EP1902457A1 - Systeme de buses - Google Patents

Systeme de buses

Info

Publication number
EP1902457A1
EP1902457A1 EP06776162A EP06776162A EP1902457A1 EP 1902457 A1 EP1902457 A1 EP 1902457A1 EP 06776162 A EP06776162 A EP 06776162A EP 06776162 A EP06776162 A EP 06776162A EP 1902457 A1 EP1902457 A1 EP 1902457A1
Authority
EP
European Patent Office
Prior art keywords
nozzle
nozzle arrangement
tube
arrangement
screw cap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06776162A
Other languages
German (de)
English (en)
Inventor
Manfred Faubel
Ales Charvat
Juergen Troe
Bernd Abel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Max Planck Gesellschaft zur Foerderung der Wissenschaften eV
Georg August Universitaet Goettingen
Original Assignee
Max Planck Gesellschaft zur Foerderung der Wissenschaften eV
Georg August Universitaet Goettingen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Max Planck Gesellschaft zur Foerderung der Wissenschaften eV, Georg August Universitaet Goettingen filed Critical Max Planck Gesellschaft zur Foerderung der Wissenschaften eV
Publication of EP1902457A1 publication Critical patent/EP1902457A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0431—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for liquid samples

Definitions

  • the invention relates to a nozzle arrangement for dispensing a fluid, in particular for the injection of the fluid into a vacuum chamber, according to the preamble of the main claim.
  • the problem with the SLICED technology is the fact that the slice consisting of the analyte widen over time in the liquid jet in the longitudinal direction of the liquid jet, which leads to a dilution of the analyte.
  • the unwanted broadening of the slices from the analyte increases with the volume that flows through the nozzle assembly until it is expelled.
  • DE 198 22 674 A1 discloses a nozzle arrangement for injecting a fluid into a vacuum chamber, which can be used for example in a mass spectrometer.
  • This known nozzle arrangement has a nozzle body, which can be made of glass, quartz or stainless steel, for example, and accommodates a supply capillary.
  • the inner diameter of the nozzle body is, however, greater than the outer diameter of the Zu effetskapillare, so that between the nozzle body and the Zu effetskapillare an annular gap through which a collision gas (eg argon or air) can be supplied while fed via the Zu effetskapillare an analyte gas stream becomes.
  • the supply capillary is thus not guided by the surrounding nozzle body.
  • the invention is therefore based on the object to improve the initially described known nozzle arrangement for Vakuumein- injection accordingly.
  • the invention therefore comprises the general technical teaching to reduce the dead volume in the known nozzle arrangement described above.
  • dead volume used in the context of the invention preferably means the entire volume through which the liquid to be injected flows through within the nozzle arrangement.
  • the nozzle arrangement according to the invention has a nozzle body with a continuous nozzle channel and a nozzle opening formed on the output side for discharging the fluid and has a supply capillary running coaxially with the nozzle channel for supplying the fluid to be injected.
  • the minimization of the dead volume in the nozzle arrangement according to the invention is achieved in that the feed capillary is guided in the direction of flow into the nozzle channel of the nozzle body. Therefore, the fluid to be injected preferably passes in the nozzle arrangement only a single component transition from the supply capillary to the nozzle body, resulting in a correspondingly smaller dead volume than in the known nozzle arrangement described above.
  • the dead volume of the nozzle arrangement according to the invention is therefore smaller than 50 ⁇ l, 10 ⁇ l, 5 ⁇ l, 2 ⁇ l, 1 ⁇ l or even less than 0.6 ⁇ l.
  • the nozzle arrangement according to the invention has a sealing body with a continuous channel, which is coaxial with the located in the nozzle body nozzle channel and the Zu effetskapillare and is passed through the in the assembled state, the Zu effetskapillare.
  • the supply capillary is guided through the sealing body and protrudes as far as possible into the nozzle channel of the nozzle body, so that a small dead volume remains in the nozzle channel of the nozzle body between the exit-side end of the supply capillary and the nozzle opening.
  • the sealing body on the output side preferably has a coaxial receiving bore, which receives the nozzle body at least partially in the mounted state.
  • the receiving bore is in this case arranged in the output-side end face of the seal body and preferably hollow cylindrical, so that the preferably likewise cylindrically shaped nozzle body can simply be inserted axially into the receiving bore of the seal body.
  • the nozzle arrangement according to the invention preferably has a nozzle tube, which at least partially accommodates the nozzle body and / or the sealing body in the mounted state, the nozzle tube having an external thread onto which a screw cap arranged on the output side can be screwed with an internal thread.
  • the screw connection of the screw cap to the nozzle tube in this case allows axial clamping of the sealing body in the screw connection formed by the nozzle tube and the screw cap.
