EP2257855B1 - Herstellungsverfahren einer kompositen unruh - Google Patents

Herstellungsverfahren einer kompositen unruh Download PDF

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Publication number
EP2257855B1
EP2257855B1 EP09721945A EP09721945A EP2257855B1 EP 2257855 B1 EP2257855 B1 EP 2257855B1 EP 09721945 A EP09721945 A EP 09721945A EP 09721945 A EP09721945 A EP 09721945A EP 2257855 B1 EP2257855 B1 EP 2257855B1
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EP
European Patent Office
Prior art keywords
substrate
metal
balance
manufacturing
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP09721945A
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English (en)
French (fr)
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EP2257855A1 (de
Inventor
Pierre-André Bühler
Marco Verardo
Thierry Conus
Jean-Philippe Thiébaud
Jean-Bernard Peters
Pierre Cusin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nivarox Far SA
Nivarox SA
Original Assignee
Nivarox Far SA
Nivarox SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Nivarox Far SA, Nivarox SA filed Critical Nivarox Far SA
Priority to EP12164386.0A priority Critical patent/EP2485095B1/de
Priority to EP09721945A priority patent/EP2257855B1/de
Publication of EP2257855A1 publication Critical patent/EP2257855A1/de
Application granted granted Critical
Publication of EP2257855B1 publication Critical patent/EP2257855B1/de
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Classifications

    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B17/00—Mechanisms for stabilising frequency
    • G04B17/04—Oscillators acting by spring tension
    • G04B17/06—Oscillators with hairsprings, e.g. balance
    • G04B17/063—Balance construction
    • G—PHYSICS
    • G04—HOROLOGY
    • G04D—APPARATUS OR TOOLS SPECIALLY DESIGNED FOR MAKING OR MAINTAINING CLOCKS OR WATCHES
    • G04D3/00—Watchmakers' or watch-repairers' machines or tools for working materials
    • G04D3/0002—Watchmakers' or watch-repairers' machines or tools for working materials for mechanical working other than with a lathe
    • G04D3/0035—Watchmakers' or watch-repairers' machines or tools for working materials for mechanical working other than with a lathe for components of the regulating mechanism
    • G04D3/0038—Watchmakers' or watch-repairers' machines or tools for working materials for mechanical working other than with a lathe for components of the regulating mechanism for balances
    • G—PHYSICS
    • G04—HOROLOGY
    • G04D—APPARATUS OR TOOLS SPECIALLY DESIGNED FOR MAKING OR MAINTAINING CLOCKS OR WATCHES
    • G04D3/00—Watchmakers' or watch-repairers' machines or tools for working materials
    • G04D3/0069—Watchmakers' or watch-repairers' machines or tools for working materials for working with non-mechanical means, e.g. chemical, electrochemical, metallising, vapourising; with electron beams, laser beams

