EP2201331A1 - Dispositif micromécanique à cadre de commande - Google Patents

Dispositif micromécanique à cadre de commande

Info

Publication number
EP2201331A1
EP2201331A1 EP08804811A EP08804811A EP2201331A1 EP 2201331 A1 EP2201331 A1 EP 2201331A1 EP 08804811 A EP08804811 A EP 08804811A EP 08804811 A EP08804811 A EP 08804811A EP 2201331 A1 EP2201331 A1 EP 2201331A1
Authority
EP
European Patent Office
Prior art keywords
drive frame
drive
oscillator
micromechanical device
frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
EP08804811A
Other languages
German (de)
English (en)
Inventor
Daniel Christoph Meisel
Joerg Hauer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of EP2201331A1 publication Critical patent/EP2201331A1/fr
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
    • G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames

Definitions

  • the invention is based on a micromechanical device having at least one drive frame and at least one oscillator, wherein the oscillator is arranged in a region enclosed by the drive frame, wherein the
  • Oscillator is mechanically coupled to the drive frame.
  • the patent application DE 101 08 198 A1 shows a micromechanical rotation rate sensor which has a drive frame and a mechanically coupled oscillator (Coriolis element) arranged therein.
  • Drive frame performs a drive vibration in the form of a substantially rectilinear translational movement between two reversal points.
  • the drive vibration is transmitted to the vibrator by means of the mechanical coupling.
  • a Coriolis force can act on the oscillator.
  • the effect of the Coriolis force will be on one with the
  • the patent DE 196 17 666 B4 shows a micromechanical rotation rate sensor by means for vibrational excitation too
  • the invention is based on a micromechanical device having at least one drive frame and at least one oscillator, wherein the oscillator is arranged in a region encompassed by the drive frame, wherein the oscillator is mechanically coupled to the drive frame.
  • the drive frame can be excited to a bending vibration.
  • a micromechanical device is provided which is compact and allows a certain oscillation frequency of at least one oscillator.
  • a drive means is provided for exciting the bending vibration on the drive frame. It is particularly advantageous that the drive means is arranged outside the area enclosed by the drive frame. It is advantageous that the drive means is designed to excite a natural vibration of the drive frame. This is the
  • Oscillation frequency accurately determined and the necessary drive power low.
  • An advantageous embodiment of the invention provides that the oscillator is rigidly coupled to the drive frame.
  • the amplitude of the oscillator is determined.
  • Another advantageous embodiment of the invention provides that the vibrator is resiliently coupled to the drive frame.
  • An advantageous embodiment of the invention provides that a first drive frame with at least one first oscillator and at least one second drive frame are provided with at least one second oscillator, wherein the two drive frames are mechanically coupled.
  • a first drive frame is provided with a first oscillator and at least one second oscillator. It is also advantageous that the first oscillator and the second oscillator oscillate in different directions.
  • the micromechanical device is a rotation rate sensor, wherein the force effect of a Coriolis force is detectable on the vibrator.
  • This drive frame may be a common frame for multiple vibrators. But it can also be multiple frames that are coupled together and each having one or more oscillators.
  • Oscillation of the frame are e.g. There are two directions of movement, which are transmitted separately to two oscillators, so that they oscillate perpendicular (or obliquely) or in any other way different directions to each other.
  • a single drive mode is imposed. This is particularly advantageously possible if the drive frame is excited by means of a drive means to a natural vibration.
  • a drive of the oscillator with high amplitude is possible when the vibrator is coupled to the drive frame at a position of a vibration antinode.
  • the coupling between the drive frame and the oscillator can be rigid or resilient. With rigid coupling, the amplitude of the frame is transmitted directly and unchanged to the transducer. With resilient coupling, the drive mode of the overall system can be designed so that the frame executes only a small amplitude, whereas the or the inner oscillator performs by resonant elevation actually wanted large drive amplitude.
  • the drive combs of a capacitive drive can be mounted outside, far away from the oscillator and the sensing elements.
  • the fact that the drive frame must oscillate only with small amplitude, the electrode fingers of the drive can be made short. This reduces the absolute levitation power.
  • the transfer of the remaining levitation power to the oscillator (s) can be mitigated by passing the - A -
  • Figure 1 shows a bending vibration of a circular frame with two mutually orthogonal directions of vibration.
  • FIG. 2 schematically shows a first embodiment of the micromechanical device according to the invention.
  • FIG. 3 schematically shows a second embodiment of the micromechanical device according to the invention.
  • FIG. 4 schematically shows a third embodiment of the micromechanical device according to the invention.
  • FIG. 5 schematically shows a fourth embodiment of the micromechanical device according to the invention.
  • Figure 1 shows a natural vibration of a circular frame with two mutually orthogonal directions of vibration. Shown is the fundamental mode of a bending vibration 100, ie a vibration with antinodes and Vibration node, a circular drive frame 10. The directions of movement of the drive frame 10 are symbolized at the antinodes with arrows.
  • the micromechanical device according to the invention has a frame with such properties as a drive frame 10.
  • FIG. 2 schematically shows a first embodiment of the micromechanical device according to the invention. Shown is a bending vibration of a rectangular frame with a vibrator 20, here a simple 2-mass oscillator inside, i. the area covered by the drive frame 10
  • FIG. 3 schematically shows a second embodiment of the micromechanical device according to the invention. Shown in this embodiment is a two frame oscillator system. Here are two drive frame 10 and
  • the device according to the invention according to FIG. 3 represents a micromechanical rotation rate sensor with two sensitive axes.
  • the rotation rate sensor is a two-channel element for the detection of Co x and co Y rotation rates.
  • the illustrated structure can be realized as a micromechanical structure, in particular as a surface micromechanical structure over a substrate.
  • the substrate plane is spanned by the axes x and y of the coordinate system shown.
  • the axis z is perpendicular to this plane.
  • a two-channel element for the detection of G) x and ⁇ v rotation rates is also possible with the above structure.
  • the drive (not shown), for example, as known from the writings mentioned in the prior art, done capacitively as a comb drive.
  • An often undesirable side effect of the comb drive are levitation forces in the z direction on there driven movable element, here the
  • Drive frame 10 and 15 act.
  • the device according to the invention makes it possible to significantly reduce these levitation forces and their effect.
  • FIG. 4 schematically shows a third embodiment of the micromechanical device according to the invention.
  • Oscillators 20 and 25 arranged in a common frame 10.
  • FIG. 5 schematically shows a fourth embodiment of the micromechanical device according to the invention, similar to the second embodiment shown in FIG. Shown in this embodiment is a three frame
  • Schwinger system Here are two drive frames 10 and 15, and 15 and 17 are rigidly coupled together by means of a short crossbar at an edge center.
  • oscillators 20, 25 and 27 are arranged, which oscillate in two directions perpendicular to each other.
  • the inventive device according to FIG 5 illustrates a micromechanical rotation rate sensor having three sensitive axes represent the rotation rate sensor is a three-channel element for the detection of ⁇ ⁇ -., C ⁇ y - and z ⁇ -Drehraten.
  • the drive movement is coupled in the x and y directions.
  • the detection structures are then each to

