CN1656316A - Vacuum pump - Google Patents
Vacuum pump Download PDFInfo
- Publication number
- CN1656316A CN1656316A CN03811707.XA CN03811707A CN1656316A CN 1656316 A CN1656316 A CN 1656316A CN 03811707 A CN03811707 A CN 03811707A CN 1656316 A CN1656316 A CN 1656316A
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- China
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- casing
- exhaust chamber
- bearing
- vacuum pump
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- 229910052751 metal Inorganic materials 0.000 claims abstract description 44
- 239000002184 metal Substances 0.000 claims abstract description 44
- 239000000463 material Substances 0.000 claims abstract description 43
- 238000009413 insulation Methods 0.000 claims abstract description 37
- 230000008676 import Effects 0.000 claims description 6
- 238000002955 isolation Methods 0.000 claims description 6
- 229920005989 resin Polymers 0.000 claims description 5
- 239000011347 resin Substances 0.000 claims description 5
- 230000007797 corrosion Effects 0.000 claims description 4
- 238000005260 corrosion Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 abstract description 40
- 239000007789 gas Substances 0.000 abstract description 28
- 239000004065 semiconductor Substances 0.000 abstract description 3
- 230000005540 biological transmission Effects 0.000 abstract description 2
- 238000001816 cooling Methods 0.000 abstract description 2
- 230000000717 retained effect Effects 0.000 abstract 1
- 238000007789 sealing Methods 0.000 description 15
- 230000000694 effects Effects 0.000 description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 239000010949 copper Substances 0.000 description 6
- 230000006378 damage Effects 0.000 description 6
- 239000000498 cooling water Substances 0.000 description 5
- 239000007788 liquid Substances 0.000 description 5
- 239000000376 reactant Substances 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 239000012298 atmosphere Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 239000004411 aluminium Substances 0.000 description 3
- 238000010276 construction Methods 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- 239000000314 lubricant Substances 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 238000002791 soaking Methods 0.000 description 3
- 229910001369 Brass Inorganic materials 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 229910052790 beryllium Inorganic materials 0.000 description 2
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 2
- 239000010951 brass Substances 0.000 description 2
- 238000002788 crimping Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 230000004323 axial length Effects 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 229920002313 fluoropolymer Polymers 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 229920006015 heat resistant resin Polymers 0.000 description 1
- 238000000265 homogenisation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/04—Heating; Cooling; Heat insulation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/10—Stators
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
- F05C2225/00—Synthetic polymers, e.g. plastics; Rubber
- F05C2225/04—PTFE [PolyTetraFluorEthylene]
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
- F05C2251/00—Material properties
- F05C2251/04—Thermal properties
- F05C2251/048—Heat transfer
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Abstract
The invention relates to a heat insulation structure having the function of retaining a high temperature in a vacuum exhaust chamber in a rotary type vacuum pump and the function of cooling bearings at the same time, and particularly has for its object the provision of a structure for preventing bearings or shaft seals from becoming so high in temperature as to be damaged when a high temperature is to be retained in an exhaust chamber with respect to a vacuum pump for exhausting reactive gases as in a semiconductor process. As a means to achieve the object, in a vacuum pump comprising an introduction means having a vacuum exhaust chamber and adapted to introduce a process gas into the vacuum exhaust chamber, an exhaust means for exhausting the process gas out of the vacuum exhaust chamber, a housing for separating the vacuum exhaust chamber from outside, with a rotor installed fro rotation in the housing through a bearing, a heat insulation means is provided between the vacuum exhaust chamber and the bearing. Further, a metal whose thermal conductivity is higher than that of the material of the housing is incorporated as a heat transmission means into the housing.
Description
Technical field
The present invention relates to a kind of structure of bearing etc. being protected, made the warming-up effect in its exhaust chamber that is not subjected to vacuum pump; particularly relate to a kind of vacuum pump that carries out exhaust for the reactant gas in the semiconductor processes, when exhaust chamber is kept high temperature, do not make bearing or shaft sealing pad become high temperature and the structure destroyed.