Definitions

  • the invention relates to a method of manufacturing a composite beam.
  • the regulating member of a timepiece generally comprises an inertia flywheel called a balance wheel and a resonator called a spiral. These pieces are decisive for the running quality of the timepiece. Indeed, they regulate the movement, that is to say they control the frequency of the movement.
  • the balance and the hairspring are different in nature, which makes it extremely difficult to perfect the regulating organ, which includes the own fabrications of the pendulum and the hairspring as well as their assembly substantially in resonance.
  • the pendulum in particular has been manufactured in various materials without the difficulties of isochronism related to the influence of a temperature change of the regulating organ on which it depends, do not disappear.
  • GB2416408 discloses a composite rocker made of a silicon-based material.
  • the object of the present invention is to overcome all or part of the disadvantages mentioned above by proposing a method of manufacturing a composite balance which comprises fewer steps.
  • the invention relates to a generally annotated method 1 and which is intended to manufacture a balance 45, 45 'for a timepiece movement.
  • process 1 comprises successive steps intended to form at least one type of composite beam, that is to say which is preferably formed by two different materials, such as, for example, silicon and metal.
  • the first step 3 consists in providing a substrate 21 comprising a silicon layer.
  • the substrate 21 is chosen so that, as visible at figures 1 and 3 its thickness corresponds substantially to the desired thickness of the silicon part of the balance 45, 45 '.
  • the thickness of the substrate 21 may be, for example, between 100 and 400 microns.
  • the method 1 may comprise two embodiments 19, 20 as illustrated in FIG. figure 10 .
  • the method 1 comprises the implementation of a process of the LIGA type (also known by the German terms "röntgenlithographie, Galvanoformung &Abformung") comprising a succession of steps making it possible to electrodeposit, according to a particular form, a metal on the substrate 21 with a selectively photostructured resin.
  • LIGA type also known by the German terms "röntgenlithographie, Galvanoformung &Abformung”
  • the deposited metal may be, for example, gold or nickel or one of their alloys.
  • step 5 may consist in depositing a crenellated ring 23 and / or a cylinder 25.
  • the ring 23 comprises a series of pads 22 substantially in a circular arc and is intended to advantageously increase the mass of the future beam 45.
  • one of the advantages of silicon is its low sensitivity to temperature variations. However, it has the disadvantage of having a low density.
  • a first characteristic of the invention is therefore to increase the mass of the balance 45 with the aid of metal obtained by electroplating in order to increase the inertia of the future balance 45.
  • the metal deposited on the substrate 21 has a spacing between each pad 22 adapted to compensate for the thermal expansion of the ring 23 by avoiding transmitting silicon constraints related to these dilations.
  • the cylinder 25 is intended to receive, advantageously, by driving a balance shaft.
  • another disadvantage of silicon lies in its very weak elastic and plastic zones which makes it very brittle.
  • Another characteristic of the invention therefore consists in effecting the clamping of the balance shaft not against the silicon but on the inside diameter 24 of the metal cylinder 25 electrodeposited during step 5.
  • the cylinder 25 obtained by electroplating leaves full freedom as to its geometry.
  • the inner diameter 24 is not necessarily circular but, for example, polygonal which could improve the transmission of rotational force with a corresponding shape axis.
  • Cavities 26 to 34 are selectively etched, for example, by a deep reactive ion etching process (also known as DRIE), in the silicon substrate 21.
  • DRIE deep reactive ion etching process
  • the cavities 26 to 34 make it possible to form the pattern 35 of the future pendulum 45.
  • the pattern 35 obtained comprises a serge 37 connected to the hub 39 by four arms 40 to 43.
  • the etching on the substrate 21 leaves complete freedom on the geometry of the pattern 35.
  • the number and the geometry of the arms can be different just as the rim is not necessarily circular but, for example, elliptical.
  • the arms may be slender in order to allow their axial and / or radial deformation in the event of shock transmitted on the balance 45.
  • the cavity 34 formed in the hub 39 forms with the inner diameter 24 of the metal cylinder 25 a hollow space adapted to receive an axis.
  • material bridges 36 are formed in order to maintain the pattern 35 on the substrate 21.
  • step 9 is simply performed by providing a force to the balance 45 able to break its material bridges 36.
  • This effort can, for example, be generated by machining or manually by an operator.
  • the balance 45 is of the composite type in that it comprises at least two types of material and monoblock in that the element 35 and the elements 23 and / or 25 are inseparable under pain of destruction.
  • the balance 45 comprises a hub 39 connected radially to the seam 37 by four arms 40, 41, 42 and 43.
  • the hub 39 is advantageously also axially connected to the metal cylinder and the seam 37 comprises, on a part of a of its main faces, the crenellated ring 23.
  • the method 1 comprises a second step 11, as visible in FIG. figure 3 , in which cavities 38 and / or 44 are selectively etched, for example, by a method of the DRIE type, in a portion of the thickness of the silicon substrate 21.
