EP1858766A2 - Recipient a masque - Google Patents

Recipient a masque

Info

Publication number
EP1858766A2
EP1858766A2 EP06736681A EP06736681A EP1858766A2 EP 1858766 A2 EP1858766 A2 EP 1858766A2 EP 06736681 A EP06736681 A EP 06736681A EP 06736681 A EP06736681 A EP 06736681A EP 1858766 A2 EP1858766 A2 EP 1858766A2
Authority
EP
European Patent Office
Prior art keywords
latch
lid
base
rail
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06736681A
Other languages
German (de)
English (en)
Inventor
Anthony Mathius Tieben
Christian Andersen
Brian Wiseman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of EP1858766A2 publication Critical patent/EP1858766A2/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
    • G03F7/70741—Handling masks outside exposure position, e.g. reticle libraries
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67353—Closed carriers specially adapted for a single substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67359—Closed carriers specially adapted for containing masks, reticles or pellicles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67373—Closed carriers characterised by locking systems

Definitions

  • This invention relates to sealable hinged latchable containers for storing and transporting masks used in manufacturing integrated circuits.
  • Semiconductor components such as integrated circuits, are made using semiconductor wafers.
  • relatively fragile masks or reticles
  • These masks are generally in the form of a substantially planar substrate.
  • small particles of foreign material may settle upon the masks or substrate, hence damaging the mask or the product being manufactured or otherwise interfering with the manufacturing process.
  • These foreign particles are present in the environments in which masks are stored and transported.
  • containers are used. These containers serve the dual purpose of protecting the masks from damage and providing a dust-free microenvironment.
  • Containers for masks have conventionally been manufactured from separate top cover or lid and a bottom or base.
  • the portions are molded separately with each having a hinge portion integral on the back side thereof.
  • the containers are then assembled utilizing a metal hinge pin to complete the hinge.
  • a simple manually slidable C-shaped latch positioned on a rail on the front of the base piece is manually slid to capture a tab on the top cover when closed to secure the package shut.
  • the hinge portions are conventionally formed of the same materials as the top cover and base and typically has plastic to plastic rubbing contact as well as plastic to metal rubbing contact which can cause abrading and particle generation.
  • a latch that secures a lid to a base automatically and a hinge that could be incorporated with minimal assembly steps and without the plastic to plastic or plastic to metal rubbing contact and thus without the associated particle generation would be quite desirable.
  • the invention addresses the needs of the industry in part by a providing a container for storing and transporting masks and a process for making the container by sequentially molding its components using overmolding techniques and a living hinge.
  • the container includes a lid, a base, a hinge, and a latching mechanism.
  • the hinge is formed of a first material by injection molding. The hinge is placed in a mold to overmold the base and cover thereon. Thus the base and lid formed integrally — or connected mechanically by the overmolding — to the hinge by a second injection molding.
  • the hinge has a living hinge portion that functions with no rubbing or abrading contact.
  • the latching mechanism which includes a sliding latch member configured as a C-shaped latch carriage and an integrally formed spring, slidably engages a rail on the front side of the base.
  • the spring biases the latch member to an original normal position that is the "latch" position.
  • the latch can be automatically actuated, that is, moved out of the latch position to accept and latch with the top cover, when a ramp-shaped extension, that is a cam surface, of the lid presses against a ramp-shaped beveled surface, a cooperating cam surface, of the latch as the lid is being closed to the base.
  • the force of the downward moving lid extension contacts a cam surface and urges each of the two latch carriages outboard until the lid tab extensions enters notches in the latch carriages, thereby releasing the latch carriage to it original position under the force of the spring.
  • the lid extension is thus seated, it is aligned with the rail and the latch spring retains the latch mechanism in a locked and closed position.
  • Another downwardly facing ramp-shaped beveled edge of the latch may be used to automatically open the latch mechanism by an actuator moving upwardly from below.
  • a feature and advantage of the invention is that the latch mechanism may be manually or robotically operated and robotically operated with simple vertical moving actuating arms extending either upwardly from below or downwardly from above.
  • each latch mechanism consists of only one additional component in addition to the portions of the top cover and base that are utilized. This facilitates simplicity, easy cleaning, an minimizes manufacturing costs such as assembly costs.
  • a feature and advantage is the lack of rubbing components in the hinge.
  • a feature and advantage of preferred embodiments of the invention is that the latch carriages both are biased inwardly to their latched position facilitating robotic actuation • for opening by inserting between the two latch carriages an actuator with cam surfaces that can simultaneously urge outwardly both latch carriages by a simple vertical motion coming either from above or below the container.