Background technique
The rotary vacuum pump that makes reactive gas flows in the past has such problem, promptly, reaction product is deposited in the exhaust passageway, the exhaust passageway of relief opening is stopped up and problem that can not exhaust or make resultant attached in the exhaust chamber or rotary blade etc. go up, make impeller (rotor) etc. to become the problem that can not rotate.In order to address these problems, the heat that obtains producing by with vacuum exhaust the time is used and casing is formed high temperature or heater is wound on the casing periphery of vacuum pump, makes the method that forms high temperature in the exhaust chamber under the noncondensing state of resultant.But, under the situation of rotary vacuum pump with running shaft, when making the casing that forms exhaust chamber form high temperature, with regard to the problem that has heat transfer to make bearing become high temperature and bearing be destroyed to being fixed on the bearing on this casing by the reduction of the thermal expansion of bearing or hardness.In order to solve such problem, considered as shown in Figure 7, near bearing 1,2,3 and 4, be provided with flowing water path 9 and 10, by the method that flows bearing 1,2,3 and 4 is cooled off of water.Among Fig. 7, the expression be example with vacuum pump of a pair of spiral.Casing is to be made of main box body 5 and the bearing cage 16,17 that is fixed on its two ends.6 and 7 be, can be fixed on the impeller on this casing with rotating freely by bearing 1,2,3 and 4.The motor 8 that makes impeller 6 rotation usefulness is installed on the end of impeller 6.And impeller 7 is by timing gear 20 and 21, synchronously is rotated with impeller 6.Accommodate to be provided with in the casing 5 of impeller 6 and 7 and make gas carry out the exhaust chamber 11 that exhaust is used, disposing each shaft sealing pad 12,13,14 and 15,, make the exhaust chamber can be by oil pollution so that make this exhaust chamber and with bearing 1,2,3 and 4 sealings that lubricant oil is full of.
But, because under the vacuum pump situation before above-mentioned with running shaft, be provided with near bearing for bearing is cooled off cooling water with path, make flow of cooling water, thus also with casing cooling, thereby the problem with regard to there being the heat that will be held in the exhaust chamber of high temperature also to seize.For prevent resultant in exhaust chamber attached to above casing or the impeller etc., need will be held in high temperature in the exhaust chamber; For when bearing is cooled off, the temperature in the exhaust chamber is raise, the heat energy more than the heat that need heat, will be seized is supplied with casing, therefore has to cause the so-called problem that makes the vicious circle that the consumption energy also increases.And, under the situation of axle construction, also may produce the problem that the shaft sealing pad destroys because of heating with shaft sealing pad.
Summary of the invention
The present invention makes for the problem that solves above-mentioned prior art existence, its objective is provides a kind of vacuum pump with drive portions such as bearings, when exhaust chamber being formed high temperature, can prevent that also bearing portion or shaft sealing pad portion from becoming high temperature and destroy even the resultant when reactant gas is discharged is taken measures.
The rotary vacuum pump of the application's the 1st invention of making in order to achieve the above object, it has the vacuum exhaust chamber, and have and import to the indoor introducing mechanism of this vacuum exhaust, above-mentioned processing gas be discharged to the outdoor exhaust gear of above-mentioned vacuum exhaust and the casing of above-mentioned vacuum exhaust chamber and external isolation with handling gas, impeller (ロ one ) can be fixed in this casing by bearing with rotating freely, it is characterized in that, between above-mentioned vacuum exhaust chamber and above-mentioned bearing, be provided with adiabatic mechanism.With adiabatic mechanism make that shape with the casing end face of vacuum pump matches tabular, make processing and install and can both easily carry out, but under the not many situation of heating value, adiabatic mechanism partly can be configured on the part near bearing.And at the material that thermal characteristics is more weak as under the situation of shaft sealing pad, this shaft sealing pad is the bearing side that is configured in adiabatic mechanism, can also protect the shaft sealing pad not destroy because of heat thus.
The rotary vacuum pump of the application's the 2nd invention is characterized in that the material that the pyroconductivity of thermal conductivity ratio case material is also low is as above-mentioned adiabatic mechanism.Even be clamped between the metals such as main box body or bearing can not produce destruction yet, material firm, that insulation effect is big is suitable for as above-mentioned adiabatic mechanism.The material that can be used as above-mentioned adiabatic mechanism has materials such as resin or pottery.
The rotary vacuum pump of the application the 3rd invention is characterized in that, also low and resin material that corrosion resistance is high is as above-mentioned adiabatic mechanism with the pyroconductivity of thermal conductivity ratio case material.As above-mentioned adiabatic mechanism, though be clamped in can not produce between the metals such as main box body or bearing yet destruction, firm, insulation effect is big, as the material of the adiabatic mechanism of easy processing and assembling polytetrafluoroethylene (テ Off ロ Application) fluoroplastics resin series such as (trade marks) is arranged.
