200403392 玫、發明說明： 【發明所屬之技術領域】 本發明係關於一種能夠保護軸承菩 、 又平田艰寺不文真空泵排氣室内 產生的熱所影響的構造，特指在對 社蚵如+導體處理之反應性 氣體進行排氣的真空泵中，能夠 化夕」雨·徘乳罜保持在高溫的情 形下，防止軸承及軸塾圈不因高溫而遭到破壞的構造。 【先前技術】 以往使反應性氣體流動的旋轉式真空泵方面，會因為反 應生成物堆積於排氣路徑而發生排氣口的排氣路徑阻塞的 問題，或因為反應生成物附著於旋轉轉子等而使轉子等旋 轉不順的問題。為了解決上述問Μ，以往在方法上係利用 真空排氣時產生的熱來使外殼保持在高溫，或且藉由在真 空泵的外殼外圍纏繞加熱器，使排氣室保持在高溫狀態下 來避免反應生成物凝固。惟，在具備轉軸的旋轉式真空泵 的h ;兄中，當形成排氣室的外殼保持在高溫時，熱會傳導 土固足於該外殼的軸承而使該軸承處在高溫狀態下，進而 因為軸承的熱膨脹及硬度下滑而發生軸承損壞的問題。為 了解決上述問題，如圖7所示一般，一般在方法上係在軸承 1、2、3、及4的附近設置通水路9及10，藉由使水流通來冷 卻軸承1、2、3、及4。圖7所示的為具有一對螺旋轉子的真 2系的例子·外殼包含主遮板5及固定於其兩端的軸承箱1 6 及17 ; ό及7為轉子，其係經由軸承1、2、3、及4而固定於 遺外殼且能夠自由旋轉；轉子6的端部上設置有馬達8，用 以轉動轉子6 ;此外，轉子7係經由正時齒輪20及21而與轉 85580 200403392 子6同步轉動；收納轉子6及7的外殼5内設置有進行排氣的 · 排氣主11’且分別設置有軸整圈12、13、14、及15，用以密 封4排氣主及浸滿潤滑油的轴承1、2、3、及4，以防止讲 氣室内受到潤滑油的污染。 惟，在上述般以往具有轉軸的真空泵的情況中，為了使 軸承冷卻而在軸承附近設置冷卻水用通路並使冷卻水流過 時’連帶地也冷卻了外殼，進而導致保持在高溫狀態下的 排f室内的熱能散失的問題。為了防止生成物在排氣室内 · 附者於外殼及轉子等，排氣室内有必要保持在高溫狀態’ 因此為了-面冷卻軸承—面提高排氣室内的溫度，有必要 進一步加熱以將高於散失熱量的熱能供應給外殼，進而也 導致了消耗能源增加的惡性猶環之問題。此外，具有軸墊 圈之軸構造的情況中，也可 ^％會發生軸墊圈因為熱而損壞 【發明内容】 有鐘於上述問題，本發 Λ U Ί - 目的在於提供一種構造，以 在具備軸承寺驅動部之直六 在古㈤妝μ t ^ Α /、二7中，即便藉由使排氣室保持 ΐ:::: 應性氣體排出時的生成物對策，轴承 部及軸塾圈部不會因為高溫而受到*轴承 解決問題之手段 〃 為了解決上述課題，依φ 外炎*古、 ㉔專利範圍第1項，本發明的杜 徵為在真空泵（其具有直知 、 明的特 導入裝置，其用以將處:氣=’該真空排氣室内包含； 置，其用以將上述處理氣，：入孩真空排氣室；排氣裳 a排出至真空排氣室外；及用以 85580 392 將上述真空排氣室與 # ^ E塥開來的外殼，且該外殼内之 子係經由軸承固定且 盥上、十、姑I自由軺動）中的上述真空排氣室 /、上述軸承間設置絕執 成Μ八#、 …、置。、、，巴典裝置方面，不僅可加工 成付σ真玄系外殼端面 欹s τ么 J的平板狀以便於安裝，且在發 熱I不鬲的情況下，也 杜知 裝置。 非近軸承的一邵份上配置絕熱 中，可藉由將 便可保護抽塾 /匕外，在使用不耐熱材質㈣㈣㈣況 痛塾圈設置在相對於絕熱裝置的轴承側， 圈免於受熱而損壞。 依申請專利範圍第2項之發 其特徵為上述絕熱裝置的 材科具有低於上述外殼的材料 ㈣所具有的熱傳導率。上述絕 :裝置：面，以採用央在主外殼及軸承箱等金屬之間也不 般地堅固且絕熱效果大的材質為佳。上述絕熱裝置 了為樹脂及陶瓷等。 專利範圍第3項之發明，其特徵為上述絕熱裝置係 “導性低於上述外殼材料且耐腐㈣高的樹脂。上述 :::、、裝置万面，能夠央在主外殼及軸承箱等金屬之間不會受 :般地堅固且加工安裝容易的絕熱材料有特氟隆（商標）之類 依申請專利範圍第4項之發明’其特徵為上述絕熱裝置係 知用中空絕熱構件。中空部的空間可為真空密封或封入熱 傳導率低的大氣等之氣體、液體或材料。此外，使中空部 内部與真空排氣室相通而使其真空也能夠有效地絕熱。二 依申請專利範圍第5項之發明，其特徵為位於固定有上述 85580 200403392 軸承的外殼與上述直令由 ^ 二排巩至側間的絕熱裝置上，設有該 絶熱裝置的支撐構件。备 田脆弱的材質做為絕熱裝置時， 可精由在外殼構件與軸承箱 η* 置比上述絕熱裝置厚度長 =件’以避免外殼施力於上述絕熱裝置，便可解決 利用將外殼構件與軸承箱以及上賴熱裝置 加以固疋的螺栓孔，藉由將 夺厗度比上述絕熱裝置還厚的支 牙上述絕熱裝置的螺检通過的孔内來解決問題。 上=請專利範圍第6项之發明’其特徵為上述絕熱裝置與 ::嗔室間設有熱傳導率高的構件。在此所指之高 勺二傳導率，係指比絕埶 …、竹种回炙思，且以鬲於形成真空 之主外殼的熱傳導率為佳。此外，上述熱傳導率高 的構件也可做為排氣室端壁而直接連接於排氣室。 :申請專利範圍第7項之發明，其特徵為上述外殼外圍設 弟-絕熱裝置。藉由上述般的構造，配合設於轉子的轉 ^端邵（即，外殼端部）上之上述第一絕熱裝置端部的形狀， =由進-步以第二絕熱裝置由外圍將包覆轉子外圍的主外 成加以包覆，能夠以絕熱材料完全地將排氣室加以包覆。 士依申請專利範圍第8項之發明，其特徵為上述外殼或且外 :外圍5又有熱傳導裝置。該熱傳導裝置可藉由以熱傳導率 同的材質做為外殼的材質來達成。 、依申請專利範圍第9項之發明，其特徵為上述熱傳導裝置 為熱^ f。熱導管的配置方法方面包括：纟外殼上沿著相 對於轉軸的平行方向鑽孔後封入動作液的方法、在外殼上 開叹忐夠容納熱導管的孔（溝槽）而將既有的熱導管插入的 85580 200403392 方法、將既有的熱導管固定於外殼的方法等。 依申請專利範圍第10項之發明，其特徵為上述熱傳導裝置 為熱傳導率高的金屬。在方法上包括有：將配合外殼形狀加 工而成的金屬貼於外殼外圍的方法、外殼内開設軸方向的孔 或溝槽後插入金屬的方法、外殼内開設軸方向的孔或溝槽後 >王入熔解金屬的方法、及在模具内預先配置熱傳導率佳且具 有特定形狀的金屬後進行鑄造的方法等。熱傳導率高的金屬 有·鋁、金、銀、銅、鈹、黃銅及其合金等。 依申請專利範圍第11項之發明，其特徵為在真空泵（其具 有真窆排氣室，該真空排氣室内包含；導入裝置，其用以 將處理氣體導人該真空排氣室；排氣裝置，其用以將上述 處理氣fa排出至真空排氣室外；及用以將上述真空排氣室 與外部11隔開來的外殼，且該外殼内之轉子係經由轴承固 足且把夠自由轉動）中的上述外殼或且外殼外圍設置熱傳導 裝置。再者，依申請專利範圍第丨2項之本發明，其特徵為 上述熱傳導裝置係採用熱傳導率高於外殼材料的金屬。熱 傳導裝置可採用配合外殼的形狀而對熱傳導率佳的金屬施 :沖壓等加工後貼於外殼外圍的方法，及在外殼因為鑄造 寺而具有歪曲表面的情況時，可採用在使表面平滑後將金 屬板直接貼上、塗上熱傳導率佳的矽膏等來貼上、或夾著 熱傳導板來貼上的方法。再者，如欲使用軟性金屬來做為 熱傳導板時，可採用壓接方式，或採用藉由在磨平表面後 壓接以提高外殼與金屬間密合度的方法。此外，也可採取 的方法有：在外殼側面溝槽後，將金屬嵌入該溝槽的方法 85580 -10- 200403392 ’在外设内開設軸方向的孔或溝槽後，插入金屬方法；外 殼内開設軸方向的孔或溝槽後，注入熔解金屬的方法；及 在模具内預先配置熱傳導率佳且具有特定形狀的金屬後進 仃鑄造的方法等。此外，也可在外殼的發熱部及吸熱部形 成部份凸起且平坦的部份後，將熱傳導率佳的金屬如同架 橋般地固定於該平坦部份，以使熱量能夠由發熱部移轉至 吸熱邵。此外，對於由發熱部及吸熱部凸起之用以固定上 述外殼金屬的平坦部份，可藉由使其表面更為光滑，而輕 易地改善外殼與金屬板間的熱接觸效果。熱傳導率高的金 屬有··鋁、金、銀、銅 '鈹、黃銅及其合金等。 【實施方式】 以下依圖式來說明本發明之實施方式。 首先’依圖1來說明關於本發明之第一實施方式的真空泵 100構造。 真空泵100具有螺旋轉子10丨及102。 螺旋轉子101及102係收納於外殼内部形成之轉子收納室 。洋細來說’螺旋轉子101係藉由由軸承1〇4及1〇5而在外殼 内受到支撐及轉動；螺旋轉子102係藉由由軸承1〇6及1〇7而 在外殼内受到支撐及轉動。在排氣室π〗及浸滿潤滑油的軸 承104、105、106、及1〇7之間，為了防止軸承1〇4、1〇5、 1 06、及1 07的潤滑油污染到排氣室内，並且也為了防止反 應性氣體產生之異物由外殼内侵入轴承1〇4、1〇5、1〇6、及 107，分別設置有軸墊圈112、113、114、及115。 此外，螺旋轉子101及螺旋轉子102之一端上有正時齒輪 85580 -11- 200403392 109及110相互叹合般地固定，使得隨著螺旋轉子1〇1及螺旋 轉子102中之其中一方轉動時，螺旋轉子1〇1及螺旋轉子1〇2 中 < 另一方會隨I轉動。再者，螺旋轉子1〇2之一端係與馬 達108結合成一體。 為了將壓縮性泥體由外殼外部吸入至外殼内部，在外殼 上開有吸氣口 l〇3a ;排氣室u丨不僅藉由該吸氣口 1〇3a而與 外殼外部相通’且藉由用以將壓縮性流體由外殼内部排出 至外殼外部而設的排氣口丨03e而與外殼外部相通。在此，吸 氣口 103a係與未圖示的被真空容器相通，排氣口 1〇3e則與未 圖示之排氣氣體處理裝置或外界相通。 外殼具有：吸氣側軸承箱121、絕熱構件122、吸氣側端 壁構件123、主套管124、排氣侧端壁構件125、絕熱構件126 、及排氣側軸承箱1 27。吸氣侧軸承箱12 1及排氣側軸承箱 127上設置有用以支撐轉子的軸承1〇4、1〇5、1〇6、及1〇7。 絕熱構件122及絕熱構件126係由熱傳導率低的材料所構成 ，例如由堅固的耐熱性樹脂所構成。使反應性氣體流通的 排氣室111係由以熱傳導率高於絕熱構件122及絕熱構件126 的材料所製成的吸氣側端壁構件丨23、主套筒1 24、及排氣 側端壁構件12 5所構成。如上述般，藉由使構成排氣室的吸 氣侧端壁構件123、主套筒124、及排氣侧端壁構件125以熱 傳導率佳的材料來製成，在排氣口 l〇3e附近’排出氣體在受 到壓縮等產生的熱將可整體地傳導至吸氣側端壁構件1 23 、主套筒124、及排氣侧端壁構件125，僅使排氣口 103e附近 處在高溫狀態下，進而減少軸承105及107、軸墊圈113及11 5 -12- 85580 200403392 因為受熱所損壞的可能性’·再者，能夠使與排氣室相連接 的外殼整面的溫度上升，進而使生成物難以形成。此外， 由於絕熱構件122及絕熱構件126係以熱傳導率低的絕熱材 料所構成，因此即使必須將吸氣側端壁構件123、主套筒、|24 、及外殼第五構件125保持在高溫在情況下，仍可降低轴承 105及107軸墊圈丨13及〗丨5受熱損壞的可能性。再者，藉由 在吸氣側端壁構件123、主套筒124、及排氣侧端壁構件125 的外圍上被覆由絕熱材料製成的絕熱構件128，將可抑制吸 氣側端壁構件123、主套筒124、及排氣侧端壁構件125對外 的熱散失，使得吸氣側端壁構件123、主套筒124、及排氣 侧續壁構件125保持在高溫。當無法將吸氣侧端壁構件123 、主套筒124、及排氣側端壁構件125的溫度提升至生成物 無法形成的高溫時，可藉由在吸氣側端壁構件123、主套筒 124、及排氣側端壁構件125的全部或一部份上安裝加熱裝-置234，使吸氣側端壁構件123、主套筒124、及排氣側端壁 構件125保持在咼溫。加熱裝置方面，可採取在主套筒124 正沾：外圍上被覆一薄板型加熱器的方法，也可採取在吸氣 侧场壁構件123或主套筒的任意位置（以溫度低的吸氣側為 最適合）上加裝加熱器的方法。 如上述般，在以真空泵對半導體處理等之反應氣體進行 排氣時’藉由加熱手段對吸氣側端壁構件〗23、主套筒124 及排氣側端壁構件12 5進行加熱而使三者的溫度保持在生 成物難以形成的高溫，將可構成生成物不易形成的真空泵 。再者，為了提升吸氣側端壁構件123、主套筒124、及排 85580 200403392 氣$端壁構件125的熱傳導率，可藉由在各套筒内部埋設熱 導g或使熱導t接觸各套筒表面的方式，使得吸氣側端壁 構件123、主套筒124、及排氣側端壁構件125的溫度呈均一 再者，除上迷（外’也可採用在外殼上形成溝槽而在該 溝槽中埋設熱傳導率非常高的銅合金等之金屬方法，也可 採用在外殼以鑽孔機開設一個或複數個孔或溝槽後，將熔 融：熱傳導率佳的金屬注入該孔或溝槽的方法。