EP1558422A1 - Verfahren zum bohren von löchern mittels eines laserstrahls in einem substrat, insbesondere in einem elektrischen schaltungssubstrat - Google Patents
Verfahren zum bohren von löchern mittels eines laserstrahls in einem substrat, insbesondere in einem elektrischen schaltungssubstratInfo
- Publication number
- EP1558422A1 EP1558422A1 EP03779671A EP03779671A EP1558422A1 EP 1558422 A1 EP1558422 A1 EP 1558422A1 EP 03779671 A EP03779671 A EP 03779671A EP 03779671 A EP03779671 A EP 03779671A EP 1558422 A1 EP1558422 A1 EP 1558422A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- hole
- laser beam
- jump
- substrate
- angular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0017—Etching of the substrate by chemical or physical means
- H05K3/0026—Etching of the substrate by chemical or physical means by laser ablation
- H05K3/0032—Etching of the substrate by chemical or physical means by laser ablation of organic insulating material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/073—Shaping the laser spot
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
- B23K26/389—Removing material by boring or cutting by boring of fluid openings, e.g. nozzles, jets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/42—Printed circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/05—Patterning and lithography; Masks; Details of resist
- H05K2203/0548—Masks
- H05K2203/0554—Metal used as mask for etching vias, e.g. by laser ablation
Definitions
- the invention relates to a method for drilling holes by means of a laser beam in a substrate, in particular in an electrical circuit substrate, the laser beam having a beam spot diameter which is smaller than the hole diameter to be drilled, in each case in the region of a hole to be drilled on at least one Circular path is moved.
- the positions of the drill holes are approached one after the other with the deflection unit used in each case.
- the shape and processing or processing of the borehole are expediently predefined by a program (a so-called drilling tool). With this program, each hole is processed in the same way.
- a program a so-called drilling tool.
- each hole is processed in the same way.
- the laser beam jumps from a starting position, for example a previous hole, to the center of the hole to be newly drilled and from there in an always the same, defined angular direction in the first circular path is traversed. After passing through this first circular path, the beam can then, if necessary, be experienced in further circular paths.
- the aim of the present invention is to improve the above-mentioned method for drilling holes in substrates in such a way that a higher process speed with good hole quality at the same time, i.e. good roundness of the holes.
- the deflection units should be less stressed, i.e. that especially galvomotors have a longer lifespan.
- this goal is achieved in that when the laser beam is aligned with a new borehole, the beam axis first moves in a jump direction specified by the beam position into the center of the hole to be drilled and then in a defined radial movement from the center to a defined circular path is steered and that the angular direction of the traversing movement is defined as a function of the jump direction in such a way that a change in direction of the beam axis in the center does not exceed a predetermined maximum angular range or that — ideally — the direction is maintained.
- the movement out of the center of the hole is selected as a function of the jump direction from the last hole in each case so that abrupt changes in direction, for example of more than 225 °, are avoided.
- this can be done by varying the predefined drilling program for a hole in each individual case in such a way that the angular direction of the traversing movement is adapted to the jump direction of the incoming laser beam. In this case, there is no or almost no change of direction in the center of the hole, but such a solution is very complex.
- an embodiment of the method according to the invention is therefore favorable, in which, in accordance with the predetermined maximum angular range, a number of angular directions for the traversing movement is specified, each of which is assigned an angular range for incoming jump directions, depending on the, in which angle range the jump direction is, an associated drilling program with the associated travel direction can be selected. If, for example, the maximum permissible angular range for a change of direction at the center is 45 °, eight angular ranges of 45 ° each are defined for the incoming jump directions, each of which is assigned an outgoing direction of travel with an associated drilling program. Depending on the direction in which the laser beam arrives, the associated drilling program is then selected and implemented.
