EP2222959B1 - Procédé pour la circulation d'un fluide, et micropompe utilisée à cet effet - Google Patents

Procédé pour la circulation d'un fluide, et micropompe utilisée à cet effet Download PDF

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Publication number
EP2222959B1
EP2222959B1 EP20080847009 EP08847009A EP2222959B1 EP 2222959 B1 EP2222959 B1 EP 2222959B1 EP 20080847009 EP20080847009 EP 20080847009 EP 08847009 A EP08847009 A EP 08847009A EP 2222959 B1 EP2222959 B1 EP 2222959B1
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EP
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Prior art keywords
actuator
fluid
recess
actuators
chamber
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EP20080847009
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German (de)
English (en)
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EP2222959A1 (fr
Inventor
Frank Bartels
Severin Dahms
Uwe Kampmeyer
Markus Rawert
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Bartels Mikrotechnik GmbH
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Bartels Mikrotechnik GmbH
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/09—Pumps having electric drive
    • F04B43/095—Piezoelectric drive
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0396—Involving pressure control
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/85978—With pump

Definitions

  • the invention relates to the field of pumped delivery, and more particularly to methods of pumping small and minute quantities of fluid, and more particularly to pumps constructed of pumping chambers, diaphragm actuators and valves.
  • Silicon-based pumps are known from the prior art, in which essential parts such as pumping diaphragm and / or valves made of silicon are produced by means of etching techniques, as for example from the document US 2004/0001767 A1 , from which emerge the features of the preamble of claim 1.
  • Another such construction is found, inter alia, in HTG van Lintel, FCM van de Pol, "A piezoelectric micropumps based on micromachining of silicon", Sensors and Actuators, 15 1988, pp. 153-167 ,
  • Such pumps are generally sensitive to gas bubbles in the fluid stream and are therefore often lined with hydrophilic coatings, with the high hydrophilicity of the silicon base material being advantageous.
  • the possibilities of avoiding problems by gas bubbles entrained in the fluid flow are limited, in particular in the case of single-chamber pumps.
  • peristaltic pumps which have the ability due to their multi-chamber structure to press gas bubbles, which are located in a first chamber, by emptying them in the next chamber, without any risk of retraction of the gas bubble.
  • Such a structure is for example the publication WO 95/20105 removable.
  • the juxtaposition of several individual pumps creates a pump cascade. By a phase offset, which is for example in three chambers 120 °, a continuous transport of the fluid is achieved in one direction.
  • peristaltic pumps on the one hand robust against gas bubbles in the fluid react, they always need at least three chambers, otherwise the phase offset would be 180 °, so that the conveying direction would not be defined. Furthermore, the drive of the three or more chambers requires a corresponding amount of space and energy for operation.
  • the object of the invention is therefore to provide a device and a method for conveying fluids, which is miniaturizable, energy-saving and bubble-tolerant and also allows effective promotion.
  • the invention relates to a device and a method for the bubble-tolerant and effective delivery of a fluid, which are particularly suitable for use in microsystems technology due to their simple and robust construction, such as in the field of life sciences, medical technology, personal hygiene, cosmetics Also, the above invention is well suited for use in environmental technology, toys, or other particularly harsh environments.
  • the N pumping chambers are arranged serially one behind the other, and the forms of the periods of volume changes of all the pumping chambers are substantially identical, and there is an ideal phase offset PHI of approximately 180 ° between the volume change of the chamber volume of two successive pumping chambers.
  • phase offset is to be distinguished from an actual phase offset PHI *; By this it is meant that in certain circumstances, as will be shown, a deliberate deviation from the ideal value can be sought, but that in the basic configuration from each pumping chamber to the next, a phase shift PHI of 180 ° is to be set.
  • PHI * phase offset
  • the device is able, provided that it has a structure according to the teaching set forth herein and is used according to the inventive method to be described, to meet all the requirements arising from the problem set out above, in particular the requirement an excellent bladder tolerance.
  • the actual phase offset PHI * should preferably deviate not more than ⁇ 7% and more preferably not more than ⁇ 3% from the ideal phase offset PHI.
  • these numbers may vary; In general, a smaller deviation is always preferable.
  • the N. and the N + 2. Actuator are each addressed with the same control curve, so that at least all even or all odd pumping chambers work in exactly the same phase.
  • the device according to the invention is intended for use with fluids.
  • the fluid may be a liquid, a gas, or a liquid-gas mixture, in which the gas may be dissolved in the liquid and / or in the form of bubbles.
  • Such liquids can for example, be blood or other body fluids in which dissolved gas is present, which shows under certain pressure changes in the form of (mostly undesirable) gas bubbles, which in turn can block the pumping device.
