EP2153070A1 - Pompe turbomoléculaire - Google Patents

Pompe turbomoléculaire

Info

Publication number
EP2153070A1
EP2153070A1 EP08760568A EP08760568A EP2153070A1 EP 2153070 A1 EP2153070 A1 EP 2153070A1 EP 08760568 A EP08760568 A EP 08760568A EP 08760568 A EP08760568 A EP 08760568A EP 2153070 A1 EP2153070 A1 EP 2153070A1
Authority
EP
European Patent Office
Prior art keywords
opening
turbomolecular pump
vacuum
cutouts
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP08760568A
Other languages
German (de)
English (en)
Inventor
Robert Schneiders
Markus Henry
Gerhard Wilhelm Walter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of EP2153070A1 publication Critical patent/EP2153070A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/70—Suction grids; Strainers; Dust separation; Cleaning

Definitions

  • the invention relates to a turbomolecular pump having a suction opening distal to an input rotor stage.
  • the object of the present invention is to provide a simple turbomolecular pump which can provide a plurality of pressure levels.
  • the turbomolecular pump according to the invention has at least two separate opening cut-outs in the plane of the generally circular suction opening.
  • the relatively large suction opening which usually has an annular shape and immediately adjacent to the input rotor stage is divided into two or more opening cutouts.
  • the division of the suction in two or more opening cutouts is technically associated with relatively little effort. Since all opening cutouts are located in the plane of the suction opening, good guide values and thus low pumping losses can be achieved despite the smaller opening cutout areas compared with the suction opening area.
  • the opening cutouts are separated from one another by conduit walls.
  • the cable walls form lines to each of which a separate vacuum chamber can be connected.
  • the cable walls completely enclose the respective opening cutout.
  • the opening cutouts are not equal to each other.
  • different pressure levels and pumping speeds can be achieved with the opening cutouts. This is required, for example, in mass spectrometers that require two different vacuum pressures.
  • the opening cutouts may be circular, circular, concentric, non-concentric and / or sector-shaped.
  • the turbomolecular pump is designed as a caseless cartridge, which is plugged into a housing of the vacuum chambers having device.
  • the device may be, for example, a mass spectrometer. Since the turbomolecular pump is designed as a caseless cartridge whose housing is formed by the device housing or the inner structures of the device housing, a separate turbomolecular pump housing is saved. As a result, not only space and weight are saved, but in principle, the flow resistance at the inlet and the outlet of the turbomolecular pump are reduced.
  • Hg. 1 is a schematic representation of a vacuum arrangement with three
  • FIG. 2 shows a cross section II-II in the region of the intake opening of
  • Fig. 3 is a cross section of the suction port of a second
  • FIG. 4 shows a cross section of the intake opening of a third embodiment of a turbomolecular pump
  • FIG. 5 shows a cross section of the intake opening of a fourth embodiment of a turbomolecular pump
  • Fig. 6 is a schematic representation of a second embodiment of a
  • Vacuum arrangement with a mass spectrometer device and an integrated caseless turbomolecular pump cartridge Vacuum arrangement with a mass spectrometer device and an integrated caseless turbomolecular pump cartridge.
  • FIG. 1 shows a vacuum arrangement 10 which has a turbomolecular pump 12, three vacuum chambers 21, 22, 23 and vacuum lines 31, 32, 33 connecting them to the turbomolecular pump 12.
  • the turbomolecular pump 12 is a multi-stage turbopump having a plurality of rotor stages on a rotor shaft 14, of which the rotor stage closest to a circular intake opening 16 is an input rotor stage 18.
  • the suction port 16 is located distal to the input rotor stage 18 and immediately adjoins it, i. is formed by the pump housing.
  • the circular suction opening 16 is divided into three opening cutouts 41, 42, 43 which are formed by line walls 24, 25, 26 and are separated from one another, as shown in FIG. 2.
  • the rotor blades of the input rotor stage 18 were shown in FIGS. 2-5 omitted for simplicity. ⁇
  • the lines 31, 32, 33 formed by the conduit walls 24, 25, 26 are circular in cross-section. Two of the three lines 32, 33 are not arranged concentrically and have an inner diameter that is at most equal to or less than half the inner diameter of the entire intake opening 16.
  • the first opening cutout 41 is formed from the entire suction opening area minus the other two opening cutout areas.
  • a second embodiment of a turbomolecular pump 12 is shown with a suction opening, which has two opening cut-outs 51,52, which are formed by two concentric circular cross-section walls 53,54.
  • FIG. 4 shows a further alternative embodiment of a turbomolecular pump 12, in which two segmental opening cutouts 61, 62 together form the opening of a first vacuum line, while the remaining area forms an opening cutout 63 of a second vacuum line 64.
  • FIG. 5 shows a further exemplary embodiment of the embodiment of the suction opening or of the opening cutouts of a turbomolecular pump.
  • the opening cutouts 71,72,73 formed as the same size circle sectors.
  • FIG. 6 shows a second embodiment of a vacuum arrangement 80.
  • This vacuum arrangement 80 has a device 92 designed as a mass spectrometer, into the housing 86 of which a cartridge 13 forming a turbomolecular pump 12 'is inserted.
  • a backing pump 90 is connected at a pre-vacuum port 88 of the turbomolecular pump 12 'and the cartridge 13, a backing pump 90 is connected.
  • the device housing 86 has a total of four vacuum chambers 20,21,22,23.
  • the pressure-highest prevacuum vacuum chamber 20 with a pressure of about 2 mbar is connected with its pre-vacuum outlet 94 to a second separate backing pump 91.
  • the Device 92 is, for example, a quadrupole mass spectrometer, but may be another type of mass spectrometer.
  • the present apparatus 92 has three high vacuum vacuum chambers 21,22,23, which are each connected individually to an intermediate inlet 83 of the turbomolecular pump or to each ⁇ réellesausschn ⁇ tt 81.82 of the turbomolecular pump inlet port 16 and pressure levels of 10 "2 to 10 " 7 mbar.
  • the path of the ion current through the vacuum chambers 20,21,22,23 runs here from left to right through an ion current housing inlet 94 and the vacuum chambers 20,21,22,23 and is indicated by the dashed arrows.
  • the turbomolecular pump 12 ' is designed as a cartridge 13, i. it does not have its own housing.
  • the turbomolecular pump cartridge 13 is used without housing in the housing 86 of the device 92.
  • the pump stator 19 is thus held directly by the device housing 86 or inner structures of the device housing 86.
  • the flow resistances of the various inlets of the turbomolecular pump 12 ' i.e., the flow rate, decrease. the intermediate inlet 83 and the inlet forming opening cutouts 81,82.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

