EP1546433A1 - Corps creux a revetement interieur, procede de revetement et dispositif - Google Patents

Corps creux a revetement interieur, procede de revetement et dispositif

Info

Publication number
EP1546433A1
EP1546433A1 EP03748049A EP03748049A EP1546433A1 EP 1546433 A1 EP1546433 A1 EP 1546433A1 EP 03748049 A EP03748049 A EP 03748049A EP 03748049 A EP03748049 A EP 03748049A EP 1546433 A1 EP1546433 A1 EP 1546433A1
Authority
EP
European Patent Office
Prior art keywords
coating
hoses
hollow body
source
coatings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03748049A
Other languages
German (de)
English (en)
Inventor
Ludwig Material Design GmbH Hiss
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HISS LUDWIGMATERIAL DESIGN GmbH
HISS LUDWIGMATERIAL DESIGN GMB
Original Assignee
HISS LUDWIGMATERIAL DESIGN GmbH
HISS LUDWIGMATERIAL DESIGN GMB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE2002145459 external-priority patent/DE10245459A1/de
Priority claimed from DE2003105546 external-priority patent/DE10305546A1/de
Application filed by HISS LUDWIGMATERIAL DESIGN GmbH, HISS LUDWIGMATERIAL DESIGN GMB filed Critical HISS LUDWIGMATERIAL DESIGN GmbH
Publication of EP1546433A1 publication Critical patent/EP1546433A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L11/00—Hoses, i.e. flexible pipes
    • F16L11/04—Hoses, i.e. flexible pipes made of rubber or flexible plastics
    • F16L11/12—Hoses, i.e. flexible pipes made of rubber or flexible plastics with arrangements for particular purposes, e.g. specially profiled, with protecting layer, heated, electrically conducting
    • F16L11/127—Hoses, i.e. flexible pipes made of rubber or flexible plastics with arrangements for particular purposes, e.g. specially profiled, with protecting layer, heated, electrically conducting electrically conducting
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L58/00—Protection of pipes or pipe fittings against corrosion or incrustation
    • F16L58/02—Protection of pipes or pipe fittings against corrosion or incrustation by means of internal or external coatings
    • F16L58/04—Coatings characterised by the materials used
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/13—Hollow or container type article [e.g., tube, vase, etc.]
    • Y10T428/131—Glass, ceramic, or sintered, fused, fired, or calcined metal oxide or metal carbide containing [e.g., porcelain, brick, cement, etc.]

