EP1977860B1 - Dispositif et procédé de fabrication d'éléments optiques - Google Patents

Dispositif et procédé de fabrication d'éléments optiques Download PDF

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Publication number
EP1977860B1
EP1977860B1 EP08102962A EP08102962A EP1977860B1 EP 1977860 B1 EP1977860 B1 EP 1977860B1 EP 08102962 A EP08102962 A EP 08102962A EP 08102962 A EP08102962 A EP 08102962A EP 1977860 B1 EP1977860 B1 EP 1977860B1
Authority
EP
European Patent Office
Prior art keywords
blank
liquid jet
profile
removal
incidence
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP08102962A
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German (de)
English (en)
Other versions
EP1977860A1 (fr
Inventor
Oliver FÄHNLE
Wilhelmus Messelink
Mark Meeder
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fisba Optik AG
Original Assignee
Fisba Optik AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fisba Optik AG filed Critical Fisba Optik AG
Publication of EP1977860A1 publication Critical patent/EP1977860A1/fr
Application granted granted Critical
Publication of EP1977860B1 publication Critical patent/EP1977860B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
    • B24C1/04—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for treating only selected parts of a surface, e.g. for carving stone or glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
    • B24C1/08—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for polishing surfaces, e.g. smoothing a surface by making use of liquid-borne abrasives

