EP1827695A1 - Dispositif de transport de fluides, procede de fabrication dudit dispositif et pipette equipee d'un dispositif de ce type - Google Patents

Dispositif de transport de fluides, procede de fabrication dudit dispositif et pipette equipee d'un dispositif de ce type

Info

Publication number
EP1827695A1
EP1827695A1 EP05850327A EP05850327A EP1827695A1 EP 1827695 A1 EP1827695 A1 EP 1827695A1 EP 05850327 A EP05850327 A EP 05850327A EP 05850327 A EP05850327 A EP 05850327A EP 1827695 A1 EP1827695 A1 EP 1827695A1
Authority
EP
European Patent Office
Prior art keywords
board
microfluidic component
microfluidic
channel
component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP05850327A
Other languages
German (de)
English (en)
Inventor
Hans-Jürgen BIGUS
Jörg VOLK
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hirschmann Laborgerate & Co KG GmbH
Hirschmann Laborgerate GmbH and Co KG
Original Assignee
Hirschmann Laborgerate & Co KG GmbH
Hirschmann Laborgerate GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hirschmann Laborgerate & Co KG GmbH, Hirschmann Laborgerate GmbH and Co KG filed Critical Hirschmann Laborgerate & Co KG GmbH
Publication of EP1827695A1 publication Critical patent/EP1827695A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/50273—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means or forces applied to move the fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502715—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/02—Adapting objects or devices to another
    • B01L2200/026—Fluid interfacing between devices or objects, e.g. connectors, inlet details
    • B01L2200/027—Fluid interfacing between devices or objects, e.g. connectors, inlet details for microfluidic devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0809—Geometry, shape and general structure rectangular shaped
    • B01L2300/0816—Cards, e.g. flat sample carriers usually with flow in two horizontal directions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0887—Laminated structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0475—Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure
    • B01L2400/0481—Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure squeezing of channels or chambers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502738—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by integrated valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L9/00—Supporting devices; Holding devices
    • B01L9/52—Supports specially adapted for flat sample carriers, e.g. for plates, slides, chips
    • B01L9/527—Supports specially adapted for flat sample carriers, e.g. for plates, slides, chips for microfluidic devices, e.g. used for lab-on-a-chip
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/206—Flow affected by fluid contact, energy field or coanda effect [e.g., pure fluid device or system]
    • Y10T137/2224—Structure of body of device
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/494—Fluidic or fluid actuated device making