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Micromachines (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)

Abstract

L'invention concerne un dispositif micromécanique comportant au moins un cadre de commande (10. 15, 17) et au moins un oscillateur (20, 25, 27). Ledit oscillateur (20, 25, 27) est monté dans une zone (50) comprise dans le cadre de commande (10, 15, 17). L'oscillateur (20, 25, 27) est accouplé mécaniquement au cadre de commande (10, 15, 17). L'invention se caractérise en ce que le cadre de commande (10, 15, 17) peut être entraîné en vibrations de flexion (100).
EP08804811A 2007-10-12 2008-09-26 Dispositif micromécanique à cadre de commande Ceased EP2201331A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102007049341 2007-10-12
DE102007051591.1A DE102007051591B4 (de) 2007-10-12 2007-10-29 Mikromechanische Vorrichtung mit Antriebsrahmen
PCT/EP2008/062936 WO2009050021A1 (fr) 2007-10-12 2008-09-26 Dispositif micromécanique à cadre de commande

Publications (1)

Publication Number Publication Date
EP2201331A1 true EP2201331A1 (fr) 2010-06-30

Family

ID=40435562

Family Applications (1)

Application Number Title Priority Date Filing Date
EP08804811A Ceased EP2201331A1 (fr) 2007-10-12 2008-09-26 Dispositif micromécanique à cadre de commande

Country Status (6)

