EP1869625A2 - Multi-layer composite body having an electronic function - Google Patents

Multi-layer composite body having an electronic function

Info

Publication number
EP1869625A2
EP1869625A2 EP06723879A EP06723879A EP1869625A2 EP 1869625 A2 EP1869625 A2 EP 1869625A2 EP 06723879 A EP06723879 A EP 06723879A EP 06723879 A EP06723879 A EP 06723879A EP 1869625 A2 EP1869625 A2 EP 1869625A2
Authority
EP
European Patent Office
Prior art keywords
components
multilayer composite
composite body
layers
common
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06723879A
Other languages
German (de)
French (fr)
Inventor
Andreas Ullmann
Alexander Knobloch
Merlin Welker
Walter Fix
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PolyIC GmbH and Co KG
Original Assignee
PolyIC GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PolyIC GmbH and Co KG filed Critical PolyIC GmbH and Co KG
Publication of EP1869625A2 publication Critical patent/EP1869625A2/en
Withdrawn legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/16Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06KGRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K19/00Record carriers for use with machines and with at least a part designed to carry digital markings
    • G06K19/06Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code
    • G06K19/067Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components
    • G06K19/07Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components with integrated circuit chips
    • G06K19/077Constructional details, e.g. mounting of circuits in the carrier
    • G06K19/07718Constructional details, e.g. mounting of circuits in the carrier the record carrier being manufactured in a continuous process, e.g. using endless rolls
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06KGRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K19/00Record carriers for use with machines and with at least a part designed to carry digital markings
    • G06K19/06Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code
    • G06K19/067Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components
    • G06K19/07Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components with integrated circuit chips
    • G06K19/077Constructional details, e.g. mounting of circuits in the carrier
    • G06K19/07749Constructional details, e.g. mounting of circuits in the carrier the record carrier being capable of non-contact communication, e.g. constructional details of the antenna of a non-contact smart card
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K19/00Integrated devices, or assemblies of multiple devices, comprising at least one organic element specially adapted for rectifying, amplifying, oscillating or switching, covered by group H10K10/00
    • H10K19/202Integrated devices comprising a common active layer
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0393Flexible materials
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10007Types of components
    • H05K2201/10166Transistor
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10007Types of components
    • H05K2201/10174Diode
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K19/00Integrated devices, or assemblies of multiple devices, comprising at least one organic element specially adapted for rectifying, amplifying, oscillating or switching, covered by group H10K10/00
    • H10K19/10Integrated devices, or assemblies of multiple devices, comprising at least one organic element specially adapted for rectifying, amplifying, oscillating or switching, covered by group H10K10/00 comprising field-effect transistors

Definitions

  • the invention relates to a multilayer composite body with electronic function, in particular an electronic assembly comprising a plurality of organic electronic components.
  • Electronic components are known, for example from WO 02/15264.
  • an electronic device is fabricated by sequentially depositing the various functional layers (conductive, semiconducting, insulating, and again conducting layers) on a substrate.
  • Several electronic components can be combined on a board, as described for example in DE 101 51 440 C1.
  • a disadvantage of the assemblies currently used is that for a more complex assembly, a plurality of individual components individually and sequentially prepared, electrically connected and arranged must be. This requires various costly work and process steps.
  • Object of the present invention is to provide a structure for an assembly available that is simple, mass production suitable and inexpensive to implement and in which a variety of essential electronic components, ie active and passive components alike, as a transistor, field-effect transistor , electrical contact, resistance, conductor resistance, coil, capacitor, Rectifier or the like can be combined as desired and in particular with a diode.
  • essential electronic components ie active and passive components alike, as a transistor, field-effect transistor , electrical contact, resistance, conductor resistance, coil, capacitor, Rectifier or the like can be combined as desired and in particular with a diode.
  • the invention relates to a multilayer composite body, comprising at least two different electronic components, which are common at least two, each applied in one operation layers, which may be homogeneous or structured.
  • one of the layers that is common to the components of the composite according to the invention is a homogeneous or structured semiconducting layer and / or another, for example also a layer, which may not be structured due to its high viscosity during application.
  • all components of the composite body so different components and any number thereof, simultaneously and on the same substrate, for example in a continuous process, produced.
  • some components include layers that have no functionality in the device.
  • the carrier layer ie the substrate common to all the components.
  • all components of a multilayer composite body are built up of contiguous layers, wherein some of the layers are structured and again other homogeneous layers are homogeneous. These layers are produced simultaneously for all the components present in the composite body and, if appropriate, structured suitably for the respective component.
  • the multilayer composite body assemblies are preferably realized, in which at least one diode and another different component are included.
  • Realized rectifier wherein at least two different components, a diode and a capacitance in the composite body are present.
  • a complex rectifier can also be realized in the multilayer composite body if at least three different components, at least two diodes, a capacitance and through-contact are contained in the assembly forming the composite body.
  • the multilayer composite body has, for example, at least three different components, a diode, a capacitance and a transistor.
  • At least four different components are used to construct a transponder in the multilayer composite body.
  • the multilayer composite body can in principle contain all sorts of components such as transistor, field-effect transistor, electrical contact, resistance, conductor resistance, coil, capacitor, rectifier or the like as often as desired and in particular with one or more diode (s) in combination.
  • components such as transistor, field-effect transistor, electrical contact, resistance, conductor resistance, coil, capacitor, rectifier or the like as often as desired and in particular with one or more diode (s) in combination.
  • the multilayer composite body in the two conductive layers has two different - with respect to their work function - different materials.
  • the conductive layer which is in contact with the semiconducting layer is made of silver and the material of the counterelectrode is then a material with different work function, in particular a base material such as copper, nickel, chromium, cobalt or the like.
  • all components be prepared by four structured layers and their well-thought superimposition in a manufacturing process.
  • the typical structure seen from bottom to top, is the sequence substrate, conductive layer, semiconducting layer, insulating layer and upper, conductive layer.
