CN1711150A - 用于在衬底中、尤其是在电路衬底中借助激光束钻孔的方法 - Google Patents
用于在衬底中、尤其是在电路衬底中借助激光束钻孔的方法 Download PDFInfo
- Publication number
- CN1711150A CN1711150A CNA2003801026812A CN200380102681A CN1711150A CN 1711150 A CN1711150 A CN 1711150A CN A2003801026812 A CNA2003801026812 A CN A2003801026812A CN 200380102681 A CN200380102681 A CN 200380102681A CN 1711150 A CN1711150 A CN 1711150A
- Authority
- CN
- China
- Prior art keywords
- hole
- angle
- jump
- boring
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 21
- 239000000758 substrate Substances 0.000 title claims abstract description 17
- 238000006073 displacement reaction Methods 0.000 claims abstract description 27
- 238000005553 drilling Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 description 5
- 239000002184 metal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 2
- 238000013016 damping Methods 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000009191 jumping Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0017—Etching of the substrate by chemical or physical means
- H05K3/0026—Etching of the substrate by chemical or physical means by laser ablation
- H05K3/0032—Etching of the substrate by chemical or physical means by laser ablation of organic insulating material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/073—Shaping the laser spot
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
- B23K26/389—Removing material by boring or cutting by boring of fluid openings, e.g. nozzles, jets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/42—Printed circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/05—Patterning and lithography; Masks; Details of resist
- H05K2203/0548—Masks
- H05K2203/0554—Metal used as mask for etching vias, e.g. by laser ablation
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Laser Beam Processing (AREA)
- Drilling And Boring (AREA)
Abstract
Description
Claims (5)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10251480.1 | 2002-05-11 | ||
DE10251480A DE10251480B4 (de) | 2002-11-05 | 2002-11-05 | Verfahren zum Bohren von Löchern mittels eines Laserstrahls in einem elektrischen Schaltungssubstrat |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1711150A true CN1711150A (zh) | 2005-12-21 |
CN100430175C CN100430175C (zh) | 2008-11-05 |
Family
ID=32115240
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2003801026812A Expired - Lifetime CN100430175C (zh) | 2002-11-05 | 2003-10-27 | 用于在衬底中借助激光束钻孔的方法 |
Country Status (8)
Country | Link |
---|---|
US (1) | US7897893B2 (zh) |
EP (1) | EP1558422B1 (zh) |
JP (1) | JP4662028B2 (zh) |
KR (1) | KR101067078B1 (zh) |
CN (1) | CN100430175C (zh) |
AU (1) | AU2003287851A1 (zh) |
DE (2) | DE10251480B4 (zh) |
WO (1) | WO2004041474A1 (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101351115B (zh) * | 2007-07-16 | 2010-12-08 | 牧德科技股份有限公司 | 印刷电路板钻孔车间的钻孔质量监控方法 |
CN104133262A (zh) * | 2014-07-16 | 2014-11-05 | 深圳市华星光电技术有限公司 | 滤色板、滤色板制作方法及液晶显示器 |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102004040068B4 (de) * | 2004-08-18 | 2018-01-04 | Via Mechanics, Ltd. | Verfahren zum Laserbohren eines mehrschichtig aufgebauten Werkstücks |
WO2006132229A1 (ja) * | 2005-06-07 | 2006-12-14 | Nissan Tanaka Corporation | レーザピアシング方法及び加工装置 |
US20090312859A1 (en) * | 2008-06-16 | 2009-12-17 | Electro Scientific Industries, Inc. | Modifying entry angles associated with circular tooling actions to improve throughput in part machining |
JP2013075299A (ja) * | 2011-09-29 | 2013-04-25 | Komatsu Ntc Ltd | 孔加工方法 |
US8716625B2 (en) * | 2012-02-03 | 2014-05-06 | Trumpf Werkzeugmaschinen Gmbh + Co. Kg | Workpiece cutting |
GB2529153A (en) * | 2014-08-06 | 2016-02-17 | Bae Systems Plc | Substrate manufacture |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3742182A (en) * | 1971-12-27 | 1973-06-26 | Coherent Radiation | Method for scanning mask forming holes with a laser beam |