  • gas bubbles can no longer lead to a blockage of the pumping device, which is of particular importance in the field of medical technology.
  • each pumping chamber preferably comprises at least one separate inlet and / or at least one outlet valve, and particularly preferably two separate inlet valves and two separate inlet valves.
  • Exhaust valves Experiments have shown that with the use of double valves, a particularly high degree of reliability in the operation of the device can be achieved.
  • the valves are arranged and configured such that the directional changes in the fluid flow caused by them are minimized. This minimizes the energy required to transport the fluid and further reduces the likelihood of gas bubbles settling.
  • the exact configuration of the fluid components depends on the type of actuators used, pumping chamber shapes, etc.; As a rule, however, it can be said that angle changes in the fluid path should not be abrupt and in particular right angles should be avoided. Change from one fluid level to another Sufficiently slow and shallow, meaning that the bore connecting both fluid planes should have a diameter at least as long as their length.
  • this is characterized in that it comprises the change of the respective chamber volumes Piezomembranaktuatoren.
  • disk or plate-shaped actuators are particularly preferred.
  • other actuators for changing the respective chamber volumes are conceivable, such as mechanical, thermal, magnetic, electrostatic or other, a change in the chamber volume inducing actuators, in particular those are particularly preferred, which have a particularly low energy and space requirements.
  • all components in contact with the fluid are made of polyphenylsulfone (PPSU).
  • PPSU polyphenylsulfone
  • This material offers desirable advantages, in particular with regard to the joining and manufacturing methods preferred for joining the invention.
  • the invention is in no way limited to this material.
  • it may be necessary to specially coat the fluid-related parts in the medical or environmental field, for example by biocompatible or other, especially inert, materials to adapt the device to the specific requirements.
  • other materials, like Silicon, metals or glasses are conceivable, it being necessary to ensure in the case of materials which are less extensible that the actuators can still lead to a change in the chamber volume according to the invention.
  • all the components to be connected to one another can be connected by means of the "laser transmission welding” method.
  • This method is particularly suitable for joining plastics and, in addition to short production times, offers the possibility of producing, without adhesives, a hermetically sealed connection which approximates the strength of the original material. Especially in the field of medical technology, this method is used successfully. Depending on the wavelength of the laser used for welding, it must be ensured that one absorbing and one transparent component are to be connected to each other.
  • the device comprises geometric configurations such that a faulty assembly of the components is largely excluded.
  • This is particularly advantageous if the assembly of the device is done manually, and as a result of possibly similar components of the individual pumping chambers, or due to almost symmetrical configurations of these components there is a risk of confusion. Since the correction of such incorrect assembly costs time and at worst results in defective pumps, such mounting errors are to be avoided in any case.
  • This can according to the invention be done by the fact that certain marks or projections are on the housing, which allow the mounting of other components only in a very specific way, so that incorrect installation is practically impossible, since they attract attention immediately or are possible only with damage of the component.
  • Such mounting aids are therefore preferably made of one or more raised parts and with these corresponding recesses on other components. Particular preference is given to those embodiments which extend in a direction perpendicular to the individual layers or functional planes through the entire housing, so that only a minimal number of such embodiments is necessary.
  • the device is characterized in that the necessary for the production of a single pumping chamber components, in particular the or the valves and the actuator, compared to the components required for the production of another pumping chamber of the same device substantially interchangeable or identical with these is designed or are.
  • all actuators, all valves and possibly other components that are repeated in each pumping chamber are in each case configured identically.
  • the costs are minimized in the production, since a correspondingly larger number of identical components can normally be produced more cost-effectively than several different variants with correspondingly smaller numbers.
  • the bottom element, the intermediate layer and the cover element can be connected to one another in a fluid-tight manner.
  • the device is not constructed as described above as an integrated variant, but by juxtaposing separate individual pumps. It thus consists of a serial arrangement of N separate, each comprising only a single pumping chamber individual pumps, which are designed to be connected to each other by means of fluidic lines.
  • Such lines are preferably made of a material as unyielding material to avoid the loss of energy by (unwanted) widening of the lines in each pumping cycle. Therefore, such lines are particularly preferably as short as possible, for example not more than 10 centimeters, to design.