  • a "bottom-up" layer sequence is also conceivable and encompassed by the inventive idea.
  • the two conductive layers of the composite body are made of different materials, which in particular have different work function or different Fermi level.
  • This is realized for example by the use of metallic layers of two dissimilar metals and / or alloys.
  • Particularly preferred is the use of silver as an electrode adjacent to the semiconducting layer, in particular as a conductive layer in contact with the semiconductor layer and another metal / alloy with a work function different from silver as counterelectrode.
  • FIG. 1 shows a schematic cross section through a fully integrated printable electronics, such as is required for a complete transponder circuit.
  • FIG. 2 again shows all the components which can also be seen in FIG. 1, but here the semiconductive layer at the location of the diode is not drawn to the level of the upper electrode of the other components, but the upper electrode of the diode is deeper here placed.
  • FIG. 3 shows a structure for the voltage supply, in which case the components diode, capacitor and through contact are produced simultaneously on a substrate.
  • FIG. 4 shows a composite body which has an electrical
  • the substrate 1 can be seen below.
  • insulating materials with a smooth surface can be used, flexible and rigid materials can equally be used.
  • flexible films such as PET film or other polymer plastic films, glass, quartz, ceramic or other are used in place.
  • the layer 2 following the substrate 1 is the first conductive layer or the lower electrode 2, which is applied in a structured manner.
  • the source and drain electrodes are produced here, which are covered by the following semiconductor layer.
  • the conductive layer 2 only conductive materials can be used, it is immaterial whether it is organic or inorganic or a composite material.
  • the work function is adjusted to the Fermi level of the semiconductor so that the difference to the Fermi level of the Semiconductor is preferably 0.3 eV or less. Then it is ensured that the charge carriers pass smoothly from the semiconducting material into the conducting one.
  • the first and lower electrode layers are followed by the semiconducting layer 3, which may be applied unstructured because of its viscosity.
  • Preferred materials for the semiconducting layer are organic materials such as P3AT, P3DHTT, regioregular polyalkylthiophenes, polyfluorene derivatives, PPVs, in general and / or other polymers, for example with a conjugated main chain or a freely mobile one
  • Electron pair in the main chain used.
  • the semiconductive layer 3 can also be applied structured by printing, for example.
  • the insulating layer 4 is made of, for example, soluble printable material.
  • materials for the insulating layer organic, soluble materials such as e.g. Polystyrene derivatives, PMMA or generally insulating polymers used.
  • the structured insulating layer 4 is followed by an upper conductive layer 5, which in turn is preferably structured.
  • conductive organic and inorganic materials and / or composite materials are used. Particular preference is given to using metals whose work function differs from that of the material of the lower conductive layer (counterelectrode).
  • materials are used whose work function in the range of 3 to 5 eV, in particular from 3.0 eV to 4.6 eV or more, for example, is here copper, nickel, chromium, cobalt, manganese, etc. successfully used.
  • the following components are now realized on the substrate 1 of FIG.
  • FIG. 2 again shows all the components and all layers which can also be seen in FIG. 1, but here the semiconductive layer 3 at the location of the diode c does not become electrical through-contact up to the level of the upper electrode 5 of the other components a, transistor b, capacitor d and resistor e pulled, but the upper electrode 5 of the diode c is here deeper, to the level of the insulating layer 4, set.
  • layer 1 is the substrate, layer 2, a conductive layer and 3 the semiconductor layer, 4 the insulating layer and 5 the counter-electrode, which in turn is structured.
  • the sequence of components is provided as follows: far left outside is the through-hole 1, next to the diode c and subsequent to the diode c, the capacitor d.
  • the composite body shown here can rectify the alternating voltage originating from an antenna.
  • the semiconductor is slightly thicker in the diode region c applied, which can be achieved for example via a at a simultaneous production of the components by a decor pressure.
  • FIG. 4 shows a multilayer composite body which combines an electrical contact, a transistor and a resistor or a coil.
  • this layer structure and this arrangement of the components electrical contact a, transistor b, and resistor or coil e at least PFETs (polymer field effect transistor), inverters, ring oscillators, flip-flops, frequency dividers and / or counters can be constructed.
  • PFETs polymer field effect transistor
  • the layer structure again corresponds to that known from the other figures. Although no diode is realized here, the conductive material of the upper electrode 5 and the lower electrode 2 may be quite different, especially in terms of its work function.
  • the encapsulation and / or sealing of the components which may comprise a wide variety of materials and / or laminates, is still recommended as topmost layer or finish.
  • the encapsulation / seal may be made of a rigid or flexible material.
  • the essential components of electronic devices can be produced side by side and / or in succession on a substrate by continuously applied and / or structured layers, such as transistor, field effect transistor, electrical contact, resistance, track resistance, inductance, diode, capacitor and rectifiers are realized.
  • the gate electrode Due to the cost-effective and mass production suitable production of all components of the assembly at the same time and in a continuous process can be contained in individual components layers that have no special function there, for example, in a field effect transistor and / or in a capacitor, the gate electrode have a work function different from the source / drain electrode, wherein the difference of the work function here has no functionality.
  • a semiconductor is present, which is unnecessary at the site and not functional.
  • the essential components of complex electronic devices can be produced side by side and / or one after another on a substrate by continuously applied and / or structured layers, such as field effect transistor, electrical contact, resistance, conductor resistance, coil, Diode, capacitor and rectifier.
  • the invention opens up for the first time a possibility for a structure of an entire assembly such as an RFID tag, wherein the entire day can be realized with all components in a manufacturing process. As a result, a cost-effective and mass production suitable manufacturing method is described for the first time.

Abstract

The invention relates to a multi-layer composite body having an electronic function, especially an electronic subassembly which comprises a plurality of electroorganic components. The invention allows to construct an entire subassembly such as an RFID tag, whereby the entire tag and all its components can be produced in a single process.