  • the sealing body preferably has an outer contour on the output side, which tapers in the flow direction, while the screw cap on the input side has an inner contour which tapers in the flow direction.
  • the screw cap preferably has an approach for a screwing.
  • the approach for the screwing tool can be, for example, a radial bore arranged in the screw cap into which a pin can be inserted radially in order to screw the screw cap tight.
  • the screw cap may also have a key surface, so that the
  • Screw cap can be tightened with a conventional wrench.
  • the nozzle tube preferably has an inner contour which narrows in the direction of flow and carries an internal thread.
  • this internal thread can be screwed a plastic squeeze with an external thread and a continuous channel for carrying the Zu effetskapillare.
  • the nozzle tube preferably consists of an input-side tube element with an external thread and an outlet-side tube element with an internal thread, wherein the two tube elements are screwed together in the mounted state.
  • the sealing body on the input side has an outer contour, which tapers counter to the flow direction and / or the input-side tube element of the nozzle tube has on the output side an inner contour, which widens in the flow direction.
  • This has the consequence that the sealing body is axially pressed against the inlet-side tube element of the nozzle tube during the screwing of the screw cap with the nozzle tube, which leads to a wedge-pressing effect due to the design of inner and outer contour.
  • the nozzle tube in the nozzle arrangement according to the invention preferably also has an attachment for a screwing tool, which is preferably a wrench surface located on the outside of the nozzle tube, which allows mounting with a conventional wrench.
  • the nozzle body In the mounted state, the nozzle body preferably projects axially beyond the screw cap through a central bore located in the screw cap in the flow direction.
  • the nozzle tube and / or the screw cap are preferably made of stainless steel
  • the supply capillary, the compression fitting and / or the sealing body are preferably made of plastic
  • the nozzle body is preferably made of quartz, sapphire or glass.
  • the plastic sealing body preferably prevents direct physical contact between the quartz, sapphire or glass dome. senkorper and the existing stainless steel Dusenrohr or the screw cap, since such a material transfer of quartz, sapphire or glass to stainless steel would be very susceptible to wear.
  • the choice of quartz, sapphire or glass as the material for the Dusenkorper leads advantageously to a long life.
  • a further advantage of glass as a material for the nozzle body is its good processing capability, since outlet openings with an internal diameter of 1 ⁇ m to 1 mm can be easily realized.
  • the invention is not limited to the materials mentioned above with regard to the material of the nozzle body, but can also be realized, for example, with a plastic nozzle body, provided that the plastic used is sufficiently resistant to erosion and smooth.
  • the Dusenkorper consists of a transparent material, such as glass.
  • the transparency of the Dusenkorpers offers the advantage that bubbles or dirt in the Dusenkanal can be detected by a simple visual inspection, whereby the troubleshooting is much easier.
  • the supply capillary preferably has an inner diameter of between 0.1 mm and 1.5 mm, wherein an inner diameter of 0.130 mm has proven to be advantageous.
  • the nozzle opening preferably has an inner diameter which is in the range from 1 ⁇ m to 0.5 mm, with any intermediate values within this value range being possible.
  • the invention is not limited to the above-mentioned value ranges with regard to the inner diameter of the nozzle opening or the supply capillary, but in principle can also be realized with other values.
  • the nozzle arrangement according to the invention preferably has a compressive strength of at least 100 bar in order to be able to inject a fluid jet into a vacuum chamber.
  • the supply capillary tapers at its output end in the flow direction. This makes it possible to further push the supply capillary in the direction of flow into the nozzle channel of the nozzle body, although the nozzle channel tapers in the region of the nozzle opening. As a result, the dead volume in the nozzle channel of the nozzle body is reduced between the outlet-side mouth opening of the feed capillary and the nozzle opening, since the feed capillary can be pushed further into the nozzle channel due to the taper.
  • the invention also includes the use of a nozzle arrangement according to the invention for injecting a fluid into a vacuum chamber.
  • the present description therefore also includes the examination method or the examination device described in the European patent application 04030063.4, so that the content of this patent application is to be fully attributed to the present description.
  • Figure Ia is a cross-sectional view of an inventive
  • FIG. 1 b shows a side view of the nozzle arrangement according to the invention from FIG. 1 a
  • FIG. 1 c shows an exploded perspective view of the nozzle arrangement according to the invention from FIGS. 1 a and 1 b,