US4169976A (en) * | 1976-02-27 | 1979-10-02 | Valfivre S.P.A. | Process for cutting or shaping of a substrate by laser |
US4782438A (en) * | 1986-06-10 | 1988-11-01 | Yamazaki Mazak Corporation | Means and method for translating a turret punch press control program into a laser beam machine control program |
JPH02169194A (ja) * | 1988-12-23 | 1990-06-29 | Shin Meiwa Ind Co Ltd | 穴あけ切断方法 |
US5293025A (en) * | 1991-08-01 | 1994-03-08 | E. I. Du Pont De Nemours And Company | Method for forming vias in multilayer circuits |
JPH07112287A (ja) * | 1993-10-15 | 1995-05-02 | Fanuc Ltd | Ncレーザ装置 |
JP3162255B2 (ja) * | 1994-02-24 | 2001-04-25 | 三菱電機株式会社 | レーザ加工方法及びその装置 |
US5856649A (en) * | 1994-02-25 | 1999-01-05 | Fanuc Ltd. | Laser beam machine |
JP3372339B2 (ja) | 1994-02-25 | 2003-02-04 | ファナック株式会社 | レーザ加工装置 |
US5593606A (en) * | 1994-07-18 | 1997-01-14 | Electro Scientific Industries, Inc. | Ultraviolet laser system and method for forming vias in multi-layered targets |
JP3515838B2 (ja) * | 1995-10-02 | 2004-04-05 | ファナック株式会社 | レーザ加工装置、レーザ加工方法、及びプログラム作成装置 |
US5973290A (en) * | 1997-02-26 | 1999-10-26 | W. L. Gore & Associates, Inc. | Laser apparatus having improved via processing rate |
EP1224999A4 (en) * | 1999-09-28 | 2007-05-02 | Sumitomo Heavy Industries | LASER BORING METHOD AND LASER DRILLING DEVICE |
US6407363B2 (en) * | 2000-03-30 | 2002-06-18 | Electro Scientific Industries, Inc. | Laser system and method for single press micromachining of multilayer workpieces |
US6605799B2 (en) * | 2000-05-25 | 2003-08-12 | Westar Photonics | Modulation of laser energy with a predefined pattern |
-
2002
- 2002-11-05 DE DE10251480A patent/DE10251480B4/de not_active Expired - Fee Related
-
2003
- 2003-10-27 AU AU2003287851A patent/AU2003287851A1/en not_active Abandoned
- 2003-10-27 EP EP03779671A patent/EP1558422B1/de not_active Expired - Lifetime
- 2003-10-27 CN CNB2003801026812A patent/CN100430175C/zh not_active Expired - Lifetime
- 2003-10-27 JP JP2004549066A patent/JP4662028B2/ja not_active Expired - Lifetime
- 2003-10-27 DE DE50305791T patent/DE50305791D1/de not_active Expired - Lifetime
- 2003-10-27 WO PCT/DE2003/003564 patent/WO2004041474A1/de active IP Right Grant
- 2003-10-27 KR KR1020057007947A patent/KR101067078B1/ko active IP Right Grant
-
2005
- 2005-04-29 US US11/117,414 patent/US7897893B2/en active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101351115B (zh) * | 2007-07-16 | 2010-12-08 | 牧德科技股份有限公司 | 印刷电路板钻孔车间的钻孔质量监控方法 |
CN104133262A (zh) * | 2014-07-16 | 2014-11-05 | 深圳市华星光电技术有限公司 | 滤色板、滤色板制作方法及液晶显示器 |
Also Published As
Publication number | Publication date |
---|---|
WO2004041474A1 (de) | 2004-05-21 |
CN100430175C (zh) | 2008-11-05 |
AU2003287851A1 (en) | 2004-06-07 |
DE50305791D1 (de) | 2007-01-04 |
JP2006505926A (ja) | 2006-02-16 |
DE10251480A1 (de) | 2004-05-19 |
KR20050073607A (ko) | 2005-07-14 |
DE10251480B4 (de) | 2008-01-24 |
EP1558422B1 (de) | 2006-11-22 |
EP1558422A1 (de) | 2005-08-03 |
JP4662028B2 (ja) | 2011-03-30 |
US7897893B2 (en) | 2011-03-01 |
KR101067078B1 (ko) | 2011-09-22 |
US20070187373A1 (en) | 2007-08-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: HITACHI VIA MACHINE CO., LTD. Free format text: FORMER OWNER: SIEMENS AG Effective date: 20060623 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20060623 Address after: Kanagawa Applicant after: Hitachi VIA Machinery Co.,Ltd. Address before: Munich, Germany Applicant before: Siemens AG |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee |
Owner name: VIA MECHANICS LTD. Free format text: FORMER NAME: HITACHI VIA MECHANICS LTD. |
|
CP01 | Change in the name or title of a patent holder |
Address after: Kanagawa Patentee after: Via Mechanics, Ltd. Address before: Kanagawa Patentee before: Hitachi VIA Machinery Co.,Ltd. |
|
CP01 | Change in the name or title of a patent holder | ||
CX01 | Expiry of patent term |
Granted publication date: 20081105 |
|
CX01 | Expiry of patent term |