Description

Mehrschichtiger Verbundkörper mit elektronischer FunktionMultilayer composite body with electronic function
Die Erfindung betrifft einen mehrschichtigen Verbundkörper mit elektronischer Funktion, insbesondere eine elektronische Baugruppe, welche mehrere organische elektronische Bauelemente umfasst.The invention relates to a multilayer composite body with electronic function, in particular an electronic assembly comprising a plurality of organic electronic components.
Bekannt sind elektronische Bauelemente, beispielsweise aus der WO 02/15264. In der Regel wird ein elektronisches Bauelement durch aufeinander folgendes Aufbringen der diversen funktionellen Schichten (leitende, halbleitende, isolierende und wiederum leitende Schicht) auf einem Substrat hergestellt. Mehrere elektronische Bauelemente können auf einer Platine kombiniert werden, wie beispielsweise in der DE 101 51 440 C1 beschrieben.Electronic components are known, for example from WO 02/15264. Typically, an electronic device is fabricated by sequentially depositing the various functional layers (conductive, semiconducting, insulating, and again conducting layers) on a substrate. Several electronic components can be combined on a board, as described for example in DE 101 51 440 C1.
Nachteilig an den derzeit verwendeten Baugruppen ist, dass für eine komplexere Baugruppe eine Vielzahl einzelner Komponenten einzeln und nacheinander hergestellt, elektrisch leitend verbunden und angeordnet werden müssen. Dazu sind verschiedene kostspielige Arbeits- und Prozessschritte nötig.A disadvantage of the assemblies currently used is that for a more complex assembly, a plurality of individual components individually and sequentially prepared, electrically connected and arranged must be. This requires various costly work and process steps.
Aufgabe der vorliegenden Erfindung ist es, einen Aufbau für eine Baugruppe zur Verfügung zu stellen, der einfach, massenfertigungstauglich und kostengünstig realisierbar ist und in dem eine Vielzahl essentieller elektronischer Bauelemente, also aktive und passive Komponenten gleichermaßen, wie ein Transistor, Feld-Effekt-Transistor, elektrischer Durchkontakt, Widerstand, Leiterbahnwiderstand, Spule, Kondensator, Gleichrichter oder ähnliches beliebig und insbesondere mit einer Diode kombinierbar sind.Object of the present invention is to provide a structure for an assembly available that is simple, mass production suitable and inexpensive to implement and in which a variety of essential electronic components, ie active and passive components alike, as a transistor, field-effect transistor , electrical contact, resistance, conductor resistance, coil, capacitor, Rectifier or the like can be combined as desired and in particular with a diode.
Gegenstand der Erfindung ist ein mehrschichtiger Verbundkörper, zumindest zwei unterschiedliche elektronische Bauelemente umfassend, denen zumindest zwei, jeweils in einem Arbeitsgang aufgebrachte Schichten, die homogen oder strukturiert sein können, gemeinsam sind.The invention relates to a multilayer composite body, comprising at least two different electronic components, which are common at least two, each applied in one operation layers, which may be homogeneous or structured.
Beispielsweise ist eine der Schichten, die den Bauelementen des Verbundkörpers nach der Erfindung gemeinsam ist, eine homogene oder strukturierte halbleitende und/oder eine andere, beispielsweise auch eine, unter Umständen wegen ihrer hohen Viskosität bei der Aufbringung nicht strukturierte, Schicht.For example, one of the layers that is common to the components of the composite according to the invention is a homogeneous or structured semiconducting layer and / or another, for example also a layer, which may not be structured due to its high viscosity during application.
Nach einer vorteilhaften Ausgestaltung der Erfindung werden alle Bauelemente des Verbundkörpers, also verschiedene Bauelemente und eine beliebige Anzahl davon, gleichzeitig und auf dem gleichen Substrat, beispielsweise in einem kontinuierlich ablaufenden Prozess, hergestellt. Dadurch kommt es vor, dass einige Bauelemente Schichten umfassen, die in dem Bauelement keine Funktionalität besitzen.According to an advantageous embodiment of the invention, all components of the composite body, so different components and any number thereof, simultaneously and on the same substrate, for example in a continuous process, produced. As a result, some components include layers that have no functionality in the device.
Ebenfalls bevorzugt ist eine der zumindest zwei, aber grundsätzlich auch fünf oder mehr Schichten, die den Bauelementen des Verbundkörpers gemeinsam ist, die Trägerschicht, also das allen Bauelementen gemeinsame Substrat.Likewise preferred is one of the at least two, but in principle also five or more layers, which is common to the components of the composite body, the carrier layer, ie the substrate common to all the components.
Nach einer bevorzugten Ausführungsform werden alle Bauelemente eines mehrschichtigen Verbundkörpers aus zusammenhängenden Schichten aufgebaut, wobei einige der Schichten strukturiert und wieder andere durchgehend homogene Schichten sind. Diese Schichten werden für alle, in dem Verbundkörper vorhandenen, Bauelemente gleichzeitig hergestellt und gegebenenfalls passend für das jeweilige Bauelement strukturiert. Mit dem mehrschichtigen Verbundkörper werden bevorzugt Baugruppen realisiert, in denen zumindest eine Diode und ein weiteres unterschiedliches Bauelement enthalten sind.According to a preferred embodiment, all components of a multilayer composite body are built up of contiguous layers, wherein some of the layers are structured and again other homogeneous layers are homogeneous. These layers are produced simultaneously for all the components present in the composite body and, if appropriate, structured suitably for the respective component. With the multilayer composite body assemblies are preferably realized, in which at least one diode and another different component are included.
Beispielsweise wird als mehrschichtiger Verbundkörper ein einfacherFor example, as a multilayer composite, it becomes easier
Gleichrichter realisiert, wobei zumindest zwei unterschiedliche Bauelemente, eine Diode und eine Kapazität im Verbundkörper vorhanden sind.Realized rectifier, wherein at least two different components, a diode and a capacitance in the composite body are present.