此外，也 可藉由將^專㈣㈣冑的銅等之類的金屬板固定於吸氣 倒*壁構件123、主套筒124、及排氣側端壁構件125的表面 以進步提升吸氣側端壁構件1 23、主套筒丨24、及排氣 側端壁構件125的熱傳導率。藉由上述的構造，排氣室内任 何會接觸到氣體的部份均可保持在高溫下，絕大部份的氣 均可在氣體狀態下排出至真空泵之外，藉此可減少因為 吸氣側端壁構件123、主套筒124、及排氣側端壁構件125上 出現溫度較低的部份，使得生成物在該部份堆積而減少轉 子在轉動時所需的間隙，造成轉子的負載增加，或因為部 份堆積的生成物掉落至相互逆轉的轉子間，使得轉子無^ 轉動，甚至因為生成物卡死轉子而導致轉子損壞（斷裂）的異 常情況發生。 此外，在如上述般使用熱導管或熱傳導率非常高的金屬 的情況中，吸氣側端壁構件123、主套筒124、及排氣側端 壁構件125在材質上雖不至於因為通過排氣室内之高腐蝕 性氣體而腐蝕，然而即便使用熱傳導率不佳的材質時，熱 能仍能夠輕易地傳導至吸氣側端壁構件丨23、主套筒1 24、 85580 -14- 200403392 及排氣側端壁構件125整體。 再者’在吸氣侧軸承箱1 21及排氣侧軸承箱1 2 7的轴承安 裝位置附近，藉由形成用以使冷卻水流通的水路23〇及231 ，即便軸承及轴塾圈附近的溫度超出指定溫度而形成高溫 時’也可藉由使水流通而冷卻軸承，因此可提升防止因為 熱膨腺造成損壞的效果。在此情況中，係依安裝於軸承部 的溫度感應益2 3 2及2 3 3的溫度資訊來控制冷卻水，當檢測 出溫度南於事先設定的溫度時，藉由控制冷卻水流通或控 制流量來有效率地控制軸承的溫度。此外，由於有做為上 述絕熱裝置的套筒絕熱構件122及絕熱構件126，因此可防 止因為吸氣侧轴承柏12 1及排氣側軸承箱12 7受到冷卻，使 得吸氣側端壁構件123、主套筒124、及排氣側端壁構件ι25 的熱散失，致使排氣室内的溫度下降的情況。 以下將外殼的其他均熱裝置的實施例做為第二實施例， 依圖2及粵3來說明。圖2為具有一對螺旋轉子之螺旋式真空 泵中相對於其中一側之螺旋轉子的軸方向剖面。此外，圖3 為圖2之A-A的剖面圖。螺旋轉子251係經由軸承255及257而 固定於外殼内且能夠自由轉動。267為吸氣口，269為排氣 口。259及261為絕熱材料，用以防止因為排氣室内的熱量 傳導至軸承255及257附近而致使軸承255及2彡7受到損壞。 此外’為了使排氣室内均熱，外殼253上設有表面平坦的凸 出邵263及265，並架橋方式般地將純銅或純鋁等之熱傳導 率佳的金屬或其合金製成的金屬板27丨及273以特定手法固 定於該凸出部263及265。此外，藉由使上述凸出部263及265 85580 200403392 的平坦部份光滑，可提升金屬板271及273與凸出部間的熱 接觸效果。藉由上述的構造，在真空泵的外殼中，熱量會 由高溫的排氣室侧傳導至溫度不高的吸氣側，使得外殼呈 均熱狀態。 以其他均熱裝置為第三實施例，依圖4來進行說明。由於 在此之真空泵的基本構造係與第二實施例相同，因此以對 應於圖3的剖面形狀來加以說明：403及4〇5為螺旋轉子的剖 面。401為收納了螺旋轉子之外殼4〇ι，且做為該外殼4〇! 的均熱構造’外殼40 1包覆有由銅及鋁等合金之類的熱傳導 率佳的金屬407。該金屬4〇7可依外殼形狀加工成筒狀後加 以肷合’也可將分割成複數片的金屬在安裝於外殼4〇丨時加 工成金屬407的形狀，也可利用鑄造等方法在完成的外殼 401上形成金屬4〇7。 接下來’針對有關絕熱構造的其他第四實施方式，以圖5 來加以說明。 由於本實施方式中之真空泵的構造與第一實施方式完全 相同，因此僅顯示絕熱裝置構造的放大圖。圖5(a)所示的 為本實施例中使用中空的絕熱構件時的情況。不論中空内 3〇1充填的為大氣、熱傳導率低的氣體、或液體，其絕熱效 果均大。此外，該中空的絕熱材料的中空内3〇1也可藉由真 空锆閉或如圖5(b)所示一般地開設用以與真空排氣室相通 連的中空排氣孔302而使其具有與排氣室相同程度的真空 度’以進一步提升絕熱效果。 本貫施例中’由於使用熱傳導率佳的材料也能夠得到絕 85580 -16 - 200403392 熱效果，因此即便以絕熱構造做為與排氣室相連接的外殼 也不g龟生妨礙排氣室内的高溫均熱化的問題。 再者，上述實施例之圖卜2、及3中雖以螺旋式的轉子為 例’然而理所當然地也適用於轉子剖面呈萌形的羅茨⑽⑽) 式、及轉子剖面呈勾玉形的爪（elaw)^等具有轉子係依轴承 的4曰示來轉動之構造的真空泵。 此外’依圖6說明第5實施方式；第5實施方式中，係針對 在以較軟的材質或較脆的材質來做為絕熱裝置情況中，利 用比上述絕熱裝置的厚度長的支撐構件，將該構件配置於 外殼構件與設有軸承之軸承箱之間’以避免在旋緊固定時 有過大的應力施加於上述絕熱裝置。6〇1為固定有軸承及軸 塾圈的軸承箱’ 603為使用軟材質或脆材質而成的絕敎構件 ，605及607為會處在高溫狀態下的外殼構件。6〇9為以硬度 高的金屬或陶资等材料所形成之圓筒狀的固定構件，其: ㈣外H構件6(H '絕熱裝置咖、外殼構件6〇5 及607等固定成-體的螺栓611穿過。該固定構件6〇9在轴方 向上的長度係以比絕熱構件603的厚度長為佳，然而絕熱裝 置具有m生時並不以此為限。#由上述的構造，在以螺 栓旋緊固定時，軸承箱601及外殼構件6〇5不會對絕熱構件 6 0 3施加過大的應力。 此外，也可將複數支長度稍微比絕熱構件長的楔子夾在 轴承箱⑷及外殼構件6。5之間的方法，也可利用配合外殼 形狀能夠被覆絕熱構件6 0 3的環狀固定構件。 士口上述之說明，依申請專利範圍第”頁之發明，藉由採用 •17- 85580 200403392 ^真空栗（其具有真空排氣室，該真空排氣室内包含；導入 J置其用以將處理氣體導入該真空排氣室；排氣裝置， “用以將上逑處理氣體排出至真空排氣室外；及用以將上 f真空排氣室與外部區隔開來的外殼，且該外殼内之轉子 :'、’工由轴承固足且能夠自由轉動)中的上述真空排氣室血上 爆I、間設置絕熱裝置的構造，被覆在外殼上之加敎裝置 及排氣室内產生的熱不會傳導= ' 0得導至形成於孩外殼上之軸承及 ^圈，而得以防止該輛承及軸塾圈因為高溫或熱膨脹而 才貝壞。 的：：凊專利範圍第2項之發明’以熱傳導率低於上述外殼 熱裝置做為上迷絕熱裝置的材料，可得到絕熱效果大的絕 :?清專利範圍第3项之發明，以熱傳導率低於外殼所用 :科且耐腐録高的樹脂做為上述絕熱裝 2於加工及安裝且絕熱效果大的絕熱裝置，並且也能夠 埶材Z排出腐姓性高的氣體時，防止因為腐姓而導致絕 …、材科的氣密性及強度下降。 構Γ二：申上請專利範圍第4項之發明’藉由以中空的絕熱 導率^ v "^巴熱裝置，可在中空部的空間内封入熱傳 效:低的氣體或液體’也可裝入絕熱構件，有效發揮絕熱 :申：專利範圍第5項之發明’藉由為配置於固定有上述 支承箱與上述外殼間的絕熱裝置設置該絕熱裝置的 牙構件，將允許以軟性材質做為絕熱裝置，使得絕熱材 85580 -18- 200403392 料的選擇增加。200403392 Description of the invention: [Technical field to which the invention belongs] The present invention relates to a structure capable of protecting the heat affected by the heat generated in the exhaust chamber of the bearing pump and the flat vacuum pump of Hirata Koji Temple. In the vacuum pump that exhausts the processed reactive gas, it is possible to prevent the bearing and the shaft ring from being damaged due to the high temperature when the rain and milk are kept at a high temperature. [Prior Art] In the conventional rotary vacuum pump that allows reactive gas to flow, the exhaust path of the exhaust port is blocked due to the accumulation of reaction products on the exhaust path, or the reaction products adhere to the rotating rotor. The problem that the rotor etc. rotates irregularly. In order to solve the above-mentioned problems, in the past, the heat generated during the vacuum exhaust was used to keep the casing at a high temperature, or the heater was wound around the outer periphery of the vacuum pump to keep the exhaust chamber at a high temperature to avoid reactions. The product solidifies. However, in the case of a rotary vacuum pump with a rotating shaft, when the casing forming the exhaust chamber is maintained at a high temperature, heat will conduct the soil to fix the bearing of the casing and keep the bearing at a high temperature. Bearing thermal expansion and hardness decrease cause bearing damage. In order to solve the above problem, as shown in FIG. 7, generally, the method is generally to set water passages 9 and 10 near the bearings 1, 2, 3, and 4 to cool the bearings 1, 2, 3, and 3 by circulating water. And 4. Figure 7 shows an example of a true 2-series with a pair of helical rotors. The housing includes a main shield 5 and bearing boxes 1 6 and 17 fixed to both ends; and 7 are rotors, which are connected via bearings 1, 2 , 3, and 4 are fixed to the casing and can rotate freely; the end of the rotor 6 is provided with a motor 8 to rotate the rotor 6; in addition, the rotor 7 is connected to the rotation 85580 200403392 through the timing gears 20 and 21 6 synchronous rotation; the casing 5 housing the rotors 6 and 7 is provided with an exhaust main 11 ′ and a full shaft 12, 13, 14, and 15 are provided to seal the 4 exhaust main and immersion Lubricated bearings 1, 2, 3, and 4 to protect the air room from being contaminated by