  • a feature and advantage of preferred embodiments is that the latch carriages have cam surfaces that can be both actuated by a actuator cam portion on the top lid and also robotically. Moreover the latches are readily operated manually.
  • Figure 1 is a perspective view of one embodiment of a container according to the inventions herein when in a closed position;
  • Figure 2 is a perspective view of the inside of the container of Figure 1 when in an open position
  • Figure 3 is a plan view of the outside of the container of Figure 1 when in an open position.
  • Figure 4 is a side, cross sectional view of the container of Figure 1 when in an open position.
  • Figure 5 is a perspective view illustrating the function of the latch mechanism with the container partially open and the latch carriage in its normal position.
  • Figure 6 is a perspective view illustrating the function of the latch mechanism with the top cover commencing to engage the base at the latching mechanism deflecting the latch carriage outwardly.
  • Figure 7 is a perspective view illustrating the function of the latch mechanism with the top cover closed on the base at the latch carriage of the latching mechanism returned to its normal position.
  • Figure 8 is an view of the hinge before incorporation in the container.
  • Figure 9 is a view of the hinge before incorporation in the container.
  • Figure 10 is perspective view of the top of the hinge before incorporation in the container.
  • Figure 11 is perspective view of the bottom of the hinge before incorporation in the container.
  • Figure 12 is an end view of the hinge in a fully extended position before incorporation in the container.
  • Figure 13 is an end view of the living hinge portion of the hinge.
  • Figure 14 is an end view of the hinge in a fully folded position before incorporation in the container.
  • Figure 15 is an end view of the hinge in a fully folded position before incorporation in the container.
  • Figure 16 is a cross sectional side view of the hinge mechanism integrally molded with the lid and base of this invention.
  • Figure 17 is a perspective view of the container from the back side illustrating the hinge in the fully folded position.
  • Figure 18 is a front elevational view of the latch carriage.
  • Figure 19 is a top plan view of the latch carriage.
  • Figure 20 is a rear side elevational view of the latch carriage.
  • Figure 21 is an end view of the latch carriage.
  • Figure 22 is a perspective view of a corner of the base illustrating the latch carrage retracted from its normal position.
  • Figure 23 is a perspective view of the mechanism engaging lid extension of the present latch mechanism.
  • Figure 24 is a side view of a rail of the base as part of the latch mechanism.
  • Figure 25 is an illustration as to how both latch mechanisms can be simultaneously operated by a simple cam actuator either from above or below the container.
  • Figures 1-4 show an embodiment of the mask (reticle) container of the invention.
  • the container is depicted generally at 100 and includes an upper member such as a cover or lid 102, a lower member or base 104, a hinge 106, and a pair of latching mechanisms 108.
  • the lid 102 in turn, has a shell 110 with a generally planar top 112, opposed longitudinal sides 114 and 116 and opposed lateral sides 118 and 120, thereby defining a lid cavity 121. Disposed within the lid cavity 121 are opposed recess structure 122 and 124 and laterally opposed reticle restraints or cushions 126 and 128. Exemplary cushions suitable for some embodiments of the invention are disclosed in U.S. Patent 6,216,873, hereby incorporated by reference.
  • the base 104 has a shell portion 129 having a generally planar bottom 130, opposed longitudinal sides 132 and 134, and generally opposed lateral sides 136 and 138, thereby defining a base cavity 140.
  • Posts 142, 144, 146, and 148 are attached to the bottom 130 proximate the four comers of the base cavity 140.
  • Laterally opposed recessed structure 150 and 152 are positioned at the lateral sides 136 and 138, respectively.
  • a rim 154 is defined at the periphery of the lid 102 and a ledge 156 is defined at a periphery of the base 104. The rim 154 sealingly contacts the ledge 156 when the container is closed.
  • a mask In use, a mask is placed in the cavity 140 and is supported and confined by the posts 142-148. When the lid 102 is closed, cushions 126 and 128 resiliently confine the mask vertically and laterally.
  • the hinge 106 unitarily (or otherwise integrally) has a first hinge member 170 and a second hinge member 172, which are separated by a hinge portion 174 as shown in Figures 6-16.
  • the hinge portion 174 is an area of reduced thickness to enable the hinge to functionally and pivotally flex when attached to the lid and base and constitutes a "living hinge.”
  • First hinge member 170 may be considered to include a planar portion 180 terminating in a lip 182.
  • a second hinge member 172 has respective first, second, and third planar portions 186, 188, and 190 and a lip 192.
  • first, second, and third planar portions 186, 188, and 190 angularly adjoin and the third planar portion 190 terminates at the lip 192.
  • the hinge portion 174 is defined by a generally arcuate groove 194 and a generally opposed notch 196.
  • each latching mechanism 108 has a latch carriage 200, a rail 202, and a top cover projection or extension 204.
  • Latch carriage 200 as best shown in includes a C shaped in the vertical cross-section) body 208 accommodating a spring 210.
