40, 41, 42 and 43.
  • the hub 39 is advantageously also axially connected to the metal cylinder and the seam 37 comprises, on a part of a of its main faces, the crenellated ring 23.
  • the method 1 comprises a second step 11, as can be seen in FIG. 3, in which cavities 38 and / or 44 are selectively etched, for example by a method of the DRIE type, in a part of the thickness of the silicon substrate 21.
  • These cavities 38, 44 make it possible to form recesses able to serve as a container for at least one metal part 23 ', 25'.
  • the cavities 38 and 44 obtained can be respectively ring-shaped and disk.
  • cavities 38 and / or 44 obtained by etching leave all freedom as to their geometry.
  • the cavities 38 and / or 44 are not necessarily circular but, for example, polygonal.
  • step 13 may consist in depositing a crenellated ring 23 'in the cavity 38 and / or a cylinder 25' in the cavity 44.
  • the ring 23 ' has a series of pads 22' substantially in a circular arc and is intended to advantageously increase the mass of the future beam 45 '. Indeed, as already explained above, a disadvantage of silicon lies in its low density.
  • a characteristic of the invention therefore consists in increasing the mass of the balance 45 'with the aid of metal obtained by electroplating, which makes it possible to increase the inertia of the future balance 45'.
  • the metal deposited on the substrate 21 has a spacing between each pad 22 'able to compensate for the thermal expansion of the ring 23' while avoiding to transmit to silicon the stresses related to these expansions.
  • the cylinder 25 ' is intended to receive, advantageously, by driving a balance shaft.
  • another advantageous feature according to the invention is to achieve the clamping of the balance shaft not against the silicon but on the inner diameter 24 'of the metal cylinder 25' electrodeposited at the time of the invention.
  • the cylinder 25 'obtained by electroplating leaves full freedom as to its geometry.
  • the inner diameter 24 ' is not necessarily circular but, for example, polygonal which could improve the transmission of rotational force with a corresponding shape axis.
  • the method 1 may comprise, in a fourth step 15, as shown in broken lines in Figure 10, of polishing the metal deposit or 23 ', 25' made in step 13 to make them planar.
  • the cavities 26 'to 34' make it possible to form the pattern 35 'of the future arm 45'.
  • the pattern 35 'obtained comprises a serge 37' connected to the hub 39 'by four arms 40' to 43 '.
  • the etching on the substrate 21 leaves all freedom on the geometry of the pattern 35 '.
  • the number and the geometry of the arms can be different just as the rim is not necessarily circular but, for example, elliptical.
  • the arms may be slender to allow their axial deformation and / or radial in case of shock transmitted on the balance 45 '.
  • the cavity 34 'formed in the hub 39' forms with the inner diameter 24 'of the metal cylinder 25' a hollow space adapted to receive an axis.
  • material bridges 36 ' are formed in order to maintain the pattern 35' on the substrate 21.
  • Embodiment 20 terminates as Embodiment 19, i.e., by the final step 9 of releasing substrate 45 from the substrate 21 manufactured.
  • step 9 is simply performed by providing a force to the balance 45 'able to break its material bridges 36'. This effort can, for example, be generated by machining or manually by an operator.
  • the balance 45 ' is of the composite type in that it comprises at least two types of material and monoblock in that the element 35' and the elements 23 'and / or 25' are indissociable under pain of destruction.
  • the balance 45 ' comprises a hub 39' radially connected to the seam 37 'by four arms 40', 41 ', 42' and 43 '.
  • the hub 39 'advantageously comprises also the cylinder 25 'metal.
  • the serge 37 ' comprises the crenellated ring 23'.
  • the hub 39, 39 ' according to the embodiment 19, 20 may not comprise a cylinder 25, 25' metal hunting.
  • the cylinder 25, 25 'could then, for example, be replaced by elastic means etched into the silicon hub 39, 39' which can take the form of those disclosed in FIGS. 1 OA to 10E of the patent EP 1 655 642 or those disclosed in Figures 1, 3 and 5 of EP 1 584 994 which are incorporated by reference in the present description.
  • the metal parts 25, 25 'electrodeposited according to the embodiments 19 and 20 are interchanged, i.e. the projecting portion 25 of the mode 19 is replaced by the integrated part 25' of the mode. 20 or conversely (which requires only a minimal adaptation of the method 1) or even that the portion 25 'integrated in the hub protrudes from the substrate 21.
  • the method 1 may furthermore provide, a posteriori of the release step 9, a step of adapting the inertia of the balance 45, 45 '.
  • a posteriori of the release step 9 a step of adapting the inertia of the balance 45, 45 '.
  • Such a step could then consist in engraving, by laser example, recesses made on the peripheral wall of the serge 37, 37 'and / or on one of the metal parts 23, 23' electrodeposited.
  • control structures of the flyweight type can also be envisaged to increase the inertia of the balance 45, 45 '.
  • a polishing step of the type of step 15 can also be performed between step 5 and step 7.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
EP09721945A 2008-03-20 2009-03-13 Herstellungsverfahren einer kompositen unruh Active EP2257855B1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP12164386.0A EP2485095B1 (de) 2008-03-20 2009-03-13 Unruh von Kompositmaterialen
EP09721945A EP2257855B1 (de) 2008-03-20 2009-03-13 Herstellungsverfahren einer kompositen unruh