lubricant. However, in the case of the conventional vacuum pump with a rotating shaft as described above, in order to cool the bearing, a cooling water passage is provided near the bearing and the cooling water flows through the casing, which also cools the casing, thereby causing the exhaust f to be maintained at a high temperature. The problem of indoor heat dissipation. In order to prevent the products in the exhaust chamber, the enclosure and the rotor, etc., the exhaust chamber must be kept at a high temperature. Therefore, in order to cool the bearing and increase the temperature in the exhaust chamber, it is necessary to further heat the The heat energy that dissipates heat is supplied to the housing, which in turn causes a vicious problem of increased energy consumption. In addition, in the case of a shaft structure with a shaft washer, the shaft washer may be damaged due to heat. [Summary of the Invention] The problem is due to the above problem. The present invention is to provide a structure to provide a bearing In the ancient temple makeup μ t ^ Α / 2: 7, even if the exhaust driving chamber is kept in the 驱动 :::: product countermeasure when the reactant gas is discharged, the bearing part and the shaft ring part Does not suffer from bearing problems due to high temperature. To solve the above-mentioned problems, according to the first item of the scope of the patent, the patent of the present invention is a vacuum pump (which has a straightforward and clear introduction). A device for containing: gas = 'the vacuum exhaust chamber; a device for introducing the above-mentioned processing gas: into the child's vacuum exhaust chamber; the exhaust skirt a is discharged to the vacuum exhaust chamber; and 85580 392 The above-mentioned vacuum exhaust chamber and the bearing in which the above-mentioned vacuum exhaust chamber and # ^ E # are separated, and the children in the housing are fixed via bearings and can be moved freely. The settings must be made into Ｍ 八 #,…, set. As for the Badian device, it can not only be processed into a flat shape with a σ true mystic shell end face 欹 s τ Mod J for easy installation, but also knows the device when the heat I is not bad. In the case of non-near bearings, the heat insulation can be arranged on the side of the bearing, which can be protected by pumping / daggering. When the heat-resistant material is used, the pain ring is set on the bearing side opposite to the heat insulation device, and the ring is protected from heat. damage. It is issued according to item 2 of the scope of the patent application, and is characterized in that the material section of the aforesaid heat insulation device has a lower thermal conductivity than the material ㈣ of the aforesaid case. The above-mentioned insulation device: surface is preferably made of a material that is not so strong and has a large heat insulation effect between the main housing and the metal such as the bearing housing. The heat insulation device is made of resin, ceramic, or the like. The invention in item 3 of the patent is characterized in that the adiabatic device is a "conductivity lower than that of the above-mentioned housing material and has a high corrosion resistance. The above ::: ,, and the surface of the device can be centered on the main housing and bearing box Metals will not be affected: Insulation materials that are generally sturdy and easy to install and install are Teflon (trademark) inventions according to the scope of patent application No. 4, which is characterized in that the above-mentioned insulation device is a known hollow insulation member. Hollow The space of the part can be vacuum-sealed or sealed with gas, liquid, or material with low thermal conductivity in the atmosphere. In addition, the inside of the hollow part can communicate with the vacuum exhaust chamber so that the vacuum can be effectively insulated. II. Five inventions are characterized in that they are located on the heat insulation device fixed to the above-mentioned 85580 200403392 bearing and the above-mentioned direct insulation from the second row to the side, and are provided with a supporting member of the heat insulation device. In the case of a thermal insulation device, the housing members and the bearing housing η * can be set longer than the thickness of the above thermal insulation device = pieces' to prevent the housing from exerting force on the thermal insulation device, which can solve the problem of using external The shell member, the bearing box, and the bolt holes secured by the upper heat-retaining device solve the problem by passing through the holes of the above-mentioned heat-insulation device through the screw inspection of the supporting teeth that are thicker than the heat-retaining device. Top = Patent The invention according to the sixth item is characterized in that a high thermal conductivity member is provided between the adiabatic device and the: 嗔 chamber. The high-conductivity of 2 is referred to as the specific insulation… In addition, the thermal conductivity of the main casing which is susceptible to forming a vacuum is good. In addition, the above-mentioned high thermal conductivity member can also be directly connected to the exhaust chamber as the exhaust chamber end wall.: Invention of the seventh scope of the patent