L'invention concerne une pompe turbomoléculaire (12) comprenant un orifice d'aspiration (16) circulaire situé à distance de l'étage du rotor (18) d'entrée. L'orifice d'aspiration (16) présente au moins deux parties d'orifice (41, 42, 43) séparées les unes des autres.
EP08760568A 2007-06-11 2008-06-05 Pompe turbomoléculaire Withdrawn EP2153070A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007027354A DE102007027354A1 (de) 2007-06-11 2007-06-11 Turbomolekularpumpe
PCT/EP2008/056991 WO2008151979A1 (fr) 2007-06-11 2008-06-05 Pompe turbomoléculaire

Publications (1)

Publication Number Publication Date
EP2153070A1 true EP2153070A1 (fr) 2010-02-17

Family

ID=39691048

Family Applications (1)

Application Number Title Priority Date Filing Date
EP08760568A Withdrawn EP2153070A1 (fr) 2007-06-11 2008-06-05 Pompe turbomoléculaire

Country Status (6)

Country Link
US (1) US20100187415A1 (fr)
EP (1) EP2153070A1 (fr)
JP (1) JP2010529359A (fr)
CN (1) CN101680458A (fr)
DE (1) DE102007027354A1 (fr)
WO (1) WO2008151979A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9368335B1 (en) * 2015-02-02 2016-06-14 Thermo Finnigan Llc Mass spectrometer
GB2558921B (en) * 2017-01-20 2020-06-17 Edwards Ltd A multiple stage turbomolecular pump with inter-stage inlet
GB2584603B (en) * 2019-04-11 2021-10-13 Edwards Ltd Vacuum chamber module
US11519419B2 (en) 2020-04-15 2022-12-06 Kin-Chung Ray Chiu Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface
EP4108932A1 (fr) * 2022-09-29 2022-12-28 Pfeiffer Vacuum Technology AG Reciate et pompe à vide élevé

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1992822A1 (fr) * 2007-05-15 2008-11-19 Agilent Technologies Inc Diviseur sous vide pour pompage différentiel d'un système sous vide

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62261696A (ja) * 1986-05-08 1987-11-13 Mitsubishi Electric Corp タ−ボ分子ポンプ装置
EP0344345B1 (fr) * 1988-06-01 1991-09-18 Leybold Aktiengesellschaft Système à pompe pour un appareil de détection de fuite
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
FR2736103B1 (fr) * 1995-06-30 1997-08-08 Cit Alcatel Pompe turbomoleculaire
US6589009B1 (en) * 1997-06-27 2003-07-08 Ebara Corporation Turbo-molecular pump
JP2000126569A (ja) * 1998-09-18 2000-05-09 Sulzer Chemtech Ag 複数の流動性成分の混合分配を行う装置
FR2784184B1 (fr) * 1998-10-01 2000-12-15 Cit Alcatel Detecteur de fuite compact
KR100724048B1 (ko) * 1999-02-19 2007-06-04 가부시키가이샤 에바라 세이사꾸쇼 터보 분자 펌프
KR20010007349A (ko) * 1999-06-14 2001-01-26 마에다 시게루 터보분자펌프
GB9921983D0 (en) * 1999-09-16 1999-11-17 Boc Group Plc Improvements in vacuum pumps
JP4159443B2 (ja) * 2003-10-14 2008-10-01 大阪瓦斯株式会社 流体混合装置及び脱硝装置
GB0414316D0 (en) * 2004-06-25 2004-07-28 Boc Group Plc Vacuum pump
DE102004038677B4 (de) * 2004-08-10 2016-11-24 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP2006299968A (ja) * 2005-04-21 2006-11-02 Shimadzu Corp 異物侵入防止板、回転真空ポンプおよび真空システム

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1992822A1 (fr) * 2007-05-15 2008-11-19 Agilent Technologies Inc Diviseur sous vide pour pompage différentiel d'un système sous vide

Also Published As

Publication number Publication date
DE102007027354A1 (de) 2008-12-18
JP2010529359A (ja) 2010-08-26
WO2008151979A1 (fr) 2008-12-18
CN101680458A (zh) 2010-03-24
US20100187415A1 (en) 2010-07-29

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Inventor name: WALTER, GERHARD WILHELM

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