EP1533526A1 - Pompe a vide - Google Patents

Pompe a vide Download PDF

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Publication number
EP1533526A1
EP1533526A1 EP03728116A EP03728116A EP1533526A1 EP 1533526 A1 EP1533526 A1 EP 1533526A1 EP 03728116 A EP03728116 A EP 03728116A EP 03728116 A EP03728116 A EP 03728116A EP 1533526 A1 EP1533526 A1 EP 1533526A1
Authority
EP
European Patent Office
Prior art keywords
housing
exhaust chamber
vacuum pump
heat
insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03728116A
Other languages
German (de)
English (en)
Inventor
Eiji c/o Tsu Plant of TS Corporation MASUSHIGE
Satoshi c/o Tsu Plant of TS Corporation FUJII
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nabtesco Corp
Original Assignee
TS Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TS Corp filed Critical TS Corp
Publication of EP1533526A1 publication Critical patent/EP1533526A1/fr
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/10—Stators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2225/00—Synthetic polymers, e.g. plastics; Rubber
    • F05C2225/04—PTFE [PolyTetraFluorEthylene]
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2251/00—Material properties
    • F05C2251/04—Thermal properties
    • F05C2251/048—Heat transfer

Definitions

  • the present invention relates to a structure of protecting a bearing or the like against heat generated at inside of an exhaust chamber of a vacuum pump, particularly relates to a structure of preventing a bearing or a shaft seal from being destructed by elevating a temperature thereof while maintaining an exhaust chamber at a high temperature relative to a vacuum pump for exhausting a reactive gas as in a semiconductor process.
  • a rotary vacuum pump for making a reactive gas flow of a background art there poses a problem that a reaction product is piled up at an exhaust path to close the exhaust path of an exhaust port or a problem that the product is adhered to inside of the exhaust chamber, a rotating rotor or the like and the rotor or the like is not rotated.
  • a method of elevating a temperature of inside of the exhaust chamber such that the product is not solidified by elevating a temperature of the housing by utilizing heat generated in vacuuming or winding a heater around an outer periphery of the housing of the vacuum pump.
  • a rotary vacuum pump having a rotating shaft when a temperature of a housing forming the exhaust chamber is elevated, there poses a problem that heat is conducted also to a bearing fixed to the housing to elevate a temperature of the bearing and the bearing is destructed by thermal expansion of the bearing or a reduction in hardness thereof.
  • Fig. 7 exemplifies the vacuum pump having a pair of screws.
  • the housing is constituted by a main casing 5 and bearing cases 16, 17 fixed to both end thereof.
  • Numerals 6 and 7 designate rotors rotatably fixed to the housing via the bearings 1, 2, 3 and 4. An end portion of the rotor 6 is attached with a motor 8 for rotating the rotor 6. Further, the rotor 7 is rotated via timing gears 20 and 21 in synchronism with the rotor 6.
  • An exhaust chamber 11 for exhausting a gas is provided to inside of the housing 5 containing the rotors 6 and 7, and respective shaft seals 12, 13, 14 and 15 are arranged at inside of the housing 5 containing the rotors 6 and 7 to seal the exhaust chamber and the bearings 1, 2, 3 and 4 filled with a lubricant such that inside of the exhaust chamber is not contaminated by oil.
  • the invention is characterized in a vacuum pump including introducing means having a vacuum exhaust chamber for exhausting a process gas into the vacuum exhaust chamber, exhausting means for exhausting the process gas to outside of the vacuum exhaust chamber, and a housing partitioning the vacuum exhaust chamber and outside wherein a rotor is rotatably fixed to inside of the housing via a bearing, and wherein insulating means is provided between the vacuum exhaust chamber and the bearing.
  • the insulating means in a plate-like shape matched to a shape of an end face of the housing of the vacuum pump is easy to work and attach, when a heat generating amount is not so large, the insulating means can be partially arranged at a portion thereof proximate to the bearing.
  • the shaft seal when a shaft seal comprising a material weak at heat is used, by arranging the shaft seal to a side of the bearing relative to the insulating means, the shaft seal can be protected against destruction by heat.
  • the invention of Claim 2 is characterized in that a material having a heat conductivity lower than a heat conductivity of a material of the housing is used as the insulating means.
  • a material having a heat conductivity lower than a heat conductivity of a material of the housing is used as the insulating means.
  • the insulating means a material which is solid to a degree of not being destructed even when the material is interposed between metals of a main casing, a bearing case and the like and having a significant insulating effect is suitable as the insulating means.
  • the invention is characterized in that that a resin having a heat conductivity lower than a heat conductivity of the housing and having a high corrosion resistance is used as the insulating means.
  • the insulating means there is a fluorine species resin of Teflon (trade mark) as a material for being used for the insulating means which is solid to a degree of not being destructed even when the material is interposed between metals of a main casing, a bearing case and the like and easy to work and install.
