EP1706771A1 - Systeme optique pourvu d'un dispositif de camera permettant la visualisation de plusieurs objets eloignes les uns des autres - Google Patents

Systeme optique pourvu d'un dispositif de camera permettant la visualisation de plusieurs objets eloignes les uns des autres

Info

Publication number
EP1706771A1
EP1706771A1 EP04803006A EP04803006A EP1706771A1 EP 1706771 A1 EP1706771 A1 EP 1706771A1 EP 04803006 A EP04803006 A EP 04803006A EP 04803006 A EP04803006 A EP 04803006A EP 1706771 A1 EP1706771 A1 EP 1706771A1
Authority
EP
European Patent Office
Prior art keywords
prism
optical system
optical
beam path
camera device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
EP04803006A
Other languages
German (de)
English (en)
Inventor
Elke Zakel
Ghassem Azdasht
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pac Tech Packaging Technologies GmbH
Original Assignee
Pac Tech Packaging Technologies GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pac Tech Packaging Technologies GmbH filed Critical Pac Tech Packaging Technologies GmbH
Publication of EP1706771A1 publication Critical patent/EP1706771A1/fr
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/106—Beam splitting or combining systems for splitting or combining a plurality of identical beams or images, e.g. image replication
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G02B27/143—Beam splitting or combining systems operating by reflection only using macroscopically faceted or segmented reflective surfaces
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G02B17/04—Catoptric systems, e.g. image erecting and reversing system using prisms only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G02B27/144—Beam splitting or combining systems operating by reflection only using partially transparent surfaces without spectral selectivity