application It is characterized in that a heat-insulation device is provided on the periphery of the housing. With the above-mentioned structure, the shape of the end portion of the first heat-insulation device provided on the rotor end of the rotor (ie, the housing end) is determined by Further, a second heat insulation device is used to cover the main outer member of the rotor from the periphery, so that the exhaust chamber can be completely covered with heat insulation material. The invention according to item 8 of the scope of patent application features For the above enclosure or outside: the outer 5 Heat conduction device. The heat conduction device can be achieved by using a material with the same thermal conductivity as the material of the housing. According to the invention in the ninth scope of the patent application, it is characterized in that the heat conduction device is heat ^ f. Aspects include: a method of sealing the casing with drilling fluid in a parallel direction with respect to the rotation axis, sighing on the casing, a hole (groove) sufficient to accommodate a heat pipe, and inserting an existing heat pipe 85580 200403392 Method, method for fixing an existing heat pipe to a casing, etc. According to the invention of claim 10 in the scope of patent application, the heat conduction device is a metal with high thermal conductivity. The method includes: A method for attaching a formed metal to the outer periphery of a casing, a method of inserting metal after opening a hole or a groove in an axial direction in the casing, a method of opening a hole or a groove in an axial direction in the casing, and a method for melting the metal in a mold A method in which a metal having a good thermal conductivity and a specific shape is arranged in advance and then cast. Metals with high thermal conductivity include aluminum, gold, silver, copper, beryllium, brass, and their alloys. The invention according to item 11 of the scope of patent application is characterized in that a vacuum pump (which has a true exhaust chamber, which contains the vacuum exhaust chamber; an introduction device, which is used to direct the processing gas into the vacuum exhaust chamber; exhaust A device for exhausting the above-mentioned processing gas fa to the vacuum exhaust chamber; and a casing for separating the vacuum exhaust chamber from the outside 11; and the rotor in the casing is fixed by a bearing and free enough (Rotation), or the outer periphery of the shell is provided with a heat conduction device. Furthermore, according to the invention according to item 2 of the scope of application for patent, it is characterized in that the heat conduction device is a metal with a higher thermal conductivity than the material of the casing. The heat conduction device can be applied to the metal with good thermal conductivity in accordance with the shape of the casing: a method such as stamping and sticking to the periphery of the casing, and when the casing has a distorted surface due to the casting temple, it can be used to smooth the surface A method of directly attaching a metal plate, applying a silicon paste having a high thermal conductivity, or attaching it by sandwiching a thermally conductive plate. Furthermore, if a soft metal is used as the heat conductive plate, a crimping method can be used, or a method of improving the adhesion between the shell and the metal by crimping the surface after flattening it can be used. In addition, the methods that can be taken are: the method of inserting metal into the groove after the groove on the side of the shell 85580 -10- 200403392 'After opening the hole or groove in the axial direction in the peripheral, insert the metal method; A method of injecting a molten metal after a hole or a groove in the axial direction; and a method of back-casting a metal having a specific thermal conductivity and a specific shape in advance in a mold. In addition, after the convex part and the flat part of the heat generating part and the heat absorbing part of the shell are formed, the metal with good thermal conductivity can be fixed to the flat part as a bridge, so that the heat can be transferred from the heat generating part. To endothermic shao. In addition, for the flat portion of the metal protruding from the heat generating portion and the heat absorbing portion to fix the case metal, the surface can be made smoother, and the thermal contact effect between the case and the metal plate can be easily improved. Metals with high thermal conductivity include aluminum, gold, silver, copper, beryllium, brass, and their alloys. [Embodiment] An embodiment of the present invention will be described below with reference to the drawings. First, the structure of a vacuum pump 100 according to a first embodiment of the present invention will be described with reference to FIG. The vacuum pump 100 includes spiral rotors 10 and 102. The spiral rotors 101 and 102 are stored in a rotor storage chamber formed inside the casing. In detail, the 'spiral rotor 101 is supported and rotated in the housing by the bearings 104 and 105; the spiral rotor 102 is supported in the housing by the bearings 106 and 107. And turning. Between the exhaust chamber π and the bearings 104, 105, 106, and 107 which are filled with lubricating oil, in order to prevent