Definitions

  • the invention relates to a method for producing optical elements according to the features of the preamble of the independent claims.
  • fluid jet polishing For polishing, correcting or processing of optical elements, it is known to remove material with an abrasive liquid jet. With this technology called fluid jet polishing, it is possible to shape and polish optical surfaces of glass bodies, for example.
  • the fluid jet polishing technique is for example from OW Fähnle / H. van Brug / HJ Frankena in "Fluid Jet Polishing of Optical Surfaces", Applied Optics 37 (28), 6771-6773, 1998 , described.
  • mini- and micro-lenses are here and hereinafter understood lenses having a diameter of 0.1 to 5 mm. It is therefore an object of the present invention to avoid the disadvantages of the known, in particular therefore to provide a method and a device by means of which aspheric mini and microlenses can be produced with high precision in a simple manner.
  • the device according to the invention and the method according to the invention should moreover permit the production of such lenses in a flexible manner.
  • WO 02-49804 shows a method according to the preamble of claim 1.
  • the method according to claim 1 is used for producing optical elements.
  • this aspheric mini and microlenses are to be produced.
  • a blank is provided.
  • the blank is made of a transparent material, typically of glass.
  • the blank is processed with an abrasive liquid jet. This will remove material from the blank.
  • the liquid jet has a jet diameter which is greater than the dimension of the blank in a plane perpendicular to the direction of the liquid jet.
  • the blank typically has a size of 0.1 to 5 mm.
  • the method according to the invention also works with larger diameters, provided that an abrasive jet with a sufficiently large diameter is made available. It has been found that in this case a specific, inhomogeneous removal profile is produced on the surface of the blank. This profile is dependent inter alia on the different angles of incidence of the beam at the different points of the blank, in particular a spherical blank. If such a larger jet of liquid is used, the typically spherical surface of the blank is eroded irregularly, typically aspherized.
  • the liquid jet is so under at least two different Incident angles led against the blank that a predetermined Abtragprofil is generated.
  • a blank is processed, which is at least in the region of the surface to be machined spherical or cylindrical.
  • the desired profile or the desired asphericity can be achieved particularly simply due to the difference between the desired shape and the blank shape.
  • the inventive method is carried out according to the known principle of fluid jet polishing.
  • water is typically used as the liquid in which as abrasive material CeO 2 or SiC or other commercially available grinding or polishing agents are mixed.
  • the blanks typically have dimensions of a few tenths of a millimeter.
  • the liquid jet has a beam diameter of about 1-6 mm.
  • the jet is conveyed at a delivery pressure of 5 to 20 bar and impinges at a speed of 40 to 80 m / s on the surface of the blank.
  • the jet and the blank are moved relative to one another such that the jet is rotated about the center of the at least partially spherical blank. In this way, it is possible to predict with particular accuracy predetermined removal profiles relative to a spherical blank.
  • the blank is particularly preferably brought into a predetermined shape by a desired Abtragprofil is formed as the difference between the shape of the blank and the desired shape as a combination of a plurality of Basisabtragprofilen.
  • Each base removal profile corresponds to the machining of the blank at a predetermined angle of incidence of the liquid jet. From a plurality of such basic ablation profiles, therefore, the desired ablation profile can be produced as a linear combination.
  • This combination of the ablation profiles represents the spatial deviation of the desired optical element, in particular the aspherical lens from the blank, in particular from the base sphere.
  • the removal profile of the blank is then compiled as a linear combination of the basic removal profiles.
  • the desired removal rate can be easily generated from a linear combination of the simulated base profiles. Therefore it is also readily possible to determine and select basic profiles with particularly suitable angles of incidence. It is therefore not necessary to assume fixed angular positions with fixed distances. Thus, optimized angles can be selected so that the asphere can also be produced with minimal residence times.
  • the device for carrying out the method according to the invention has a holding arrangement for at least one blank.
  • the device is also provided with a jet device for delivering an abrasive liquid jet.
  • the jet device is designed to deliver a jet of liquid having a jet diameter which is greater than the dimension of the blank in a plane perpendicular to the direction of the liquid jet.
  • the jet device for discharging the abrasive liquid jet and the holding device are movable relative to each other such that the liquid jet impinges on the blank at different angles of incidence.
  • the holding arrangement is movable with the blank. This type of reciprocal movement is particularly simple, since it is sufficient to move the holding device so that the blank moves around its center. However, it is basically also conceivable to move only the blasting device or the blasting device and the holding arrangement for the blank.
  • the control of the movements is a bit more complex. However, it can be easily realized with a CNC control.
  • the holding device for receiving a blank having a size of 0.1 - 5 mm is formed.
  • the blasting device is typically designed to produce a liquid jet having a delivery pressure of 5 to 20 bar and an impact velocity of the liquid jet onto the blank of 40 to 80 m / s.
  • the device is also preferably provided with a computer arrangement, by means of which the relative position between the direction of the liquid jet and the position of the holding device of the blank is adjustable. That way Automatically create a desired removal profile automatically.
  • the calculating means may be designed to determine a combination of predefined basic removal profiles for generating a desired ablation profile.
  • a plurality of basic removal profiles are advantageously stored in the device according to the invention and assigned to individual angles of incidence.