Auch ein komplexer Gleichrichter kann in dem mehrschichtigen Verbundkörper realisiert sein, wenn mindestens drei unterschiedliche Bauelemente, zumindest zwei Dioden, eine Kapazität und Durchkontakt in der Baugruppe, die den Verbundkörper bildet, enthalten sind.A complex rectifier can also be realized in the multilayer composite body if at least three different components, at least two diodes, a capacitance and through-contact are contained in the assembly forming the composite body.
Zum Aufbau eines einfachen Gleichrichters mit Modulator hat der mehrschichtige Verbundkörper beispielsweise mindestens drei verschiedene Bauelemente, eine Diode, eine Kapazität und einen Transistor.To construct a simple rectifier with modulator, the multilayer composite body has, for example, at least three different components, a diode, a capacitance and a transistor.
Schließlich kommen zum Aufbau eines Transponders bei dem mehrschichtigen Verbundkörper mindestens vier unterschiedliche Bauelemente vor, eine Diode, eine Kapazität, ein Transistor und ein oder mehrere Durchkontakte.Finally, at least four different components, a diode, a capacitor, a transistor and one or more vias, are used to construct a transponder in the multilayer composite body.
Der mehrschichtige Verbundkörper kann grundsätzlich alle möglichen Bauelemente wie Transistor, Feld-Effekt-Transistor, elektrischer Durchkontakt, Widerstand, Leiterbahnwiderstand, Spule, Kondensator, Gleichrichter oder ähnliches beliebig oft und insbesondere mit einer oder mehreren Diode(n) kombinierbar enthalten.The multilayer composite body can in principle contain all sorts of components such as transistor, field-effect transistor, electrical contact, resistance, conductor resistance, coil, capacitor, rectifier or the like as often as desired and in particular with one or more diode (s) in combination.
Bevorzugt hat der mehrschichtige Verbundkörper bei den beiden leitenden Schichten zwei - hinsichtlich ihrer Austrittsarbeit - verschiedene Materialien. Dabei ist es insbesondere bevorzugt, dass die leitende Schicht, die in Kontakt mit der halbleitenden Schicht ist, aus Silber ist und das Material der Gegenelektrode dann ein Material mit verschiedener Austrittsarbeit, insbesondere ein unedleres Material wie beispielsweise Kupfer, Nickel, Chrom, Cobalt oder ähnliches ist.Preferably, the multilayer composite body in the two conductive layers has two different - with respect to their work function - different materials. In this case, it is particularly preferred that the conductive layer which is in contact with the semiconducting layer is made of silver and the material of the counterelectrode is then a material with different work function, in particular a base material such as copper, nickel, chromium, cobalt or the like.
Bei der Herstellung der Baugruppe ist es besonders bevorzugt, dass alle Bauelemente durch vier strukturierte Schichten und deren gut durchdachte Überlagerung in einem Herstellungsprozess herzustellen sind.In the manufacture of the assembly, it is particularly preferred that all components be prepared by four structured layers and their well-thought superimposition in a manufacturing process.
Der typische Aufbau, von unten nach oben gesehen, ist dabei die Abfolge Substrat, leitfähige Schicht, halbleitende Schicht, isolierende Schicht und obere, leitfähige Schicht. Eine „bottom-up" Schichtabfolge ist auch denkbar und vom Erfindungsgedanken mit umfasst.The typical structure, seen from bottom to top, is the sequence substrate, conductive layer, semiconducting layer, insulating layer and upper, conductive layer. A "bottom-up" layer sequence is also conceivable and encompassed by the inventive idea.
Dabei ist es besonders bevorzugt, dass die beiden leitfähigen Schichten des Verbundkörpers aus verschiedenen Materialien, die insbesondere unterschiedliche Austrittsarbeit oder unterschiedliches Fermi - Niveau haben, gemacht sind. Dies wird beispielsweise durch die Verwendung metallischer Schichten aus zwei ungleichen Metallen und/oder Legierungen, realisiert. Insbesondere bevorzugt ist dabei die Verwendung von Silber als an die halbleitende Schicht angrenzende Elektrode, insbesondere als leitfähige Schicht in Kontakt mit der Halbleiterschicht und einem anderen Metall/einer anderen Legierung mit einer von Silber verschiedenen Austrittsarbeit als Gegenelektrode.In this case, it is particularly preferred that the two conductive layers of the composite body are made of different materials, which in particular have different work function or different Fermi level. This is realized for example by the use of metallic layers of two dissimilar metals and / or alloys. Particularly preferred is the use of silver as an electrode adjacent to the semiconducting layer, in particular as a conductive layer in contact with the semiconductor layer and another metal / alloy with a work function different from silver as counterelectrode.
Im Folgenden wird die Erfindung noch anhand von 4 Zeichnungen, die bevorzugte Ausführungsformen der Erfindung schematisch wiedergeben, näher erläutert.In the following, the invention will be explained in more detail with reference to 4 drawings, which schematically illustrate preferred embodiments of the invention.
Figur 1 zeigt einen schematischen Querschnitt durch eine voll integrierte druckbare Elektronik, wie sie z.B. für eine vollständige Transponderschaltung benötigt wird. Figur 2 zeigt noch einmal alle Bauelemente, die auch in Figur 1 zu sehen sind, allerdings wird hier die halbleitende Schicht an der Stelle der Diode nicht bis auf das Niveau der oberen Elektrode der anderen Bauelemente gezogen, sondern die obere Elektrode der Diode ist hier tiefer gelegt.Figure 1 shows a schematic cross section through a fully integrated printable electronics, such as is required for a complete transponder circuit. FIG. 2 again shows all the components which can also be seen in FIG. 1, but here the semiconductive layer at the location of the diode is not drawn to the level of the upper electrode of the other components, but the upper electrode of the diode is deeper here placed.