  • These cavities 38, 44 make it possible to form recesses able to serve as a container for at least one metal part 23 ', 25'.
  • the cavities 38 and 44 obtained can be respectively in the form of ring and disk.
  • cavities 38 and / or 44 obtained by etching leave all freedom as to their geometry.
  • the cavities 38 and / or 44 are not necessarily circular but, for example, polygonal.
  • the method 1 comprises the implementation of a galvanic growth type or LIGA type process for filling the cavities 38 and / or 44 in a particular metallic form.
  • the deposited metal may be, for example, gold or nickel or one of their alloys.
  • step 13 may consist in depositing a crenellated ring 23 'in the cavity 38 and / or a cylinder 25' in the cavity 44.
  • the ring 23 ' comprises a series of pads 22' substantially in a circular arc and is intended to advantageously increase the mass of the future beam 45 '. Indeed, as already explained above, a disadvantage of silicon lies in its low density.
  • a characteristic of the invention therefore consists in increasing the mass of the balance 45 'with the aid of metal obtained by electroplating, which makes it possible to increase the inertia of the future balance 45'.
  • the metal deposited on the substrate 21 comprises a spacing between each pad 22 'able to compensate for the thermal expansion of the ring 23' while avoiding transmitting to silicon the stresses associated with these expansions.
  • the cylinder 25 ' is intended to receive, advantageously, by driving a balance shaft.
  • another advantageous feature according to the invention is to achieve the clamping of the balance shaft not against the silicon but on the inner diameter 24 'of the metal cylinder 25' electrodeposited at the time of the invention.
  • Step 13 the cylinder 25 'obtained by electroplating leaves full freedom as to its geometry.
  • the inner diameter 24 ' is not necessarily circular but, for example, polygonal which could improve the transmission of rotational force with a corresponding shape axis.
  • the method 1 may comprise, in a fourth step 15, as illustrated in dashed lines at the figure 10 , polishing the metal deposit or deposits 23 ', 25' made during step 13 to make them planar.
  • cavities 26 'to 34' are selectively etched, for example, by a deep reactive ion etching process in the silicon substrate 21.
  • the cavities 26 'to 34' make it possible to form the pattern 35 'of the future arm 45'.
  • the pattern 35 'obtained comprises a serge 37' connected to the hub 39 'by four arms 40' to 43 '.
  • the etching on the substrate 21 leaves all freedom on the geometry of the pattern 35 '.
  • the number and the geometry of the arms can be different just as the rim is not necessarily circular but, for example, elliptical.
  • the arms may be slender to allow their axial deformation and / or radial in case of shock transmitted on the balance 45 '.
  • the cavity 34 'formed in the hub 39' forms with the inner diameter 24 'of the metal cylinder 25' a hollow space adapted to receive an axis.
  • material bridges 36 ' are formed in order to maintain the pattern 35' on the substrate 21.
  • Embodiment 20 terminates as Embodiment 19, i.e., by the final step 9 of releasing substrate 45 from the substrate 21 manufactured.
  • step 9 is simply performed by providing a force to the balance 45 'able to break its material bridges 36'. This effort can, for example, be generated by machining or manually by an operator.
  • the balance 45 ' is of the composite type in that it comprises at least two types of material and monoblock in that the element 35' and the elements 23 'and / or 25' are indissociable under pain of destruction.
  • the balance 45 ' comprises a hub 39' radially connected to the seam 37 'by four arms 40', 41 ', 42' and 43 '.
  • the hub 39 'advantageously comprises also the cylinder 25 'metal.
  • the serge 37 ' comprises the crenellated ring 23'.
  • the hub 39, 39 ' according to the embodiment 19, 20 may not comprise a cylinder 25, 25' metal hunting.
  • the cylinder 25, 25 'could then, for example, be replaced by elastic means etched into the silicon hub 39, 39' which can take the form of those disclosed in FIGS. 10A to 10E of the patent EP 1 655 642 or those disclosed in the figures 1 , 3 and 5 patent EP 1 584 994 .
  • the metal parts 25, 25 'electrodeposited according to the embodiments 19 and 20 are interchanged, i.e. the projecting portion 25 of the mode 19 is replaced by the integrated part 25' of the mode. 20 or conversely (which requires only a minimal adaptation of the method 1) or even that the portion 25 'integrated in the hub protrudes from the substrate 21.
  • the metal parts 23, 23 'electrodeposited in the embodiments 19 and 20 are interchanged, that is to say that the projecting portion 23 of the mode 19 is replaced by the part integrated 23 'mode 20 or vice versa or even that the portion 23' integrated in the serge protrudes from the substrate 21.
  • the method 1 may furthermore provide, a posteriori of the release step 9, a step of adapting the inertia of the balance 45, 45 '.
  • a posteriori of the release step 9 a step of adapting the inertia of the balance 45, 45 '.
  • Such a step could then consist in engraving, by laser example, recesses made on the peripheral wall of the serge 37, 37 'and / or on one of the metal parts 23, 23' electrodeposited.
  • control structures of the flyweight type can also be envisaged to increase the inertia of the balance 45, 45 '.
  • a polishing step of the type of step 15 can also be performed between step 5 and step 7.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)