Definitions

  • the invention relates to a device for the active and / or passive delivery of fluids with at least one microfluidic component with at least one inlet and optionally with at least one outlet; at least one conductor track electrically connected to the microfluidic component; and a support on which the microfluidic component is fixed.
  • the invention further relates to a method for producing a device of the aforementioned type.
  • the invention relates to a pipetting device with at least one pipetting channel and at least one micropump operatively connected to the pipetting channel for the metered aspiration and dispensing of liquid microfluidic component is equipped in the form of a micropump; and a pressure measuring device with at least one measuring channel and with at least one pressure sensor operatively connected to the measuring channel for detecting the pressure prevailing in the measuring channel, which is equipped with such a device with a microfluidic component in the form of a pressure sensor.
  • Microfluidic components are increasingly being used in microtechnology.
  • micropumps or micromembrane pumps for actively conveying fluids, both gases and liquids, of great technical interest which consist of two or more superimposed and substantially disc-shaped microstructures - so-called "wafers" - constructed are at least two of which form a pump chamber between them and of which at least one of the deformable by an actuating element membrane.
  • the Microstructures often consist of a semiconductor material, eg silicon or a silicon-containing alloy.
  • the membrane communicates with, for example, a piezoelectric, electromagnetic, electrostatic, thermo-pneumatic etc. activatable actuator in connection, which is seated for example directly on the membrane and is supplied with power.
  • micromembrane pumps are used for exact dosing of fluids with an extremely high accuracy up to the nanoliter range and are used, for example, in single or multi-channel pipettes. It is possible to directly convey the liquid to be metered, i. the liquid enters the pumping chamber of the micropump, or an air cushion is arranged between the pipetting channel and the micropump, so that the micropump itself only conveys air, which is favorable, in particular with regard to carry-over, since the micropump itself does not have to be dosed Liquid comes into contact.
  • Pipetting device with such micropumps are known inter alia from EP 0 993 869 Bl and WO 2004/018 103 Al.
  • microfluidic components in the form of microvalves are known, which may be formed on the one hand as active switching or control valves, which are supplied via the conductor with electrical energy to perform the respective switching operation.
  • microvalves may also be designed as passive pressure control valves, which switch at a predetermined pressure, eg close or open, whereby electrical energy is induced due to the switching operation, which via the conductor to another device, such as a measuring and / or Control device, is passed.
  • microvalves are generally constructed of substantially disk-shaped microstructures, in which case the active microvalves in turn can be provided with an example piezo ⁇ electrically, electromagnetically, electrostatically, thermopneumatically, etc. activatable actuator in connection standing silicon diaphragm, which is between an open and a closed position back and forth movable.
  • microfluidic components in the form of - usually passive - pressure sensors are known, which are also referred to as microelectronic-mechanical systems ("MEMS").
  • MEMS microelectronic-mechanical systems
  • Such microsensors are also constructed of substantially disk-shaped microstructures, primarily of semiconductor materials such as silicon or special glass, and have at least one inlet which is connected to a system whose pressure is to be measured.
  • a membrane is arranged, which is deformable in dependence on the pressure in the measuring chamber, which is e.g. can be ensured by the formation of the membrane made of silicon.
  • an electrical energy can be induced, which is transmitted via the conductor to a measuring device, or a deformation of the membrane is externally, e.g. via another membrane, inductive, capacitive, by means of light barriers or the like, detected and transmitted via the conductor track to the measuring device.
  • a deformation of the membrane is externally, e.g. via another membrane, inductive, capacitive, by means of light barriers or the like, detected and transmitted via the conductor track to the measuring device.
  • Such microsensors find particular, though not exclusive, use in the automotive industry.
  • a problem is basically the fluidic connection of such microfluidic components to the inlet and - if present - the outlet thereof fluid-tight to connect with a fluid system.
  • the fluidic connection in microfluidic components in Form of micro- or micro-diaphragm pumps usually carried out in that a capillary is attached to the inlet or to the outlet of the micropump, which connects the inlet / outlet, for example, with the pipetting a pipette.
  • a capillary is attached to the inlet or to the outlet of the micropump, which connects the inlet / outlet, for example, with the pipetting a pipette.
