EP2020024A4 - Équipement de tranfert de substrats et système de traitement de substrats à haute vitesse l'utilisant - Google Patents

Équipement de tranfert de substrats et système de traitement de substrats à haute vitesse l'utilisant

Info

Publication number
EP2020024A4
EP2020024A4 EP07746289A EP07746289A EP2020024A4 EP 2020024 A4 EP2020024 A4 EP 2020024A4 EP 07746289 A EP07746289 A EP 07746289A EP 07746289 A EP07746289 A EP 07746289A EP 2020024 A4 EP2020024 A4 EP 2020024A4
Authority
EP
European Patent Office
Prior art keywords
processing system
high speed
same
transfer equipment
substrate processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP07746289A
Other languages
German (de)
English (en)
Other versions
EP2020024A1 (fr
Inventor
Soon-Im Wi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
New Power Plasma Co Ltd
Original Assignee
New Power Plasma Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020060039744A external-priority patent/KR100814238B1/ko
Priority claimed from KR1020060090225A external-priority patent/KR100781816B1/ko
Priority claimed from KR1020060129476A external-priority patent/KR101364583B1/ko
Priority claimed from KR1020070007160A external-priority patent/KR101416780B1/ko
Application filed by New Power Plasma Co Ltd filed Critical New Power Plasma Co Ltd
Publication of EP2020024A1 publication Critical patent/EP2020024A1/fr
Publication of EP2020024A4 publication Critical patent/EP2020024A4/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67196—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the transfer chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67745—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber characterized by movements or sequence of movements of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/139—Associated with semiconductor wafer handling including wafer charging or discharging means for vacuum chamber
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/141—Associated with semiconductor wafer handling includes means for gripping wafer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S901/00—Robots
    • Y10S901/30—End effector

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Cell Separators (AREA)
EP07746289A 2006-05-03 2007-05-01 Équipement de tranfert de substrats et système de traitement de substrats à haute vitesse l'utilisant Withdrawn EP2020024A4 (fr)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
KR1020060039744A KR100814238B1 (ko) 2006-05-03 2006-05-03 기판 반송 장치 및 이를 이용한 기판 처리 시스템
KR1020060090225A KR100781816B1 (ko) 2006-09-18 2006-09-18 기판 반송 장치 및 이를 이용한 기판 처리 시스템
KR1020060129476A KR101364583B1 (ko) 2006-12-18 2006-12-18 기판 처리 시스템
KR1020070007160A KR101416780B1 (ko) 2007-01-23 2007-01-23 고속 기판 처리 시스템
PCT/KR2007/002133 WO2007126289A1 (fr) 2006-05-03 2007-05-01 Équipement de tranfert de substrats et système de traitement de substrats à haute vitesse l'utilisant

Publications (2)

Publication Number Publication Date
EP2020024A1 EP2020024A1 (fr) 2009-02-04
EP2020024A4 true EP2020024A4 (fr) 2011-03-30

Family

ID=38655752

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07746289A Withdrawn EP2020024A4 (fr) 2006-05-03 2007-05-01 Équipement de tranfert de substrats et système de traitement de substrats à haute vitesse l'utilisant

Country Status (5)

Country Link
US (1) US9054146B2 (fr)
EP (1) EP2020024A4 (fr)
JP (1) JP5467221B2 (fr)
TW (1) TWI476855B (fr)
WO (1) WO2007126289A1 (fr)

