EP1699107B1 - Coupleur 3dB - Google Patents

Coupleur 3dB Download PDF

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Publication number
EP1699107B1
EP1699107B1 EP05004860.2A EP05004860A EP1699107B1 EP 1699107 B1 EP1699107 B1 EP 1699107B1 EP 05004860 A EP05004860 A EP 05004860A EP 1699107 B1 EP1699107 B1 EP 1699107B1
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EP
European Patent Office
Prior art keywords
conductor
coupler
inductance
coupler according
coupling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP05004860.2A
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German (de)
English (en)
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EP1699107A1 (fr
Inventor
Erich Dr. Pivit
Michael Glück
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Trumpf Huettinger GmbH and Co KG
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Trumpf Huettinger GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by Trumpf Huettinger GmbH and Co KG filed Critical Trumpf Huettinger GmbH and Co KG
Priority to EP05004860.2A priority Critical patent/EP1699107B1/fr
Priority to US11/368,314 priority patent/US7477114B2/en
Priority to JP2006059327A priority patent/JP2006245591A/ja
Priority to US11/371,628 priority patent/US7452443B2/en
Publication of EP1699107A1 publication Critical patent/EP1699107A1/fr
Priority to US12/257,643 priority patent/US8133347B2/en
Application granted granted Critical
Publication of EP1699107B1 publication Critical patent/EP1699107B1/fr
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P5/00—Coupling devices of the waveguide type
    • H01P5/12—Coupling devices having more than two ports
    • H01P5/16—Conjugate devices, i.e. devices having at least one port decoupled from one other port
    • H01P5/18—Conjugate devices, i.e. devices having at least one port decoupled from one other port consisting of two coupled guides, e.g. directional couplers
    • H01P5/184—Conjugate devices, i.e. devices having at least one port decoupled from one other port consisting of two coupled guides, e.g. directional couplers the guides being strip lines or microstrips