  • the capillaries mostly chemically inert injection molded parts are used, which are adhered to the inlet / outlet of the micropump.
  • active or passive promotion within the meaning of the invention, on the other hand, on the one hand an actively promoted by the mikrofluidi- see component, eg in the form of a micropump, on the other hand, a passive, caused by external components promotion of fluids through the example in the form of a microfluidic component formed in the form of an active or passive microvalve or, for example in the case of a microsensor, also merely a fluidic connection of the microfluidic components to a fluid volume whose pressure is to be measured.
  • active or passive promotion within the meaning of the invention is therefore also a pure supply and / or Deriving means for the - even purely passive - supply / discharge of fluids to the microfluidic component meant.
  • the invention has the object of developing a device of the type mentioned in that a simple and cost-effective, permanent fluidic connection of the microfluidic component is provided while ensuring their electrically conductive connection to the conductor. It is further directed to a simple and inexpensive manufacturing method of such a device and to a pipetting and a pressure measuring device with such a device.
  • the carrier is formed by a circuit board comprising the circuit board having a with the inlet and optionally a aligned with the outlet of the microfluidic component passageway, and that at least one supply line for the inlet and / or at least one outlet for the outlet is formed by a channel opening into the through-channel, wherein the channel is formed on the side of the board facing away from the microfluidic component in the form of a groove-like recess.
  • the invention further provides in a pipetting device or in a pressure measuring device of the type mentioned above that it is equipped with such a device, wherein the microfluidic component of the Mikropum- PE or of the pressure sensor ( Microsensor) is formed.
  • a support for the microfluidic component comprises a conductor track.
  • Sending board is used, that the board is provided with at least one, optionally at least two passageways, wherein the distance of the through channels is selected according to the distance of the inlet and the outlet of the microfluidic component, that on which provided for applying the microfluidic component Side facing away from the board at least one supply line for the inlet and / or at least one discharge for the outlet is formed by in the board material each one opening into the passage channel in the form of a groove-like recess, in particular milled into this is, and that the microfluidic component is applied to the side of the circuit board facing away from the channel-like recess while ensuring an electrical connection with the conductor track and a fluidic connection with the passageway (s).
  • the embodiment of the invention ensures an extremely simple and cost-effective connection of the microfluidic component, such as a micropump, a micro-valve, a microsensor or the like, by the board with the or on this formed tracks not only to the power supply of the microfluidic component or It also serves to transmit the electrical energy induced or detected there, but also to ensure its fluidic connection, for example, with the pipetting channel of a pipette, with a fluid volume whose pressure is to be measured, or the like.
  • the microfluidic component such as a micropump, a micro-valve, a microsensor or the like
  • a conventional circuit board for example a board consisting of a conventional board material, such as resin-impregnated paper or paper / cardboard composite, can be used on its side facing away from the conductor tracks, ie the microfluidic component opposite side / or derivative (s) serving gutter-like recess (s) is or are formed.
  • the latter are especially by milling, such as 3D milling (ie, three-dimensional milling, without completely cutting through the board in the field of engagement of the milling tool in the board material) taken out of the board material, of course, other machining processes, etching or the like are possible.
  • the gutter-like recess (s) may or may then optionally be provided at its end facing away from the passage, which opens into the inlet and outlet of the microfluidic component end with a connecting piece, a neck or the like, for example a conventional Hose to install.
  • the device according to the invention represents a simple and economically producible unit of a random fluidic component, including its electrical and fluidic connections, which can be installed in a simple manner, for example in a pipette, a pressure gauge or in other microfluidic components or metering devices can be.
  • the microfluidic component is formed by an electrically operated component, such as a micropump or an active microvalve, and supplied with the electrical energy required for operation via the conductor track.
  • an electrically operated component such as a micropump or an active microvalve