Claims (7)

  1. Verfahren für die Herstellung (1) einer Verbundwerkstoff-Unruh (45, 45'), das den folgenden Schritt umfasst:
    a) Vorsehen (3) eines Substrats (21) aus einem Material auf Siliciumbasis;
    dadurch gekennzeichnet, dass es außerdem die folgenden Schritte umfasst:
    b) selektives Ablagern (5, 13) wenigstens einer Metallschicht (23, 23', 24, 24') auf dem Substrat (21), um das Muster wenigstens eines Teils aus Metall der Unruh zu definieren;
    c) selektives Ätzen (7, 17) wenigstens eines Hohlraums (26, 27, 28, 29, 30, 31, 32, 33, 34, 26', 27', 28', 29', 30', 31', 32', 33', 34') in dem Substrat (21), um das Muster (35, 35') der Unruh (45, 45'), das die wenigstens eine Metallschicht aufweist, zu definieren;
    d) Freilegen (9) der Unruh (45, 45') von dem Substrat (21).
  2. Herstellungsverfahren nach Anspruch 1, dadurch gekennzeichnet, dass der Schritt b) die folgende Phase umfasst:
    e) Bewirken eines Anwachsens (5) der Ablagerung durch aufeinander folgende Metallschichten wenigstens teilweise auf der Oberfläche des Substrats (21), um einen Metallteil (23) zu formen, der dazu bestimmt ist, die Masse der Unruh (45) zu erhöhen.
  3. Herstellungsverfahren nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass der Schritt b) die folgende Phase umfasst:
    e') Bewirken des Anwachsens (5) der Ablagerung durch aufeinander folgende Metallschichten wenigstens teilweise auf der Oberfläche des Substrats (21), um einen Metallteil (25) zu bilden, der dazu bestimmt ist, durch Versenken eine Achse aufzunehmen.
  4. Herstellungsverfahren nach Anspruch 1, dadurch gekennzeichnet, dass der Schritt b) die folgenden Phasen umfasst:
    f) selektives Ätzen (11) wenigstens eines Hohlraums (38) in dem Substrat (21), der dazu bestimmt ist, den wenigstens einen Metallteil aufzunehmen;
    g) Bewirken eines Anwachsens (13) der Ablagerung durch aufeinander folgende Metallschichten wenigstens teilweise in dem wenigstens einen Hohlraum, um einen Metallteil (23') zu bilden, der dazu bestimmt ist, die Masse des dritten Teils aus Silicium zu erhöhen.
  5. Herstellungsverfahren nach Anspruch 1 oder 4, dadurch gekennzeichnet, dass der Schritt b) die folgenden Phasen umfasst:
    f') selektives Ätzen (11) wenigstens eines Hohlraums (44) in dem Substrat (21), der dazu bestimmt ist, den wenigstens einen Metallteil aufzunehmen;
    g') Bewirken eines Anwachsens (13) der Ablagerung durch aufeinander folgende Metallschichten wenigstens teilweise in dem wenigstens einen Hohlraum, um einen Metallteil (25') zu bilden, der dazu bestimmt ist, durch Versenken eine Achse aufzunehmen.
  6. Herstellungsverfahren nach Anspruch 1 oder 5, dadurch gekennzeichnet, dass der Schritt b) die folgende letzte Phase umfasst:
    h) Polieren (15) der metallischen Ablagerung (21).
  7. Herstellungsverfahren nach einem der Ansprüche 1 bis 6, dadurch gekennzeichnet, dass mehrere Verbund-Unruhen (45, 45') auf demselben Substrat (21) verwirklicht werden.
EP09721945A 2008-03-20 2009-03-13 Herstellungsverfahren einer kompositen unruh Active EP2257855B1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP12164386.0A EP2485095B1 (de) 2008-03-20 2009-03-13 Unruh von Kompositmaterialen
EP09721945A EP2257855B1 (de) 2008-03-20 2009-03-13 Herstellungsverfahren einer kompositen unruh