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP08153093A EP2104005A1 (de) 2008-03-20 2008-03-20 Composite-Unruh und Herstellungsverfahren dafür
PCT/EP2009/053001 WO2009115464A1 (fr) 2008-03-20 2009-03-13 Balancier composite et son procédé de fabrication
EP09721945A EP2257855B1 (de) 2008-03-20 2009-03-13 Herstellungsverfahren einer kompositen unruh

Related Child Applications (1)

Application Number Title Priority Date Filing Date
EP12164386.0 Division-Into 2012-04-17

Publications (2)

Publication Number Publication Date
EP2257855A1 true EP2257855A1 (de) 2010-12-08
EP2257855B1 EP2257855B1 (de) 2012-12-05

Family

ID=39917657

Family Applications (3)

Application Number Title Priority Date Filing Date
EP08153093A Withdrawn EP2104005A1 (de) 2008-03-20 2008-03-20 Composite-Unruh und Herstellungsverfahren dafür
EP12164386.0A Active EP2485095B1 (de) 2008-03-20 2009-03-13 Unruh von Kompositmaterialen
EP09721945A Active EP2257855B1 (de) 2008-03-20 2009-03-13 Herstellungsverfahren einer kompositen unruh

Family Applications Before (2)

Application Number Title Priority Date Filing Date
EP08153093A Withdrawn EP2104005A1 (de) 2008-03-20 2008-03-20 Composite-Unruh und Herstellungsverfahren dafür
EP12164386.0A Active EP2485095B1 (de) 2008-03-20 2009-03-13 Unruh von Kompositmaterialen

Country Status (9)

Country Link
US (1) US8550699B2 (de)
EP (3) EP2104005A1 (de)
JP (3) JP2011525614A (de)
KR (1) KR20100138927A (de)
CN (1) CN101978327B (de)
HK (1) HK1154087A1 (de)
RU (1) RU2468405C2 (de)
TW (1) TWI438589B (de)
WO (1) WO2009115464A1 (de)

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US9188956B2 (en) * 2012-12-28 2015-11-17 Seiko Instruments Inc. Balance, timepiece movement, timepiece and manufacturing method of balance
JP6133730B2 (ja) * 2013-09-02 2017-05-24 シチズン時計株式会社 てん輪
EP2990883A1 (de) * 2014-08-29 2016-03-02 Nivarox-FAR S.A. Spiralunruh-Einheit für Uhrwerk
JP6358944B2 (ja) * 2014-12-12 2018-07-18 シチズン時計株式会社 電鋳部品の製造方法、電鋳部品、時計用電鋳部品及びベアリング
TWD173639S (zh) * 2015-01-13 2016-02-11 奧米茄公司 針盤
CN105182722A (zh) * 2015-07-13 2015-12-23 济南大学 一种时计机芯摆轮
EP3181515A1 (de) * 2015-12-15 2017-06-21 CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement Uhr aus verbundmaterial und ihr herstellungsverfahren
JP6625451B2 (ja) * 2016-03-08 2019-12-25 シチズン時計株式会社 テン輪
CN105974776A (zh) * 2016-07-04 2016-09-28 上海靖和实业有限公司 一种双露摆机心止摆装置
EP3425458A1 (de) * 2017-07-07 2019-01-09 ETA SA Manufacture Horlogère Suisse Abtrennbares stück eines uhrenoszillators
EP3502786A1 (de) * 2017-12-22 2019-06-26 The Swatch Group Research and Development Ltd Unruh für uhr, und herstellungsverfahren einer solchen unruh
EP3502787B1 (de) 2017-12-22 2020-11-18 The Swatch Group Research and Development Ltd Herstellungsverfahren einer unruh für uhren
EP3647883A1 (de) * 2018-11-05 2020-05-06 CSEM Centre Suisse D'electronique Et De Microtechnique SA Unruh einer uhr
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Also Published As

Publication number Publication date
RU2010142923A (ru) 2012-04-27
EP2257855B1 (de) 2012-12-05
EP2104005A1 (de) 2009-09-23
EP2485095A1 (de) 2012-08-08
JP2013068638A (ja) 2013-04-18
JP5603458B2 (ja) 2014-10-08
KR20100138927A (ko) 2010-12-31
JP2011525614A (ja) 2011-09-22
US20110103196A1 (en) 2011-05-05
RU2468405C2 (ru) 2012-11-27
JP5443626B2 (ja) 2014-03-19
JP2013231732A (ja) 2013-11-14
CN101978327A (zh) 2011-02-16
HK1154087A1 (en) 2012-04-20
US8550699B2 (en) 2013-10-08
TWI438589B (zh) 2014-05-21
WO2009115464A1 (fr) 2009-09-24
TW201007395A (en) 2010-02-16
CN101978327B (zh) 2012-07-18
EP2485095B1 (de) 2013-06-19

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