  • the microfluidic component is formed by a component that induces or detects electrical energy, such as a pressure sensor (microsensor) or a passive microvalve, and the electrical energy induced by the microfluidic component via the conductor track to another institution, like one Measuring and / or control device or the like, transfer ⁇ bar is.
  • a component that induces or detects electrical energy such as a pressure sensor (microsensor) or a passive microvalve
  • a microfluidic component with both an inlet and an outlet for example in the form of a micropump or a microvalve, it is expedient to dispose both the inlet and the outlet of a respective channel opening into the respective through-channel on the microfluidic component Formed side of the board in the form of a groove-like recess, so that any supply and removal of fluid to or from the microfluidic component via the board.
  • the board is coated with a noble metal, in particular gold (Au), at least in the region of the through-channel and the groove-like recess.
  • Au gold
  • other coating materials e.g. Copper (alloys), gold and / or platinum alloys, etc., into consideration.
  • the channel-like recess of the supply line and / or the discharge is preferably closed by means of a plate applied to the board, which, for example, in a simple manner on the side of the board, in which the channel-like recess is formed adhered can be.
  • equivalent means such as preferably inert plastic films, can be applied to close the groove-like recess on this side of the board.
  • the mouth of the groove-like recess is arranged on a narrow side of the board, so that the entire device including its connections is very flat and space-saving trained on the other hand in the production no further operations, such as holes, are required, but the groove-like recess is removed only to a desired edge of the board from the board material, so that after applying a plate or foil on this side of the board a narrow-side terminal is formed.
  • the microfluidic component is arranged on spacers arranged on the side of the board facing it, which supports serve the microfluidic component and in the case of sticking the microfluidic component on the board form a gap for the adhesive film.
  • the contacting of the microfluidic component for the reasons mentioned may pose a certain problem, in many cases a highly dense connection of the microfluidic component should be guaranteed to the board, for example in the case of active fluid delivery in the nanoliter range by means of a Micropump to ensure very high precision.
  • the microfluidic component is glued onto the circuit board.
  • adhesive for example, a liquid or viscous resin can be used, which is cured after application to the board and pressing the microfluidic component. This may radiation with electromagnetic radiation, such as UV, IR or microwave range, by supplying heat, etc., where appropriate, by known means, such as Be ⁇ be supported or initiated.
  • connection of the microfluidic component to the printed circuit board can thus be achieved by arranging spacers on the side of the printed circuit board intended for the arrangement of the microfluidic component such that one or more adhesive sites are applied to the surface of the sinker between the spacers, and that the microfluidic component is placed on the spacers and the adhesive film is cured by distributing the adhesive in the intermediate space formed between it and the board surface.
  • a permanent, surface connection is ensured while ensuring an exactly parallel alignment of the microfluidic component to the circuit board surface, so that a fluid-tight connection of the passage channels in the circuit board with the inlet and outlet of the microfluidic component occurs.
  • individual adhesive dots can be attached to each other in a given relative position at a few points, whereby the still liquid adhesive can be uniformly distributed and hardened when the microfluidic component is pressed against the blank in the intermediate space formed by the spacers.
  • connection of the microfluidic component with the board which satisfies the aforementioned requirements for the tightness
  • the microfluidic component in particular by means of an etching liquid, is bonded to the board.
  • a connection is addressed which of a metal bond of the coating material of the board, eg Gold, formed with the material of the microfluidic component, for example silicon, and thus configured similar to a solder or welded joint ⁇ .
  • This can be done by the board and / or the microfluidic component pre-treated on their contact surfaces with an etching liquid and subsequently bond to form the Bondingver ⁇ be fixed to one another.
  • the microfluidic component is applied to the circuit board by means of an elastic, at least around the area of the microfluidic component Cladding of the board is clamped.
  • the elastic sheath can either be designed as a separate part, for example in the manner of a pocket that at least partially accommodates the board, or the elastic sheathing is applied to the board, for example, insoluble.
  • the sheath in the region of the contact point of the board with the microfluidic component has a recess whose shape is preferably substantially complementary to that of the microfluidic component or slightly smaller than the latter, wherein the microfluidic component jammed in the recess and thus on the Board is clamped.