The rotary vacuum pump of the application the 4th invention is characterized in that, with the thermal insulation member of hollow as above-mentioned adiabatic mechanism.Vacuum seal is carried out in the space of hollow portion, and perhaps that pyroconductivity is low gases such as atmosphere, liquid or material are enclosed.And make that to be connected and to form vacuum with the vacuum exhaust chamber in the hollow portion also be effective to thermal insulation.
The rotary vacuum pump of the application the 5th invention is characterized in that, said machine casing is to constitute by the bearing housing that is provided with above-mentioned bearing with round the main box body of above-mentioned impeller, and the supporting member of above-mentioned adiabatic mechanism is being set between this bearing housing and this main box body.With softness or fragile materials when the adiabatic mechanism, the supporting member that length is also longer than the thickness of above-mentioned adiabatic mechanism is configured between casing component and the bearing housing, form not have and powerfully act on structure in the above-mentioned adiabatic mechanism, just can realize the scheme that the application the 5th invents thus from casing.For example, utilize the fixing hole of the bolt of usefulness to casing component and bearing housing and above-mentioned adiabatic mechanism, be inserted in the hole that bolt passes through by the support sleeve that thickness is also thicker than the thickness of above-mentioned adiabatic mechanism.
The rotary vacuum pump of the application's the 6th invention is characterized in that, is provided with the high heat conduction mechanism of pyroconductivity between above-mentioned adiabatic mechanism and above-mentioned vacuum exhaust chamber.Here so-called high pyroconductivity is meant the pyroconductivity height than thermoinsulation material, cans be compared to the pyroconductivity height of the main box body that forms the vacuum exhaust chamber most.And member that can above-mentioned pyroconductivity is high is configured to directly be connected with exhaust chamber as the exhaust chamber end wall.
The rotary vacuum pump of the application the 7th invention is characterized in that, is provided with the 2nd adiabatic mechanism at the atmospheric side of said machine casing periphery.By forming such structure, make on the running shaft end that is arranged on impeller, promptly, make the above-mentioned the 1st adiabatic mechanism on the end that is arranged on casing become the writing board shape that the shape with the end matches, and the peripheral part of the main box body of covering impeller periphery can fully cover exhaust chamber with thermoinsulation material thus again with the covering of the 2nd adiabatic mechanism.
The rotary vacuum pump of the application the 8th invention is characterized in that, in said machine casing or/and be provided with heat conduction mechanism on the periphery of casing.The material that is used as casing by the material that pyroconductivity is high forms the scheme that this heat conduction mechanism just can be realized the application's the 8th invention.
The rotary vacuum pump of the application's the 9th invention is characterized in that, heat pipe is used as above-mentioned heat conduction mechanism.Collocation method as heat pipe has: on casing, offer the hole parallel with running shaft, and the method that working liquid body is enclosed; Or the method for on casing, offering the hole (groove) that is used to accommodate existing heat pipe and existing heat pipe being inserted; Or existing heat pipe is fixed tightly in method on the casing etc.
The rotary vacuum pump of the application's the 10th invention is characterized in that the metal that the pyroconductivity of thermal conductivity ratio case material is also high is as above-mentioned heat conduction mechanism.Used method has: will be processed into flat metal that the shape with casing matches and be adjacent to method on the casing periphery; Or on the casing side, form groove and metal is embedded in method in this groove; Or the method for in casing, offering axial hole or groove and metal being inserted; Maybe with axial hole in the metal inflow casing of dissolving or the method in the groove; Method that the metal of reservation shape that can also pyroconductivity is good is pre-configured in the mold, be cast into etc.The metal that pyroconductivity is high has: aluminium, gold, silver, copper, beryllium, brass and alloy thereof etc.