Definitions

  • the present invention relates to an optical system for viewing a plurality of objects arranged at a distance from one another with a camera device comprising a first prism device arranged on the optical axis or in the beam path of the camera device for generating two partial beam paths and two object prism devices each arranged in a partial beam path and each assigned to an object ,
  • image processing systems are often used which record position and / or quality information via a camera device, which are used to control further processes depending on the degree of automation of the system technology.
  • a camera device which are used to control further processes depending on the degree of automation of the system technology.
  • corresponding dimensioning regulations also apply to optical systems, which should be able to be integrated into an appropriate system technology without interfering with the handling or manufacturing processes.
  • the present invention is therefore based on the object of proposing an optical system that enables a differentiated consideration of different surface locations of microelectronic components, such as, for example, a chip, while at the same time requiring as little space as possible for the optical system.
  • the optical system according to the invention for viewing a plurality of objects arranged at a distance from one another with a camera device comprises a first prism device arranged on the optical axis or in the beam path of the camera device for generating two partial beam paths and two objects each arranged in a partial beam path and each assigned to an object - prism devices.
  • the optical system upstream of the camera device it is possible to view a plurality of surface locations of a microelectronic component, such as a chip, for example, which are arranged at a distance from one another, without the need for several camera devices to be handled in parallel with one another, or if only a camera device that would have to be pivoted to view several surface locations.
  • a stationary static optical system and only one camera device can be used so that there is only a correspondingly small space requirement.
  • the use of the object prism devices opens up the advantage of being able to quickly adapt to changing surface geometries by simply changing the relative distance of the object prism devices from one another.
  • the use of the object prism devices has the advantage that only very small masses have to be moved when adapting to the spacing of the objects, so that a suitable apparatus adjusting device can be designed to be correspondingly filigree and space-saving.
  • an illumination device is assigned to each object prism device, so that sufficient illumination of the objects or surface locations to be viewed is ensured, independently of the ambient conditions, via an illumination beam path guided via the object prism devices.
  • the lighting devices can be designed to be particularly space-saving if they are designed as light-emitting semiconductor components, that is to say, for example, as light-emitting diodes.
  • An exemplary embodiment of the optical system which is particularly suitable for differentiated viewing of surface locations of relatively elongated microelectronic components, such as an LCD diode, has a structure such that the output beam paths of the object prism devices run transversely and in the same direction as the optical axis of the camera device.
  • This optical system it is therefore possible to carry out an observation with an optical system aligned below or above and essentially parallel to the plane of the surface topography of interest. It is advantageous to arrange the lighting devices in such a way that the lighting beam paths formed between the object prism devices and the lighting devices run transversely to the optical axis of the camera device. This makes it possible to design the arrangement of the optical system in such a way that the optical system has the smallest possible depth.
  • the prism device has two optical boundary surfaces which are arranged perpendicular to one another and are each positioned at 45 ° to the optical axis of the camera device.
  • a particularly easy adaptation to a given topography is possible if the distance between the object prism devices can be changed.
  • An embodiment in which the output beam paths of the object prism devices run transversely and in opposite directions to the optical axis of the camera device is particularly advantageous in the event that the optical system is used for the relative alignment of contact metallizations during contacting processes between a plurality of microelectronic components.
  • the lighting devices are arranged in such a way that the illumination beam paths formed between the object prism devices and the lighting devices run parallel to the plane of the optical axis of the camera device, an overall flat design of the optical system is possible.
  • the optical system can also be used with extremely small distances between contact metallizations of two microelectronic components to be contacted with one another if the
  • Prism device has a first optical boundary surface arranged on the optical axis of the camera device, reflecting a first partial beam path and permeable to a second partial beam path, set at 45 °, which is followed by a second optical boundary surface arranged perpendicular to the optical axis for reflection of the second partial beam path against the first optical boundary surface and reflection of the second beam path in the direction of the second object.
  • FIG. 1 shows a first optical system for viewing two surface locations of a surface which are arranged at a distance from one another;
  • FIG. 2 shows a further view of the optical system shown in FIG. 1;
  • FIG. 3 shows a second optical system for viewing two surface locations of substrates arranged one above the other.
  • FIG. 1 and 2 show a viewing device 10 designed as an optical system, which is used for combination with a camera device 11.
  • an input prism 13 is arranged on an optical axis 12 of the camera device 1 1, the beam path 15 emerging from an objective device 14 of the camera device 1 1 is arranged on two outer and perpendicular to each other divides the optical boundary surfaces 16, 17 of the input prism 13 into a first and a second partial beam path 18 and 19 by 45 ° to the optical axis 12.
  • the partial beam paths 18 and 19 are oriented transversely and opposite each other to the beam path 15 emerging from the lens device 14 of the camera device 11 and each meet an output prism 20, 21 of the viewing device 10.
  • the output prisms 20, 21 serve to deflect the partial beam paths 18 and 19 in object beam paths 22, 23 emerging vertically upward from the plane of the drawing.
  • the output prisms 20, 21 each have an optical boundary surface 24, 25, which extends around a prism axis 26, 27 parallel to the optical axis 12 by an angle of 45 ° with respect to an optical plane 28 (FIG. 2).
  • At right angles to the optical axis 12 are located at a distance from the output prisms 20, 21, here as light-emitting diodes 29, 30, which emit an illumination beam path 31 or 32, which delimits the optically transparent boundary surface 24 or 32 in the direction of the illumination beam path 31 or 32.
  • 25 of the output prisms 20, 21 penetrates and together with the respective object beam path 22 or 23, as shown in FIG. 2, an illumination of an object surface of a microelectronic substrate 35, such as a chip, formed here by a connection surface 33 or 34, allows.
  • an output prism 20, 21 and the associated light-emitting diode 31 or 32 can be combined in an actuating device 37, 38 and their distance from the optical axis 12 depending on the distance of the Pads 33, 34 of the substrate 35 can be changed.
  • the adjusting devices 37, 38 are preferably adjusted with respect to the optical axis 12 with the same actuating amounts or even simultaneously, so that there is no need for focusing optics interposed in the partial beam path 18 or 19.
  • FIG. 3 shows a viewing device 40 designed as an optical system, which is arranged on an optical axis 41 and has a camera device 42 and an input prism 43.
  • the entrance prism 43 has an inner optical boundary surface 45, which is set at 45 ° to the optical axis 41 and perpendicular to an optical plane 44, which in the present case corresponds to the plane of the drawing.
  • a beam path 47 emanating from an objective device 46 of the camera device 42 is reflected into a first partial beam path at the boundary surface 45 and deflected upwards.
  • a second partial beam path 49 penetrates the boundary surface 45 and is reflected on a mirrored outer boundary surface 50 of the entrance prism 43 backwards against the boundary surface 45, which is totally reflective in this direction, and deflected downward there.
  • An output prism 51, 52 is arranged on both sides next to the input prism 43 in the direction of the partial beam paths 48, 49, each having an optical boundary surface 53, 54.
  • the boundary surface 53 of the output prism 51 is set at an angle of 45 ° with respect to a prism axis 55 running parallel to the optical axis 41 and is arranged perpendicular to the optical plane 44.
  • the boundary surface 54 of the output prism 52 is set at an angle of 45 ° with respect to a prism axis 56 parallel to the optical axis 41 and is arranged perpendicular to the optical plane 44.
  • both the output prism 51 and the output prism 52 are associated with an illumination device designed here as a light-emitting diode 57 or 58, which in each case emits an illumination beam path 59, 60.
  • the boundary surface 54 of the output prism 52 is designed to be transparent to the partial beam path 48, which becomes an object beam path at the boundary surface 54.
  • the illumination beam path 60 of the associated light-emitting diode 58 is reflected on the boundary surface 54 axially parallel to the partial beam path 48 and, together with the partial beam path 48, strikes a first object surface 61 of a first substrate 62 arranged above the output prism 52.
  • the boundary surface 53 of the output prism 51 is transparent for the partial beam path 49 reflected downward in the input prism 43, which becomes the object beam path at the boundary surface 53.
  • the illuminating beam path 59 of the associated light-emitting diode 57 is reflected downward on the boundary surface 53, parallel to the axis of the partial beam path 49, so that the partial beam path 49 and the illuminating beam path 59 are directed onto an object surface of a second substrate 54 arranged below the output prism 51 and here formed by a further connection surface 63 incident.
  • the viewing device 40 introduced into a contact gap 65 of two substrates 62, 63 makes it possible to check the correct alignment of two connection surfaces 61, 63 to be contacted or the alignment of the connection surfaces 61 , 63 as a function of a detected positional deviation in order to achieve an arrangement on a contact axis 66 which coincides with the axis of the partial beam paths 49, 48.
  • exit prisms 51, 52 with an absorbing coating 69 on their rear, outer boundary surfaces 67, 68 in order to prevent scattered light 70 from escaping.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Studio Devices (AREA)
  • Instruments For Viewing The Inside Of Hollow Bodies (AREA)

