EP2256752B1 - Millimeterwellen-Transformator mit hohem Umwandlungskoeffizienten und geringen Einfügungsverlusten - Google Patents

Millimeterwellen-Transformator mit hohem Umwandlungskoeffizienten und geringen Einfügungsverlusten Download PDF

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Publication number
EP2256752B1
EP2256752B1 EP10164168A EP10164168A EP2256752B1 EP 2256752 B1 EP2256752 B1 EP 2256752B1 EP 10164168 A EP10164168 A EP 10164168A EP 10164168 A EP10164168 A EP 10164168A EP 2256752 B1 EP2256752 B1 EP 2256752B1
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EP
European Patent Office
Prior art keywords
primary
transformer
winding
secondary winding
level
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP10164168A
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English (en)
French (fr)
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EP2256752A2 (de
EP2256752A3 (de
Inventor
Didier Belot
Bernardo Leite
Eric Kerherve
Jean-Baptiste Begueret
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
STMicroelectronics SA
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Centre National de la Recherche Scientifique CNRS
STMicroelectronics SA
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Publication of EP2256752A2 publication Critical patent/EP2256752A2/de
Publication of EP2256752A3 publication Critical patent/EP2256752A3/de
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Publication of EP2256752B1 publication Critical patent/EP2256752B1/de
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F19/00—Fixed transformers or mutual inductances of the signal type
    • H01F19/04—Transformers or mutual inductances suitable for handling frequencies considerably beyond the audio range
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00—Details of transformers or inductances, in general
    • H01F27/28—Coils; Windings; Conductive connections
    • H01F27/2804—Printed windings

