EP1974072A1 - Procédé de revêtement d'un corps de substrat en métal dur ou en cermet et corps revêtu en métal dur ou en cermet - Google Patents

Procédé de revêtement d'un corps de substrat en métal dur ou en cermet et corps revêtu en métal dur ou en cermet

Info

Publication number
EP1974072A1
EP1974072A1 EP06805498A EP06805498A EP1974072A1 EP 1974072 A1 EP1974072 A1 EP 1974072A1 EP 06805498 A EP06805498 A EP 06805498A EP 06805498 A EP06805498 A EP 06805498A EP 1974072 A1 EP1974072 A1 EP 1974072A1
Authority
EP
European Patent Office
Prior art keywords
substrate body
coating
cermet
pvd
blasting agent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06805498A
Other languages
German (de)
English (en)
Inventor
Hartmut Westphal
Hendrikus Van Den Berg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kennametal Widia Produktions GmbH and Co KG
Original Assignee
Kennametal Widia Produktions GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kennametal Widia Produktions GmbH and Co KG filed Critical Kennametal Widia Produktions GmbH and Co KG
Publication of EP1974072A1 publication Critical patent/EP1974072A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
    • B23B27/141—Specially shaped plate-like cutting inserts, i.e. length greater or equal to width, width greater than or equal to thickness
    • B23B27/145—Specially shaped plate-like cutting inserts, i.e. length greater or equal to width, width greater than or equal to thickness characterised by having a special shape
    • B23B27/146—Means to improve the adhesion between the substrate and the coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/028—Physical treatment to alter the texture of the substrate surface, e.g. grinding, polishing
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2224/00—Materials of tools or workpieces composed of a compound including a metal
    • B23B2224/04—Aluminium oxide
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2224/00—Materials of tools or workpieces composed of a compound including a metal
    • B23B2224/08—Aluminium nitride
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2224/00—Materials of tools or workpieces composed of a compound including a metal
    • B23B2224/24—Titanium aluminium nitride
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2224/00—Materials of tools or workpieces composed of a compound including a metal
    • B23B2224/28—Titanium carbide
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2224/00—Materials of tools or workpieces composed of a compound including a metal
    • B23B2224/32—Titanium carbide nitride (TiCN)
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2224/00—Materials of tools or workpieces composed of a compound including a metal
    • B23B2224/36—Titanium nitride
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
    • B23B2228/08—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner applied by physical vapour deposition [PVD]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
    • B23B2228/10—Coatings
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31678—Of metal