- the invention is explained in more detail below using exemplary embodiments with reference to the drawing. It shows
- FIG. 1 shows a schematically illustrated laser arrangement for drilling holes in a multilayer substrate
- FIG. 2 shows the path of the beam axis of an incoming laser beam in the region of a hole to be drilled without changing the angle in the center
- FIG. 3 shows the path of an incoming laser beam in the region of a hole to be drilled with maximum angle change in the center
- FIGS. 4 to 11 show the path of the axis of a laser beam in the region of a hole to be drilled according to the method according to the invention with different directions of jump of the incoming beam.
- the arrangement shown schematically in FIG. 1 and in no way to scale shows a laser 1 with a deflection unit 2 and an optical imaging unit 3, via which a laser beam 4 is directed onto a substrate 10, preferably a printed circuit board.
- this substrate 10 has an upper, first metal layer (for example a copper layer) 11 and a lower, second metal layer 12, between which a dielectric layer 13 is arranged.
- This dielectric layer consists for example of a polymer material such as RCC or a glass fiber reinforced polymer material such as FR4. It is known that the metal layers, which generally consist of copper, require a different amount of energy for processing or transmission than the dielectric. Accordingly, different laser settings, such as different pulse repetition rates and different focusing of the laser beam, can also be selected.
- blind or through holes 15 with a diameter D1 are to be drilled in the substrate 1.
- a holes 14 are first drilled through the copper layer 11, and then the blind holes 15 can be made in the dielectric layer 13 with another laser setting.
- the laser beam 4 with its focal spot F1 is moved in concentric circles in the hole region to be drilled until the material is completely removed from the hole 14 or 15 in question.
- the individual holes are processed one after the other so that the laser beam or the optical axis of the laser beam switched off during the jump or operated with very low energy (at 355 nm UV, for example in CW mode) jumps from one hole area to the next.
- this direction of jump from one hole to the other is indicated by an arrow S.
- the jump therefore runs from a starting point at a preceding hole, for example after completion of the drilling process at an edge point or hole center, in an approximately straight line to the center point of the hole to be subsequently drilled.
- a predetermined drilling program is then started from this center point M, the axis of the laser beam initially being brought onto a circular path in a fixed predetermined travel direction V or alternatively from the center of the circle.
- the laser is switched on and the laser beam runs through the circular path in one or more revolutions, depending on the given conditions, such as substrate material, borehole depth, type and energy density of the laser, etc.
- the laser beam is moved to another circular path after it has passed through the first circular path one or more times.
- the laser beam or the beam axis of the switched-off laser is moved from the center M only in the beginning in the direction of travel V; then it is conveniently controlled so that it is approximated to the desired circular path K in the form of an arc B (FIG. 2).
- the angle of the jump direction S to the center M depends on the respective starting point A, which is usually a preceding hole. Depending on the arrangement and sequence of the holes to be machined, the jump direction S can therefore take any angle. However, since the angle of the direction of travel V is permanently preprogrammed, there is a more or less large change in angle at the center M. The ideal case is shown in Figure 2.
- the starting point A is such that the jump direction S is approximately the same as the travel direction V, which is assumed to be 0 ° in the X-axis. The axis of the laser beam can thus be moved beyond the center point M without interruption, so that the deflection unit can carry out a continuous movement.
- the laser beam is thus moved in the direction of travel V towards the circular path, in which case it is then brought into the circular path K in accordance with the arc B shown in dashed lines or alternatively in the direction of travel V and carries out the drilling process along the circular path K shown in dashed lines.
- the worst case for guiding the laser beam is shown in FIG. 3.
- the axis of the laser beam arrives in a jump direction that is opposite to the predetermined direction of travel V by 180 °.
- the beam axis must therefore change direction by 180 ° at the center M.
- the deflection unit must first be stopped and accelerated in a new direction.
- the direction of travel is adapted according to the invention to the direction of jump S as far as possible. Since a respective adjustment of the
- Drilling program in order to achieve the ideal case (according to FIG. 2) for each direction, is very complex, a certain one Number of drilling programs fixed, and depending on the jump direction, the program with the least deviation between the jump direction and the travel direction is selected.