The rotary vacuum pump of the application's the 11st invention, has the vacuum exhaust chamber, and have and import to the indoor introducing mechanism of this vacuum exhaust, above-mentioned processing gas be discharged to the outdoor exhaust gear of above-mentioned vacuum exhaust and the casing of above-mentioned vacuum exhaust chamber and external isolation with handling gas, impeller can be fixed on vacuum pump in this casing by bearing with rotating freely, it is characterized in that, on the periphery of said machine casing and/or casing, be provided with heat conduction mechanism.In addition, the rotary vacuum pump of the application's the 12nd invention is characterised in that the metal that the pyroconductivity of thermal conductivity ratio case material is also high is as above-mentioned heat conduction mechanism.Have heat pipe as the method for heat conduction mechanism or metal that pyroconductivity is good method as heat conduction mechanism.Collocation method as heat pipe has: directly casing is processed and formed the practice of heat pipe on casing in the method for offering the hole on the casing and working liquid body being enclosed etc. abreast with running shaft; Or the method for on casing, offering the hole that is used to accommodate existing heat pipe or groove and existing heat pipe being inserted; Or with fixed component existing heat pipe is adhered to method on the casing etc.The shape of heat pipe can be flat pattern, also can be cylindric.Collocation method as heat pipe also has: the metal that pyroconductivity is good is processed into the casing shape and matches, and will stick on the method on the casing periphery with the plate-shape metal of processing such as pushing; Waiting with casting when casing being formed distort the surface, the surface can formed and paste sheet metal after smooth, or the good lubricated wet goods of Si of coating pyroconductivity then pastes, or the method that the transmission of heat thin plate is pasted clampingly.In addition, when the thermal transfer plate, crimping is arranged or with in addition crimping after the skiving, improve the degree of connecting airtight of casing and metal and the method that constitutes thus at the metal that ductility will be arranged.In addition, also can use and form groove in the casing side and metal is embedded into method in this groove; Or the method for in casing, offering axial hole or groove and metal being inserted; Or the method for in casing, offering axial hole or groove and the metal of dissolving being flowed into; Or the metal of in advance that pyroconductivity is good reservation shape is provided in the mold, the method that is cast into etc.And, form local outstanding flat portions in the generating heat department of casing and endothermic section, be that bridge is fixed this flat portions with the good sheet metal of pyroconductivity, just heat can be sent to the endothermic section from the generating heat department of casing thus.And the surface Machining of the flat that the generating heat department of the sticky metals of said machine casing and the part on the endothermic section is outstanding becomes smooth surface, can easily make the thermo-contact of casing and sheet metal good thus.As the good metal of pyroconductivity aluminium, gold, silver, copper, beryllium, brass and alloy thereof etc. are arranged.
Description of drawings
Fig. 1 is the front elevational view of expression the present invention the 1st embodiment's vacuum pump.
Fig. 2 is the sectional side view of expression the present invention the 2nd embodiment's vacuum pump.
Fig. 3 is expression the present invention the 2nd embodiment's the sectional drawing along the A-A line of Fig. 2.
Fig. 4 is the axle orthogonal cross-section figure of expression the present invention the 3rd embodiment's vacuum pump.
Fig. 5 is the bolt front elevational view partly of expression the present invention the 4th embodiment's vacuum pump.
Fig. 6 is the upper bearing front elevational view partly of expression the present invention the 5th embodiment's vacuum pump.
Fig. 7 is the front elevational view of the vacuum pump before the expression.
Embodiment
Below, with reference to accompanying drawing embodiments of the invention are described.
The structure of the vacuum pump 100 that the present invention the 1st embodiment relates to is described with reference to Fig. 1 earlier.
Vacuum pump 100 is provided with helical runner (ス Network リ ユ ウ ロ one ) 101 and 102.
Helical runner 101 and 102 is housed in the impeller containing room that is formed at casing inside.In detail, helical runner 101 is by bearing 104 and 105 and rotatably be supported on the casing; Helical runner 102 is by bearing 106 and 107 and rotatably be supported on the casing.For the oil leak that prevents bearing 104,105,106 and 107, lubricant oil with the exhaust chamber internal contamination, and in order to prevent in casing, to invade 104,105,106 and 107 li on bearing, between exhaust chamber 111 and the bearing 104,105,106 and 107 that is full of with lubricant oil, setting shaft sealing pad 112,113,114 and 115 respectively by the foreign matter that reactant gas generates.
And, on an end of helical runner 101 and helical runner 102, can fix timing gear 109 and 110 respectively, make another rotation in helical runner 101 and the helical runner 102 along with one rotation in helical runner 101 and the helical runner 102 with being meshing with each other.Also on an end of helical runner 102, connecting motor 108 with being integral.
Offering the suction port 103a that is used for compressible fluid is drawn into from the outside of casing the inside of casing on the casing, by this suction port 103a exhaust chamber 111 is connected with the outside of casing, and by exhaust chamber 111 is connected with the outside of casing, this relief opening 103e is the outside that is used for compressible fluid is discharged to from the inside of casing casing.Wherein, among suction port 103a and the figure not the container that is evacuated of expression be connected, the emission-control equipment or the ambient atmosphere that do not have to represent among relief opening 103e and the figure are connected.