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KR101887110B1 (ko) 2007-05-18 2018-08-09 브룩스 오토메이션 인코퍼레이티드 빠른 교환 로봇을 가진 컴팩트 기판 운송 시스템
US9117870B2 (en) 2008-03-27 2015-08-25 Lam Research Corporation High throughput cleaner chamber
JP5511273B2 (ja) * 2008-09-12 2014-06-04 株式会社日立国際電気 基板処理装置及び基板処理方法
KR102027108B1 (ko) 2009-03-18 2019-10-01 에바텍 아크티엔게젤샤프트 진공처리 장치
KR101968855B1 (ko) 2009-06-30 2019-04-12 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 제조 방법
JP2011071293A (ja) * 2009-09-25 2011-04-07 Tokyo Electron Ltd プロセスモジュール、基板処理装置、および基板搬送方法
JP5452166B2 (ja) * 2009-10-23 2014-03-26 川崎重工業株式会社 アライナ装置、及びそれを備える半導体処理設備
JP5721132B2 (ja) 2009-12-10 2015-05-20 オルボテック エルティ ソラー，エルエルシー 真空処理装置用シャワーヘッド・アセンブリ及び真空処理装置用シャワーヘッド・アセンブリを真空処理チャンバに締結する方法
US8562272B2 (en) * 2010-02-16 2013-10-22 Lam Research Corporation Substrate load and unload mechanisms for high throughput
US8893642B2 (en) 2010-03-24 2014-11-25 Lam Research Corporation Airflow management for low particulate count in a process tool
JP5168329B2 (ja) * 2010-08-31 2013-03-21 Ｔｄｋ株式会社 ロードポート装置
JP5610952B2 (ja) * 2010-09-24 2014-10-22 日本電産サンキョー株式会社 産業用ロボット
CN102530556B (zh) * 2010-12-20 2015-06-24 理想能源设备(上海)有限公司 基板传输装置、基板传输方法及基板传输系统
US8459276B2 (en) 2011-05-24 2013-06-11 Orbotech LT Solar, LLC. Broken wafer recovery system
JP5283770B2 (ja) * 2012-05-15 2013-09-04 大日本スクリーン製造株式会社 基板搬送装置およびこれを備えた基板処理装置
US20140064886A1 (en) * 2012-08-30 2014-03-06 Orbotech LT Solar, LLC. System, architecture and method for simultaneous transfer and process of substrates
FR2998205A1 (fr) * 2012-11-19 2014-05-23 Semco Engineering Dispositif de transfert de supports de substrats et dispositif de traitement de substrats le comportant
US10424498B2 (en) 2013-09-09 2019-09-24 Persimmon Technologies Corporation Substrate transport vacuum platform
TWI672191B (zh) 2013-10-16 2019-09-21 美商應用材料股份有限公司 帶有裝設樞紐手臂之化學機械拋光機的系統及方法
JP6503280B2 (ja) 2015-11-12 2019-04-17 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置
US11024531B2 (en) 2017-01-23 2021-06-01 Lam Research Corporation Optimized low energy / high productivity deposition system
JP6841920B2 (ja) 2017-09-01 2021-03-10 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ 基板処理装置、半導体装置の製造方法およびプログラム
JP7065204B2 (ja) * 2018-11-14 2022-05-11 東京エレクトロン株式会社 基板処理装置及び基板搬送方法
JP7149837B2 (ja) * 2018-12-21 2022-10-07 株式会社ダイヘン 多段式ハンドおよびこれを備える搬送ロボット
SG11202108920SA (en) * 2019-02-19 2021-09-29 Veeco Instr Inc Automated batch production thin film deposition systems and methods of using the same
US11883958B2 (en) * 2019-06-07 2024-01-30 Applied Materials, Inc. Robot apparatus including dual end effectors with variable pitch and methods
US11569111B2 (en) 2019-12-02 2023-01-31 Brooks Automation Us, Llc Substrate processing apparatus
US20220372621A1 (en) * 2021-05-18 2022-11-24 Mellanox Technologies, Ltd. Cvd system with substrate carrier and associated mechanisms for moving substrate therethrough
GB202208951D0 (en) * 2022-06-17 2022-08-10 Lam Res Ag System for processing wafer-shaped articles

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US20040141832A1 (en) * 2003-01-10 2004-07-22 Jang Geun-Ha Cluster device having dual structure
US20060039781A1 (en) * 2004-08-17 2006-02-23 Leszek Niewmierzycki Advanced low cost high throughput processing platform

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JP5259907B2 (ja) * 2000-09-01 2013-08-07 クロッシング オートメーション インコーポレイテッド 加工ツール、加工物を位置合わせする方法、及び加工物を次々に加工する方法
JP3956350B2 (ja) * 2002-03-25 2007-08-08 東京エレクトロン株式会社 位置決め機能を有する基板処理装置及び位置決め機能を有する基板処理方法
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US20040043513A1 (en) * 2000-11-07 2004-03-04 Shigeru Ishizawa Method of transferring processed body and processing system for processed body
US20040141832A1 (en) * 2003-01-10 2004-07-22 Jang Geun-Ha Cluster device having dual structure
US20060039781A1 (en) * 2004-08-17 2006-02-23 Leszek Niewmierzycki Advanced low cost high throughput processing platform

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Title
See also references of WO2007126289A1 *

Also Published As

Publication number Publication date
WO2007126289A1 (fr) 2007-11-08
EP2020024A1 (fr) 2009-02-04
US9054146B2 (en) 2015-06-09
US20110318141A1 (en) 2011-12-29
TWI476855B (zh) 2015-03-11
JP2010507221A (ja) 2010-03-04
TW200818378A (en) 2008-04-16
JP5467221B2 (ja) 2014-04-09

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