Figur 3 zeigt einen Aufbau zur Spannungsversorgung, hier werden die Bauelemente Diode, Kondensator und Durchkontakt gleichzeitig auf einem Substrat erzeugt.FIG. 3 shows a structure for the voltage supply, in which case the components diode, capacitor and through contact are produced simultaneously on a substrate.
Figur 4 schließlich zeigt einen Verbundkörper, der einen elektrischenFinally, FIG. 4 shows a composite body which has an electrical
Durchkontakt, einen Transistor und einen Widerstand und/oder eine Spule vereint.Through contact, a transistor and a resistor and / or a coil united.
In Figur 1 ist unten das Substrat 1 zu erkennen. Als Substrat können alle isolierenden Materialien mit einer glatten Oberfläche eingesetzt werden, es können flexible und starre Materialien gleichermaßen zum Einsatz kommen. Beispielsweise werden flexible Folien wie PET-Folie oder andere Polymer- Plastik-Folien, Glas, Quarz, Keramik oder anderes an der Stelle eingesetzt.In Figure 1, the substrate 1 can be seen below. As a substrate, all insulating materials with a smooth surface can be used, flexible and rigid materials can equally be used. For example, flexible films such as PET film or other polymer plastic films, glass, quartz, ceramic or other are used in place.
Die auf das Substrat 1 folgende Schicht 2 ist die erste leitfähige Schicht oder die untere Elektrode 2, die strukturiert aufgebracht wird. Nach einer vorteilhaften Ausgestaltung werden hier die Source und Drain Elektroden produziert, die durch die folgende Halbleiterschicht abgedeckt werden. Für die leitfähige Schicht 2 können nur leitfähige Materialien eingesetzt werden, wobei unwesentlich ist, ob es sich dabei um organische oder anorganische oder um ein Verbundmaterial handelt. Nach einer bevorzugten Ausführungsform wird als Material für die leitende Schicht, die in Kontakt mit der halbleitenden Schicht ist, ein Metall oder eine Legierung mit einer Austrittsarbeit, die im Bereich von 4.6 - 5.2 eV, bevorzugt bei 4.9eV liegt. Besonders bevorzugt wird an der Stelle Silber mit einer Austrittsarbeit von 4,9eV eingesetzt. Bei der Wahl des Materials wird bevorzugt darauf geachtet, dass die Austrittsarbeit an das Fermi-Niveau des Halbleiters so angeglichen ist, dass der Unterschied zum Fermi - Niveau des Halbleiters bevorzugt 0,3 eV oder weniger beträgt. Dann ist gewährleistet, dass die Ladungsträger problemlos vom halbleitenden Material in das leitende übergehen.The layer 2 following the substrate 1 is the first conductive layer or the lower electrode 2, which is applied in a structured manner. According to an advantageous embodiment, the source and drain electrodes are produced here, which are covered by the following semiconductor layer. For the conductive layer 2, only conductive materials can be used, it is immaterial whether it is organic or inorganic or a composite material. According to a preferred embodiment, as the material for the conductive layer which is in contact with the semiconductive layer, a metal or alloy having a work function that is in the range of 4.6 - 5.2 eV, preferably 4.9 eV. Particularly preferably, silver with a work function of 4.9 eV is used at the site. In the choice of material, it is preferably ensured that the work function is adjusted to the Fermi level of the semiconductor so that the difference to the Fermi level of the Semiconductor is preferably 0.3 eV or less. Then it is ensured that the charge carriers pass smoothly from the semiconducting material into the conducting one.
Auf die erste und untere Elektrodenschicht folgt die halbleitende Schicht 3, die wegen ihrer Viskosität unter Umständen unstrukturiert aufgebracht wird. Als Materialien für die halbleitende Schicht werden bevorzugt organische Materialien wie P3AT,P3DHTT, regioregulare - Polyalkylthiophenere, Polyfluoren - Derivate, PPVs, allgemein und/oder andere Polymere, beispielsweise mit konjugierter Hauptkette oder einem frei beweglichenThe first and lower electrode layers are followed by the semiconducting layer 3, which may be applied unstructured because of its viscosity. Preferred materials for the semiconducting layer are organic materials such as P3AT, P3DHTT, regioregular polyalkylthiophenes, polyfluorene derivatives, PPVs, in general and / or other polymers, for example with a conjugated main chain or a freely mobile one
Elektronenpaar in der Hauptkette, eingesetzt. Die halbleitende Schicht 3 kann auch beispielsweise durch Drucken strukturiert aufgebracht werden.Electron pair in the main chain, used. The semiconductive layer 3 can also be applied structured by printing, for example.
Darauf folgt bei den meisten elektronischen Bauelementen eine isolierende Schicht 4, die nur insoweit strukturiert aufgebracht werden muss, als an der/den Stellen auf dem Substrat, an denen Dioden oder Durchkontakte hergestellt werden, eine dielektrische oder isolierende Schicht ausgespart bleiben sollte, weil sie störend wirken würde. Die isolierende Schicht 4 ist beispielsweise aus löslichem druckbarem Material. Als Materialien für die isolierende Schicht werden bevorzugt organische, lösliche Materialien wie z.B. Polystyrol-Derivate, PMMA oder allgemein isolierende Polymere eingesetzt.This is followed in the case of most electronic components by an insulating layer 4 which has to be applied in a structured manner only if a dielectric or insulating layer should remain recessed at the point (s) on the substrate where diodes or vias are produced, because they are disturbing would work. The insulating layer 4 is made of, for example, soluble printable material. As materials for the insulating layer, organic, soluble materials such as e.g. Polystyrene derivatives, PMMA or generally insulating polymers used.