- eight programs are specified with travel directions VI to V8 each offset by 45 °, each travel direction being assigned an angular range for an incoming jump direction. These eight predetermined combinations of jump direction and travel direction are shown in FIGS. 4 to 11.
- the eight preprogrammed traversing directions VI to V8 are each coupled with an angular range W1 to W8, so that depending on the angular range Wl to W8 in which a jump direction Sl to S8 falls, the associated drilling program with the traversing direction Sl to S8 is automatically triggered , This results in a maximum between the jump direction and the direction of travel
- Angle change at the center of 22.5 ° The direction from the center of the hole is given by the bisector of the opposite angle of incidence. If this angle range is 45 °, the change in angle per range is a maximum of 22.5 ° (see FIG. 4).
- the appropriate drilling program can be defined in advance for each hole to be drilled, so that there is no loss of time as a result of insufficient processor performance can. Otherwise, the number of specified directions of travel is by no means limited to the example described, but, depending on the requirements, any other number of specified directions of travel and associated drilling programs can be provided or, ideally, the direction can be taken into account online.
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Laser Beam Processing (AREA)
- Drilling And Boring (AREA)
Abstract
Description
Claims
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10251480 | 2002-11-05 | ||
DE10251480A DE10251480B4 (de) | 2002-11-05 | 2002-11-05 | Verfahren zum Bohren von Löchern mittels eines Laserstrahls in einem elektrischen Schaltungssubstrat |
PCT/DE2003/003564 WO2004041474A1 (de) | 2002-11-05 | 2003-10-27 | Verfahren zum bohren von löchern mittels eines laserstrahls in einem substrat, insbesondere in einem elektrischen schaltungssubstrat |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1558422A1 true EP1558422A1 (de) | 2005-08-03 |
EP1558422B1 EP1558422B1 (de) | 2006-11-22 |
Family
ID=32115240
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP03779671A Expired - Lifetime EP1558422B1 (de) | 2002-11-05 | 2003-10-27 | Verfahren zum bohren von löchern mittels eines laserstrahls in einem substrat, insbesondere in einem elektrischen schaltungssubstrat |
Country Status (8)
Country | Link |
---|---|
US (1) | US7897893B2 (de) |
EP (1) | EP1558422B1 (de) |
JP (1) | JP4662028B2 (de) |
KR (1) | KR101067078B1 (de) |
CN (1) | CN100430175C (de) |
AU (1) | AU2003287851A1 (de) |
DE (2) | DE10251480B4 (de) |
WO (1) | WO2004041474A1 (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102004040068B4 (de) * | 2004-08-18 | 2018-01-04 | Via Mechanics, Ltd. | Verfahren zum Laserbohren eines mehrschichtig aufgebauten Werkstücks |
US8183499B2 (en) * | 2005-06-07 | 2012-05-22 | Nissan Tanaka Corporation | Laser piercing method and processing apparatus |
CN101351115B (zh) * | 2007-07-16 | 2010-12-08 | 牧德科技股份有限公司 | 印刷电路板钻孔车间的钻孔质量监控方法 |
US20090312859A1 (en) * | 2008-06-16 | 2009-12-17 | Electro Scientific Industries, Inc. | Modifying entry angles associated with circular tooling actions to improve throughput in part machining |
JP2013075299A (ja) * | 2011-09-29 | 2013-04-25 | Komatsu Ntc Ltd | 孔加工方法 |