  • the spring is preferably serpentine in shape and is compressible within the body.
  • the latch carriage 200 has beveled (angled) generally converging, inboard lateral edges 214 and 216 that function as cam surfaces.
  • the latch carriage 208 also has a generally curvilinear front member 218, with a plurality of gripping extensions 220, and a rear member 222.
  • the rear member 222 defines upper and lower notches 224 and 226 via respective extensions 228 and 230 and lip 232 and 234 extending inwardly from the extensions 226 and 228.
  • the rail 202 has a first extension 240 extending from the longitudinal side 132 of the base 104. Respective second and third extensions 242 and 244 extend from the first extension 240 and are dimensioned to slidingly accommodate the notches 226 and 228 of the latch 200.
  • the rail 202 may also include a spring mount 246 outboard the structure formed by the first second and third extensions 240, 242, and 244.
  • Extension 250 extends from the longitudinal side 114 of the lid 102 and presents a generally angled surface 252 as shown in Figures 23 and 25.
  • a lip 254 extends from a main portion 256 of the extension 250. When the container is fully closed the lip 254 generally aligns with the third extension 244 of the base latch assembly.
  • Latch 200 is slidingly disposed on rail 202 such that the spring 210 abuts and biases the latch 200 away from the spring mount 246.
  • the angled surface 252 of the lid extension 204 contacts the angled lateral edge 214 of the latch 200, thereby forcing the latch 200 to slide away there from and compressing the spring 210 against the adjacent spring mount 246.
  • the spring 210 decompresses to allow the latch 200 to be displaced away from the spring mount 246 such that the notch 224 of the latch 200 is accommodated partially by the rail 254. In this position, the latch 200 spans the extension 215 and the rail 202, thereby securing the lid in a closed position.
  • the beveled edge 216 is useful for automatically opening the latch from above or below, such as by automatic handling equipment 257 as shown in Figure 26.
  • the handling equipment forces the latch 200 open by exerting an upward force on the beveled edge 216, thereby urging the latch outboard and allowing the lid and base rail portions to disengage.
  • the beveled edge 252 or cam surface of the projection of the top lid automatically causes the latch carriage to retract as indicated by the arrow 251 in Figure 6 by engagement with the beveled surface 214 of the latch carriage. The projection then clears the beveled surface allowing the latch carriage to snap back to its normal position as indicated by the arrow 253 of Figure 7.
  • the container is made by a process that includes sequential molding operations.
  • the hinge is molded and allowed to cure. Then the hinge is removed from the first mold and placed in a second mold. The second mold is injected with a second polymer suitable for the lid and base members.
  • Figure 16 shows how the hinge is embedded in the present lid and base and how the lips 182 and 192 anchor and secure the hinge — in addition to mechanical or chemical bonding between the polymers used to form the hinge, lid and base.
  • the latch 200 is molded separately, with the latch carriage and spring formed integrally. The integral lid, base, and hinge are removed from the second mold after being allowed to cure. The latch is installed on the rail 202. Finally, cushions are affixed to the lid 102. Suitable sequential molding processes are disclosed in U.S. Patent 6,428,729,6,719,381,6,402,552, and 6,077,124, and U.S. Patent Application 20030025244, each hereby incorporated by reference.
  • Figure 16 shows the conformation of the hinge when the container of this invention is fully opened.
  • Figure 14 shows the hinge in a closed position and
  • Figure 15 depicts the hinge generally mid-way between the open and closed positions.
  • the flexible hinge material may be mechanically attached to the base and top cover in a separate operation, rather that during an overmolding operation.
  • the living hinge may be formed with two materials: a flexible material for the living hinge and another material suitable for attachment to the base and top cover by means such as welding or by a second overmolding operation.
  • Suitable materials used to form the hinge include polypropylene and polyurethane, optionally with an inherently dissipative polymer to dissipate static electricity.
  • Suitable materials for the lid, base, and hinge include acrylonitrile butadiene-styrene (ABS), optionally with a static dissipative property, e.g., StatPro 435TM is such a material utilized in molding these types of products by Entegris, Inc. the owner of the this application.
  • ABS acrylonitrile butadiene-styrene
  • StatPro 435TM is such a material utilized in molding these types of products by Entegris, Inc. the owner of the this application.
  • Other polymers may also be used, depending on the specific application intended for the container. Polymers suitable for these and other applications are disclosed in Handbook of Plastics, Elastomers, and Composites, Charles A. Harper, Editor-in-Chief, Third Edition, 1996, McGraw-Hill, hereby incorporated by reference.
  • an elastomeric seal may be utilized with the container to seal between the top cover and base when the container is closed.
  • the seal may be formed before the top cover and base are molded and may be inserted in the molds for said top cover and base to be joined by overmolding.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Library & Information Science (AREA)
  • Closures For Containers (AREA)
  • Medical Preparation Storing Or Oral Administration Devices (AREA)