Country Link
US (1) US20100199762A1 (fr)
EP (1) EP2201331A1 (fr)
JP (1) JP2011500337A (fr)
CN (1) CN101821587B (fr)
DE (1) DE102007051591B4 (fr)
WO (1) WO2009050021A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011086633A1 (fr) * 2010-01-12 2011-07-21 ソニー株式会社 Capteur de vitesse angulaire, dispositif électronique et procédé pour détecter une vitesse angulaire
JP6061064B2 (ja) * 2012-05-14 2017-01-18 セイコーエプソン株式会社 ジャイロセンサー、および電子機器
WO2017130312A1 (fr) * 2016-01-27 2017-08-03 株式会社日立製作所 Gyroscope
US10627235B2 (en) * 2016-12-19 2020-04-21 Analog Devices, Inc. Flexural couplers for microelectromechanical systems (MEMS) devices
DE102017216010A1 (de) * 2017-09-12 2019-03-14 Robert Bosch Gmbh Mikromechanische Drehraten-Sensoranordnung und entsprechendes Herstellungsverfahren

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2876180A1 (fr) * 2004-10-06 2006-04-07 Commissariat Energie Atomique Resonateur a masses oscillantes.
EP1936805A1 (fr) * 2006-12-22 2008-06-25 Commissariat A L'energie Atomique Oscillateur mécanique formé d'un réseau d'oscillateurs élémentaires

Family Cites Families (15)

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Publication number Priority date Publication date Assignee Title
JP3263113B2 (ja) * 1992-03-06 2002-03-04 株式会社東芝 慣性センサー
DE19617666B4 (de) 1996-05-03 2006-04-20 Robert Bosch Gmbh Mikromechanischer Drehratensensor
GB2318184B (en) 1996-10-08 2000-07-05 British Aerospace A rate sensor
JP3942762B2 (ja) * 1998-02-12 2007-07-11 日本碍子株式会社 振動子、振動型ジャイロスコープ、直線加速度計および回転角速度の測定方法
US6192756B1 (en) * 1998-02-12 2001-02-27 Ngk Insulators, Ltd. Vibrators vibratory gyroscopes a method of detecting a turning angular rate and a linear accelerometer
JP2000009473A (ja) 1998-06-22 2000-01-14 Tokai Rika Co Ltd ２軸ヨーレートセンサ及びその製造方法
CN2370392Y (zh) * 1999-03-19 2000-03-22 阳台运 振动陀螺
DE10108198A1 (de) * 2001-02-21 2002-09-12 Bosch Gmbh Robert Drehratensensor
JP2002277248A (ja) * 2001-03-22 2002-09-25 Matsushita Electric Ind Co Ltd 角速度センサ
US6843127B1 (en) * 2003-07-30 2005-01-18 Motorola, Inc. Flexible vibratory micro-electromechanical device
KR100652952B1 (ko) * 2004-07-19 2006-12-06 삼성전자주식회사 커플링 스프링을 구비한 멤스 자이로스코프
US20080276706A1 (en) 2004-09-27 2008-11-13 Conti Temic Microelectronic Gmbh Rotation Speed Sensor
US7284430B2 (en) 2005-08-15 2007-10-23 The Regents Of The University Of California Robust micromachined gyroscopes with two degrees of freedom sense-mode oscillator
EP1760037A1 (fr) * 2005-09-06 2007-03-07 Infineon Technologies SensoNor AS Procédé de fabrication des structures micro-mécaniques
US8141424B2 (en) * 2008-09-12 2012-03-27 Invensense, Inc. Low inertia frame for detecting coriolis acceleration

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2876180A1 (fr) * 2004-10-06 2006-04-07 Commissariat Energie Atomique Resonateur a masses oscillantes.
EP1936805A1 (fr) * 2006-12-22 2008-06-25 Commissariat A L'energie Atomique Oscillateur mécanique formé d'un réseau d'oscillateurs élémentaires

Also Published As

Publication number Publication date
JP2011500337A (ja) 2011-01-06
DE102007051591B4 (de) 2019-04-25
CN101821587B (zh) 2013-12-11
CN101821587A (zh) 2010-09-01
US20100199762A1 (en) 2010-08-12
WO2009050021A1 (fr) 2009-04-23
DE102007051591A1 (de) 2009-04-16

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