Definitions

  • the invention relates to a 3dB coupler having at least a first and a second electrical conductor which are spaced apart and which are capacitively and inductively coupled together, wherein the first conductor represents the primary side and the second conductor represents the secondary side of a transformer.
  • high-frequency amplifiers with the usual industrial frequencies of 13.56 MHz and 27.12 MHz and output powers of 1 kW to 50 kW are known.
  • the use of high frequency amplifiers of higher power and higher frequencies is desired, but can be difficult to realize for various reasons.
  • Such load impedance changes occur, for example, when igniting the laser excitation or plasma processes or when arcing in the plasma process.
  • high-frequency-driven laser excitations and, to an increasing extent, high-frequency excitations Plasma processes are operated pulsed, so the high-frequency amplifier with pulse frequencies of, for example, 100Hz to 300kHz on and off or be switched between two power ranges. With each switching process then arise short-term reflections, which are for the most part in the amplifiers in loss energy, ie heat development, implemented.
  • Tubes are more robust to reflections and can dissipate the energy dissipation better than transistors, but are more expensive and subject to operational wear. Besides, they are relatively big. Together with control circuit and cooling, tube high-frequency amplifiers are offered in control cabinets in sizes of approx. 0.8m x 1m x 2m.
  • a combiner commonly used in microwave technology or radio transmitter technology is the so-called 90 ° hybrid, which is also referred to as a 3dB coupler.
  • the 3dB coupler is a four-port.
  • a high-frequency power amplifier with the same internal resistance, the same output frequency and a 90 ° phase-shifted output signal is connected to two ports.
  • a load with a load resistor is connected.
  • a load balancing resistor is connected.
  • Load resistance, load balancing resistance and internal resistance of the amplifiers are the same.
  • the exclusively passive components of the 90 ° hybrid lines, capacitors, transformers or inductors) are designed so that the power of the two amplifiers is combined at the load, that no power is delivered at the load balancing resistor and that the two amplifiers are decoupled and mutually exclusive can not influence.
  • the 90 ° hybrid itself is ideally lossless, that is, the power of the two high-frequency amplifiers is fully supplied to the load applied to the third port.
  • the 3dB couplers known from microwave technology are constructed as Leltungskoppler with line lengths of ⁇ / 4. This line coupling technique is very unfavorable for 13 and 27 MHz, because the size would be a few meters with ⁇ / 4 lengths, which would mean a step backwards in view of the desired reduction of the generators.
  • a 3dB coupler may be constructed of discrete components, with the 3dB coupler typically having at least one Capacitive coupling capacitance and a transformer with a coupling inductance for inductive magnetic coupling has.
  • the coupling capacity by means of two spaced electrical conductors with a defined surface and a defined distance from each other can be realized easily, inexpensively and very precisely reproducible. In most cases, however, the required inductance is not achieved by means of two such conductors. It must therefore be increased appropriately.
  • One possibility is to increase the inductance exclusively with inductance-increasing elements, eg ferrites. To come to the necessary inductance at high powers are Inductor elements with large dimensions and high costs necessary.
  • the EP 0 456 212 A2 discloses a common mode choke for filtering common mode signals.
  • common mode choke In the known common mode choke a purely inductive coupling is sought.
  • the US 2004/0207482 A1 further discloses a microwave coupler.
  • the coupling takes place for microwave signals with a frequency of more than 1 GHz.
  • the US 2003/0218516 A1 shows a directional coupler, in which a part of a power to be determined is coupled out for measurement purposes. A capacitive coupling should be avoided.
  • the known battery charging system is operated at a frequency of 75 kHz.
  • the EP 0 964 525 A1 discloses an analog-to-digital converter with a coupler acting as an adder.
  • the coupling in the coupler is made by inductive coupling with two magnetic cores.
  • the Lelstungsdetektor is operated at frequencies of 800 MHz to 1 GHz.
  • the object of the present invention is to further form a 3dB coupler in such a way that a good capacitive and inductive coupling of the primary and the secondary side of the transformer can be realized with a small overall size.