Abstract

L'invention concerne un système optique (40) permettant de visualiser plusieurs objets (61, 63), éloignés les uns des autres, au moyen d'un dispositif de caméra (42) comprenant un premier dispositif à prisme (43), placé sur l'axe optique (41) ou sur la trajectoire de faisceau (47) du dispositif de caméra et destiné à produire deux trajectoires de faisceau partiel (48, 49), ainsi que deux dispositifs à prisme (51, 52) associés chacun à un objet et placés sur une trajectoire de faisceau partiel. Un dispositif d'éclairage, se présentant ici sous la forme d'une diode électroluminescente (57 ou 58), produisant une trajectoire de faisceau d'éclairage (59,60), est associé aussi bien au prisme de sortie (51) qu'au prisme de sortie (52). L'agencement représenté ici montre clairement que le dispositif de visualisation (40), introduit dans une fente de contact (65) entre deux substrats (62, 63), permet de contrôler l'alignement correct de deux surfaces de connexion (61, 63) à mettre en contact l'une avec l'autre ou de provoquer l'alignement des surfaces de connexion (61, 63) en fonction d'un axe de contact (66) qui coïncide avec l'axe des trajectoires de faisceau partiel (49, 48).
EP04803006A 2003-12-23 2004-12-22 Systeme optique pourvu d'un dispositif de camera permettant la visualisation de plusieurs objets eloignes les uns des autres Ceased EP1706771A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10361522A DE10361522A1 (de) 2003-12-23 2003-12-23 Optisches System
PCT/DE2004/002826 WO2005062103A1 (fr) 2003-12-23 2004-12-22 Systeme optique pourvu d'un dispositif de camera permettant la visualisation de plusieurs objets eloignes les uns des autres

Publications (1)

Publication Number Publication Date
EP1706771A1 true EP1706771A1 (fr) 2006-10-04

Family

ID=34706655

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04803006A Ceased EP1706771A1 (fr) 2003-12-23 2004-12-22 Systeme optique pourvu d'un dispositif de camera permettant la visualisation de plusieurs objets eloignes les uns des autres

Country Status (6)