Casing is made of air inlet side bearing case 121, thermal insulation member 122, air inlet side wall member 123, main box body 124, exhaust side end wall members 125, thermal insulation member 126, exhaust side bearing housing 127.The bearing 104 that supports impeller is being set on air inlet side bearing case 121 and exhaust side bearing housing 127.105,106 and 107.Thermal insulation member 122 and thermal insulation member 126 are made of the low material of pyroconductivity, for example can constitute with firm heat-resistant resin.The exhaust chamber 111 of flowing reactive gas can be made of air inlet side wall member 123, main box body 124 and the exhaust side end wall members 125 that thermal conductivity ratio thermal insulation member 122 and the also high material of thermal insulation member 126 form.Like this, since constitute air inlet side wall member 123, main box body 124 and the exhaust side end wall members 125 of exhaust chamber and be with pyroconductivity preferably material constitute, therefore near relief opening 103e, the integral body such as heat transferred air inlet side wall member 123, main box body 124 and exhaust side end wall members 125 that can produce by gas compression etc., become high temperature near only making relief opening 103e, can suppress to make the possibilities of bearing 105 and 107, shaft sealing pad 113 and 115 destructions by heat.And, because the temperature of the whole casing face that links to each other with exhaust chamber also can both rise therefrom, thereby just can be difficult to form resultant.And because thermal insulation member 122 and thermal insulation member 126 are to constitute with the lower thermoinsulation material of pyroconductivity, even thereby air inlet side wall member 123, main box body 124 and exhaust side end wall members 125 must be maintained under the situation of high temperature, also can suppress to make bearing 105 and 107, shaft sealing pad 113 and 115 possibilities of destroying by heat.And, since thermal insulation member 128 that thermoinsulation material is made cover on the periphery of air inlet side wall member 123, main box body 124 and exhaust side end wall members 125, thereby the heat that just can suppress air inlet side wall member 123, main box body 124 and exhaust side end wall members 125 is released to ambient atmosphere, air inlet side wall member 123, main box body 124 and exhaust side end wall members 125 can be held in high temperature.Temperature in air inlet side wall member 123, main box body 124 and exhaust side end wall members 125 is not risen under the situation that does not form resultant, can be by adiabatic mechanism 234 being installed on all or part of of air inlet side wall member 123, main box body 124 and exhaust side end wall members 125, and air inlet side wall member 123, main box body 124 and exhaust side end wall members 125 are held in high temperature.As having of heating machanism: cover the method on the main box body 124 whole peripheries or heater is installed in method on the random position (the air inlet side that preferably temperature is lower) of air inlet side wall member 123 or main box body 124 with the heater of thin sheet type.
Like this, because when semiconductor processes isoreactivity gas being discharged with vacuum pump, with heating machanism air inlet side wall member 123, main box body 124 and exhaust side end wall members 125 are heated, with being maintained in the high temperature that does not form resultant in the exhaust chamber, can constitute the vacuum pump that resultant is difficult to form thus.And, in order to improve the pyroconductivity of air inlet side wall member 123, main box body 124 and exhaust side end wall members 125, employing is embedded in the inside of each casing with heat pipe or makes heat pipe and surperficial contacted method, just can make the temperature of air inlet side wall member 123, main box body 124 and exhaust side end wall members 125 even thus.Method for distinguishing forms groove in addition on casing, the metal of alloy one class of the copper that pyroconductivity is very high is embedded in this groove, perhaps offers single or multiple holes or groove in casing inside, makes the good metal of pyroconductivity of fusion flow into wherein method with drill bit.And, the sheet metal by copper one class that pyroconductivity is very high is fastened on the surface of air inlet side wall member 123, main box body 124 and exhaust side end wall members 125, and the pyroconductivity of air inlet side wall member 123, main box body 124 and exhaust side end wall members 125 is further improved.By forming such structure, just can will be held in high temperature with the contacted part of the gas in the exhaust chamber, nearly all gas can both be discharged to outside the pump under gaseous state, just can reduce many accidents, for example, because the low position of formation temperature on the part of air inlet side wall member 123, main box body 124 and exhaust side end wall members 125 only, resultant is deposited in the there, impeller is not set rotates needed space and load is increased; Or the resultant of piling up owing to part comes off, bites into and forms between the mutual counter-rotating impellers and can not rotate; Or in the worst case, impeller is destroyed accidents such as (jackknifings) by resultant nipping, making excessive masterpiece to be used on the impeller.