the lubricant of the bearings 104, 105, 106, and 107 from contaminating the exhaust gas The shaft washers 112, 113, 114, and 115 are respectively provided indoors and in order to prevent foreign substances generated by the reactive gas from entering the bearings 104, 105, 106, and 107 from the inside of the housing. In addition, one end of the helical rotor 101 and the helical rotor 102 is provided with timing gears 85580 -11- 200403392 109 and 110 fixed to each other so that when one of the helical rotor 101 and the helical rotor 102 rotates, The other one of the helical rotor 101 and the helical rotor 102 will rotate with I. Furthermore, one end of the helical rotor 102 is integrated with the motor 108. In order to suck the compressible mud from the outside of the casing to the inside of the casing, an air inlet 103a is opened in the casing; the exhaust chamber u 丨 is not only communicated with the outside of the casing through the air inlet 103a, but also by An exhaust port 03e for discharging compressive fluid from the inside of the case to the outside of the case communicates with the outside of the case. Here, the suction port 103a communicates with a vacuum container (not shown), and the exhaust port 103e communicates with an exhaust gas processing device (not shown) or the outside. The housing includes an intake-side bearing case 121, a heat-insulating member 122, an intake-side end wall member 123, a main sleeve 124, an exhaust-side end wall member 125, a heat-insulating member 126, and an exhaust-side bearing box 127. Bearings 104, 105, 106, and 107 for supporting the rotor are provided on the suction-side bearing box 121 and the exhaust-side bearing box 127. The heat insulating member 122 and the heat insulating member 126 are made of a material having a low thermal conductivity, and are made of, for example, a strong heat-resistant resin. The exhaust chamber 111 that circulates the reactive gas is a suction-side end wall member made of a material having a higher thermal conductivity than the heat-insulating member 122 and the heat-insulating member 126, 23, the main sleeve 1, 24, and the exhaust-side end. The wall member 125 is formed. As described above, the exhaust-side end wall member 123, the main sleeve 124, and the exhaust-side end wall member 125 constituting the exhaust chamber are made of a material having a high thermal conductivity, and the exhaust port 103 Nearby 'exhaust gas is subjected to heat generated by compression or the like to be conducted to the intake-side end wall member 1 23, the main sleeve 124, and the exhaust-side end wall member 125 as a whole, and only the vicinity of the exhaust port 103e is at a high temperature. In the state, the bearings 105 and 107 and the shaft washers 113 and 11 5 -12- 85580 200403392 are likely to be damaged due to heat. Furthermore, the temperature of the entire surface of the housing connected to the exhaust chamber can be increased, and Makes the product difficult to form. In addition, since the heat insulating member 122 and the heat insulating member 126 are made of a heat insulating material having a low thermal conductivity, it is necessary to keep the suction-side end wall member 123, the main sleeve, | 24, and the case fifth member 125 at a high temperature. Under the circumstances, the bearing 105 and 107 shaft washers 丨 13 and 〖丨 5 can still reduce the possibility of thermal damage. Furthermore, by covering the periphery of the intake-side end wall member 123, the main sleeve 124, and the exhaust-side end wall member 125 with a heat-insulating member 128 made of a heat-insulating material, the intake-side end wall member can be suppressed. 123, the main sleeve 124, and the exhaust-side end wall member 125 dissipate external heat, so that the intake-side end wall member 123, the main sleeve 124, and the exhaust-side continuous wall member 125 are kept at a high temperature. When the temperature of the intake-side end wall member 123, the main sleeve 124, and the exhaust-side end wall member 125 cannot be raised to a high temperature that cannot be formed by the product, the intake-side end wall member 123 and the main sleeve can be used. A heating device 234 is installed on all or part of the cylinder 124 and the exhaust-side end wall member 125 to keep the intake-side end wall member 123, the main sleeve 124, and the exhaust-side end wall member 125 at 咼temperature. As for the heating device, the main sleeve 124 may be covered with a thin plate heater on the periphery, or the field wall member 123 on the suction side or any position of the main sleeve (with low temperature suction) The side is the most suitable method). As described above, when the reaction gas such as a semiconductor process is exhausted by a vacuum pump, the suction-side end wall member 23, the main sleeve 124, and the exhaust-side end wall member 125 are heated by heating means so that The temperature of the three is maintained at a high temperature where it is difficult to form the product, which will constitute a vacuum pump that is difficult to form the product. Furthermore, in order to improve the thermal conductivity of the suction-side end wall member 123, the main sleeve 124, and the row 85580 200403392 air end wall member 125, a thermal conductivity g or a thermal conductivity t may be buried inside