  • the invention is characterized in that a hollow insulating member is used as the insulating means.
  • a space of the hollow portion is hermetically sealed in vacuum or filled with a gas of atmosphere or the like, a liquid or a material having a low heat conductivity. Further, it is also effective for insulting to communicate the hollowed inside with the vacuum exhaust chamber to vacuum.
  • the invention is characterized in that a supporting member of the insulating means is provided at the insulating member arranged between a housing fixed with the bearing and a housing on a side of the vacuum exhaust chamber.
  • a supporting member of the insulating means is provided at the insulating member arranged between a housing fixed with the bearing and a housing on a side of the vacuum exhaust chamber.
  • the case can be resolved by utilizing a hole of a bolt for fixing the housing member and the bearing case and the insulating means and inserting a support collar thicker than the thickness of the insulating means into the hole of the insulating means for passing the bolt.
  • the invention is characterized in that heat conducting means having a high heat conductivity is provided between the insulating means and the vacuum exhaust chamber.
  • the high heat conductivity mentioned here signifies that the heat conductivity of the member is higher than that of the insulating material. It is preferable that the heat conductivity of the member is equal to or higher than the heat conductivity of the main casing forming the vacuum exhaust chamber. Further, the member having the high heat conductivity may be arranged to be brought into direct contact with the exhaust chamber as the end wall of the exhaust chamber.
  • the invention is characterized in that second insulating means is provided at an outer periphery of the housing.
  • the exhaust chamber can completely be covered by the insulating members by constituting the first insulating means provided at an end portion of a rotating shaft of the rotor, that is, an end portion of the housing by a plate-like shape matched with the shape of the end portion and covering an outer peripheral portion of the main casing covering the outer periphery of the rotor further by the second insulting means.
  • the invention is characterized in that heat conducting means is provided at the housing or/and an outer periphery of the housing.
  • the heat conducting means can also be achieved by forming the heat conducting means by using a material having a high heat conductivity as the material of the housing.
  • the invention is characterized in that a heat pipe is used as the heat conducting means.
  • a heat pipe is used as the heat conducting means.
  • a method of arranging the heat pipe there is a method of opening a hole in parallel with the rotating shaft at the housing and filling a working fluid, a method of opening a hole (groove) containing an existing heat pipe and inserting the existing heat pipe, or a method of fixedly attaching an existing heat pipe to a housing or the like.
  • the invention is characterized in that a metal having a high heat conductivity is used as the heat conducting means.
  • a metal having a high heat conductivity is used as the heat conducting means.
  • the metal having the high heat conductivity there are aluminum, gold, silver, copper, beryllium, brass and alloys of these and so on.
  • the invention is characterized in a vacuum pump including means for introducing a process gas into the vacuum exhaust chamber, exhausting means for exhausting the process gas to outside of the vacuum exhaust chamber, and a housing partitioning the vacuum exhaust chamber and outside, wherein a rotor is rotatably fixed to inside of the housing via a bearing, and wherein heat conducting means is provided at the housing or/and an outer periphery of the housing.
  • the invention is characterized in that a metal having a heat conductivity more excellent than a heat conductivity of a material of the housing is used as the heat conducting means.
  • the heat conducting means there is a method of using a heat pipe, a method of using a metal having an excellent heat conductivity or the like.
  • a method of arranging a heat pipe there is a method of forming a heat pipe directly at the housing by working the housing of a method of opening a hole in parallel with a rotating shaft at the housing and filling a working fluid, a method of opening a hole or a groove containing an existing heat pipe and inserting the existing heat pipe, a method of fixedly attaching an existing heat pipe to the housing by using a fixing member or the like.
  • the heat pipe may be constituted by a flat shape or a shape of a circular column.
  • a method of pasting a metal there is a method of pasting a metal in a plate-like shape constituted by pressing a metal having an excellent heat conductivity to be matched with a shape of the housing to an outer periphery of the housing, when the housing is a cast product and is provided with a warped surface, there is a method of flattening the surface to be pasted with a metal plate, coating an Si grease or the like having an excellent heat conductivity to paste, or pasting the Si grease by interposing a heat conductive sheet.