  • the N pumping chambers are arranged serially one behind the other.
  • the inventive method requires that the forms of the periods of volume changes of all pumping chambers are substantially identical, and that the pumping chambers are controlled such that there is an ideal phase offset PHI of approximately 180 ° between the volume change of the chamber volume of two successive pumping chambers.
  • the phase offset between the first and the second pumping chamber is 180 ° in accordance with the method according to the invention.
  • an actual phase offset PHI * does not deviate more than ⁇ 7% and in a particularly preferred embodiment not more than ⁇ 3% from the ideal phase offset PHI.
  • the rule is that smaller deviations from the ideal value are always to be preferred.
  • the process according to the invention is particularly preferably suitable for conveying fluids which are selected from the group of liquids, gases and liquid / gas mixtures, the process being in the case of a mixture both present and in the form of bubbles dissolved in the liquid Gas shares is suitable.
  • the change in the volume of each pumping chamber takes place in accordance with a rectangular curve.
  • electrically driven actuators e.g. Piezoaktuatoren
  • the actuator moves accordingly, resulting in the optimal case of an approximately rectangular cyclic volume change of the respective pumping chamber.
  • appropriate correction factors or functions can be used.
  • the rising and / or falling edge of the square-wave voltage / curve is rounded in such a way that cavitation effects in the pumping chamber caused by insufficient chamber pressure are avoided.
  • a negative pressure can develop in the pumping chamber, which leads to spontaneous gas bubble formation, since the boiling point in a fluid depends on its pressure state and also drops sharply at lower pressures, in extreme cases up to room temperature.
  • the subsequent collapse of the cavitation gas bubbles during normalization of the pressure results in strong pressure waves, which can lead to significant material damage in the event of permanent occurrence and should therefore be avoided.
  • the frequencies f of the volume changes of successive pumping chambers may have a difference A temporarily or continuously.
  • This difference is as desired ; specifically set difference in the frequency of the individual chambers. If, for example, the difference is just 1 Hz at an operating frequency of 100 Hz, then the differing chamber again reaches the same phase offset after 100 cycles as at the beginning of the induced frequency change.
  • this temporary introduction of a so-called "beating" is particularly well suited for discharging gas bubbles which otherwise can not be released from the fluidic channels of the device.
  • the difference .DELTA May be of different sizes and different lengths in order to obtain an optimum result.
  • the difference ⁇ is preferably less than 1% of the frequency f and particularly preferably less than 0.1% of the frequency f.
  • the fault detection can only be temporarily assumed by one or more actuators, or one or more actuators can be permanently converted as fault sensors.
  • the reading of one or more separately introduced and unspecified here sensors can temporarily serve to detect malfunctions.
  • a change in operation as described above is triggered, ie, there is generated a beat according to the invention, with which the disturbance can be corrected again, provided that they occur an otherwise non-removable gas bubble was caused.
  • FIG. 1 shows an exploded view of a particularly preferred embodiment of the device according to the invention 1. This consists of a layer-like structure 1, which comprises two pumping chambers 2 in the illustrated case.
  • FIG. 2 shows a diagram in which the time on the abscissa, on the ordinate the actuator voltage U (hereinafter called “driving curve”) and / or the volume of a pumping chamber (hereinafter referred to as “chamber volume curve”) is or are plotted.
  • the illustrated amount of time corresponds to just one period, ie the time necessary for a single pumping cycle of a pumping chamber.
  • the dashed line shows an ideal rectangle curve.
  • both the rising flank A and the falling flank B of this curve can be rounded, so that a curve corresponding to the solid line results, which represents the optimized curve.
  • this rounding serves to avoid pressure change peaks, which can lead to unwanted cavitation bubble formation.
  • the exact optimized shapes of the fillets must be determined according to the exact geometric design of the pumping chambers, the fluid channels and the magnitude of the operating pressures. This can be done for example by calculation, simulation and / or the execution of test series. The form shown here is therefore to be understood only as a symbol and does not correspond to the actual, optimal form of the control or chamber volume curve.
  • FIG. 3 shows a diagram with the same axis captions as before FIG. 2 , Likewise, it shows the solid line FIG. 2 , which the optimized curve sales of the drive or
  • Chamber volume curve reflects.
  • the lifting and lowering phases of an actuator the so-called duty cycle
  • the duty cycle are approximately the same length, which is why the almost mirrored shape of the dotted line results (duty cycle 1: 1).
  • the duty cycle is not the same, there are images in which the wake of the second drive curve does not correspond accordingly as a reflection of the first.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)