  • FIG. 1 d shows a perspective view of the nozzle arrangement according to the invention from FIGS. 1 a - 1 c in the mounted state and FIG
  • Figure 2 is a cross-sectional view of the end of the nozzle body of the nozzle assembly of Figures Ia-Id.
  • the drawings show an embodiment of a nozzle arrangement 1 according to the invention, which makes it possible to inject a very thin liquid jet as a target for physical-chemical investigations in a high vacuum.
  • the nozzle arrangement 1 consists essentially of a nozzle body 2, a sealing body 3, a nozzle pipe consisting of two pipe elements 4, 5, a screw cap 6, a compression fitting 7 and a supply capillary 8, the structure and operation of which will be described below.
  • PEEK polyetheretherketone
  • the nozzle body 2 consists in this embodiment of quartz glass, because quartz glass as a material for the nozzle body 2 has a good processing capability.
  • quartz glass is transparent, so that bubbles or soiling can be detected by a simple visual inspection, which considerably simplifies troubleshooting.
  • the nozzle body 2 includes a through orifice passage 9 a, as shown in figure 2, wherein the nozzle channel 9 the outlet side opens into a nozzle opening '10 through which the fluid jet is emitted.
  • the nozzle body has a convex outer contour 11 and a concave inner contour 12 with a parabolic shape, which is particularly favorable in terms of flow when injecting a liquid jet into a high vacuum, as already explained in the patent application DE 103 08 299 A1.
  • the design of the inner contour 11 and the outer contour 12 and the nozzle opening 10 reference is made to the patent application DE 103 08 299 A1, the contents of which are attributed to the present description to the full extent to avoid repetition.
  • the supply capillary 8 is guided in the flow direction into the nozzle channel 9 of the nozzle body 2, so that the liquid to be injected has to pass only a single component transition from the supply capillary 8 to the nozzle body 2, whereby the dead volume is reduced.
  • the feed capillary 8 is guided as far as possible into the nozzle channel 9 of the nozzle body 2 as far as possible to the nozzle opening 10 in order to minimize the dead volume between the outlet-side mouth opening of the feed capillary 8 and the nozzle opening 10. In this embodiment, this dead volume is therefore smaller than 0.6 ⁇ l.
  • the extensive introduction of the Zu effetskapillare 8 in the nozzle channel 9 of the nozzle body 2 is made possible • that the Zu effetskapillare 8 at its output end has an outer contour which tapers in the flow direction, so that the Zu effetskapillare 8 in the flow direction further into the also tapered nozzle channel 9 of the nozzle body 2 can be pushed in, whereby the dead volume is further reduced.
  • the essentially cylindrical nozzle body 2 is inserted into a hollow cylindrical receiving bore, which is located in the outlet-side end face of the sealing body 3.
  • the sealing body 3 is in turn inserted into the tubular element 5, which is bolted to the tubular element 4, wherein the tubular element 4 carries an external thread on the output side, while the tubular element 3 on the input side carries a correspondingly adapted internal thread.
  • the tube element 5 on the output side an external irrig., a correspondingly adapted internal thread of the screw cap 6 can be screwed.
  • an axial tension between the tube element 5 and the screw cap 6 takes place.
  • the sealing leads to a radial contact force of the screw cap 6 on the sealing body 3, since the sealing body 3 on the output side has an outer contour which tapers in the flow direction, while the screw cap 6 has an inner contour which tapers in the flow direction, so that due to the interaction of the outer and inner contour of the sealing body 3 and the screw cap 6, a wedge-pressing effect arises.
  • the two tubular elements 4, 5 and the screw cap 6 in this case made of stainless steel, wherein the plastic sealing body 3 prevents a direct physical contact between the screw cap 6 and consisting of quartz glass nozzle body 2, since such a material pairing would be mechanically very susceptible to wear.
  • the screw cap 6 has a radial bore 13 into which a mounting pin can be inserted in order to screw the screw cap 6 to the tubular element 5.
  • the tubular element 5 For screwing the tubular element 5 to the tubular element 4, the tubular element 5 has on its outer side a key surface 14, so that the screwing of the tubular element 5 can be made with the tubular element 4 by means of a conventional ringen expectis.
  • the tubular element 4 At its input end, the tubular element 4 has an inner contour which tapers in the direction of flow.
  • the tube element 4 has an internal thread into which an external thread of the compression fitting 7 can be screwed, so that the compression fitting 7 strikes against the tapering in the flow direction inner contour of the tubular element 4 when screwed, resulting in a radially oriented pressing force.
  • the invention is not limited to the above preferred embodiment. Rather, a multiplicity of variants and modifications is possible, which likewise make use of the idea of the invention and therefore fall within the scope of protection.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Nozzles (AREA)
  • Coating Apparatus (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