  • the heat conductive sheet when a metal having a flexibility is used as the heat conductive sheet, there is a method constituted by promoting adherence between the housing and a metal by bringing the metal into press contact with the housing or by polishing the surface to be brought into press contact therewith. Otherwise, there may be used a method of forming a groove at a side face of the housing and fitting the metal into the groove, a method of opening a hole or a groove in an axial direction at inside of the housing and inserting the metal, a method of making a molten metal flow into a hole or a groove in an axial direction at inside of the housing or a method of previously arranging a metal having an excellent heat conductivity and a predetermined shape at inside of a die to cast or the like.
  • a flat portion partially projected to a heat generating portion and a heat absorbing of the housing by forming a flat portion partially projected to a heat generating portion and a heat absorbing of the housing, and fixing the flat portion to bridge by a metal plate having an excellent heat conductivity, heat can be transferred from the heat generating portion to the heat absorbing portion of the housing. Further, by smoothing a surface of the flat portion partially projected to the heat generating portion and the heat absorbing portion for fixedly attaching the metal of the housing, thermal contact between the housing and the metal plate can easily be improved.
  • a metal having the excellent heat conductivity there are aluminum, gold, silver, copper, beryllium, brass and alloys of these and so on.
  • the vacuum pump 100 is provided with screw rotors 101 and 102.
  • the screw rotors 101 and 102 are contained in a rotor containing chamber formed at an inner portion of a housing. Describing in details, the screw rotor 101 is rotatably supported by the housing by bearings 104 and 105 and the screw rotor 102 is rotatably supported by the housing by bearings 106 and 107.
  • Shaft seals 112, 113, 114 and 115 are respectively arranged between an exhaust chamber 111 and the bearings 104, 105, 106 and 107 filled with a lubricant for preventing the lubricant of the bearings 104, 105, 106 and 107 from being leaked to contaminate inside of the exhaust chamber by the lubricant and to prevent a foreign matter produced by a reactive gas from invading the bearings 104, 105, 106 and 107 from inside of the housing.
  • end portions on one side of the screw rotor 101 and the screw rotor 102 are fixed with timing gears 109 and 110 for rotating other of the screw rotor 101 and the screw rotor 102 in accordance with rotation of one of the screw rotor 101 and the screw rotor 102 to be brought in mesh with each other respectively.
  • the one end portion of the screw rotor 102 is integrally connected with a motor 108.
  • the housing is opened with a suction port 103a for sucking a compressive fluid from outside of the housing to inside of the housing
  • the exhaust chamber 111 communicates with outside of the housing by the suction port 103a, and communicates with outside of the housing by an exhaust port 103e for exhausting the compressive fluid from inside of the housing to outside of the housing.
  • the suction port 103a communicates with a vacuumed vessel, not illustrated
  • the exhaust port 103e communicates with an exhaust gas processing apparatus, not illustrated, or outside air.
  • the housing is formed from a suction side bearing case 121, an insulating member 122, a suction side end wall member 123, a main casing 124, an exhaust side end wall member 125, an insulating member 126, and an exhaust side bearing case 127.
  • the suction bearing case 121 and the exhaust side bearing case 127 are installed with the bearings 104, 105, 106 and 107 for supporting a rotor.
  • the insulating member 122 and the insulating member 126 are constituted by a material having a low heat conductivity and is fabricated by, for example, a stout heat resistant resin.
  • the exhaust chamber 111 for making a reactive gas flow is fabricated by the suction side end wall member 123, the main casing 124 and the exhaust side end wall member 125 comprising a material having a heat conductivity higher than that of the insulating member 122 and the insulating member 126.
  • the suction side end wall member 123, the main casing 124 and the exhaust side wall member 125 constituting the exhaust chamber By constituting the suction side end wall member 123, the main casing 124 and the exhaust side wall member 125 constituting the exhaust chamber by a material having the excellent heat conductivity in this way, heat generated by compressing an exhaust gas at a vicinity of the exhaust port 103e can be conducted to a total of the suction side end wall member 123, the main casing 124 and the exhaust side end wall member 125, and there can be restrained a possibility of destructing the bearings 105 and 107, and the shaft seals 113 and 115 by heat by elevating the temperature only at a vicinity of the exhaust port 103e. Further, a temperature of a total of a housing face brought into contact with the exhaust chamber can be elevated and therefore, the product can be made to be difficult to be produced.
  • the insulating member 122 and the insulating member 126 are constituted by an insulating material having a low heat conductivity, even when the suction side end wall member 123, the main casing 124 and the housing end wall member 125 need to be maintained at a high temperature, there can be restrained a possibility of destructing the bearings 105 and 107 and the shaft seals 113 and 115 by heat.