Country Link
US (1) US20080260370A1 (fr)
EP (1) EP1706771A1 (fr)
JP (1) JP4791973B2 (fr)
KR (1) KR101116467B1 (fr)
DE (1) DE10361522A1 (fr)
WO (1) WO2005062103A1 (fr)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5060063A (en) * 1990-07-30 1991-10-22 Mpm Corporation Viewing and illuminating video probe with viewing means for simultaneously viewing object and device images along viewing axis and translating them along optical axis
US5752446A (en) * 1993-11-22 1998-05-19 Dek Printing Machines Limited Alignment systems
US5943089A (en) * 1996-08-23 1999-08-24 Speedline Technologies, Inc. Method and apparatus for viewing an object and for viewing a device that acts upon the object
DE10012043A1 (de) * 2000-03-14 2001-10-04 Bosch Gmbh Robert Vorrichtung zur Ausrichtung von Referenzmarken tragenden Objekten zueinander
JP2003168309A (ja) * 2001-12-04 2003-06-13 Kyoto Denkiki Kk ライトガイド用光源装置
US20030193817A1 (en) * 2002-04-16 2003-10-16 Kenji Yoneda Lighting unit

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JPS4415396Y1 (fr) * 1965-02-05 1969-07-03
JPS6044601B2 (ja) * 1974-03-29 1985-10-04 キヤノン株式会社 位置合わせ方法
JPS5280039A (en) * 1975-12-26 1977-07-05 Kokusai Electric Co Ltd Split field microscope
JPS5359443A (en) * 1976-11-09 1978-05-29 Kazuo Yomoda Microscope with two fields
JPS5662218A (en) * 1979-10-26 1981-05-28 Olympus Optical Co Ltd Photographing apparatus
DE3116634A1 (de) * 1981-04-27 1982-11-11 Karl Süss KG, Präzisionsgeräte für Wissenschaft und Industrie - GmbH & Co, 8046 Garching Vorrichtung zum automatischen justieren von ebenen gegenstaenden mit zwei bezugspunkten, insbesondere bei der herstellung von halbleiterbauelementen
JPS6017417A (ja) * 1983-07-11 1985-01-29 Tokyo Optical Co Ltd 光学装置
DD222432A1 (de) * 1984-03-01 1985-05-15 Zeiss Jena Veb Carl Anordnung zur strahlenteilung eines laserstrahles
DE3577355D1 (de) * 1984-06-25 1990-05-31 Olympus Optical Co Mikroskop.
JPS63276015A (ja) * 1987-05-08 1988-11-14 Toyo Kogaku Kogyo Kk 二視野顕微鏡
DE19505048A1 (de) * 1995-02-15 1996-08-22 Gemicon Gmbh Beobachtungs- und Justierstation für ein Montagegerät
US6101048A (en) * 1998-05-19 2000-08-08 Raytheon Company Split field wide angle viewing system for vehicles
JP4510952B2 (ja) * 1999-05-21 2010-07-28 オリンパス株式会社 実体顕微鏡
JP2003066336A (ja) * 2001-08-23 2003-03-05 Olympus Optical Co Ltd 手術用顕微鏡

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5060063A (en) * 1990-07-30 1991-10-22 Mpm Corporation Viewing and illuminating video probe with viewing means for simultaneously viewing object and device images along viewing axis and translating them along optical axis
US5752446A (en) * 1993-11-22 1998-05-19 Dek Printing Machines Limited Alignment systems
US5943089A (en) * 1996-08-23 1999-08-24 Speedline Technologies, Inc. Method and apparatus for viewing an object and for viewing a device that acts upon the object
DE10012043A1 (de) * 2000-03-14 2001-10-04 Bosch Gmbh Robert Vorrichtung zur Ausrichtung von Referenzmarken tragenden Objekten zueinander
JP2003168309A (ja) * 2001-12-04 2003-06-13 Kyoto Denkiki Kk ライトガイド用光源装置
US20030193817A1 (en) * 2002-04-16 2003-10-16 Kenji Yoneda Lighting unit

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2005062103A1 *

Also Published As

Publication number Publication date
KR101116467B1 (ko) 2012-03-06
KR20060134008A (ko) 2006-12-27
JP2007521516A (ja) 2007-08-02
US20080260370A1 (en) 2008-10-23
JP4791973B2 (ja) 2011-10-12
DE10361522A1 (de) 2005-07-28
WO2005062103A1 (fr) 2005-07-07

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