Definitions

  • the invention relates to a method for coating a cemented carbide or cermet substrate body by means of physical vapor deposition (PVD).
  • PVD physical vapor deposition
  • the invention further relates to a coated hard metal or cermet body.
  • Carbide or cermet bodies in various compositions have been suggested for many applications.
  • the substrate body composition is adapted to the application, for example, a high hardness, thermal shock resistance or wear resistance, the latter in particular in tools for machining operations in the foreground.
  • coated substrate body have proven their coating consisted of one or more layers. Coating materials are carbides, nitrides, carbonitrides, oxicarbonitrides, oxynitrides or oxides of the metals of the IVa to VIa group of the periodic table or aluminum compounds such as Al 2 O 3 and TiAIN.
  • PVD methods physical deposition methods have the advantage that the coating can be applied at lower temperatures.
  • the substrate bodies are ground before the PVD coating.
  • Unpolished substrate surfaces (ie in the sintered state) left substrates have virtually no compressive or tensile residual stresses. Due to the grinding process, residual compressive stresses are generated in the surface of the substrate body which can be between -200 and -1200 MPa for carbide.
  • PVD layers always have residual compressive stresses of about -1800 to -4000 MPa due to the way in which the layer-forming constituents (ions) are incorporated into the layer with high energy. Thereafter, the difference in residual compressive stresses between the coating and substrate for ground substrates is smaller than for substrates left in the sintered state. The difference in the residual stresses between the substrate body and the coating causes shear stresses which adversely affect the layer adhesion. For this reason, PVD-coated substrates that are not ground show poorer machining performance.
  • the core idea of the present invention is that the finished sintered substrate body made of a hard metal or a cermet without further intermediate treatment before the PVD coating of a blasting using a granular blasting agent is subjected until the near-surface zone of the substrate body has a residual stress, the at least substantially equal to the residual stress present in the single or first applied PVD layer.
  • a blasting agent is used with particles having particles with a maximum diameter of 600 microns, preferably at most 150 microns and in particular between 15 and 100 microns.
  • the substrate body which is treated according to a development of the invention in the dry-jet method, is preferably irradiated with at least substantially spherical blasting agents or blasting agents which have a round grain shape.
  • Suitable blasting agents are, in particular, pressure-blasted blasting, cast iron granules, heavy metal powder or alloys, glass, corundum, hard metal granules and / or unbreakable ceramics made therefrom.
  • the steel or the means are directed by compressed air under a pressure of at least 1, 0 x10 5 - 10 x10 5 Pa, preferably 1, 5 x10 5 -3.5 x10 5 Pa on the substrate body.
  • the blast treatment of the type described above has proven particularly in connection with a subsequent PVD coating consisting of carbides, nitrides, carbonitrides, oxides or oxicarbonitrides of the elements of the IVa to Vla group of the Periodic Table or of Al 2 O 3 , AITiN or AIN existed.
  • the thickness of the individual layers was preferably between 0.1 ⁇ m and 10 ⁇ m with a total thickness (in the case of multilayer coatings) of not more than 20 ⁇ m.
  • coated hard metal or cermet body according to claim 9, apply to the corresponding advantages as described above.
  • Such a coated hard metal or cermet body is designed in particular as a cutting tool for drilling, milling or turning.
  • indexable inserts have been coated with an AlTiN coating applied by PVD at 350 ° to 600 ° (coating temperature). While the tools that were coated after sintering without further treatment or only after a grinding treatment, had to be replaced after a relatively short time due to wear, the service life of corresponding tools of the same configuration, after sintering a method of the invention, namely a blast treatment between 10 and 60 seconds have been significantly improved. This is because the PVD layers, the residual compressive stresses measured by the SIN 2 - ⁇ process, were on the order of -1.5 to -3.5GPa, which had residual tensile stresses or very small compressive residual stress in the surface near edge zones of the substrate body of a maximum of 100 MPa opposed.
  • the compressive stress of the near-surface zone of the substrate body is increased to the compressive residual stress dependent on the coating material and the PVD parameters (except for +/- 10%) by the jet treatment, in particular in the dry-jet method with round grains of 50 ⁇ m and 100 ⁇ m, this increase results the compressive residual stress to much better wear resistance of the tools.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Physical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Abstract

L’invention concerne un procédé de revêtement d’un corps de substrat en métal dur ou en cermet au moyen du PVD, dans lequel le corps de substrat déjà fritté sans autre traitement intermédiaire avant le revêtement par PVD est soumis à un traitement par jet au moyen d’un moyen de projection granulaire jusqu’à ce que la zone proche de la surface du corps de substrat présente une contrainte résiduelle qui est au moins sensiblement égale à la contrainte résiduelle qui est présente dans la seule ou la première couche de PVD appliquée. L’invention concerne en outre un tel corps en métal dur ou en cermet revêtu, en particulier sous la forme d'un outil pour enlever les copeaux.
EP06805498A 2006-01-17 2006-11-07 Procédé de revêtement d'un corps de substrat en métal dur ou en cermet et corps revêtu en métal dur ou en cermet Withdrawn EP1974072A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200610002371 DE102006002371A1 (de) 2006-01-17 2006-01-17 Verfahren zur Beschichtung eines Hartmetall- oder Cermetsubstratkörpers und beschichteter Hartmetall- oder Cermetkörper
PCT/DE2006/001943 WO2007082498A1 (fr) 2006-01-17 2006-11-07 Procédé de revêtement d’un corps de substrat en métal dur ou en cermet et corps revêtu en métal dur ou en cermet

Publications (1)