  • an insulating member 128 comprising an insulating material
  • heat of the suction side end wall member 123, the main casing 124, and the exhaust side end wall member 125 can be restrained from being radiated to outside air, and the suction side end wall member 123, the main casing 124 and the exhaust side end wall member 125 can be maintained at a high temperature.
  • the suction end wall member 123, the main casing 124 and the exhaust side end wall member 125 When the temperature of the suction side end wall member 123, the main casing 124 and the exhaust side end wall member 125 is not elevated to a degree of not producing the product, by mounting heating means 234 at a total or a portion of the suction side end wall member 123, the main casing 124, and the exhaust side end wall member 125, the suction end wall member 123, the main casing 124 and the exhaust side end wall member 125 can be maintained at a high temperature.
  • the heating means there is a method of covering the total of the outer periphery of the main casing 124 by a sheet-type heater, or attaching a heater to an arbitrary location of the suction side end wall member 123 or the main casing 124 (the suction side having the low temperature is optimum).
  • a vacuum pump which is difficult to produce the product can be constituted by maintaining inside of the exhaust chamber at a high temperature to a degree of not producing the product by heating the suction side end wall member 123, the main casing 124 and the exhaust side end wall member 125 by heating means when a reactive gas of a semiconductor process or the like is exhausted by the vacuum pump.
  • the temperature of the suction side end wall member 123, the main casing 124 and the exhaust side end wall member 125 can be made to be uniform by a method of embedding a heat pipe to inside of each housing or bringing a heat pipe into contact with a surface thereof in order to increase the heat conductivity of the suction side end wall member 123, the main casing 124 and the exhaust side end wall member 125.
  • the heat conductivity of the suction side end wall member 123, the main casing 124 and the exhaust side end wall member 125 can further be increased by fixedly attaching a metal plate of copper or the like having a very high heat conductivity to surfaces of the suction end wall member 123, the main casing 124 and the exhaust side end wall member 125.
  • heat can be made to be easily to conduct to the total of the suction side end wall member 123, the main casing 124 and the exhaust side end wall member 125 even in the case of using a material of the suction side end wall member 123, the main casing 124 and the exhaust side end wall member 125 which is not provided with an excellent heat conductivity although the material is not corroded by a highly corrosive gas passing inside of the exhaust chamber.
  • cooling water is made to be able to control the temperature of the bearing efficiently by controlling to make the cooling water flow or controlling a flow rate of making cooling water flow when the temperature is elevated to be higher than a previously determined temperature by temperature information of temperature sensors 232, 233 attached to the bearing portions.
  • Fig.2 shows a section in an axial direction of one screw rotor of a screw type vacuum pump having a pair of screw rotors.
  • Fig.3 is a sectional view taken along a line A-A of Fig.2.
  • a screw rotor 251 is rotatbly fixed at inside of a housing 253 via bearings 255 and 257.
  • Numeral 267 designates a suction port, and numeral 269 designates an exhaust port.
  • Numerals 259 and 261 designate insulating members for preventing the bearings 255 and 257 from being destructed by conducting heat at inside the exhaust chamber to vicinities of the bearings 255 and 257.
  • projected portions 263 and 265 are provided at the housing 253 for uniformly heating inside of the exhaust chamber, surfaces thereof are formed to be flat, and metal plates 271 and 273 comprising a metal having an excellent heat conductivity of pure copper, pure aluminum or the like are fixedly attached thereto by predetermined means to bridge the projected portions 263 and 265. Further, thermal contact between the metal plates 271 and 273 and the projected portions can be improved by making the flat portions of the projected portions 263 and 265 smooth. By constituting in this way, heat can be transferred from a side of the exhaust chamber the temperature of which is elevated by the housing of the vacuum pump to the suction side the temperature of which is not elevated so much and the housing can be heated uniformly.
  • FIG. 4 A basic structure of a vacuum pump is similar to that of Embodiment 2 and therefore, a sectional shape in correspondence with that of Fig.3 will be explained.
  • Numerals 403 and 405 designate sections of screw rotors.
  • Numeral 401 designates a housing 401 contained with the screws as a structure of uniformly heating the housing 401, the housing 401 is covered with a metal 407 having an excellent heat conductivity of an alloy of copper, aluminum or the like.
  • the metal 407 can be formed by a method of fitting the metal 407 worked in a shape of a cylindrical housing, using the metal 407 worked to constitute a shape of the metal 407 when a metal divided by a plural number is mounted to the housing 401, or casting the metal 407 further to the housing 401 which has already been finished.