Definitions

  • the invention relates to flexible hollow bodies with a coating of the inner surface, coating processes and devices for carrying out the coating process for the purpose of specifically adapting the physical properties, such as the electrical conductivity, the diffusion behavior or the chemical resistance of hollow bodies such as Plastic pipes or flexible hoses by coating their inner surface with a gas plasma with approx. 5 - 1000 nm thick coatings.
  • the coatings are applied individually or in a sandwich and act bidirectionally at the coating point.
  • Such coatings protect e.g. a medium in the interior of the hollow body against contamination from the environment and the material of the hollow body wall itself or the environment in front of the medium inside the hollow body in a previously unknown quality or escape of the medium through the hollow body wall is prevented.
  • the object of the present invention is to make the cavity of a plastic pipe more effective than was previously possible e.g. To protect against contamination, that is, against the escape of substances from the plastic itself and against the penetration of substances from the vicinity of the tube through the wall of the tube.
  • its inner wall is deposited in a plasma process, for example with Si 3 N 4 , Si0 2 or metal oxides such as WO x (deposited for example from SiH 4 , WF 6 , NH 3 , N 2 and 0 2 ) coated.
  • Coating substances such as WF e , CH 4 , PH 3 , B 2 H 6, TiCI 4)
  • AICI 3 , AlH X [aluminum hydride] and other organometallic compounds, which may be generated in a chemical reaction upstream of the plasma process, can have other properties, such as electrical conductivity inside the pipe.
  • the invention therefore relates to internally coated hollow bodies, tubes or hoses, the coating being able to have one or more layers and preferably consisting of Si 3 N, Si0 2 , W, WC, Wsi, Al, Ti and / or Si-n. as well as methods and devices for carrying out the coatings.
  • FIG. 1 The device shown in FIG. 1 is used to coat the inside of plastic hoses with different materials.
  • the tube is pulled past the ring electrode (6) in the longitudinal direction.
  • the ring electrode (6) with the electrode connection (7) (connection HF source with ring electrode) is held rotationally symmetrically on the tube calibration sleeves (4) with the electrically non-conductive electrode centering sleeve (5).
  • the gas inlet (12) takes place via a vacuum-tight rotating union (11) to which the hose reel (10) on the gas inlet side is connected.
  • the coating pressure is set to 0.3-15 mbar, depending on the gas used, such as argon, hydrogen, nitrogen, helium, SiH 4 , SiH 2 CI 2 , CH 4 , NH 3 , WF 6 , PH 3 , B 2 H 6 , TiCI 4 , AICI 3 or AIH X and mixtures thereof.
  • the symmetrically constructed furnaces (3, 4) with their heating elements (3) and (easily exchangeable for different pipe diameters) pipe calibration sleeves (4) can preheat the pipe to 20 - 400 ° C before entering the plasma area and are at the same time the counter potential for the ring electrode (6).
  • the process exhaust gases are sucked off according to the arrangement on the gas inlet side via the hose reel (2) and the vacuum-tight rotating union (1) from the vacuum pump (0) connected on the gas outlet side.
  • the device according to the invention can, by suitable modification, also be used for the inner coating of rigid plastic pipes and hollow bodies which are open on one side, such as plastic beverage bottles.
  • the hose reels (2, 10) are replaced by a linear drive that pushes the tube past the ring electrode (6).
  • the pipe ends are connected with flexible hoses to the gas inlet (12) and the vacuum pump (0) connected on the gas outlet side.
  • the gas plasma is generated between the inner wall of the bottle and a hollow electrode inserted into the bottle through the one-sided bottle opening (replaces the ring electrode (6) shown in FIG. 1), which is used to introduce the process gases with the Gas inlet (12) is connected.
  • the HF counter potential forms a divisible, conductive electrode with the image of the bottle's outer contour.
  • the process exhaust gases also pass through the one-sided bottle opening between the hollow electrode and the inside wall of the bottle connection to the vacuum pump connected to the gas outlet (0).
  • the layer properties specifically produced with the device according to the invention of FIG. 1 can be examined for their characteristic properties, such as diffusion tightness, conductivity, cracking, adhesion and fatigue strength, as described below by way of example.
  • the plastic pipes / hoses coated with different conditions in order to achieve increased diffusion tightness are investigated using the helium leak test method.
  • the hose is sealed in an enveloping "coaxial outer tube” and connected to a leak test device by means of vacuum-tight fittings.
  • the space between the "coaxial outer tube” and the hose surface to be tested is flooded with helium.
  • the helium is detected in the interior of the hose using a volume-controlled helium mass spectrometer.
  • cracks are also inspected using the light and scanning electron microscope.
  • the frequency of the RF source was 13.56 MHz and 27.12 MHz, and its power was 100 watts.
  • the pressure inside the plastic pipes was selected to be 1.7 mbar (measured at the vacuum pump outlet) and the train speed was 1 m / min.
  • the layer resulting from the described test was identified on the basis of its properties as an Si 3 N (silicon nitride) layer.
  • glass, tungsten carbide, tungsten silicide, n-type silicon, tungsten, aluminum and titanium coatings can be produced.
  • the plastic tubes coated according to this invention have, according to initial investigations in accordance with the examples given, tubes with a single layer of silicon nitride (Si 3 N) which have been treated compared to uncoated reference tubes and compared to the above-mentioned prior art, and have a diffusion-tightness which is improved about 30-100 times He atoms on.
  • Si 3 N silicon nitride
  • the layer thickness and its uniformity according to the method according to the invention in the hose / tube can easily be determined for the person skilled in the art by means of the calibration bore in the tube calibration sleeve (4), the ring electrode (6), the electrode centering sleeve (5) and other parameters such as coating pressure, temperature, HF Optimize performance and gas composition. This enables the production of reproducible products, which is a prerequisite for industrial use.
  • the layer thickness can be set very easily with the device according to the invention by means of the train speed without changing all other parameters.
  • the experimental results of the present invention show that layers with different properties can be deposited in a gas plasma inside cavities.
  • the diffusion tightness increases with increasing layer thickness of the deposited layer and then decreases again due to crack formation.
  • electrical conductivity The same applies to electrical conductivity.
  • the exemplary improvements in leakage rates, the ability to coat with an electrically conductive coating and the chemical resistance of pipe interior surfaces to be adjusted using a suitable coating material open up completely new fields of application for plastic pipes and hoses.
  • composite layers ie layers applied one after the other in layers), e.g.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