  • the first and the second conductor each have a number of turns n> 1.
  • the inductance can be increased in a simple manner.
  • the inductance increases with the number of turns squared, with a doubling of the number of turns, the inductance therefore increases by a factor of four.
  • the size of an inductance-increasing element can therefore be reduced by a factor of 4 when the number of turns is doubled.
  • the size can be reduced by using more than one turn.
  • At a sufficiently high number of turns can ideally be dispensed with further inductance-increasing measures.
  • the phase offset between the input signal at one input port and a first output signal of a first output port should be + 45 ° and between the input signal and a second output signal of a second output port should be -45 °.
  • a phase offset of e.g. + 40 ° at one exit gate compared to the entrance gate and -50 ° at the other exit gate For shorter conductor lengths deviations from the ideal phase are smaller.
  • the inventive 3dB coupler can be used to couple RF power at a frequency in the range 1-80 MHz, in particular at about 1 MHz; about 2 MHz; 13.56 MHz; 27.12 MHz or about 60 MHz and be used at powers greater than 1kW. In this area, the use of 3dB couplers was previously unknown.
  • the dimensions of the 3dB coupler for frequencies below 100 MHz can be significantly reduced. They can be smaller than ⁇ / 4, in particular smaller than ⁇ / 8 and preferably even smaller than ⁇ / 10. With these quantities, the influences of the line theory of high-frequency technology have no meaning.
  • the 3dB coupler according to this invention is not a line coupler, as known from the prior art for higher frequencies, ie the character of the 3dB coupler is not (exclusively) by the Cable length determined. Rather, the coupling between the electrical conductors corresponds to a capacitive coupling with a fixed predetermined and set capacitance between the conductors at a given fundamental frequency f and predetermined characteristic impedance Z 0 .
  • the capacity can be adjusted by the area and the distance of the conductors. Furthermore, the coupling of an inductive coupling with a fixed predetermined and set inductance of the transformer at a given fundamental frequency f and predetermined wave resistance Z 0 corresponds.
  • the inductance is set, for example, depending on the length of the conductors, in particular the conductor sections.
  • at least one inductance-increasing element is provided in the coupling region for increasing the inductance of the conductor. The values for the inductance and the capacitance are calculated from the formulas given above as a function of frequency and characteristic impedance.
  • the inductance-increasing element may have any shape. Preferably, it surrounds the conductors in the coupling region at least partially. It can e.g. lying parallel to them. This allows a particularly simple and effective coupling can be achieved.
  • the Indukttechnikserhöhüngselement the conductors in the coupling region is annularly surrounded.
  • annular is meant that the conductor sections are surrounded in the coupling region by a largely closed geometery, they may be circular, ellipsoidal, rectangular or otherwise shaped. The advantage of an annular geometry is the reduction of stray fields.
  • the heat that arises in the inductance-increasing element particularly good to a heat sink, especially a flat cooling plate, be dissipated.
  • the inductance-increasing element may have a heat sink or be in heat exchange connection with such or may itself be embodied as a heat sink.
  • the rectangular shape of the inductance-increasing element may be composed of several parts, for example, four cuboids or two U-shaped parts or a U-shaped part and a cuboid. In the assembled from several parts designs a simplified production is possible, also can be provided to adjust the inductance adjustable gaps between the parts.
  • the at least one inductance-increasing element is formed of ferritic material.
  • one or more conductors may be provided at least in sections, advantageously in the coupling region encompassing ferrite rings.
  • ferrite rings with relatively high or low magnetic losses can be used. While ferrite rings with still relatively high magnetic losses can be used at comparatively low powers, ferrite material with extremely low magnetic losses must be used for high powers. With the same size ferrite body with low magnetic losses usually also lower A L values, which is why to achieve the same inductance correspondingly more ferrite must be used.
  • ferrite rings with a high A L value of, for example, 200 nH can be used at comparatively low powers, and thus only a few ferrite rings are required to achieve the necessary inductance of, for example, 600 nH, for high powers (eg 5 kW) with correspondingly large currents