Definitions

  • the present invention relates to transformers of alternating signals with millimeter wavelengths, that is to say whose frequency is between about 30 GHz and about 300 GHz.
  • the figure 1 represents the circuit diagram of a transformer 1.
  • a primary winding 3 At the terminals of a primary winding 3 is applied an alternating signal IN.
  • the transformer 1 is used to raise or lower the voltage V IN of the input AC signal IN, to isolate one with respect to the other two circuits, to filter a possible DC component of the signal IN or to adapt the impedances between different components of a circuit.
  • the coefficient n is related to the value ls / Lp , where Ls and Lp are the respective inductances of the secondary and primary windings.
  • transformers capable of processing millimeter wavelength signals.
  • European automobile radars 80 GHz
  • the broadcasting of high-definition video over wireless networks 60 GHz
  • the Ls and Lp values vary greatly with frequency, in particular because of the skin effect and the small skin thickness in which a high frequency signal propagates in a conductor (0.27 ⁇ m in 60 GHz copper).
  • Another difficulty lies in the fact that the resonance frequency of the transformer, that is to say the frequency from which the transformer is no longer operational, decreases as the number of turns of the windings increases.
  • millimeter wave transformers can not have more than two turns per winding.
  • the Figure 2A is a perspective view of a millimeter wave transformer 11.
  • the transformer 11 comprises a primary winding 13, consisting of a lathe formed in a metallization level M1, and a secondary winding 15, consisting of two towers essentially formed in the same metallization level M2 less than the level M1.
  • the intersection between the two towers constituting the secondary winding 15 passes through a conductive section 17, formed in a metallization level M3 less than the M2 level and connected to the towers by vias (not shown).
  • the primary winding 13 is disposed above the secondary winding 15, so that the average diameter (average of the outer diameter and inner diameter) of the primary winding coincides with the average diameter of the secondary winding.
  • the primary and secondary windings consist of conductor tracks of identical widths (for example 4 ⁇ m) formed in successive metallization levels isolated from each other.
  • the Figure 2B is a sectional view of the transformer 11 of the Figure 2A according to a plan schematized by the line A of the Figure 2A .
  • the primary winding 13 and the secondary winding 15 are separated by an insulating layer 19.
  • transformers of this type lies in the high insertion losses that they introduce, particularly because of the significant resistivity of the windings.
  • the transformation coefficient n of the transformer 11 is determined by the inductances Lp and Ls of the primary and secondary windings. These inductances depend strongly on the working frequency. It would be desirable, at a given working frequency, to be able to increase the transformation coefficient n, that is to say increase the ratio between the inductances Ls and Lp.
  • an object of an embodiment of the present invention is to provide a millimeter wave transformer that overcomes all or at least some of the disadvantages mentioned above of the solutions of the prior art.
  • An object of an embodiment of the present invention is to provide such a transformer having a high conversion coefficient.
  • An object of an embodiment of the present invention is to provide such a transformer with low insertion losses.
  • the invention provides a millimeter wave transformer in which the track width of the primary winding is greater than the track width of the secondary winding.
  • an embodiment of the present invention provides a millimeter wave transformer comprising at the primary a tower consisting of a conductive track made in at least a first metallization level, and the secondary winding facing the primary tower, comprising at least one a tower consisting of a conductive track made in at least a second isolated metallization level of said at least one first level, the track width of the primary tower being at least greater than the total width of the secondary winding.
  • the secondary winding is arranged facing the outer portion of the primary tower, so that the outer perimeter of the secondary winding coincides with the outer perimeter of the primary tower.
  • the secondary winding comprises two turns made in said at least one second level of metallization, the intersection between these two turns being made in a third metallization level isolated from the first level.
  • the conductive tracks are copper tracks.
  • An embodiment of the present invention provides a method of adjusting the transformation coefficient of a millimeter wave transformer comprising at the primary a tower consisting of a conductive track made in at least a first level of metallization, and secondary a winding facing the primary tower, comprising at least one tower consisting of a conductive track made in at least a second isolated metallization level of said at least a first level, the width of the primary tower track being greater than the width of the the secondary winding track and the track width of the primary tower being greater than the total width of the secondary winding, this method comprising a step of adjusting the position of the secondary winding, towards the outer part of the primary tower to increase said coefficient and to the inner portion of the primary tower to decrease said coefficient.
  • the figure 3A is a perspective view of a millimeter wave transformer 21.
  • the transformer 21 comprises a primary winding 23, consisting of a lathe formed in a metallization level M1, and a secondary winding 25, consisting of two turns formed essentially in the same metallization level M2 less than the level M1.