Claims (8)

  1. Dispositif de pompage d'un fluide, tolérant les bulles, dans lequel ce dispositif de pompage présente au moins deux chambres de pompage (2), lesquelles présentent respectivement un volume de chambre séparé, respectivement une membrane pour la modification volumique périodique de la chambre de pompe et contiennent respectivement leur propre actionneur pour actionner la membrane, et présentent des vannes pour le sens d'écoulement et une admission et une évacuation, sachant que les chambres de pompe sont disposées en série et sachant que les formes de la modification volumique des chambres de pompe présentent un décalage de phase d'environ 180°, caractérisé par
    - un élément de fond (7) comprenant un évidement (7') ainsi qu'une admission (4) conduisant à l'intérieur de l'évidement (7') et une évacuation (5) conduisant hors de l'évidement (7'), ainsi qu'en outre des structures fluidiques se trouvant dans le même plan entre l'admission et l'évacuation pour guider le fluide à faire circuler vers les vannes (3, 3', 3") et pour la connexion fluidique des deux chambres de pompe (2) et pour la connexion à l'admission (4) et l'évacuation (5) : 1
    - un film de vanne (8) qui peut être inséré dans l'évidement (7') et porte les parties mobiles des vannes (3, 3', 3" )
    - une couche intermédiaire (9) qui peut être insérée dans l'évidement (7') au-dessus du film de vanne (8) et présente des ouvertures (9') qui forment les parties non mobiles des vannes (3, 30', 3") ;
    - une couche de protection (10) qui peut être insérée dans l'évidement (7') au-dessus de la couche intermédiaire (9) et qui forme avec la couche intermédiaire (9) deux espaces creux reposant dans un plan, lesquels servent de chambres de pompe (2) ;
    - deux actionneurs (6) avec des électrodes (6') et des connexions électriques (6" ), sachant que chaque actionneur (6) est placé de manière respectivement congruente avec la chambre de pompe (2) reposant dessous, et sachant que par le fonctionnement de l'actionneur (6), le volume de chambre de la chambre de pompe (2) respective reposant sous l'actionneur (6) est modifiable ;
    - un élément de couverture (11) dont les contours extérieurs correspondent essentiellement à ceux de l'élément de fond (7) et qui peut être placé sur l'élément de fond (7) et qui après avoir été lié à l'élément de fond (7) ferme l'évidement (7') de telle manière que les éléments de construction qui se trouvent à l'intérieur de celui-ci sont protégés des influences extérieures ;
    et dans lequel l'élément de fond (7), la couche intermédiaire (9) et l'élément de couverture (11) peuvent être reliés l'un à l'autre de manière étanche aux fluides.
  2. Dispositif selon la revendication 1, caractérisé en ce que celui-ci est formé par un agencement en série de N pompes individuelles séparées comprenant respectivement une chambre de pompe (2) seulement, qui sont formées en pouvant être reliées l'une à l'autre au moyen de conduites fluidiques.
  3. Dispositif selon la revendication 1 ou 2, dans lequel :
    le dispositif est ainsi formé que des informations sur l'état de circulation en fonctionnement peuvent être obtenues et sachant que le dispositif présente pour cela les attributs suivants :
    - au moins un des actionneurs (6) est formé en pouvant être arrêté
    - un agencement de commutation est prévu qui permet de détecter les modifications de forme de l'actionneur (6) produites au moyen de la pression du fluide sur un actionneur (6) arrêté, lors du fonctionnement du dispositif avec un actionneur (6) non arrêté.
  4. Dispositif selon l'une des revendications 1 à 3, caractérisé en ce qu'un décalage de phase effectif PHI* ne s'écarte de préférence pas plus de ± 7% et, de manière particulièrement préférée, pas plus de ± 3% du décalage de phase idéal PHI.
  5. Dispositif selon la revendication 1, caractérisé en ce que la commande des actionneurs (6) est formée essentiellement de manière à pouvoir être exécutée avec des tensions angulaires décalées en phase les unes aux autres et sachant que :
    le flanc augmentant et/ou décroissant de la courbe/tension rectangulaire est ainsi arrondi que des effets de cavitation dans la chambre de pompe (2) provoqués par une pression de chambre trop faible peuvent être évités.
  6. Procédé de pompage d'un fluide, tolérant les bulles, comprenant un dispositif, selon l'une des revendications 1 à 5, caractérisé en ce que les fréquences f des modifications de volume de chambres de pompe (2) successives présentent provisoirement ou continuellement une différence Δ, sachant que
    la différence Δ est choisie de préférence inférieure à 1% de la fréquence f et de manière particulièrement préférée inférieure à 0,1% de la fréquence f.
  7. Procédé selon la revendication 6, caractérisé en ce que des informations sur l'état de circulation en fonctionnement peuvent être obtenues, qu'au moins une des étapes suivantes et de préférence toutes les étapes est, respectivement, sont exécutée(s) l'une après l'autre :
    - arrêt provisoire ou continu d'un ou plusieurs actionneur(s) (6) ;
    - détection des modifications de forme produites sur le(s) actionneur(s) (6) au moyen de la pression du fluide ;
    - comparaison des modifications de forme détectées à des valeurs nominales qui proviennent d'un fonctionnement conforme.
  8. Procédé selon la revendication 6 ou 7, caractérisé en ce que lors de la détection d'une défaillance, une modification du fonctionnement selon la revendication 6 est provoquée provisoirement, pour remédier à celle-ci.
EP20080847009 2007-11-05 2008-09-25 Procédé pour la circulation d'un fluide, et micropompe utilisée à cet effet Active EP2222959B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007053047 2007-11-05
PCT/EP2008/008177 WO2009059664A1 (fr) 2007-11-05 2008-09-25 Procédé pour la circulation d'un fluide, et micropompe utilisée à cet effet

