EP2087143A2 - Revêtement déposé en phase vapeur, composant supportant les contraintes thermiques comprenant un tel revêtement, et procédé et dispositif de réalisation d'un tel revêtement - Google Patents

Revêtement déposé en phase vapeur, composant supportant les contraintes thermiques comprenant un tel revêtement, et procédé et dispositif de réalisation d'un tel revêtement

Info

Publication number
EP2087143A2
EP2087143A2 EP07817694A EP07817694A EP2087143A2 EP 2087143 A2 EP2087143 A2 EP 2087143A2 EP 07817694 A EP07817694 A EP 07817694A EP 07817694 A EP07817694 A EP 07817694A EP 2087143 A2 EP2087143 A2 EP 2087143A2
Authority
EP
European Patent Office
Prior art keywords
coating
vapor
deposited
pore
pore formers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP07817694A
Other languages
German (de)
English (en)
Inventor
Erwin Bayer
Jürgen STEINWANDEL
Stefan Laure
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MTU Aero Engines AG
Original Assignee
MTU Aero Engines GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MTU Aero Engines GmbH filed Critical MTU Aero Engines GmbH
Publication of EP2087143A2 publication Critical patent/EP2087143A2/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/083—Oxides of refractory metals or yttrium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/228—Gas flow assisted PVD deposition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/134—Plasma spraying
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/137—Spraying in vacuum or in an inert atmosphere
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T50/00—Aeronautics or air transport
    • Y02T50/60—Efficient propulsion technologies, e.g. for aircraft
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]

Definitions

  • the coating according to the invention proves to be particularly advantageous if it is designed as an adhesion-promoting layer and / or as a thermal barrier coating.
  • the component surface of the base material G (e.g., a high strength iron alloy) is cleaned of oxide layers and / or other contaminants. This can be done by a transferred arc, by absorption, or by plasma ablation. The latter can be carried out in a particularly simple manner in the device according to the invention for the production of the coating which will be explained later on.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

la présente invention concerne un revêtement déposé en phase vapeur destiné à un composant supportant les contraintes thermiques, le revêtement comprenant des agents porogènes introduits de manière ciblée. Cela les différencie des revêtements déposés en phase vapeur courants dont le mode d'application ne permet par la formation de pores, ou des revêtement injectés qui ne présentent aucun pore ou seulement des pores formés de manière irrégulière et aléatoire. L'invention concerne également un procédé et un dispositif de réalisation d'un tel revêtement.
EP07817694A 2006-10-27 2007-10-17 Revêtement déposé en phase vapeur, composant supportant les contraintes thermiques comprenant un tel revêtement, et procédé et dispositif de réalisation d'un tel revêtement Withdrawn EP2087143A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200610050789 DE102006050789A1 (de) 2006-10-27 2006-10-27 Aufgedampfte Beschichtung und thermisch belastbares Bauteil mit einer solchen Beschichtung, sowie Verfahren und Vorrichtung zur Herstellung einer solchen Beschichtung
PCT/DE2007/001859 WO2008049392A2 (fr) 2006-10-27 2007-10-17 Revêtement déposé en phase vapeur, composant supportant les contraintes thermiques comprenant un tel revêtement, et procédé et dispositif de réalisation d'un tel revêtement

Publications (1)

Publication Number Publication Date
EP2087143A2 true EP2087143A2 (fr) 2009-08-12

Family

ID=38894010

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07817694A Withdrawn EP2087143A2 (fr) 2006-10-27 2007-10-17 Revêtement déposé en phase vapeur, composant supportant les contraintes thermiques comprenant un tel revêtement, et procédé et dispositif de réalisation d'un tel revêtement

Country Status (4)

Country Link
US (1) US20090258214A1 (fr)
EP (1) EP2087143A2 (fr)
DE (1) DE102006050789A1 (fr)
WO (1) WO2008049392A2 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10145000B2 (en) 2016-05-27 2018-12-04 General Electric Company Thermally dissipative article and method of forming a thermally dissipative article
JP6908973B2 (ja) * 2016-06-08 2021-07-28 三菱重工業株式会社 遮熱コーティング、タービン部材、ガスタービン、ならびに遮熱コーティングの製造方法