  • the apparatus comprises a computer and also a computer program product containing a plurality of predefined basic removal profiles associated with different angles of incidence of an abrasive liquid jet under predetermined conditions such as glass type, size of the blank, properties of the beam.
  • the computer program performs the above described A method of manufacturing optical elements in the device described above when the program is run on the computer.
  • FIG. 1 schematically show the basic principle of the present invention.
  • a blank 20 in the form of a partial sphere is mounted in a holding arrangement 11.
  • the blank 20 is a glass blank with a radius of 0.45 mm, that is, a diameter D of 0.9 mm.
  • an abrasive liquid jet 32 material is removed from the surface 22 of the blank 20.
  • the abrasive liquid jet 32 is discharged from a nozzle 31.
  • the liquid jet 32 is directed in a direction R which is approximately perpendicular to the surface of the holder 11.
  • the angle between the perpendicular and the direction R of the liquid jet is 0 °.
  • the abrasive liquid jet 32 has a beam diameter d, which is about 1.5 mm.
  • the beam diameter d is thus greater than the diameter D of the blank in a plane E perpendicular to the direction R of the liquid jet.
  • the rate is greater in a second surface area 22c, in which the liquid jet impinges on the surface at an angle between 0 ° and 90 °. This results in an ablation dependent on the surface area of the blank and, as a result, a specific removal profile.
  • the blank 20 is pivoted relative to the nozzle 3 and its center Z, so that an angle ⁇ of approximately 10 ° results between the direction R of the liquid jet 32 and the perpendicular L.
  • the removal rate in the surface area 22f is greatest, while the removal rate in the areas 22e and 22d is nearly zero.
  • FIG. 3 shows different removal profiles at six different angles of incidence ⁇ of the liquid jet 32.
  • FIG. 3 shows only half the profile (ie the removal profile from a center plane of the blank up to an angle of 50 ° with respect to the center plane.)
  • the X-axis from 0 to 50 ° corresponds to the measuring range of an interferometer, by means of which the removal profiles were measured
  • the Y-axis shows the relative normalized material removal perpendicular to the spherical surface starting from a spherical blank 20.
  • FIG. 3 shows, depending on the angular position of the liquid jet 32 different removal profiles.
  • a combination of these individual basic removal profiles can be predicted mathematically to generate a predefined removal profile.
  • This removal profile corresponds to the difference between the shape of the blank 20 and the desired, aspherical shape of the optical component to be produced, in particular a lens.
  • FIG. 4 schematically shows an apparatus 10 for carrying out the present invention.
  • the device 10 consists essentially of a holding arrangement 11 for holding the blank 20.
  • the relative movement between the blank 20 and the nozzle 31 must be very close to the center of the blank.
  • the blank is held so that it projects at least half out of the holding assembly 11 and can be acted upon by the liquid jet.
  • the liquid jet 32 can be discharged through the nozzle 31 as part of a jet device 30.
  • the nozzle 31 is movably mounted with a nozzle holder 33, so that the liquid jet 32 is pivotable about the center Z of the blank 20.
  • a blank was held movably in three translation axes in the X, Y and Z directions.
  • the rotational movements were generated by the nozzle 31.
  • the individual movements were controlled by a high-precision CNC machine.
  • other arrangements are conceivable in which, for example, only the holding assembly 11 would be pivoted to hold the blank 20.
  • the nozzle 31 is connected in a manner known per se via a fluid connection 35 to an apparatus 36 for producing an abrasive liquid jet.
  • This is typically a volumetric pump.
  • the device 10 has a computer arrangement 34.
  • different basic removal profiles are stored.
  • the basic removal profiles correspond to the removal profile for a certain angle of incidence ⁇ of the liquid jet 32 to the blank 20.
  • Per predetermined operating conditions material and size of the blank, type of liquid jet
  • a desired removal profile can be calculated as a difference between the shape of the blank and the shape of the desired aspheric component by a linear combination of different base removal profiles.
  • the computer assembly 34 accordingly controls the position of the nozzle 31 via a CNC machine.
  • the nozzle 32 can be pivoted in the holder 33 by an angle ⁇ relative to the center Z of the blank 20 (shown in dashed lines).
  • angle ⁇ relative to the center Z of the blank 20
  • predetermined angular positions at a distance of 5 ° or 10 ° are conceivable.
  • the determination of profiles in the various angular positions can be done on the basis of simulations, starting from a real base profile. A real measurement in certain angular positions is therefore not necessary in this case.
  • the removal profile corresponds to the difference to a partially spherical blank 20.
  • the rear side 23 of the blank is ground flat, preferably before the blank is positioned in the holding arrangement.
  • the optical calculation of the lens ie, the difference between the spherical shape of the blank and the aspherical shape of the lens 21 is shown in FIG FIG. 6 shown.
  • the difference corresponds to the target removal profile.
  • Abtragonne provided in the range between 0 and a maximum of 12 microns. This results in the aspheric form.
  • FIG. 7 schematically a comparison between a desired Abtragprofil (desired profile) and a linear combination of Basisabtragprofilen shown, which form an approximation of the desired profile.
  • the removal rate is normalized (maximum removal corresponds to -1).
  • FIG. 8 an alternative embodiment is shown. Instead of in FIG. 3
  • the measured base profiles shown are based on the example according to FIG. 8 on simulated basic profiles, which are calculated from a measurement for an angle of incidence of 0 °.
  • the differences between the simulated and the measured base profiles are sufficiently small that a corresponding lens could also be produced on the basis of such simulated profiles.
  • the advantage here is that so that any profiles can be calculated for different angles of incidence.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)
  • Turning (AREA)