  • locking grooves and / or lugs may be arranged on the region of the sheath facing the microfluidic component, which engage in detent lugs or grooves of the microfluidic component that are complementary thereto.
  • the elastic sheath is preferably formed from at least one elastomer, in particular from a thermoplastic elastomer (TPE) or silicone.
  • TPE thermoplastic elastomer
  • a sealing element such as an elastomeric ring or derglei ⁇ Chen, be arranged between the Eing. Outlet of the microfluidic component and the component-side mouth of the passageway through the pia- tine a sealing element, such as an elastomeric ring
  • the production of such a clamping connection thus takes place in such a way that an elastic outer jacket which extends at least around the region of the microfluidic component is applied to the circuit board and the micro-fluidic component is clamped in the sheath - i. especially in its recess - is clamped on the board.
  • the sheath can be designed in the manner of a separate pocket into which the board is at least partially inserted, or it is applied directly to the board in the manner of a coating.
  • thermoplastic elastomer TPE
  • this can be sprayed onto the board according to an advantageous embodiment or the latter can also be completely encapsulated with the thermoplastic elastomer of the shell, so that the board with the tracks also from external influences , such as a corrosive environment, reliably protected.
  • the microfluidic component is welded to the board, which can be done in particular by laser welding.
  • a preferred embodiment provides that the passage channels are surrounded on their side facing the microfluidic component of the board by an annular projection with a thickness approximately equal to the thickness of the spacer, so that the annular projections to the inlets and outlets of the microfluidic component fluid-tightly abut.
  • the through channels are surrounded on the side of the board intended for the arrangement of the microfluidic component prior to the application of the same with an annular projection with a thickness approximately equal to the thickness of the spacers.
  • the formation of the spacers and / or about nozzle-shaped projections can be done by applying separate elements on the board surface or by partial removal of the board material between the spacers / projections, so that the latter are integrally formed with the board.
  • the invention also makes it possible to arrange a plurality of microfluidic components on one and the same board.
  • microfluidic components in the form of micro (membrane) pumps
  • pump units whose pumps are preferably electrically controllable individually via the conductor tracks of the printed circuit board.
  • Such an embodiment of the device with two pumps lends itself, for example, to a pipetting apparatus in which two micropumps are assigned to the pipetting channel, wherein a suction-side connection of one micropump communicates with the pipetting channel on the suction side, while the pressure-side connection of the other Micro pump on the pressure side with the pipetting channel is in communication, as is the case with the above-cited EP 0 993 869 Bl.
  • microfluidic components in the form of microsensors on one and the same board, if, for example, the pressures of a plurality of fluid volumes or a pressure curve are to be measured or if a multiple measurement is also to be carried out for safety reasons.
  • one and the same component carries a plurality of microfluidic components, in particular micropumps, it can be provided in a development that at least two micropumps are connected to one another in a material-locking manner.
  • the plurality of micropumps can be jointly produced inexpensively at the intended distance from one another by forming the microplates or platelets used (eg silicon wafers) after formation of the microstructures by known microtechnical material shaping, such as etching sets, photolithography, thermal oxidation, etc ., no single separation process for each pump must be performed, but can be performed together for a group of pumps.
  • the entire Pumpenag- gregat can then be applied with the connection of the electrical components, such as piezoelectric actuators, to the tracks and fluidly connecting the opening into the pump chamber inlets and outlets with the passageways of the board on this.
  • the inlet and / or the outlet of at least some microfluidic components are connected to a common supply line or discharge, ie the channel-like recess can have branches which branch into different through-channels be provided so that the inputs and / or outlets of two or more microfluidic components open via these passageways in a common supply and / or discharge.
  • Such an embodiment can be provided, for example, for multichannel pipettes, from which several pipetting channels are to convey the same metering volume, or also in the case of single or multi-channel pipettes with a pair of micropumps assigned to each pipetting channel.