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP08153093A EP2104005A1 (de) 2008-03-20 2008-03-20 Composite-Unruh und Herstellungsverfahren dafür
PCT/EP2009/053001 WO2009115464A1 (fr) 2008-03-20 2009-03-13 Balancier composite et son procédé de fabrication
EP09721945A EP2257855B1 (de) 2008-03-20 2009-03-13 Herstellungsverfahren einer kompositen unruh

Related Child Applications (1)

Application Number Title Priority Date Filing Date
EP12164386.0 Division-Into 2012-04-17

Publications (2)

Publication Number Publication Date
EP2257855A1 EP2257855A1 (de) 2010-12-08
EP2257855B1 true EP2257855B1 (de) 2012-12-05

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ID=39917657

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Application Number Title Priority Date Filing Date
EP08153093A Withdrawn EP2104005A1 (de) 2008-03-20 2008-03-20 Composite-Unruh und Herstellungsverfahren dafür
EP12164386.0A Active EP2485095B1 (de) 2008-03-20 2009-03-13 Unruh von Kompositmaterialen
EP09721945A Active EP2257855B1 (de) 2008-03-20 2009-03-13 Herstellungsverfahren einer kompositen unruh

Family Applications Before (2)

Application Number Title Priority Date Filing Date
EP08153093A Withdrawn EP2104005A1 (de) 2008-03-20 2008-03-20 Composite-Unruh und Herstellungsverfahren dafür
EP12164386.0A Active EP2485095B1 (de) 2008-03-20 2009-03-13 Unruh von Kompositmaterialen

Country Status (9)

Country Link
US (1) US8550699B2 (de)
EP (3) EP2104005A1 (de)
JP (3) JP2011525614A (de)
KR (1) KR20100138927A (de)
CN (1) CN101978327B (de)
HK (1) HK1154087A1 (de)
RU (1) RU2468405C2 (de)
TW (1) TWI438589B (de)
WO (1) WO2009115464A1 (de)

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EP1837722B1 (de) 2006-03-24 2016-02-24 ETA SA Manufacture Horlogère Suisse Mikromechanisches Bauteil aus Isoliermaterial und Herstellungsverfahren dafür
TWI438588B (zh) 2006-03-24 2014-05-21 Eta Sa Mft Horlogere Suisse 由絕緣材料製成的微機械零件及其製造方法
JP2010513886A (ja) 2006-12-21 2010-04-30 コンプリタイム エスアー 時計用メカニカル振動子
EP2105807B1 (de) 2008-03-28 2015-12-02 Montres Breguet SA Monoblockspirale zur Erhöhung der Kurve und ihr Herstellungsverfahren

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US20110103196A1 (en) 2011-05-05
JP2013068638A (ja) 2013-04-18
US8550699B2 (en) 2013-10-08
HK1154087A1 (en) 2012-04-20
EP2485095A1 (de) 2012-08-08
RU2010142923A (ru) 2012-04-27
CN101978327B (zh) 2012-07-18
JP2013231732A (ja) 2013-11-14
JP5443626B2 (ja) 2014-03-19
JP5603458B2 (ja) 2014-10-08
EP2485095B1 (de) 2013-06-19
KR20100138927A (ko) 2010-12-31
WO2009115464A1 (fr) 2009-09-24
TW201007395A (en) 2010-02-16
JP2011525614A (ja) 2011-09-22
CN101978327A (zh) 2011-02-16
TWI438589B (zh) 2014-05-21
EP2257855A1 (de) 2010-12-08
EP2104005A1 (de) 2009-09-23
RU2468405C2 (ru) 2012-11-27

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