US8716625B2 (en) * | 2012-02-03 | 2014-05-06 | Trumpf Werkzeugmaschinen Gmbh + Co. Kg | Workpiece cutting |
CN104133262A (zh) * | 2014-07-16 | 2014-11-05 | 深圳市华星光电技术有限公司 | 滤色板、滤色板制作方法及液晶显示器 |
GB2529153A (en) * | 2014-08-06 | 2016-02-17 | Bae Systems Plc | Substrate manufacture |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3742182A (en) * | 1971-12-27 | 1973-06-26 | Coherent Radiation | Method for scanning mask forming holes with a laser beam |
US4169976A (en) * | 1976-02-27 | 1979-10-02 | Valfivre S.P.A. | Process for cutting or shaping of a substrate by laser |
US4782438A (en) * | 1986-06-10 | 1988-11-01 | Yamazaki Mazak Corporation | Means and method for translating a turret punch press control program into a laser beam machine control program |
JPH02169194A (ja) * | 1988-12-23 | 1990-06-29 | Shin Meiwa Ind Co Ltd | 穴あけ切断方法 |
US5293025A (en) * | 1991-08-01 | 1994-03-08 | E. I. Du Pont De Nemours And Company | Method for forming vias in multilayer circuits |
JPH07112287A (ja) * | 1993-10-15 | 1995-05-02 | Fanuc Ltd | Ncレーザ装置 |
JP3162255B2 (ja) * | 1994-02-24 | 2001-04-25 | 三菱電機株式会社 | レーザ加工方法及びその装置 |
JP3372339B2 (ja) | 1994-02-25 | 2003-02-04 | ファナック株式会社 | レーザ加工装置 |
US5856649A (en) * | 1994-02-25 | 1999-01-05 | Fanuc Ltd. | Laser beam machine |
US5593606A (en) * | 1994-07-18 | 1997-01-14 | Electro Scientific Industries, Inc. | Ultraviolet laser system and method for forming vias in multi-layered targets |
JP3515838B2 (ja) * | 1995-10-02 | 2004-04-05 | ファナック株式会社 | レーザ加工装置、レーザ加工方法、及びプログラム作成装置 |
US5973290A (en) * | 1997-02-26 | 1999-10-26 | W. L. Gore & Associates, Inc. | Laser apparatus having improved via processing rate |
CN1376100A (zh) * | 1999-09-28 | 2002-10-23 | 住友重机械工业株式会社 | 激光钻孔的加工方法及其加工装置 |
WO2001074529A2 (en) * | 2000-03-30 | 2001-10-11 | Electro Scientific Industries, Inc. | Laser system and method for single pass micromachining of multilayer workpieces |
US6605799B2 (en) * | 2000-05-25 | 2003-08-12 | Westar Photonics | Modulation of laser energy with a predefined pattern |
-
2002
- 2002-11-05 DE DE10251480A patent/DE10251480B4/de not_active Expired - Fee Related
-
2003
- 2003-10-27 WO PCT/DE2003/003564 patent/WO2004041474A1/de active IP Right Grant
- 2003-10-27 CN CNB2003801026812A patent/CN100430175C/zh not_active Expired - Lifetime
- 2003-10-27 DE DE50305791T patent/DE50305791D1/de not_active Expired - Lifetime
- 2003-10-27 AU AU2003287851A patent/AU2003287851A1/en not_active Abandoned
- 2003-10-27 KR KR1020057007947A patent/KR101067078B1/ko active IP Right Grant
- 2003-10-27 EP EP03779671A patent/EP1558422B1/de not_active Expired - Lifetime
- 2003-10-27 JP JP2004549066A patent/JP4662028B2/ja not_active Expired - Lifetime
-
2005
- 2005-04-29 US US11/117,414 patent/US7897893B2/en active Active
Non-Patent Citations (1)
Title |
---|
See references of WO2004041474A1 * |
Also Published As
Publication number | Publication date |
---|---|
DE50305791D1 (de) | 2007-01-04 |
EP1558422B1 (de) | 2006-11-22 |
AU2003287851A1 (en) | 2004-06-07 |
CN100430175C (zh) | 2008-11-05 |
KR101067078B1 (ko) | 2011-09-22 |
DE10251480B4 (de) | 2008-01-24 |
CN1711150A (zh) | 2005-12-21 |
WO2004041474A1 (de) | 2004-05-21 |
DE10251480A1 (de) | 2004-05-19 |
US7897893B2 (en) | 2011-03-01 |
US20070187373A1 (en) | 2007-08-16 |
JP2006505926A (ja) | 2006-02-16 |
JP4662028B2 (ja) | 2011-03-30 |
KR20050073607A (ko) | 2005-07-14 |
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