  • the intersection between the two towers constituting the secondary winding 25 passes through a conductive section 27, formed in a metallization level M3 less than the M2 level and connected to the towers by vias (not shown).
  • the primary winding 23 is disposed above the secondary winding 25, so that the average diameter (average of the outer diameter and inner diameter) of the primary winding coincides with the average diameter of the secondary winding.
  • the figure 3B is a sectional view of the transformer 21 of the figure 3A according to a plan schematized by the line A of the figure 3A .
  • the conductive tracks are separated from each other by an insulator 29.
  • the track width of the primary winding 23 is greater than the track width of the secondary winding 25.
  • the track width of the primary winding 23 is greater than the total width of the secondary winding 25, i.e., in this case, twice the track width of the secondary winding plus the width insulation 29 between the first and second turns of the secondary winding.
  • secondary winding 1, 5. ⁇ m.
  • the Figure 4A represents the evolution of the transformation coefficient n of the transformers illustrated by the FIGS. 2A-2B and 3A-3B , depending on the frequency of the input signal.
  • Curve 31 corresponds to the case of transformer 11 of figures 2A and 2B , for track widths of the primary and secondary windings equal to 4 ⁇ m.
  • Curve 33 corresponds to the case of transformer 21 of Figures 3A and 3B , for track widths of the primary and secondary windings respectively equal to 12 microns and 4 microns.
  • the curve 33 is clearly above the curve 31 regardless of the working frequency considered and in particular for the millimeter wavelength signals.
  • the transformation coefficient of the transformer 11 is equal to 3.11 and that of the transformer 21 is equal to 4.24.
  • the Figure 4B represents the evolution of insertion losses of transformers 11 and 21, as a function of the frequency of the input signal.
  • Curve 41 corresponds to the case of transformer 11, for track widths of primary and secondary windings equal to 4 ⁇ m.
  • the curve 43 corresponds to the case of the transformer 21, for the track widths of the primary and secondary windings respectively equal to 12 microns and 4 microns.
  • the curve 43 is well below the curve 41 regardless of the working frequency considered and in particular for the millimeter wavelength signals.
  • the insertion losses of the transformer 11 are 1.33 dB and those of the transformer 21 are 1.01 dB.
  • the track width of the primary winding is beneficial only within a certain threshold. Indeed, from a certain width, there is a degradation of the performance of the transformer, and in particular an increase in insertion losses. For example, if the secondary winding consists of two tows of 4 ⁇ m track width, separated by 1.5 ⁇ m of insulation, or a total width of 9.5 ⁇ m, care should be taken not to increase the width of the track of the primary winding beyond 24 ⁇ m.
  • track width of the primary winding is greater than the total width of the secondary winding, different positions of the secondary winding facing the primary winding are possible.
  • the secondary winding is positioned under the outer portion of the primary winding, so that its outer perimeter coincides with the outer perimeter of the primary winding.
  • the Figure 5A is a perspective view showing a millimeter wave transformer 51.
  • the transformer 51 comprises a primary winding 53, consisting of a lathe formed in a metallization level M1, and a secondary winding 55, consisting of a lathe formed in a metallization level M2 lower than the level M1.
  • the primary winding 53 is arranged opposite the secondary winding 55, so that the inner perimeters of the primary and secondary windings coincide.
  • the Figure 5B is a sectional view of the transformer 51 of the Figure 5A according to a plan schematized by the line A of the Figure 5A .
  • the Figure 6A is a perspective view showing a millimeter wave transformer 61.
  • the transformer 61 comprises a primary winding 63, consisting of a lathe formed in a metallization level M1, and a secondary winding 65, consisting of a lathe formed in a metallization level M2 lower than the level M1.
  • the primary winding 63 is disposed opposite the secondary winding 65, so that the outer perimeters of the primary and secondary windings coincide.
  • the Figure 6B is a sectional view of the transformer 61 of the Figure 6A according to a plan schematized by the line A of the Figure 6A .
  • the figure 7 represents the evolution of the transformation coefficient n of the transformers illustrated by the Figures 5A-5B and 6A-6B , depending on the frequency of the input signal.
  • the curves 71 and 73 correspond respectively to the transformers 51 ( Figures 5A and 5B ) and 61 ( Figures 6A and 6B ), for track widths of the primary and secondary windings respectively equal to 12 microns and 4 microns.
  • the curve 73 is clearly above the curve 71 regardless of the working frequency considered and in particular for the millimeter wavelength signals.
  • the transformation coefficient of the transformer 51 is equal to 1.16 and that of the transformer 61 is equal to 1.28.
  • the inventors have determined that, for a given primary winding diameter, the transformation coefficient increases linearly with the diameter of the secondary winding, when the latter is within the range of values for which the primary and secondary windings are opposite. one of the other.
  • metallization levels lower or higher than other metallization levels have been mentioned in the description of embodiments of the invention, in particular, the primary windings have been described as being arranged above the secondary windings. The invention is not restricted to these particular cases. The order of the metallization levels can be reversed, and in particular, the secondary winding can be arranged above the primary winding.