Als Abschluss der essentiellen Teile der elektronischen Bauelemente folgt auf die strukturierte isolierende Schicht 4 eine obere leitende Schicht 5, die wiederum bevorzugt strukturiert ist. Dabei werden leitende organische und anorganische Materialien und/oder Verbundmaterialien eingesetzt. Insbesondere bevorzugt werden Metalle eingesetzt, deren Austrittsarbeit von der des Materials der unteren leitenden Schicht (Gegenelektrode) verschieden ist. Nach einer Ausführungsform werden dabei Materialien eingesetzt, deren Austrittsarbeit im Bereich von 3 bis 5 eV, insbesondere von 3.0 eV bis 4,6 eV oder darüber liegen, beispielsweise kommt hier Kupfer, Nickel, Chrom, Cobalt, Mangan etc. erfolgreich zum Einsatz. Auf dem Substrat 1 der Figur 1 sind nun, von links nach rechts gehend, folgende Bauelemente realisiert: ein elektrischer Durchkontakt oder Vias a, im Anschluss daran und z.B. verbunden damit über die obere leitende Schicht 5 befindet sich ein Transistor b mit den Source/Drain Elektroden in der unteren leitenden Schicht 2. Neben dem Transistor b ist eine Diode c angeordnet, bei der die halbleitende Schicht 3 bis auf das Niveau der Gegenelektrode 5 hochgezogen ist, damit keine Strom/Spannungsverluste entstehen. Rechts von der Diode c ist ein Kondensator d zu erkennen und wiederum rechts davon, also ganz rechts außen, befindet sich ein Widerstand oder eine Spule e.As a conclusion of the essential parts of the electronic components, the structured insulating layer 4 is followed by an upper conductive layer 5, which in turn is preferably structured. In this case, conductive organic and inorganic materials and / or composite materials are used. Particular preference is given to using metals whose work function differs from that of the material of the lower conductive layer (counterelectrode). According to one embodiment, materials are used whose work function in the range of 3 to 5 eV, in particular from 3.0 eV to 4.6 eV or more, for example, is here copper, nickel, chromium, cobalt, manganese, etc. successfully used. The following components are now realized on the substrate 1 of FIG. 1, going from left to right: an electrical through contact or vias a, and subsequently, for example, connected thereto via the upper conductive layer 5 is a transistor b with the source / drain Electrodes in the lower conductive layer 2. In addition to the transistor b, a diode c is arranged, in which the semiconducting layer 3 is pulled up to the level of the counter electrode 5, so that no current / voltage losses occur. To the right of the diode c, a capacitor d can be seen, and to the right of it, that is, on the far right, there is a resistor or a coil e.
In Figur 2 sind noch einmal alle Bauelemente und alle Schichten, die auch in Figur 1 zu sehen sind, gezeigt, allerdings wird hier die halbleitende Schicht 3 an der Stelle der Diode c nicht bis auf das Niveau der oberen Elektrode 5 der anderen Bauelemente elektrischer Durchkontakt a, Transistor b, Kondensator d und Widerstand e gezogen, sondern die obere Elektrode 5 der Diode c ist hier tiefer, auf das Niveau der isolierenden Schicht 4, gelegt.FIG. 2 again shows all the components and all layers which can also be seen in FIG. 1, but here the semiconductive layer 3 at the location of the diode c does not become electrical through-contact up to the level of the upper electrode 5 of the other components a, transistor b, capacitor d and resistor e pulled, but the upper electrode 5 of the diode c is here deeper, to the level of the insulating layer 4, set.
In Figur 3 sind alle essentiellen Bauelemente, die zur Spannungsversorgung für einen Gleichrichter erforderlich sind, zusammen auf einem Substrat und, falls alle Schichten in allen Bauelementen gemeinsam sind, gleichzeitig herstellbar, realisiert. Die Schichtabfolge entspricht der aus Figur 1 , wobei auch die gleichen oder andere entsprechende Materialien eingesetzt werden können. So ist die Schicht 1 das Substrat, die Schicht 2, strukturiert eine leitfähige Schicht und 3 die Halbleiterschicht, 4 die isolierende Schicht und 5 die Gegenelektrode, die wiederum strukturiert ist.In FIG. 3, all the essential components required for the voltage supply for a rectifier are implemented together on a substrate and, if all the layers in all components are common, can be produced simultaneously. The layer sequence corresponds to that of Figure 1, wherein the same or other corresponding materials can be used. Thus, layer 1 is the substrate, layer 2, a conductive layer and 3 the semiconductor layer, 4 the insulating layer and 5 the counter-electrode, which in turn is structured.
Die Abfolge der Bauelemente ist dabei wie folgt vorgesehen: Ganz links außen ist der Durchkontakt 1 , daneben die Diode c und im Anschluss an die Diode c der Kondensator d. Durch den hier gezeigten Verbundkörper kann beispielsweise die von einer Antenne stammende Wechselspannung gleichgerichtet werden. Der Halbleiter ist im Diodenbereich c etwas dicker aufgetragen, das kann beispielsweise über einen bei einer gleichzeitigen Herstellung der Bauelemente durch einen Dekordruck erreicht werden.The sequence of components is provided as follows: far left outside is the through-hole 1, next to the diode c and subsequent to the diode c, the capacitor d. By way of example, the composite body shown here can rectify the alternating voltage originating from an antenna. The semiconductor is slightly thicker in the diode region c applied, which can be achieved for example via a at a simultaneous production of the components by a decor pressure.
Figur 4 zeigt einen mehrschichtigen Verbundkörper, der einen elektrischen Durchkontakt, einen Transistor und einen Widerstand oder eine Spule vereint. Mit diesem Schichtaufbau und dieser Anordnung der Bauelemente elektrischer Durchkontakt a, Transistor b, und Widerstand oder Spule e können zumindest PFETs (Polymer-Field-Effect-Transistor), Inverter, Ringoszillatoren, Flip-Flops, Frequenzteiler und/oder Zähler aufgebaut werden.FIG. 4 shows a multilayer composite body which combines an electrical contact, a transistor and a resistor or a coil. With this layer structure and this arrangement of the components electrical contact a, transistor b, and resistor or coil e at least PFETs (polymer field effect transistor), inverters, ring oscillators, flip-flops, frequency dividers and / or counters can be constructed.