  • Ferrite rings with a lower A L value can be used in the conductors because otherwise correspondingly high ferromagnetic losses occur in the ferrite cores.
  • the magnetic or even gyromagnetic losses in the ferrite core increase depending on the material at certain frequencies up to a magnetic resonance frequency. If this ferromagnetic resonance frequency is too low and too close to the operating frequency, the losses heat the ferrite.
  • This number of turns represents a good compromise, in particular when using an inductance-increasing element at the same time.
  • the design effort for the 3dB coupler is limited.
  • the inductance and the capacitance can be reproduced well and ohmic losses can be kept low. Stray sufferers have no great influence.
  • reproducibility is better when fewer ferrites are used, as the 10-20% tolerances used to make ferrites are less significant.
  • the inductive transformer of the 3dB coupler To make the inductive transformer of the 3dB coupler, a close inductive coupling is necessary, ie at least sections of the primary and the secondary line must be as close to each other as possible.
  • conductor sections of the primary and the secondary side may overlap or mesh with each other.
  • the extend Conductor or sections thereof advantageously at least in sections, preferably in the coupling region, parallel to each other.
  • At least one spacer in particular an insulator, can be provided, which holds portions of the at least one first and the at least one second conductor at a predetermined distance. It is particularly preferred if the conductors extend at least in sections, preferably in the coupling region, in parallel planes.
  • areal spacers or insulators may be provided between adjacent conductor sections.
  • the insulators are preferably made of an insulating material with an ⁇ r in the range 2 - 2.6, preferably from about 2.33, and a thickness of about 0.5mm to 3mm provided.
  • the insulators may extend throughout the coupling region.
  • PTFE polytetrafluoroethylene
  • Teflon polytetrafluoroethylene
  • a low loss factor tan ⁇ of the insulating material is advantageous.
  • tan ⁇ should be less than 0.005 to minimize losses in the insulating material.
  • RT / duorit 5870 from ROGERS Corp. has been found to be particularly suitable in the first experiments. exhibited a tan ⁇ of 0.0005 - 0.0012 and an ⁇ r of 2.3.
  • a space-saving arrangement which at the same time allows easy to reproduce capacities, results when the conductors are formed at least in the coupling region as a flat conductor tracks.
  • the at least one spacer is formed flat and a conductor portion of the first conductor on the one and a conductor portion of the second conductor mounted on the opposite side of the spacer, in particular the spacer with a conductor portion of the first and second Printed conductor, coated or laminated.
  • the spacer serves as a carrier material for the conductors or conductor tracks and may be formed as a printed circuit board.
  • first and second conductors can thereby be arranged in the coupling region in a conductor stack, wherein adjacent conductor segments are spaced apart, in particular, by an insulator.
  • a plurality of spacers, in particular printed circuit boards, provided on both sides with conductor sections are stacked, wherein the conductor sections of opposing rare adjacent spacers are essentially congruent.
  • the conductor tracks with a dielectric as a carrier layer can be easily realized by means of a board design and circuit board production.
  • a first circuit board which has a recess which is surrounded by a respective conductor track on the top and bottom of the circuit board.
  • At least two essentially T-shaped printed circuit boards are provided, each of which has a conductor track on the upper and lower sides, the printed conductors being connected to two separate windings.
  • the recess can receive a ring-shaped ferrite, for example, where the tees can be inserted into the breakthrough of the ferrite.
  • the operating frequency is not limited to the industry frequency of 13.56 MHz, but may be in the range 1 to 100MHz. the big advantage This arrangement is, however, that the principle is applicable to even much lower frequencies.
  • the track sections do not work as a line coupler, but as coupling capacitances and coupling inductances. If the printed conductors or printed conductor sections were to work as line couplers, at least one line length of ⁇ ⁇ 4 would have to be used. However, such line lengths are longer, the lower the frequency. This would mean ever larger designs for line couplers. According to the concept of the invention, however, the design does not have to be lengthened with the reduction of the frequency, only the kapetity and inductance values, for example by influencing the number of turns, have to be adapted.