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Multimedia (AREA)
  • Coils Or Transformers For Communication (AREA)
  • Coils Of Transformers For General Uses (AREA)

Claims (5)

  1. Millimeterwellen-Transformator umfassend auf seiner Eingangsseite eine Windung (23; 53; 63), die von einer Leiterbahn gebildet ist, welche in mindestens einem ersten Metallisierungsniveau (M1) realisiert ist, und auf seiner Sekundärseite eine Schleife (25; 55; 65) gegenüber der Primärwindung, wobei diese Sekundärschleife mindestens eine Leiterbahn aufweist, die in mindestens einem zweiten Metallisierungsniveau (M2) realisiert ist, welches von dem mindestens ersten Niveau isoliert ist, wobei die Bahnweite der Primärwindung mindestens gleich der Gesamtweite der Sekundärschleife ist.
  2. Transformator nach Anspruch 1, bei dem die Sekundärschleife (65) gegenüber der äußeren Partie der Primärwindung (63) derart angeordnet ist, dass der äußere Perimeter der Sekundärschleife mit dem äußeren Perimeter der Primärwindung übereinstimmt.
  3. Transformator nach Anspruch 1 oder 2, bei dem die Sekundärschleife (25) zwei innerhalb des mindestens einen zweiten Metallisierungsniveaus (M2) geformte Windungen umfasst, wobei die zwischen diesen gelegene Trennstelle (27) in einem dritten Metallisierungsniveau (M3) geformt ist, welches von dem ersten Niveau (M1) isoliert ist.
  4. Transformator nach einem der Ansprüche 1 bis 3, bei dem die Leiterbahnen Kupferbahnen sind.
  5. Verfahren zum Einstellen des Umwandlungskoeffizienten eines Millimeterwellen-Transformators umfassend auf seiner Primärseite eine aus einer Leiterbahn geformte Windung, die in mindestens einem ersten Metallisierungsniveau ausgebildet ist, und auf seiner Sekundärseite eine Schleife gegenüber der Primärwindung mit mindestens einer aus einer Leiterbahn bestehenden Windung, die in mindestens einem zweiten Metallisierungsniveau geformt ist, welches von dem mindestens einen ersten Niveau isoliert ist, wobei die Bahnweite der Primärwindung größer als die Gesamtbreite der Sekundärschleife ist, wobei das Verfahren einen Schritt zur Einstellung der Position der Sekundärschleife in Richtung auf die äußere Partie der Primärwindung umfasst, um besagten Koeffizienten zu erhöhen, und in Richtung auf die innere Partie der Primärwindung, um besagten Koeffizienten zu vermindern.
EP10164168A 2009-05-27 2010-05-27 Millimeterwellen-Transformator mit hohem Umwandlungskoeffizienten und geringen Einfügungsverlusten Not-in-force EP2256752B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0953496 2009-05-27

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EP2256752A2 EP2256752A2 (de) 2010-12-01
EP2256752A3 EP2256752A3 (de) 2011-01-05
EP2256752B1 true EP2256752B1 (de) 2012-05-23

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Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8988852B2 (en) * 2009-11-17 2015-03-24 Marvell World Trade Ltd. Ground shield capacitor
US8675368B2 (en) 2011-08-18 2014-03-18 Taiwan Semiconductor Manufacturing Company, Ltd. Vertically oriented semiconductor device and shielding structure thereof
US8791784B2 (en) * 2011-08-18 2014-07-29 Taiwan Semiconductor Manufacturing Company, Ltd. Vertically oriented semiconductor device and shielding structure thereof
US8836078B2 (en) 2011-08-18 2014-09-16 Taiwan Semiconductor Manufacturing Company, Ltd. Vertically oriented inductor within interconnect structures and capacitor structure thereof
DE102013101768A1 (de) 2013-02-22 2014-08-28 Intel Mobile Communications GmbH Transformator und elektrische Schaltung
CN103353905B (zh) * 2013-05-07 2015-12-02 江苏大学 一种毫米波宽边耦合集成变压器的高精度模型建立方法
FR3038121B1 (fr) * 2015-06-25 2017-08-18 Thales Sa Transformateur ameliore pour un circuit en technologie mmic
JP2017085239A (ja) * 2015-10-23 2017-05-18 株式会社東芝 インダクティブ結合システム及び通信システム
EP3817014A4 (de) * 2018-06-29 2022-02-23 Shindengen Electric Manufacturing Co., Ltd. Elektronische vorrichtung
CN111884606A (zh) * 2020-06-22 2020-11-03 南京迈矽科微电子科技有限公司 基于毫米波变压器的宽带匹配电路及毫米波功率放大电路

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Publication number Publication date
US20100301987A1 (en) 2010-12-02
EP2256752A2 (de) 2010-12-01
EP2256752A3 (de) 2011-01-05

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