each sleeve. The surface of each sleeve makes the temperature of the suction-side end wall member 123, the main sleeve 124, and the exhaust-side end wall member 125 uniform. A method of burying a metal such as a copper alloy with a very high thermal conductivity in the groove may also be adopted after the casing is opened with a drill or a plurality of holes or grooves, and then the metal is melted: a metal with good thermal conductivity is injected into the groove. Holes or grooves. In addition, metal plates such as copper or the like can be fixed to the suction wall member 123, the main sleeve 124, and the exhaust-side end wall member 125. The surface improves the thermal conductivity of the suction-side end wall member 1 23, the main sleeve 24, and the exhaust-side end wall member 125. With the above structure, any part in the exhaust chamber that can come into contact with the gas can be used. Keep at high temperature, most of the gas can be exhausted to In addition to the vacuum pump, it is possible to reduce the number of rotors due to the lower temperature portions on the suction-side end wall member 123, the main sleeve 124, and the exhaust-side end wall member 125, so that products accumulate in this portion. The clearance required during rotation causes the load of the rotor to increase, or because some of the accumulated products fall between the rotors that reverse each other, so that the rotor does not rotate, and even the rotor is damaged due to the product jamming the rotor (fracture) ). In the case where a heat pipe or a metal having a very high thermal conductivity is used as described above, the intake-side end wall member 123, the main sleeve 124, and the exhaust-side end wall member 125 are made of materials. Although it is not corroded by the highly corrosive gas in the exhaust chamber, even when a material with poor thermal conductivity is used, the thermal energy can be easily transferred to the end wall member on the suction side 丨 23, the main sleeve 1 24, 85580 -14- 200403392 and the exhaust-side end wall member 125 as a whole. Furthermore, near the bearing mounting positions of the intake-side bearing housing 1 21 and the exhaust-side bearing housing 1 2 7, a cooling water flow is formed by Roads 23 and 231, even when the temperature near the bearing and the shaft ring exceeds the specified temperature to form a high temperature, the bearing can be cooled by circulating water, so the effect of preventing damage due to thermal expansion can be enhanced. In this case In the middle, the cooling water is controlled according to the temperature information of the temperature sensors 2 3 2 and 2 3 3 installed in the bearing part. When the temperature is detected to be higher than the preset temperature, the cooling water flow or flow rate is controlled. The temperature of the bearing is efficiently controlled. In addition, since the sleeve heat insulation member 122 and the heat insulation member 126 are used as the heat insulation device described above, it is possible to prevent the intake side bearing box 12 1 and the exhaust side bearing box 12 7 from being cooled, so that Heat loss from the intake-side end wall member 123, the main sleeve 124, and the exhaust-side end wall member ι25 may cause the temperature in the exhaust chamber to drop. In the following, another embodiment of the shell heat equalizing device is taken as the second embodiment, and it will be described with reference to FIGS. 2 and 3. Fig. 2 is a sectional view of an axial direction of a spiral rotor in a spiral vacuum pump having a pair of spiral rotors with respect to one side thereof. In addition, FIG. 3 is a cross-sectional view taken along A-A in FIG. 2. The helical rotor 251 is fixed in the housing via bearings 255 and 257 and is free to rotate. 267 is an intake port, and 269 is an exhaust port. 259 and 261 are thermal insulation materials to prevent the bearings 255 and 2 彡 7 from being damaged due to the heat in the exhaust chamber being conducted to the bearings 255 and 257. In addition, in order to make the exhaust chamber evenly heated, the outer shell 253 is provided with a flat surface with projections 263 and 265, and a metal plate made of pure copper or pure aluminum with a high thermal conductivity metal or its alloy is bridged. 27 and 273 are fixed to the protruding portions 263 and 265 by a specific method. In addition, by smoothing the flat portions of the protrusions 263 and 265 85580 200403392, the thermal contact effect between the metal plates 271 and 273 and the protrusions can be improved. With the above-mentioned structure, in the casing of the vacuum pump, heat is conducted from the high-temperature exhaust chamber side to the low-temperature suction side, so that the casing is in a soaking state. The other heat equalizing device is taken as a third embodiment, and described with reference to FIG. 4. Since the basic structure of the vacuum pump here is the same as that of the second embodiment, the cross-sectional shape corresponding to FIG. 3 will be used for explanation: 403 and 405 are cross-sections of the spiral rotor. Reference numeral 401 denotes a casing 40m in which a spiral rotor is housed, and a heat-dissipating structure 'casing 401, which is a casing 401, is covered with a metal 407 having a high thermal conductivity