L'invention concerne des corps creux dont la surface intérieure est pourvue d'un revêtement, un procédé de revêtement, ainsi que des dispositifs permettant de mettre en oeuvre ce procédé afin d'adapter de façon ciblée les propriétés physiques, comme p. ex. la conductivité électrique, les caractéristiques de diffusion ou la résistance chimique, de corps creux tels que des tubes en plastique ou des tuyaux flexibles par revêtement de leur surface intérieure au moyen d'un plasma gazeux sur une épaisseur comprise entre 5 et 1000 nm. Les revêtements sont appliqués individuellement ou en sandwich et agissent de façon bidirectionnelle sur le site du revêtement. Ces revêtements permettent par exemple de protéger un fluide à l'intérieur du corps creux contre les impuretés provenant de l'environnement et de la matière même de la paroi du corps creux, ou de protéger l'environnement contre le fluide présent à l'intérieur du corps creux avec une efficacité inédite, ou encore d'empêcher une fuite du fluide à travers la paroi du corps creux.
EP03748049A 2002-09-28 2003-09-18 Corps creux a revetement interieur, procede de revetement et dispositif Withdrawn EP1546433A1 (fr)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
DE2002145459 DE10245459A1 (de) 2002-09-28 2002-09-28 Innenbeschichtete Hohlkörper, Beschichtungsverfahren und Vorrichtung
DE10245459 2002-09-28
DE2003105546 DE10305546A1 (de) 2003-02-10 2003-02-10 Innenbeschichtete Hohlkörper, Beschichtungsverfahren und Vorrichtung
DE10305546 2003-02-11
PCT/EP2003/010360 WO2004031438A1 (fr) 2002-09-28 2003-09-18 Corps creux a revetement interieur, procede de revetement et dispositif

Publications (1)

Publication Number Publication Date
EP1546433A1 true EP1546433A1 (fr) 2005-06-29

Family

ID=32070699

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03748049A Withdrawn EP1546433A1 (fr) 2002-09-28 2003-09-18 Corps creux a revetement interieur, procede de revetement et dispositif

Country Status (4)

Country Link
US (1) US20060099359A1 (fr)
EP (1) EP1546433A1 (fr)
AU (1) AU2003267378A1 (fr)
WO (1) WO2004031438A1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004054662B4 (de) * 2004-11-12 2009-05-07 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zur Innenbehandlung von Hohlprofilen
DE102005040266A1 (de) 2005-08-24 2007-03-01 Schott Ag Verfahren und Vorrichtung zur innenseitigen Plasmabehandlung von Hohlkörpern
DE102006012021A1 (de) * 2006-03-14 2007-09-20 Viega Gmbh & Co. Kg Verfahren und Vorrichtung zum Beschichten einer Innenfläche einer hohlen Endlosgeometrie, insbesondere eines Rohres
US20110195207A1 (en) * 2010-02-08 2011-08-11 Sungkyunkwan University Foundation For Corporate Collaboration Graphene roll-to-roll coating apparatus and graphene roll-to-roll coating method using the same
TWI489517B (zh) * 2013-05-07 2015-06-21 Univ Nat Taiwan 表面處理裝置及方法
CN106062245B (zh) * 2014-03-03 2020-04-07 皮考逊公司 用ald涂层保护气体容器的内部
US10087521B2 (en) * 2015-12-15 2018-10-02 Silcotek Corp. Silicon-nitride-containing thermal chemical vapor deposition coating

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Publication number Priority date Publication date Assignee Title
DE3116026C2 (de) * 1981-04-22 1983-12-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München Verfahren zum Herstellen einer biokompatiblen Schicht an Gefäßprothesen und Vorrichtung zur Durchführung des Verfahrens
JPS58157829A (ja) * 1982-03-12 1983-09-20 Toray Ind Inc プラスチツク管内面の放電処理方法
US4692347A (en) * 1983-07-07 1987-09-08 The Curators Of The University Of Missouri Method of interiorly coating tubing
US5070597A (en) * 1985-07-19 1991-12-10 Raychem Corporation Tubular article
GB2264617A (en) * 1991-10-08 1993-09-01 Atomic Energy Authority Uk Porous heating element
US6022602A (en) * 1994-01-26 2000-02-08 Neomecs Incorporated Plasma modification of lumen surface of tubing
CH687601A5 (de) * 1994-02-04 1997-01-15 Tetra Pak Suisse Sa Verfahren zur Herstellung von im Innern sterilen Verpackungen mit hervorragenden Sperreigenschaften.
US6268425B1 (en) * 1996-10-01 2001-07-31 Corning Incorporated Glass/polymer melt blends
DE19801861C2 (de) * 1998-01-20 2001-10-18 Schott Glas Verfahren zum Herstellen eines hohlen, innenbeschichteten Glasformkörpers
JP4672941B2 (ja) * 1999-07-13 2011-04-20 東京エレクトロン株式会社 誘導結合プラズマを発生させるための高周波電源

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
None *
See also references of WO2004031438A1 *

Also Published As

Publication number Publication date
WO2004031438A1 (fr) 2004-04-15
AU2003267378A1 (en) 2004-04-23
US20060099359A1 (en) 2006-05-11

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