Publications (2)

Publication Number Publication Date
EP2222959A1 EP2222959A1 (fr) 2010-09-01
EP2222959B1 true EP2222959B1 (fr) 2012-01-25

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US (1) US20110005606A1 (fr)
EP (1) EP2222959B1 (fr)
AT (1) ATE543002T1 (fr)
WO (1) WO2009059664A1 (fr)

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DE10238585B3 (de) * 2002-08-22 2004-04-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Zweiteiliges Fluidmodul
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Cited By (5)

* Cited by examiner, † Cited by third party
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US10174749B2 (en) 2016-08-16 2019-01-08 Altria Client Services Llc Aerosol-generating device
US10746167B2 (en) 2016-08-16 2020-08-18 Altria Client Services Llc Aerosol-generating device
US11506193B2 (en) 2016-08-16 2022-11-22 Altria Client Services Llc Aerosol-generating device
DE102019117262A1 (de) 2018-06-26 2020-01-02 Mst Innovation Gmbh Ventillose Mikropumpe mit verbesserter Dosiergenauigkeit
DE102019117261A1 (de) 2018-06-26 2020-01-02 Mst Innovation Gmbh Ventillose bi-direktionale Mikropumpe mit integrierter Ventilfunktion

Also Published As

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EP2222959A1 (fr) 2010-09-01
US20110005606A1 (en) 2011-01-13
ATE543002T1 (de) 2012-02-15
WO2009059664A1 (fr) 2009-05-14

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