  • FIG.5(a) shows a case of using a hollow insulating member according to the embodiment.
  • An insulating effect of a hollowed inside 301 is significant when the hollowed inside 301 is filled with a gas or a liquid having a low heat conductivity. Further, the insulating effect can further be promoted by hermetically closing the hollowed inside 301 of the hollowed insulating member in vacuum or constituting vacuum to a degree the same as that of the exhaust chamber by providing a hollow exhaust hole 302 communicating with the vacuumed exhaust chamber as shown by Fig.5(b).
  • the insulating effect can be achieved even by using a material having an excellent heat conductivity and therefore, there is not posed a problem which hampers high temperature uniform heat formation at inside of the exhaust chamber even when the material is used as the housing brought into contact with the exhaust chamber.
  • the invention is naturally applicable to all of the vacuum pumps having a structure of being rotated by begin supported by bearings of a Roots type constituting a section of a rotor by a cocoon shape, a claw type constituting a section of a rotor by a comma shaped bead or the like.
  • a supporting member longer than a thickness of the insulating means is arranged between the housing member and the bearing case arranged with the bearing to prevent a strong force by fastening from being exerted to the insulating means in reference to Fig.6.
  • Numeral 601 designates a bearing case fixed with a bearing and a shaft seal
  • numeral 603 designates an insulating member using a soft material or a brittle material
  • numerals 605 and 607 are housing members temperatures of which are elevated.
  • Numeral 609 designates a holding member in a cylindrical shape comprising a material of a metal having a high hardness or ceramics through which a bolt 611 for integrally fixing the insulating means 603, and the housing members 605 and 605 is passed.
  • the insulating member 609 having a length in an axial direction equal to or larger than a thickness of the insulating member 603 is optimum, the holding member 609 is not limited thereto when the insulating means comprises a material having flexibility. By constituting in this way, when the bolt is fastened, the bearing case 601 and the housing member 605 can be prevented from exerting a strong force to the insulating member 603.
  • the vacuum pump including the means having the vacuum exhaust chamber for introducing the process gas into the vacuum exhaust chamber, the exhausting means for exhausting the process gas to outside of the vacuum exhaust chamber, and the housing partitioning the vacuum exhaust chamber and the outside, wherein the rotor is rotatably fixed to inside of the housing via the bearing, by constructing the constitution of providing the insulating means between the vacuum exhaust chamber and the bearing portion, there can be prevented that heat generated by the heating means covering the housing or inside of the exhaust chamber is transferred in the housing to make the temperature of the bearing or the shaft seal formed in the housing elevate, or the temperature of the bearing or the shaft seal is elevated to destruct the member or destruct the member by thermally expansion.
  • insulating means having a significant insulating effect can be provided.
  • the insulating means easily to work and install and having a significant insulating effect can be provided, further, even when the pump exhausts the highly corrosive gas, airtightness or strength can be prevented from being deteriorated by corroding the insulating material.
  • the space of the hollow portion can be filled with a gas or a liquid having a low heat conductivity or inputted with the insulating member, which is effective for insulating.
  • a soft material can be used as the insulating means and choice of the insulating material can be enhanced.
  • the exhaust chamber can completely be covered with the insulating member, and even when the reactive gas is made to flow, the temperature at inside of the exhaust chamber can be maintained at a high temperature to a degree of not producing a reaction product.
  • the temperature of the portion brought into contact with the exhaust chamber of the housing can be constituted by a uniform temperature by which the reaction product is made to be difficult to produce.
  • the heat conductivity of the housing can considerably be increased.
  • the vacuum pump including the means having the vacuum exhaust chamber for introducing the process gas into the vacuum exhaust chamber, the exhausting means for exhausting the process gas to outside of the vacuum exhaust chamber, and the housing partitioning the vacuum exhaust chamber and outside, in which the rotor is rotatably fixed to inside of the housing via the bearing, by providing the heat conducting means at the housing or/and the outer periphery of the housing, heat is delivered from the portion of the housing at a high temperature to a portion thereof at a low temperature and the temperature of the housing can be made to be uniform.
  • the heating conducting means can easily be worked.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
EP03728116A 2002-05-20 2003-05-20 Pompe a vide Withdrawn EP1533526A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002145320 2002-05-20
JP2002145320 2002-05-20
PCT/JP2003/006260 WO2003098047A1 (fr) 2002-05-20 2003-05-20 Pompe a vide