Der Schichtaufbau entspricht wieder dem aus den anderen Figuren bekannten. Obwohl hier keine Diode realisiert ist, kann das leitfähige Material der oberen Elektrode 5 und der unteren Elektrode 2 durchaus verschieden, insbesondere hinsichtlich seiner Austrittsarbeit, sein.The layer structure again corresponds to that known from the other figures. Although no diode is realized here, the conductive material of the upper electrode 5 and the lower electrode 2 may be quite different, especially in terms of its work function.
Als oberste Schicht oder Abschluss empfiehlt sich wegen der Empfindlichkeit des Device und/oder der Materialien immer noch eine Verkapselung und/oder Versiegelung der Bauelemente, die die verschiedensten Materialien und/oder Laminate umfassen kann. Die Verkapselung/Versiegelung kann aus einem starren oder flexiblen Material sein.Because of the sensitivity of the device and / or the materials, the encapsulation and / or sealing of the components, which may comprise a wide variety of materials and / or laminates, is still recommended as topmost layer or finish. The encapsulation / seal may be made of a rigid or flexible material.
Über diesen Aufbau können nebeneinander und/oder hintereinander auf einem Substrat durch durchgehend flächig aufgetragene und/oder strukturierte Schichten die essentiellen Bestandteile elektronischer Geräte hergestellt werden, wie Transistor, Feld-Effekt-Transistor, elektrischer Durchkontakt, Widerstand, Leiterbahnwiderstand, Induktivität, Diode, Kondensator und Gleichrichter realisiert sind.About this structure, the essential components of electronic devices can be produced side by side and / or in succession on a substrate by continuously applied and / or structured layers, such as transistor, field effect transistor, electrical contact, resistance, track resistance, inductance, diode, capacitor and rectifiers are realized.
Durch die kostengünstige und massenfertigungstaugliche Herstellung bevorzugt sämtlicher Bauelemente der Baugruppe gleichzeitig und in einem kontinuierlichen Verfahren können in einzelnen Bauelementen Schichten enthalten sein, die dort speziell keine Funktion haben, beispielsweise kann in einem Feld-Effekt Transistor und/oder in einem Kondensator die Gate Elektrode eine von der Source/Drain-Elektrode unterschiedlichen Austrittsarbeit haben, wobei der Unterschied der Austrittsarbeit hier keine Funktionalität hat.Due to the cost-effective and mass production suitable production of all components of the assembly at the same time and in a continuous process can be contained in individual components layers that have no special function there, for example, in a field effect transistor and / or in a capacitor, the gate electrode have a work function different from the source / drain electrode, wherein the difference of the work function here has no functionality.
In dem Kondensator und den Leiterbahnwiderständen, ebenfalls imIn the capacitor and the conductor resistances, also in the
Durchkontakt ist beispielsweise ein Halbleiter vorhanden, der an der Stelle überflüssig und nicht funktional ist.Through contact, for example, a semiconductor is present, which is unnecessary at the site and not functional.
Über den in den Figuren gezeigten Aufbau können nebeneinander und/oder hintereinander auf einem Substrat durch durchgehend flächig aufgetragene und/oder strukturierte Schichten die essentiellen Bestandteile komplexer elektronischer Geräte hergestellt werden, wie Feld-Effekt-Transistor, elektrischer Durchkontakt, Widerstand, Leiterbahnwiderstand, Spule, Diode, Kondensator und Gleichrichter.About the structure shown in the figures, the essential components of complex electronic devices can be produced side by side and / or one after another on a substrate by continuously applied and / or structured layers, such as field effect transistor, electrical contact, resistance, conductor resistance, coil, Diode, capacitor and rectifier.
Die Erfindung eröffnet erstmals eine Möglichkeit für einen Aufbau einer gesamten Baugruppe wie ein RFID-Tag, wobei der gesamte Tag mit allen Bauelementen in einem Herstellungsprozess realisierbar ist. Dadurch wird erstmals eine kostengünstige und massenfertigungstaugliche Herstellungsmethode beschrieben. The invention opens up for the first time a possibility for a structure of an entire assembly such as an RFID tag, wherein the entire day can be realized with all components in a manufacturing process. As a result, a cost-effective and mass production suitable manufacturing method is described for the first time.

Claims

Patentansprüche claims
1. Mehrschichtiger Verbundkörper, zumindest zwei unterschiedliche elektronische organische Bauelemente umfassend, denen zumindest zwei, jeweils in einem Arbeitsgang aufgebrachte Schichten, die homogen oder strukturiert sein können, gemeinsam sind.1. Multilayer composite body, comprising at least two different electronic organic components, which are common to at least two, each applied in one operation layers, which may be homogeneous or structured.
2. Mehrschichtiger Verbundkörper nach Anspruch 1 , bei dem die zumindest zwei gemeinsamen Schichten zwei Elektrodenschichten aus zwei - hinsichtlich ihrer Austrittsarbeit - verschiedenen Materialien umfassen.2. A multilayer composite according to claim 1, wherein the at least two common layers comprise two electrode layers of two - with respect to their work function - different materials.
3. Mehrschichtiger Verbundkörper nach Anspruch 2, wobei die edlere Elektrodenschicht im Wesentlichen aus Silber ist.The multilayer composite according to claim 2, wherein the nobler electrode layer is substantially silver.
4. Mehrschichtiger Verbundkörper nach Anspruch 2 oder Anspruch 3, wobei die unedlere Elektrodenschicht im Wesentlichen aus Kupfer ist.The multilayer composite according to claim 2 or claim 3, wherein the less noble electrode layer is substantially copper.