L'invention concerne un système de buses (1) pour délivrer un fluide, notamment pour injecter ledit fluide dans une chambre à vide, comprenant un corps de buse (2) avec un canal d'écoulement (9) traversant et un orifice de buse (10) formé côté sortie, pour délivrer un fluide, ainsi qu'un capillaire d'alimentation (8) s'étendant coaxialement au canal d'écoulement (9), pour acheminer le fluide à injecter. Il est prévu que le capillaire d'alimentation (8) soit guidé, dans le sens d'écoulement, jusqu'à l'intérieur du canal d'écoulement (9) du corps de buse (2), pour réduire le volume mort.
EP06776162A 2005-07-14 2006-07-07 Systeme de buses Withdrawn EP1902457A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005032983A DE102005032983B4 (de) 2005-07-14 2005-07-14 Düsenanordnung
PCT/EP2006/006677 WO2007006509A1 (fr) 2005-07-14 2006-07-07 Systeme de buses

Publications (1)

Publication Number Publication Date
EP1902457A1 true EP1902457A1 (fr) 2008-03-26

Family

ID=36940069

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06776162A Withdrawn EP1902457A1 (fr) 2005-07-14 2006-07-07 Systeme de buses

Country Status (4)

Country Link
US (1) US20080308644A1 (fr)
EP (1) EP1902457A1 (fr)
DE (1) DE102005032983B4 (fr)
WO (1) WO2007006509A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011010328A1 (de) 2011-02-04 2012-08-09 GAUSS Instruments GmbH EMV Messsystem mit Erkennung der Übersteuerung von Vorverstärkern
CN103472243B (zh) * 2012-06-06 2016-08-03 北京普源精仪科技有限责任公司 一种自动进样器及取样针
US11259394B2 (en) 2019-11-01 2022-02-22 Kla Corporation Laser produced plasma illuminator with liquid sheet jet target
US11272607B2 (en) 2019-11-01 2022-03-08 Kla Corporation Laser produced plasma illuminator with low atomic number cryogenic target

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US184776A (en) * 1876-11-28 Improvement in mucilage-holders
DE951779C (de) * 1953-10-21 1956-10-31 Siemens Ag Duese fuer Strahlschreiber
US3750961A (en) * 1971-07-16 1973-08-07 N Franz Very high velocity fluid jet nozzles and methods of making same
JPS583592B2 (ja) * 1978-09-08 1983-01-21 日本分光工業株式会社 質量分析計への試料導入方法及び装置
US4865444A (en) * 1984-04-05 1989-09-12 Mobil Oil Corporation Apparatus and method for determining luminosity of hydrocarbon fuels
US5152462A (en) * 1990-08-10 1992-10-06 Roussel Uclaf Spray system
FR2667254B1 (fr) * 1990-09-27 1992-10-30 Commissariat Energie Atomique Nebuliseur pneumatique.
US5601785A (en) * 1991-12-23 1997-02-11 Microsensor Technology, Inc. Connector for detachable column cartridge for gas chromatograph
JP3303217B2 (ja) * 1993-01-28 2002-07-15 ノードソン株式会社 二流体による二段式液滴吐出又はそれによる造粒、塗布の各方法及びそれらのノズル組立体
DE9402809U1 (de) * 1994-02-21 1994-05-19 Trinkaus Hans Düse zum Versprühen von Kühl-/Schmiermitteln mit eingepreßter Schlauchzuleitung
US5868322A (en) * 1996-01-31 1999-02-09 Hewlett-Packard Company Apparatus for forming liquid droplets having a mechanically fixed inner microtube
US6792940B2 (en) * 1996-05-13 2004-09-21 Universidad De Sevilla Device and method for creating aerosols for drug delivery
DE19822674A1 (de) * 1998-05-20 1999-12-09 Gsf Forschungszentrum Umwelt Gaseinlaß für eine Ionenquelle
US6605472B1 (en) * 1998-10-09 2003-08-12 The Governors Of The University Of Alberta Microfluidic devices connected to glass capillaries with minimal dead volume
DE10308299A1 (de) * 2003-02-26 2004-09-16 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Düsenanordnung
JP2007511746A (ja) * 2003-05-29 2007-05-10 アップチャーチ・サイエンティフィック・インコーポレイテッド エレクトロスプレー用途のための改良した装置および方法
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Title
See references of WO2007006509A1 *

Also Published As

Publication number Publication date
DE102005032983A1 (de) 2007-01-25
WO2007006509A1 (fr) 2007-01-18
US20080308644A1 (en) 2008-12-18
DE102005032983B4 (de) 2007-05-31

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