Publications (1)

Publication Number Publication Date
EP1533526A1 true EP1533526A1 (fr) 2005-05-25

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP03728116A Withdrawn EP1533526A1 (fr) 2002-05-20 2003-05-20 Pompe a vide

Country Status (7)

Country Link
US (1) US20050254969A1 (fr)
EP (1) EP1533526A1 (fr)
JP (1) JPWO2003098047A1 (fr)
CN (1) CN1656316A (fr)
AU (1) AU2003234835A1 (fr)
TW (1) TWI277696B (fr)
WO (1) WO2003098047A1 (fr)

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WO2010076245A1 (fr) * 2008-12-29 2010-07-08 Oerlikon Leybold Vacuum Gmbh Pompe à vide
GB2563595A (en) * 2017-06-19 2018-12-26 Edwards Ltd Twin-shaft pumps
EP3808982A1 (fr) * 2019-10-15 2021-04-21 Ebara Corporation Appareil de pompe à vide
US11873813B2 (en) 2018-10-19 2024-01-16 Hai Nguyen Suction/compression rotating mechanism, rotary compressor and rotary engine

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GB2487376A (en) * 2011-01-19 2012-07-25 Edwards Ltd Two material pump stator for corrosion resistance and thermal conductivity
JP5502040B2 (ja) * 2011-09-09 2014-05-28 株式会社神戸製鋼所 タイヤ加硫方法、及びタイヤ加硫機
TWI586893B (zh) * 2011-11-30 2017-06-11 Edwards Japan Ltd Vacuum pump
CN104632630B (zh) * 2013-11-13 2017-01-11 中国科学院沈阳科学仪器股份有限公司 一种罗茨干泵热膨胀的控制系统及方法
EP3808983B1 (fr) * 2019-10-15 2024-01-03 Ebara Corporation Pompe à vide avec chauffage dans le couvercle latéral
CN114542425A (zh) * 2020-11-26 2022-05-27 中国科学院微电子研究所 半导体加工工艺、抽真空装置和半导体工艺设备
JP2023083773A (ja) * 2021-12-06 2023-06-16 エドワーズ株式会社 真空ポンプおよび良熱伝導性部品

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WO2010076245A1 (fr) * 2008-12-29 2010-07-08 Oerlikon Leybold Vacuum Gmbh Pompe à vide
GB2563595A (en) * 2017-06-19 2018-12-26 Edwards Ltd Twin-shaft pumps
WO2018234755A1 (fr) * 2017-06-19 2018-12-27 Edwards Limited Pompes à double arbre
GB2563595B (en) * 2017-06-19 2020-04-15 Edwards Ltd Twin-shaft pumps
US11542946B2 (en) 2017-06-19 2023-01-03 Edwards Limited Twin-shaft pumps with thermal breaks
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EP3808982A1 (fr) * 2019-10-15 2021-04-21 Ebara Corporation Appareil de pompe à vide

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WO2003098047A1 (fr) 2003-11-27
US20050254969A1 (en) 2005-11-17
TWI277696B (en) 2007-04-01
AU2003234835A1 (en) 2003-12-02
JPWO2003098047A1 (ja) 2005-09-15
CN1656316A (zh) 2005-08-17
TW200403392A (en) 2004-03-01

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