such as an alloy such as copper and aluminum. The metal 407 can be processed into a cylindrical shape and combined according to the shape of the casing. It can also be processed into a shape of metal 407 when it is installed in the casing 4o. It can also be completed by casting and other methods. A metal 407 is formed on the outer casing 401. Next, another fourth embodiment of the heat-insulating structure will be described with reference to FIG. 5. Since the structure of the vacuum pump in this embodiment is exactly the same as that of the first embodiment, only an enlarged view of the structure of the heat insulation device is shown. Fig. 5 (a) shows a case where a hollow heat insulating member is used in this embodiment. Regardless of whether the hollow space 301 is filled with air, low thermal conductivity gas, or liquid, its thermal insulation effect is large. In addition, the hollow interior 301 of the hollow heat-insulating material can also be made by a vacuum zirconium closure or by generally opening a hollow exhaust hole 302 for communication with the vacuum exhaust chamber as shown in FIG. 5 (b). It has the same degree of vacuum as the exhaust chamber to further improve the thermal insulation effect. In the present embodiment, 'because a material with good thermal conductivity can also obtain thermal insulation 85580 -16-200403392, even if the thermal insulation structure is used as the shell connected to the exhaust chamber, it will not interfere with the exhaust chamber. The problem of high temperature soaking. In addition, although the spiral rotor is taken as an example in Figures 2 and 3 of the above embodiments, it is of course applicable to the Roots ⑽⑽ type in which the rotor cross-section is cute, and the jaws in which the rotor cross-section is hook-shaped ( elaw) ^ and other vacuum pumps with a rotor system that rotates in accordance with the 4th indication of the bearing. In addition, the fifth embodiment will be described with reference to FIG. 6. In the fifth embodiment, when a soft material or a brittle material is used as the heat insulation device, a support member longer than the thickness of the heat insulation device is used. This member is arranged between the housing member and the bearing box provided with a bearing 'so as to prevent excessive stress from being applied to the heat insulation device at the time of screwing. 601 is a bearing case with a fixed bearing and a shaft collar ′ 603 is an insulating member made of a soft material or a brittle material, and 605 and 607 are housing members that are exposed to high temperatures. 609 is a cylindrical fixing member formed of a material with high hardness such as metal or ceramics. Its outer member is H-insulation device 6 (H 'insulation device, housing members 605 and 607, etc., and is fixed into a body. The bolt 611 passes through. The length of the fixing member 609 in the axial direction is preferably longer than the thickness of the heat insulation member 603. However, the heat insulation device is not limited to this. When tightening with bolts, the bearing housing 601 and the housing member 605 will not exert excessive stress on the heat insulating member 603. In addition, wedges with a plurality of branches slightly longer than the heat insulating member may be clamped in the bearing housing ⑷ And the method between the shell member 6.5 can also use the ring-shaped fixing member that can cover the heat insulating member 603 according to the shape of the shell. The above description of Shikou, according to the invention on page "of the scope of patent application, by using • 17- 85580 200403392 ^ Vacuum pump (it has a vacuum exhaust chamber, the vacuum exhaust chamber contains; the introduction J is used to introduce the processing gas into the vacuum exhaust chamber; the exhaust device, "to the upper processing gas Vented outside the vacuum exhaust chamber; and f. The outer casing of the vacuum exhaust chamber separated from the external area, and the rotor in the outer casing: ',' The work is fixed by bearings and can rotate freely. The above-mentioned vacuum exhaust chamber in the upper part of the chamber is provided with a thermal insulation device. Structure, the heat generating device covered on the housing and the heat generated in the exhaust chamber will not conduct = '0 can lead to the bearing and the ring formed on the child's housing, which can prevent the bearing and the shaft ring from being high temperature Or the thermal expansion is bad. ：: 凊 The invention in item 2 of the patent scope 'uses the thermal conductivity lower than the above-mentioned case thermal device as the material of the above-mentioned thermal insulation device, and can obtain a large thermal insulation effect. Three inventions, using a lower thermal conductivity than the shell: resin with high corrosion resistance as the heat insulation device 2 heat insulation device for processing and installation with high heat insulation effect, and can also discharge high quality of sapwood Z When the gas is used, it is necessary to prevent the airtightness and strength of materials and materials from being reduced due to the rotten name. Structure Γ 2: Apply for the invention in item 4 of the patent scope 'by using a hollow adiabatic conductivity ^ v " ^ Barre device, can be sealed in the hollow space Heat transfer efficiency: Low gas or liquid can be installed in the heat insulation member to effectively exert heat insulation: Application: the invention in item 5 of the patent scope is provided by a heat insulation device arranged between the above-mentioned support box and the above housing. The dental component of the thermal insulation device will allow a soft material to be used as the thermal insulation device, which will increase the choice of thermal insulation material 85580 -18- 200403392.