Family Cites Families (20)

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Publication number Priority date Publication date Assignee Title
US5196471A (en) * 1990-11-19 1993-03-23 Sulzer Plasma Technik, Inc. Thermal spray powders for abradable coatings, abradable coatings containing solid lubricants and methods of fabricating abradable coatings
JPH1088368A (ja) * 1996-09-19 1998-04-07 Toshiba Corp 遮熱コーティング部材およびその作製方法
US6733907B2 (en) * 1998-03-27 2004-05-11 Siemens Westinghouse Power Corporation Hybrid ceramic material composed of insulating and structural ceramic layers
FR2779448B1 (fr) * 1998-06-04 2000-12-15 Snecma Revetement ceramique a faible conductivite thermique et de type barriere thermique, procede de depot d'un tel revetement ceramique, et piece metallique protegee par ce revetement ceramique
US6537021B2 (en) * 2001-06-06 2003-03-25 Chromalloy Gas Turbine Corporation Abradeable seal system
US6881452B2 (en) * 2001-07-06 2005-04-19 General Electric Company Method for improving the TBC life of a single phase platinum aluminide bond coat by preoxidation heat treatment
US6921586B2 (en) * 2002-02-05 2005-07-26 General Electric Company Ni-Base superalloy having a coating system containing a diffusion barrier layer
US6846515B2 (en) * 2002-04-17 2005-01-25 Air Products And Chemicals, Inc. Methods for using porogens and/or porogenated precursors to provide porous organosilica glass films with low dielectric constants
US6887530B2 (en) * 2002-06-07 2005-05-03 Sulzer Metco (Canada) Inc. Thermal spray compositions for abradable seals
DE10225532C1 (de) * 2002-06-10 2003-12-04 Mtu Aero Engines Gmbh Schichtsystem für die Rotor-/Statordichtung einer Strömungsmaschine
AU2003282988A1 (en) * 2002-10-21 2004-05-13 Massachusetts Institute Of Technology Pecvd of organosilicate thin films
US7404990B2 (en) * 2002-11-14 2008-07-29 Air Products And Chemicals, Inc. Non-thermal process for forming porous low dielectric constant films
DE10337094A1 (de) * 2003-08-12 2005-03-03 Mtu Aero Engines Gmbh Einlaufbelag für Gasturbinen sowie Verfahren zur Herstellung desselben
DE10343761A1 (de) * 2003-09-22 2005-04-14 Mtu Aero Engines Gmbh Verschleißschutzschicht, Bauteil mit einer derartigen Verschleißschutzschicht sowie Herstellverfahren
US7150921B2 (en) * 2004-05-18 2006-12-19 General Electric Company Bi-layer HVOF coating with controlled porosity for use in thermal barrier coatings
DE102004033054A1 (de) * 2004-07-08 2005-10-20 Daimler Chrysler Ag Vorrichtung und Verfahren zum Plasmaspritzen
US7374818B2 (en) * 2005-05-23 2008-05-20 United Technologies Corporation Coating system for silicon based substrates
US7549840B2 (en) * 2005-06-17 2009-06-23 General Electric Company Through thickness reinforcement of SiC/SiC CMC's through in-situ matrix plugs manufactured using fugitive fibers
CA2585992C (fr) * 2006-06-08 2014-06-17 Sulzer Metco (Us) Inc. Materiaux possedant une aptitude a l'abrasion, contenant de la zircone stabilisee a l'oxyde de dysprosium (dysprosie)
US8021742B2 (en) * 2006-12-15 2011-09-20 Siemens Energy, Inc. Impact resistant thermal barrier coating system

Non-Patent Citations (1)

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Title
See references of WO2008049392A2 *

Also Published As

Publication number Publication date
WO2008049392A3 (fr) 2009-10-15
DE102006050789A1 (de) 2008-04-30
US20090258214A1 (en) 2009-10-15
WO2008049392A2 (fr) 2008-05-02

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Owner name: MTU AERO ENGINES AG

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