  • FIGS. 1a, 1b show the top 1a and bottom 1b of a first circuit board 1.
  • Die FIGS. 2a, 2b show the top 2a and bottom 2b of a second circuit board 2.
  • Die FIGS. 3a, 3b show the top 3a and bottom 3b of a third circuit board 3.
  • an inventive 3 dB coupler 100 can be formed, as shown in the Fig. 4 is shown.
  • the terminals 11, 16, 21, 26 of the printed circuit board 1 are the inputs and outputs (gates) of the 3dB coupler.
  • the terminals 12 and 12a are congruent when the printed circuit boards 1 and 2 are placed on each other, and are electrically connected to each other in composite 3dB coupler. Same glit for the terminals 13, 13a; 14, 14a; 15, 15a; 22, 22a; 23, 23a; 24, 24a and 25, 25a.
  • the 3dB coupler has a transformer, wherein the inductance of the primary side (vertically shaded areas) has two turns that run through the inductance-increasing element 4 designed as ferrite. The course of the two turns is indicated by reference numerals and arrows in the Figures 1a - 3b explained.
  • the first inductance runs from 11 to 12, further to 12a, further to 13, further to 13a, further to 14, further to 14a, further to 15, further to 15a and finally to the terminal 16.
  • the inductance of the secondary side (diagonally hatched areas) also continues in two turns through the inductance-increasing element 4, namely from terminal 21 to 22, further to 22a, continuing to 23 after 23a continue to 24 continue to 24a continue to 25 continue to 25a and finally to connection 26.
  • the trained 3dB coupler 100 ( Fig. 4 )
  • the capacitance is so substantially only between the conductive surfaces of the top 1a, 2a, 3a and bottom 1b, 2b, 3b each of a printed circuit board 1, 2nd , 3 trained.
  • the upper side 1a of the printed circuit board 1 and the lower side 2b of the printed circuit board 2 have printed conductors 27a, 28b of the same inductance, and the upper side 2a of the printed circuit board 2 and the lower side 3b of the printed circuit board 3 have printed conductors 28a, 29b of the other inductor.
  • the circuit boards 1, 2, 3 Since a voltage is formed across the inductance, the circuit boards 1, 2, 3 must be spaced apart from each other, in particular by spacers, for example by Isoller plates or films, be isolated from each other separated. The whole arrangement of three circuit boards 1, 2, 3 can also be integrated into a multi-layered (in this case six-layered) multilayer board, which allows a more precise and cost-optimized production.
  • the inductance-increasing elements 4 must then be inserted in the form of two half-shells.
  • a discrete capacitor can be connected in parallel or the area can be increased on both sides, eg on the PCB 1
  • the arrangement of the printed circuit boards 1, 2, 3 to the 3dB coupler 100 is shown. You can see the terminals 16, 26. Above the circuit board 1, the circuit boards 2, 3 are arranged, wherein the T-shaped circuit boards 2, 3 are inserted into the free space 4a of the formed as a ferrite Induktterrorismserhöhungselements 4. This means that the coupling region 101 is surrounded by the inductance-increasing element 4.
  • the printed circuit boards 1, 2, 3 have printed conductors 27a, 27b, 28a, 28b, 29a, 29b on their upper side 1a, 2a, 3a and lower side 1b, 2b, 3b.
  • the conductor tracks 27a, 27b, 28a, 28b, 29a, 29b on different sides of a printed circuit board 1, 2, 3 are spaced apart by the carrier material of the printed circuit board 1, 2, 3.
  • the carrier material is an insulator and serves as a spacer.
  • the opposing trace portions of adjacent circuit boards 1,2,3 are spaced by spacers.
  • the inductance-increasing element 4 is placed on a heat sink 103, which in turn sits on a support plate 104. Between the heat sink 103 and the element 4, a heat conduction-improving layer 105 is arranged.
  • the conductors 110, 111 designed as strip conductors are shaped as spirals.
  • the spirals made of conductive material are applied to both sides of a circuit board, laminated example beispielse. It is largely congruent a conductor 110 mounted on the top and a conductor 111 on the underside of the circuit board.
  • terminals 112-115 are desired as vias, they must be made offset, as in the Fig. 5 implied is. However, it is also conceivable to form the connections 112-115 respectively on the top and bottom side and to arrange the 3dB coupler, for example, between two amplifiers.
  • an inductance-enhancing element e.g. a ferrite e.g. conceivable as a disk, pin or pot core.
  • a recess e.g. a bore for a ferrite can be provided.