  • FIG. 1 shows a perspective view of an embodiment of a device according to the invention for conveying fluids with two microfluidic components in the form of micropumps;
  • FIG. 2 shows a view corresponding to FIG. 1 with components shown in transparent fashion for illustrating the fluidic connection of the micropumps;
  • FIGS. 1 and 2 shows a plan view of the device according to FIGS. 1 and 2 with components shown in transparent fashion;
  • FIG. 4 shows a side view of the device according to FIG. 1 to 3 with transparent components
  • FIG. 5 is a perspective view of the device GE measure of Figures 1 to 4 in an exploded view obliquely viewed from above ..;
  • Fig. 6 is a view corresponding to Fig. 5 viewed obliquely from below.
  • FIGS. 1 to 4 show an embodiment of a device 1 for actively conveying fluids in various views.
  • the device is equipped with two electrically operated, microfluidic components 2 formed by a respective micro-pump or a micromembrane pump and is suitable, for example, as a pump module for a pipetting device with one or more pipetting channels, in which two pipetting channels are provided Associated with micropumps and a suction-side connection of a micro pump on the suction side is in communication with the pipetting, while the pressure-side connection of the other micro-pump pressure side communicates with the pipetting, as known from EP 0 993 869 Bl, whose The disclosure content is hereby made the subject of the present disclosure.
  • the micropumps 2 may be made in one piece, e.g. of common silicon wafers (not shown).
  • FIGS. 5 and 6 the device is again represented schematically in an exploded view.
  • microfluidic components formed by micropumps 2 each have on their underside an inlet 3 (suction side) and outlet 4 (pressure side) opening into a pumping chamber, as shown schematically in FIG is indicated.
  • the micro-pumps On its side facing the inlet 3 and outlet 4 opposite ⁇ other side the micro-pumps are 2 piezoelectric with an example actuator (not illustrated) which cooperates with the silicon diaphragm and for example, directly applicable is seated on this, to put them into vibration to ver ⁇ and thereby convey fluid through the pumping chamber.
  • the micropumps 2 are arranged directly on a support in the form of a circuit board 5, for example glued to it, which is equipped with a plurality of conductor tracks 6 in order to supply them with the electrical energy required for their operation.
  • the printed conductors 6 extend from the contact plate 7 arranged at the edge of the board 7 (for example, in each case a separate phase connection for each micropump 2 and a common neutral conductor) in order to contact the micropumps 2.
  • the circuit board 5 expediently consists of a known board material made of paper / cardboard composite impregnated with synthetic resin and is provided on the surface with a thin coating of gold leaf in order to give it a high chemical inertness and corrosion resistance.
  • the board 5 through channels 8, which are each aligned with the outlet 3 and the inlet 4 of each micropump 2 and the board 5, for example, enforce approximately perpendicular to its surface.
  • the circuit board 5 On its side facing away from the micropumps 2, the circuit board 5 is provided with a supply line 9 for the through-channels 8 of the inlets 3 and with a discharge line 10 for the through-channels 8 of the outlets 4, the supply line 9 as well as the discharge line 10 each having a channel-shaped recess 11 are formed, which have been obtained, for example, by milling a part of the board material from the underside of the board 5.
  • both the channel-like recess 11 of the supply line 9 and the branch Discharge 10 to provide the two inlets / outlets 3, 4 of the micro-pumps with a common fluidic connection.
  • the groove-like recesses open in an edge region of the board 5 and are closed by a plate 12 which, for example, is adhesively bonded to the side of the board 5 facing away from the micropumps 2.
  • the inlet 9 and outlet 10, which opens between the plate 5 and the plate 12, can therefore be connected from the narrow side of the plate 5 directly or by means of a hose or the like, for example, to a pipetting channel (not shown).
  • the micropumps 2 are mounted on spacers 13 projecting slightly from the surface of the board 5, wherein in the present exemplary embodiment each micropump 2 rests on four spacers 13 provided in each case in the region of its corners , As a result, a small intermediate space is formed between the circuit board 5 and each micropump 2, which serves to receive an adhesive film for the permanent connection of the micropumps 2 to the circuit board 5.
  • the through-channels 8 are surrounded on their side facing the micropumps 2 by a respective projection 14 slightly projecting from the surface of the circuit board 5, here approximately rectangular, having a thickness corresponding to the thickness of the spacers 13, so that a fluid tight connection of the inlet 3 and outlets 4 of the micropumps 2 (see Fig. 6) is ensured with the passageways 8 through the board 5 therethrough.
  • a bonding connection or a welded connection between the board 5 and the micropumps 2 may be provided (each not shown), as explained in more detail above are.