Claims (12)

  1. Procédé de fabrication d'éléments optiques (21), en particulier de minilentilles ou microlentilles asphériques, présentant les étapes qui consistent à :
    - préparer au moins une ébauche (20),
    - traiter l'ébauche (20) à l'aide d'un jet abrasif de liquide (32) pour enlever du matériau de l'ébauche (20),
    caractérisé en ce que
    le jet de liquide (32) a un diamètre (d) supérieur à la dimension (D) de l'ébauche (20) dans un plan (E) perpendiculaire à la direction (R) du jet de liquide (32) et
    en ce que pour le traitement de l'ébauche (20), le jet de liquide (32) est orienté sur l'ébauche (20) sous au moins deux angles d'incidence (α) différents de manière à obtenir le profil d'enlèvement souhaité.
  2. Procédé selon la revendication 1, caractérisé en ce qu'il utilise une ébauche (20) qui a une configuration au moins en partie sphérique dans la zone de la surface à traiter.
  3. Procédé selon l'une des revendications 1 ou 2, caractérisé en ce que le liquide du jet est l'eau.
  4. Procédé selon l'une des revendications 1 à 3, caractérisé en ce qu'un matériau abrasif CeO2 ou SiC est ajouté au jet de liquide (32).
  5. Procédé selon l'une des revendications 1 à 4, caractérisé en ce que le jet de liquide (32) a un diamètre (d) de 1 à 6 mm.
  6. Procédé selon l'une des revendications 1 à 5, caractérisé en ce que l'ébauche a un diamètre de 1 à 5 mm.
  7. Procédé selon l'une des revendications 1 à 6, caractérisé en ce que le jet abrasif de liquide (32) est transporté à une pression de refoulement de 5 à 20 bars dans un système de refoulement (35).
  8. Procédé selon l'une des revendications 1 à 7, caractérisé en ce que le jet de liquide (32) aboutit sur la surface (22) à traiter de l'ébauche (20) à une vitesse de 40 à 80 m/s.
  9. Procédé selon l'une des revendications 1 à 8, caractérisé en ce que le traitement de l'ébauche (20) sous différents angles du jet de liquide (32) s'effectue en inclinant un dispositif (11) de maintien de l'ébauche (20) autour du point central (Z) de l'ébauche (20) au moins en partie sphérique.
  10. Procédé selon l'une des revendications 1 à 9, caractérisé en ce que l'ébauche (20) est traitée en enlevant de l'ébauche (20) de la matière en suivant un profil d'enlèvement, le profil d'enlèvement étant formé d'une combinaison de plusieurs profils d'enlèvement de base, chaque profil d'enlèvement de base correspondant au traitement de l'ébauche (20) sous un angle d'incidence (α) prédéterminé du jet de liquide (32) sur l'ébauche (20).
  11. Procédé selon la revendication 10, caractérisé en ce qu'un premier profil de base est un profil de base mesuré pour le traitement de l'ébauche (20) sous un premier angle d'incidence et en ce que d'autres profils d'enlèvement de base pour d'autres angles d'incidence prédéterminés sont calculés par simulation à partir du premier profil de base.
  12. Procédé selon la revendication 11, caractérisé en ce qu'une combinaison linéaire, qui forme le taux d'enlèvement souhaité, des profils de base présentant des angles correspondants d'incidence α prédéterminés des profils de base est sélectionnée de manière à pouvoir réaliser une surface asphérique en maintenant un temps de séjour minimum à chaque angle d'incidence.
EP08102962A 2007-04-04 2008-03-27 Dispositif et procédé de fabrication d'éléments optiques Not-in-force EP1977860B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH5412007 2007-04-04

Publications (2)

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EP1977860A1 EP1977860A1 (fr) 2008-10-08
EP1977860B1 true EP1977860B1 (fr) 2010-12-15

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EP (1) EP1977860B1 (fr)
AT (1) ATE491547T1 (fr)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008052870B4 (de) * 2008-10-23 2010-09-02 Leica Biosystems Nussloch Gmbh Verfahren zum Betreiben eines Mikrotoms und Mikrotom mit einer Steuervorrichtung
JP6411821B2 (ja) * 2014-09-09 2018-10-24 オリンパス株式会社 レンズ製造装置及びレンズ製造方法

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US4383572A (en) * 1981-12-07 1983-05-17 The Air Preheater Company, Inc. Fire detection cleaning arrangement
JPH0384545A (ja) * 1989-08-29 1991-04-10 Fuji Photo Film Co Ltd ハロゲン化銀カラー写真感光材料およびカラー画像形成方法
US5948202A (en) * 1994-02-03 1999-09-07 Corning Incorporated Method for removing a protective coating from optical fibers and making a photonic device
US7416611B2 (en) * 1997-05-09 2008-08-26 Semitool, Inc. Process and apparatus for treating a workpiece with gases
NL1007589C1 (nl) * 1997-11-20 1999-05-25 Tno Werkwijze en inrichting voor het bewerken van een werkstuk.
US5971835A (en) * 1998-03-25 1999-10-26 Qed Technologies, Inc. System for abrasive jet shaping and polishing of a surface using magnetorheological fluid
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JP2003507198A (ja) * 1999-08-18 2003-02-25 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ プレートに凹所又は開孔のパターンを形成する方法
JP4268303B2 (ja) * 2000-02-01 2009-05-27 キヤノンアネルバ株式会社 インライン型基板処理装置
AU2002232735A1 (en) * 2000-12-21 2002-07-01 Qed Technologies, Inc. Jet-induced finishing of a substrate surface
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JP3896265B2 (ja) * 2001-09-11 2007-03-22 オリンパス株式会社 位置出し治具及び位置出し治具を用いた吹き付け研磨装置
CN100429752C (zh) * 2004-02-25 2008-10-29 株式会社荏原制作所 抛光装置和衬底处理装置
WO2006057720A1 (fr) * 2004-11-29 2006-06-01 Rajeev Bajaj Procede et appareil pour tampon de planarisation chimico-mecanique avec commande de pression et controleur de processus
US8187056B2 (en) * 2006-12-14 2012-05-29 Flow International Corporation Process and apparatus for surface-finishing

Also Published As

Publication number Publication date
US20080248729A1 (en) 2008-10-09
ATE491547T1 (de) 2011-01-15
EP1977860A1 (fr) 2008-10-08
US7987015B2 (en) 2011-07-26

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