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Claims (12)

  1. Coupleur (100) sous la forme d'un coupleur 3dB couplant deux signaux d'entrée déphasés de 90° en un signal de sortie, comportant au moins un premier et un deuxième conducteur électrique (110, 111) qui sont espacés l'un de l'autre et qui sont couplés ensemble de façon capacitive et inductive, le premier conducteur (110) constituant le côté primaire et le deuxième conducteur (111) le côté secondaire d'un transformateur, le premier et le deuxième conducteur (110, 111) présentant chacun un nombre de spires n > 1 et le coupleur (100) étant réalisé sous la forme d'un circuit à quatre ports, le coupleur étant réalisé avec une capacité de couplage prédéfinie CK et une inductance de couplage prédéfinie LK, avec CK = 1/(2πf Z0), LK = Z0/(2πf), Z0 une impédance caractéristique prédéfinie et f une fréquence fondamentale prédéfinie, le coupleur étant conçu pour coupler une puissance HF à une fréquence dans la plage de 1 à 80 MHz et à des puissances > 1 kW.
  2. Coupleur 3dB selon la revendication 1, caractérisé en ce que le premier et le deuxième conducteur présentent chacun un nombre de spires n = 2.
  3. Coupleur 3dB selon l'une des revendications précédentes, caractérisé en ce qu'au moins un élément d'augmentation d'inductance (4) est prévu dans une zone de couplage (101) pour augmenter l'inductance des conducteurs.
  4. Coupleur 3dB selon la revendication 3, caractérisé en ce que ledit au moins un élément d'augmentation d'inductance (4) entoure au moins partiellement les conducteurs (110, 111) dans la zone de couplage (101).
  5. Coupleur 3dB selon l'une des revendications 3 ou 4, caractérisé en ce que ledit au moins un élément d'augmentation d'inductance (4) est de forme annulaire.
  6. Coupleur 3dB selon l'une des revendications 3 à 5, caractérisé en ce que ledit au moins un élément d'augmentation d'inductance (4) présente au moins une fente réglable.
  7. Coupleur 3dB selon l'une des revendications 3 à 6, caractérisé en ce que ledit au moins un élément d'augmentation d'inductance (4) est constitué d'un matériau ferritique.
  8. Coupleur 3dB selon l'une des revendications précédentes, caractérisé en ce que la longueur dudit au moins un premier et/ou deuxième conducteur (110, 111) est < λ/4, de préférence < λ/8, particulièrement de préférence < λ/10.
  9. Coupleur 3dB selon l'une des revendications précédentes, caractérisé en ce qu'au moins un élément d'écartement est prévu, qui maintient des parties dudit au moins un premier et dudit au moins un deuxième conducteur à une distance prédéfinie, ledit au moins un élément d'écartement étant de forme plate et une partie de conducteur du premier conducteur étant disposée d'un côté et une partie de conducteur du deuxième conducteur du côté opposé de l'élément d'écartement, en particulier l'élément d'écartement étant imprimé, revêtu ou contrecollé avec une partie de conducteur du premier et du deuxième conducteur.
  10. Coupleur 3dB selon l'une des revendications 3 à 9, caractérisé en ce que l'élément d'augmentation d'inductance (4) présente ou est en relation d'échange de chaleur avec un dissipateur thermique (103) ou est lui-même réalisé sous la forme d'un dissipateur thermique (103).
  11. Coupleur 3dB selon l'une des revendications précédentes, caractérisé en ce qu'une première carte à circuit imprimé (1) est prévu, qui présente un évidement qui est entouré par une piste conductrice (27a, 27b) respectivement sur les faces supérieure et inférieure (1a, 1b) de la carte à circuit imprimé (1), qu'au moins deux cartes à circuit imprimé (2, 3) sensiblement en forme de T sont prévues, qui présentent chacune une piste conductrice (28a, 28b, 29a, 29b) respectivement sur les faces supérieure et inférieure (2a, 3a, 2b, 3b), les pistes conductrices (27a, 27b, 28a, 28b, 29a, 29b) étant reliées en deux enroulements séparés.
  12. Utilisation d'un coupleur 3dB selon l'une des revendications précédentes pour coupler une puissance HF à une fréquence dans la plage de 1 à 80 MHz, en particulier à 1 MHz ; 2 MHz ; 13,56 MHz ; 27,12 MHz ou 60 MHz et à des puissances supérieures à 1 kW.
EP05004860.2A 2005-03-05 2005-03-05 Coupleur 3dB Active EP1699107B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
EP05004860.2A EP1699107B1 (fr) 2005-03-05 2005-03-05 Coupleur 3dB
US11/368,314 US7477114B2 (en) 2005-03-05 2006-03-03 3DB coupler
JP2006059327A JP2006245591A (ja) 2005-03-05 2006-03-06 ３ｄＢカプラ
US11/371,628 US7452443B2 (en) 2005-03-05 2006-03-09 Vacuum plasma generator
US12/257,643 US8133347B2 (en) 2005-03-05 2008-10-24 Vacuum plasma generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP05004860.2A EP1699107B1 (fr) 2005-03-05 2005-03-05 Coupleur 3dB

Related Child Applications (1)

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EP15000604 Division-Into 2015-03-03

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EP1699107A1 EP1699107A1 (fr) 2006-09-06
EP1699107B1 true EP1699107B1 (fr) 2017-05-31

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EP (1) EP1699107B1 (fr)
JP (1) JP2006245591A (fr)

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US8704611B2 (en) * 2012-06-28 2014-04-22 Werlatone, Inc. Planar constant-resistance hybrid filter
DE102015212233A1 (de) 2015-06-30 2017-01-05 TRUMPF Hüttinger GmbH + Co. KG Leistungscombiner mit symmetrisch angeordnetem Kühlkörper und Leistungscombineranordnung
EP3605115A1 (fr) 2018-08-02 2020-02-05 TRUMPF Huettinger Sp. Z o. o. Détecteur d'arc pour détecter des arcs, système de plasma et procédé de détection d'arcs
EP3605582A1 (fr) 2018-08-02 2020-02-05 TRUMPF Huettinger Sp. Z o. o. Convertisseur de puissance et système d'alimentation électrique

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US7477114B2 (en) 2009-01-13
EP1699107A1 (fr) 2006-09-06
US20060197629A1 (en) 2006-09-07

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