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Hematology (AREA)
  • Clinical Laboratory Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Micromachines (AREA)

Abstract

L'invention concerne un dispositif pour le transport actif ou passif de fluides comportant une composante microfluidique pourvue d'une entrée et éventuellement d'une sortie, une piste conductrice en liaison électroconductrice avec la composante microfluidique et un support sur lequel cette composante microfluidique est fixée. L'objectif de cette invention est de permettre un raccordement fluidique simple et économique de ladite composante microfluidique. A cet effet, le support est constitué d'une platine contenant la piste conductrice, laquelle platine présente un canal de passage aligné avec l'entrée et éventuellement un canal de passage aligné avec la sortie de la composante microfluidique. De plus, une conduite d'amenée pour l'entrée ou une conduite d'évacuation pour la sortie est formée par un canal débouchant dans le canal de passage et se présentant sous la forme d'un évidement de type rigole sur le côté de la platine opposé à la composante microfluidique. Cette composante microfluidique peut être constituée, par exemple, d'une micropompe, d'une microsoupape ou d'un microcapteur, en particulier pour la mesure de pression. Cette invention concerne également un procédé de fabrication d'un dispositif de ce type ainsi qu'un dispositif de pipettage et un dispositif de mesure de pression, équipé d'un dispositif du type susmentionné.
EP05850327A 2004-12-28 2005-12-22 Dispositif de transport de fluides, procede de fabrication dudit dispositif et pipette equipee d'un dispositif de ce type Withdrawn EP1827695A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200410062923 DE102004062923A1 (de) 2004-12-28 2004-12-28 Vorrichtung zur Förderung von Fluiden, Verfahren zur Herstellung derselben und Pipette mit einer solchen Vorrichtung
PCT/EP2005/013855 WO2006069730A1 (fr) 2004-12-28 2005-12-22 Dispositif de transport de fluides, procede de fabrication dudit dispositif et pipette equipee d'un dispositif de ce type

Publications (1)

Publication Number Publication Date
EP1827695A1 true EP1827695A1 (fr) 2007-09-05

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EP05850327A Withdrawn EP1827695A1 (fr) 2004-12-28 2005-12-22 Dispositif de transport de fluides, procede de fabrication dudit dispositif et pipette equipee d'un dispositif de ce type

Country Status (4)

Country Link
US (1) US20080213134A1 (fr)
EP (1) EP1827695A1 (fr)
DE (1) DE102004062923A1 (fr)
WO (1) WO2006069730A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103406164A (zh) * 2013-07-15 2013-11-27 广东凯普生物科技股份有限公司 可移动带磁力载膜平台

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6576354B2 (ja) * 2014-01-23 2019-09-18 パフォーマンス エスケー８ ホールディング インコーポレイテッド ボード本体の製造のためのシステムと方法
CN104549590B (zh) * 2015-01-26 2016-06-29 北京工业大学 一种金属微流控芯片微通道内壁改性工艺
DE102019004450B4 (de) 2019-06-26 2024-03-14 Drägerwerk AG & Co. KGaA Mikropumpensystem und Verfahren zur Führung eines kompressiblen Fluids
CN110553096B (zh) * 2019-08-28 2024-03-26 武夷学院 一种可编程微阀装置及使用其控制微流体输运的方法
DE102021134012A1 (de) 2021-12-21 2023-06-22 Faurecia Autositze Gmbh Fahrzeugkomponentensteuerungsvorrichtung