Publication Number Publication Date
EP1974072A1 true EP1974072A1 (fr) 2008-10-01

Family

ID=37950566

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06805498A Withdrawn EP1974072A1 (fr) 2006-01-17 2006-11-07 Procédé de revêtement d'un corps de substrat en métal dur ou en cermet et corps revêtu en métal dur ou en cermet

Country Status (10)

Country Link
US (1) US20100151260A1 (fr)
EP (1) EP1974072A1 (fr)
JP (1) JP2009523618A (fr)
KR (1) KR20080085876A (fr)
CN (1) CN101310035A (fr)
BR (1) BRPI0621001A2 (fr)
CA (1) CA2635020A1 (fr)
DE (1) DE102006002371A1 (fr)
RU (1) RU2008128431A (fr)
WO (1) WO2007082498A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008009487B4 (de) * 2008-02-15 2022-09-22 Walter Ag Strahlbehandelter Schneideinsatz und Verfahren
JP5402507B2 (ja) * 2009-10-16 2014-01-29 三菱マテリアル株式会社 表面被覆切削工具
JP5510661B2 (ja) * 2010-09-06 2014-06-04 三菱マテリアル株式会社 表面被覆炭窒化チタン基サーメット製切削インサートの製造方法
AT15412U1 (de) * 2016-06-27 2017-08-15 Ceratizit Austria Gmbh Verfahren zur mechanischen Ausheilung funktionaler Hartmetall- oder Cermet-Oberflächen

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JPS5839776B2 (ja) 1977-06-13 1983-09-01 韓国チタニユム工業株式会社 酸化チタンの製造法
JPS5839776A (ja) * 1981-09-03 1983-03-08 O S G Kk 高速度鋼工具
US4761346A (en) * 1984-11-19 1988-08-02 Avco Corporation Erosion-resistant coating system
JPS6299081A (ja) * 1985-10-23 1987-05-08 Hitachi Powdered Metals Co Ltd 焼結機械部品の表面仕上げ方法
JPH0428854A (ja) * 1990-05-24 1992-01-31 Toshiba Tungaloy Co Ltd 被覆工具用基材の表面処理方法
JP2757581B2 (ja) * 1991-03-28 1998-05-25 三菱マテリアル株式会社 表面被覆切削工具
JPH05105908A (ja) * 1991-10-11 1993-04-27 Nkk Corp 粉末焼結品のシヨツトブラスト方法
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CA2383082A1 (fr) * 1999-09-01 2001-03-08 Siemens Aktiengesellschaft Procede et dispositif de traitement de surface d'un element
GB2375725A (en) * 2001-05-26 2002-11-27 Siemens Ag Blasting metallic surfaces
JP2005001088A (ja) * 2003-06-13 2005-01-06 Osg Corp 硬質被膜被覆部材、およびその製造方法
JP2005138210A (ja) * 2003-11-05 2005-06-02 Sumitomo Electric Hardmetal Corp 表面被覆切削工具
US7244519B2 (en) * 2004-08-20 2007-07-17 Tdy Industries, Inc. PVD coated ruthenium featured cutting tools

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TÖNSHOFF H K ET AL: "Einfluß der Substratbearbeitung auf die Verschleißfestigkeit von beschichteten Hartmetallwerkzeugen", GFT: TRIBOLOGIETAGUNG: REIBUNG SCHMIERUNG VERSCHLEISS., 30.09.-1.10.1997, GÖTTINGEN [DE], 40, 30 September 1997 (1997-09-30) - 1 October 1997 (1997-10-01), pages 40/1 - 40/9 *

Also Published As

Publication number Publication date
RU2008128431A (ru) 2010-02-27
BRPI0621001A2 (pt) 2011-11-29
CA2635020A1 (fr) 2007-07-26
KR20080085876A (ko) 2008-09-24
CN101310035A (zh) 2008-11-19
US20100151260A1 (en) 2010-06-17
JP2009523618A (ja) 2009-06-25
DE102006002371A1 (de) 2007-07-19
WO2007082498A1 (fr) 2007-07-26

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