Abstract

L'invention concerne un récipient de masque-emballage à charnière équipé d'un loquet à ressort servant au transport et au stockage de substrats. Le récipient présente un fond et un couvercle fixés par un loquet à ressort coulissant qui reçoit le couvercle du récipient coulissant le long du rail lorsque l'on presse ledit couvercle de façon qu'il épouse le fond et qui fixe le couvercle et le fond par coulissement arrière dans sa position initiale. Le récipient utilise également une charnière mobile obtenue par surmoulage, ladite charnière étant formée dans un premier moule et le couvercle et le fond du récipient étant formés et reliés à la charnière dans un second moule.
EP06736681A 2005-02-27 2006-02-27 Recipient a masque Withdrawn EP1858766A2 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US65731405P 2005-02-27 2005-02-27
US11/364,812 US20060201958A1 (en) 2005-02-27 2006-02-26 Mask container
PCT/US2006/007400 WO2006094113A2 (fr) 2005-02-27 2006-02-27 Recipient a masque

Publications (1)

Publication Number Publication Date
EP1858766A2 true EP1858766A2 (fr) 2007-11-28

Family

ID=36969745

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06736681A Withdrawn EP1858766A2 (fr) 2005-02-27 2006-02-27 Recipient a masque

Country Status (5)

Country Link
US (1) US20060201958A1 (fr)
EP (1) EP1858766A2 (fr)
JP (1) JP2008533512A (fr)
KR (1) KR20070114366A (fr)
WO (1) WO2006094113A2 (fr)

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JP5122484B2 (ja) * 2006-02-03 2013-01-16 インテグリス・インコーポレーテッド 衝撃吸収基板容器及びその形成方法
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US8925290B2 (en) * 2011-09-08 2015-01-06 Taiwan Semiconductor Manufacturing Company, Ltd. Mask storage device for mask haze prevention and methods thereof
USD665167S1 (en) * 2011-10-31 2012-08-14 Illinois Tool Works Inc. Inflator carrying case
US9731876B1 (en) * 2013-02-26 2017-08-15 Csp Technologies, Inc. Flat pack guides
USD733429S1 (en) * 2013-10-08 2015-07-07 Jean-Pierre Grenier Case
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US10167134B2 (en) * 2015-10-13 2019-01-01 Altria Client Services Llc Article carrier for an electronic vaping device
USD831960S1 (en) * 2018-05-29 2018-10-30 Jeff Overall Drone case
TWI680348B (zh) * 2018-12-06 2019-12-21 家登精密工業股份有限公司 光罩盒及其組裝件
USD963337S1 (en) 2019-07-31 2022-09-13 Plasticase, Inc. Case with an extendable handle
TWI720850B (zh) * 2020-03-19 2021-03-01 家登精密工業股份有限公司 光罩盒
US12087605B2 (en) * 2020-09-30 2024-09-10 Gudeng Precision Industrial Co., Ltd. Reticle pod with antistatic capability
USD985939S1 (en) 2020-12-07 2023-05-16 The Noco Company Case
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Also Published As

Publication number Publication date
KR20070114366A (ko) 2007-12-03
WO2006094113A8 (fr) 2006-12-28
WO2006094113A2 (fr) 2006-09-08
WO2006094113A9 (fr) 2007-02-08
US20060201958A1 (en) 2006-09-14
JP2008533512A (ja) 2008-08-21
WO2006094113A3 (fr) 2007-12-06

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