5. Mehrschichtiger Verbundkörper nach einem der Ansprüche 2 bis 4, bei dem die zwei Elektrodenschichten eine Elektrode und eine Gegenelektrode bilden.5. A multilayer composite according to any one of claims 2 to 4, wherein the two electrode layers form an electrode and a counter electrode.
6. Mehrschichtiger Verbundkörper nach einem der vorstehenden Ansprüche, bei dem zumindest eine der zumindest zwei gemeinsamen Schichten in zumindest einem der zumindest zwei unterschiedlichen elektronischen organischen Bauelemente in dem Bauelement selbst keine Funktionalität besitzt. 6. The multilayer composite according to claim 1, wherein at least one of the at least two common layers in at least one of the at least two different electronic organic devices has no functionality in the device itself.
7. Mehrschichtiger Verbundkörper nach Anspruch 6, bei dem eine durchgehende, den unterschiedlichen Bauelementen gemeinsame Schicht enthalten ist, die in einigen Bauelementen essentiell ist und in anderen keine Funktionalität hat.7. A composite composite body according to claim 6, wherein a continuous, common to the different components layer is included, which is essential in some components and has no functionality in others.
8. Mehrschichtiger Verbundkörper nach einem der vorstehenden Ansprüche, wobei eines der zumindest zwei unterschiedlichen Bauelemente eine Diode ist.8. Multilayer composite body according to one of the preceding claims, wherein one of the at least two different components is a diode.
9. Mehrschichtiger Verbundkörper nach einem der vorstehenden Ansprüche und insbesondere nach Anspruch 8, wobei eines der zumindest zwei unterschiedlichen Bauelemente ein Kondensator ist.9. Multilayer composite body according to one of the preceding claims and in particular according to claim 8, wherein one of the at least two different components is a capacitor.
10. Mehrschichtiger Verbundkörper nach einem der Ansprüche 8 oder 9, in dem zumindest zwei Dioden und ein Kondensator realisiert sind.10. Multilayer composite body according to one of claims 8 or 9, in which at least two diodes and a capacitor are realized.
11. Mehrschichtiger Verbundkörper nach einem der vorstehenden Ansprüche, in dem zumindest drei unterschiedliche Bauelemente realisiert sind, eine Diode, ein Kondensator und ein Transistor.11. Multilayer composite body according to one of the preceding claims, in which at least three different components are realized, a diode, a capacitor and a transistor.
12. Mehrschichtiger Verbundkörper nach einem der vorstehenden Ansprüche, in dem zumindest vier unterschiedliche Bauelemente wie eine Diode, ein Kondensator, ein Transistor und ein Durchkontakt realisiert sind.12. Multilayer composite body according to one of the preceding claims, in which at least four different components such as a diode, a capacitor, a transistor and a contact are realized.
13. Mehrschichtiger Verbundkörper nach einem der vorstehenden Ansprüche, in dem zumindest eines der elektronischen Bauelemente, ausgewählt aus der Gruppe folgende Bauelemente umfassend: Transistor, Feld-Effekt-Transistor, elektrischer Durchkontakt, Widerstand, Leiterbahnwiderstand, Spule, Kondensator und/oder Gleichrichter zusammen mit einer Diode realisiert sind.13. The multilayer composite according to claim 1, wherein at least one of the electronic components selected from the group comprises the following components: transistor, field-effect transistor, electrical contact, resistor, conductor resistance, coil, capacitor and / or rectifier together with a diode are realized.
14. Mehrschichtiger Verbundkörper nach einem der vorstehenden Ansprüche, wobei zumindest eine der, zumindest zwei Bauelementen gemeinsamen, Schichten in einem kontinuierlichen Herstellungsverfahren herstellbar ist. 14. Multilayer composite body according to one of the preceding claims, wherein at least one of the, at least two components common, layers can be produced in a continuous production process.
15. Mehrschichtiger Verbundkörper nach einem der vorstehenden Ansprüche, bei dem zumindest eine der, zumindest zwei Bauelementen gemeinsamen, Schichten drucktechnisch herstellbar ist.15. Multilayer composite body according to one of the preceding claims, wherein at least one of the, at least two components common, layers can be produced by printing technology.
16. Mehrschichtiger Verbundkörper, bei dem auf einem Substrat mehrere Bauelemente realisiert sind, wobei zumindest ein Bauelement enthalten ist, das zumindest eine Schicht hat, die in dem Bauelement selbst keine Funktionalität besitzt.16. A multilayer composite body in which a plurality of components are realized on a substrate, wherein at least one component is included, which has at least one layer which has no functionality in the component itself.
17. Mehrschichtiger Verbundkörper nach Anspruch 16, bei dem eine durchgehende, den unterschiedlichen Bauelementen gemeinsame Schicht enthalten ist, die in einigen Bauelementen essentiell ist und in anderen keine Funktionalität hat.The multilayer composite according to claim 16, wherein a continuous layer common to the different components is included, which is essential in some components and has no functionality in others.
18. Mehrschichtiger Verbundkörper nach einem der Ansprüche 16 oder 17, wobei eine Halbleiterschicht mehreren Bauelementen gemeinsam ist und dabei auch in einem Kondensator enthalten ist, in dem sie keine Funktionalität hat. 18. A multilayer composite body according to any one of claims 16 or 17, wherein a semiconductor layer is common to a plurality of components and is also contained in a capacitor in which it has no functionality.
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TWI314369B (en) 2009-09-01
KR20080002833A (en) 2008-01-04
WO2006108514A3 (en) 2007-04-05
CN101160594A (en) 2008-04-09
JP4977126B2 (en) 2012-07-18
DE102005017655A1 (en) 2006-11-02
WO2006108514A2 (en) 2006-10-19
DE102005017655B4 (en) 2008-12-11
TW200707818A (en) 2007-02-16
US7812343B2 (en) 2010-10-12
KR101244124B1 (en) 2013-03-14
US20080203383A1 (en) 2008-08-28
JP2008536227A (en) 2008-09-04

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