^請專利範圍第6項之發明，藉由在上述外殼或且外殼 田圍^置熱傳導裝置，將可使排氣室内絕熱裝置附近的 級度易於升高’使得排氣室内的溫度更為均_。 依申請專利範圍第7項之發明，藉由採用在上述外殼外圍 ^置第二絕熱裝置的構造，可完全地以絕熱材料覆蓋排 氧:’使得排氣室㈣溫度保持在即便反應性氣體流過也 不曰產生反應生成物的高溫。^ Please invent the invention in item 6 of the patent. By placing a heat conduction device in the above enclosure or in the enclosure field, it will make the level near the heat insulation device in the exhaust chamber easy to increase. _. According to the invention in item 7 of the scope of the patent application, by adopting a structure in which a second heat insulation device is arranged at the outer periphery of the shell, the exhaust gas can be completely covered with heat insulation material: 'to keep the exhaust chamber ㈣ temperature at The high temperature of the reaction product is not passed.
依申請專利範圍第8項之發明，藉由採用在上述外殼或/ 及外殼外圍上設置熱傳導裝置的構造，熱量可由外殼外圍 上溫度高的部份傳導至溫度低的部份，使得排氣室及與其 連接〈部份的溫度保持在即便反應性氣體流過也難以產生 反應生成物的均熱溫度。 依申請專利範圍第9項之發明，藉由採用以敛導管做為上 述熱傳導裝置的構造，T大幅提升外殼的熱傳㈣。、、’According to the invention of claim 8 in the scope of the patent application, by adopting a structure in which a heat conduction device is provided on the outer casing or / and the outer periphery of the outer casing, heat can be conducted from the high-temperature portion to the low-temperature portion on the outer periphery of the outer casing, so that the exhaust chamber And the temperature of the connection part is maintained at a soaking temperature at which it is difficult to generate a reaction product even if a reactive gas flows. According to the invention in the ninth scope of the patent application, by adopting a structure in which a converging duct is used as the heat conduction device, T greatly enhances the heat transfer of the casing. ,, ’
依申請專利範圍第10項之發明，藉由採用以熱傳導率佳 的^屬做為上述熱傳導裝置，可藉由以容易加工的金屬來 覆盖外殼來輕易地實施熱傳導。 依申請專利範圍第11項之發明，藉由採用在真空泵（其具 有真空排氣室’該真空排氣室内包含；導人裝置，其用以 將處理氣料人該真线氣室；排氣裝置，其用以將上述 處理氣體排出至真空排氣室外；及用以將上述真空排氣室 與外部U開來的外殼’且該外殼内之轉子係經由軸承固 疋且能夠自由轉動）中的上述外殼或/及外殼的外圍上設置熱 85580 -19- 200403392 傳導裝置，熱量會由外殼中溫度高的部份傳導至溫度低的 部份，使得外殼的溫度均等。 依申請專利範圍第12項之發明，藉由以熱傳導率比外殼 材料為佳之金屬做為上述熱傳導裝置，可輕易地加工出熱 傳導裝置。 【圖式簡單說明】 圖1為本發明之第一實施例之圖。 圖2為本發明之第二實施例之圖。 圖3為本發明之第二實施例之A-A剖面圖。 圖4為本發明之第三實施例之圖。 圖5(a)及圖5(b)為本發明之第四實施例之圖。 圖6為本發明之第五實施例之圖。 圖7為先前技術之真空泵之圖。 【圖式代表符號說明】 100 真空泵 101，102 螺旋轉子 104，105，軸承 106, 107 1Π 排氣室 112, 113，軸墊圈 114, 115 109，110 正時齒輪 108 馬達 l〇3a 吸氣口 -20- 85580 200403392 103e 排氣口 121 吸氣側軸承箱 122 絕熱構件 123 吸氣侧端壁構件 124 主套筒 125 排氣侧端壁構件 126 絕熱構件 127 排氣側軸承箱 128 絕熱構件 234 加熱裝置 230, 231 水路 232, 233 溫度感測器 85580 21-According to the invention in the tenth aspect of the patent application, the heat conduction device can be easily implemented by covering the case with a metal that can be easily processed by using the heat conductive device having a high thermal conductivity. According to the invention of claim 11 in the scope of patent application, by adopting a vacuum pump (which has a vacuum exhaust chamber 'which is contained in the vacuum exhaust chamber; a guide device which is used to direct the processing gas to the true-line gas chamber; exhaust A device for exhausting the above-mentioned processing gas to the vacuum exhaust chamber; and a casing for opening the above-mentioned vacuum exhaust chamber from the outside U; and the rotor in the casing is fixed by bearings and can rotate freely) A heat 85580 -19- 200403392 conduction device is provided on the above-mentioned shell or / and the periphery of the shell, and the heat will be conducted from the high-temperature part to the low-temperature part of the shell, so that the temperature of the shell is equal. According to the invention in item 12 of the scope of patent application, by using a metal having a better thermal conductivity than the material of the casing as the above-mentioned heat conduction device, the heat conduction device can be easily processed. [Brief Description of the Drawings] FIG. 1 is a diagram of a first embodiment of the present invention. FIG. 2 is a diagram of a second embodiment of the present invention. Fig. 3 is a sectional view taken along the line A-A of the second embodiment of the present invention. FIG. 4 is a diagram of a third embodiment of the present invention. 5 (a) and 5 (b) are diagrams of a fourth embodiment of the present invention. FIG. 6 is a diagram of a fifth embodiment of the present invention. FIG. 7 is a diagram of a prior art vacuum pump. [Explanation of Symbols of Drawings] 100 Vacuum pump 101, 102 Screw rotor 104, 105, Bearing 106, 107 1Π Exhaust chamber 112, 113, Shaft washer 114, 115 109, 110 Timing gear 108 Motor l03a Suction port- 20- 85580 200403392 103e Exhaust port 121 Suction side bearing box 122 Insulation member 123 Suction side wall member 124 Main sleeve 125 Exhaust side wall member 126 Insulation member 127 Exhaust side bearing box 128 Insulation member 234 Heating device 230, 231 Waterway 232, 233 Temperature sensor 85580 21-