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8302860A (nl) * 1983-08-15 1985-03-01 Stichting Ct Voor Micro Elektr Piezo-elektrische micropomp.
DE19507638C2 (de) * 1995-03-04 1997-09-25 Danfoss As Analysenvorrichtung
US5640995A (en) * 1995-03-14 1997-06-24 Baxter International Inc. Electrofluidic standard module and custom circuit board assembly
US20020022261A1 (en) * 1995-06-29 2002-02-21 Anderson Rolfe C. Miniaturized genetic analysis systems and methods
US6054277A (en) * 1996-05-08 2000-04-25 Regents Of The University Of Minnesota Integrated microchip genetic testing system
US5989402A (en) * 1997-08-29 1999-11-23 Caliper Technologies Corp. Controller/detector interfaces for microfluidic systems
DE19739722A1 (de) * 1997-09-10 1999-04-01 Lienhard Prof Dr Pagel Zwei- und Dreidimensionale fluidische Mikrosysteme aus Leiterplatten
US6756019B1 (en) * 1998-02-24 2004-06-29 Caliper Technologies Corp. Microfluidic devices and systems incorporating cover layers
US6495104B1 (en) * 1999-08-19 2002-12-17 Caliper Technologies Corp. Indicator components for microfluidic systems
US6656432B1 (en) * 1999-10-22 2003-12-02 Ngk Insulators, Ltd. Micropipette and dividedly injectable apparatus
US6632400B1 (en) * 2000-06-22 2003-10-14 Agilent Technologies, Inc. Integrated microfluidic and electronic components
US6827095B2 (en) * 2000-10-12 2004-12-07 Nanostream, Inc. Modular microfluidic systems
US6536477B1 (en) * 2000-10-12 2003-03-25 Nanostream, Inc. Fluidic couplers and modular microfluidic systems
US6863444B2 (en) * 2000-12-26 2005-03-08 Emcore Corporation Housing and mounting structure
WO2002070118A2 (fr) * 2001-02-09 2002-09-12 Microchem Solutions Dispositif et procede de manipulation et de transport de petits volumes de fluides
US6548895B1 (en) * 2001-02-21 2003-04-15 Sandia Corporation Packaging of electro-microfluidic devices
US6474180B2 (en) * 2001-03-20 2002-11-05 Hirschmann Laborgeräte Pipette device
DE50212792D1 (de) * 2001-07-09 2008-10-30 Greiner Bio One Gmbh Analysevorrichtung
DE10154822A1 (de) * 2001-11-08 2003-05-22 Meonic Sys Eng Gmbh Vorrichtung zur automatischen und kontinuierlichen Analyse von Flüssigkeitsproben und Verfahren zur Herstellung
DE10202996A1 (de) * 2002-01-26 2003-08-14 Eppendorf Ag Piezoelektrisch steuerbare Mikrofluidaktorik
US7125510B2 (en) * 2002-05-15 2006-10-24 Zhili Huang Microstructure fabrication and microsystem integration
CA2489176C (fr) * 2002-06-11 2013-10-15 Chempaq A/S Reactif lysogene, cartouche et compteur de cellules electronique automatique pour le denombrement simultane de differents types de globules blancs
EP1560642A4 (fr) * 2002-10-09 2006-05-03 Univ Illinois Systemes et composants microfluidiques
DE20216216U1 (de) * 2002-10-21 2003-02-27 Sls Micro Technology Gmbh Mikrofluides System
US7390457B2 (en) * 2002-10-31 2008-06-24 Agilent Technologies, Inc. Integrated microfluidic array device
DE10260308B3 (de) * 2002-12-20 2004-05-06 Siemens Ag Mikrostrukturierte Anordnung zur Behandlung mindestens eines Fluids
DE10260310B3 (de) * 2002-12-20 2004-05-06 Siemens Ag Mikrostrukturierte Anordnung zur Behandlung eines Fluids
DE10320957A1 (de) * 2003-05-09 2004-12-09 Evotec Technologies Gmbh Andockeinrichtung für ein fluidisches Mikrossystem
PT1751843E (pt) * 2003-08-29 2012-11-30 Stanford Res Inst Int Pré-tensão de polímeros electroactivos
US7932090B2 (en) * 2004-08-05 2011-04-26 3M Innovative Properties Company Sample processing device positioning apparatus and methods

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2006069730A1 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103406164A (zh) * 2013-07-15 2013-11-27 广东凯普生物科技股份有限公司 可移动带磁力载膜平台
CN103406164B (zh) * 2013-07-15 2015-04-01 广东凯普生物科技股份有限公司 可移动带磁力载膜平台

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DE102004062923A1 (de) 2006-07-06
WO2006069730A1 (fr) 2006-07-06
US20080213134A1 (en) 2008-09-04

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