And, under the situation of using the very high metal of heat pipe or pyroconductivity as described above, though with respect to being not corrodible by the high gas of the corrosivity in the exhaust chamber, as the material of air inlet side wall member 123, main box body 124 and exhaust side end wall members 125, but using under the bad situation of pyroconductivity, also still can be easily with heat transferred air inlet side wall member 123, main box body 124 and exhaust side end wall members 125 integrated members.
By near the periphery that bearing is installed of air inlet side bearing case 121 and exhaust side bearing housing 127, forming the flowing water path 230,231 that cooling water flows through usefulness, even thereby when near bearing or shaft seal, becoming high temperature more than the predetermined temperature, also can cool off bearing, can increase the effect that prevents to form destruction by thermal expansion by flowing of water.At this moment, when cooling water is become than the also high high temperature of predefined temperature by the temperature information that is installed in the temperature transducer 232,233 in the bearing portion,, can more effectively control the temperature of bearing by to the control of cooling water or the control of traffic flow of flowing.And, can prevent that air inlet side bearing case 121 and exhaust side bearing housing 127 from seizing heat and accident that the exhaust room temperature is descended from air inlet side wall member 123, main box body 124 and exhaust side end wall members 125, above-mentioned air inlet side bearing case 121 and exhaust side bearing housing 127 by be provided with above-mentioned adiabatic mechanism, promptly, casing thermal insulation member 122 and thermal insulation member 126 be cooled.
Below, with reference to Fig. 2 and Fig. 3 embodiment as the another kind of soaking mechanism of the 2nd embodiment's casing is described.Fig. 2 is the axial section of expression to a helical runner of spiral vacuum pump with a pair of helical runner.Fig. 3 is the sectional drawing of expression along the A-A line of Fig. 2.Helical runner 251 by bearing 255 and 257, can be fixed in the casing 253 with rotating freely.The 267th, suction port, the 269th, relief opening.259 and 261 are thermoinsulation materials, are used to prevent near the heat transferred bearing 255 and 257 in the exhaust chamber and make its destruction.In order to make the heat in the exhaust chamber even, on casing 253, be provided with bump 263 and 265 and the surface is made smooth, with this bump 263 and 265 be bridge, with predetermined mechanism, adhering with the good metal of pyroconductivities such as fine copper or fine aluminium or with the sheet metal 271,273 that their alloy is made.And, by on the flat of above-mentioned bump 263 and 265, sliding, can improve sheet metal 271 and 273 and the thermo-contact of bump.By forming such structure, can be from the exhaust chamber side of the formation high temperature on the casing of vacuum pump, heat is not also risen to high like that air inlet side to temperature transmit, can make the heat of casing even.
Below, with reference to Fig. 4 another kind of soaking mechanism as the 3rd embodiment is described.Because the basic structure of vacuum pump is same with the 2nd embodiment, thereby only explanation and the corresponding section shape of Fig. 3.403 and 405 is sections of helical runner.The 401st, with the casing that helical runner is being accommodated, the soaking mechanism of this casing 401 covers on the casing 401 with copper or the high metal 407 of aluminum one class pyroconductivity and forms.Can make ins all sorts of ways forms metal 407, for example, can use with this metal 407 be processed into tubular housing and in addition embedding grammar or use when the metal that will be divided into polylith is installed on the casing 401, be processed into metal 407 shape method or use metal 407 be cast into method on the casing of making 401 etc.
Below, with reference to Fig. 5 the 4th embodiment of another kind of heat insulating construction is described.
Because the vacuum pump structure of present embodiment is identical with the 1st embodiment, thereby only the structure of adiabatic mechanism is represented enlargedly.Fig. 5 (a) is the situation of the thermal insulation member of the hollow used of expression present embodiment.Thermal insulation member inside 301 with low gas of atmosphere or pyroconductivity or liquid are full of hollow also can make insulation effect increase.And with the hollow inside 301 of this hollow thermal insulation member in addition vacuum seal or shown in Fig. 5 (b), the hollow exhaust port 302 that is connected with the vacuum exhaust chamber forms and the vacuum of exhaust chamber same degree by being provided with, and can further improve insulation effect.
Because present embodiment adopts the good material of pyroconductivity also can obtain insulation effect, even thereby as the casing that joins with exhaust chamber, can not produce the problem that is an impediment to the heat of high temperature homogenization in the exhaust chamber yet.
Though in Fig. 1,2 and 3 of the foregoing description, having exemplified impeller is screw type structure, but yes is supported on the bearing impeller and the structure of rotation all can be applicable to the mechanism of vacuum pump, has the section of impeller is made the roots-type (Le one Star formula) of silk cocoon type, section made the pawl formula supports such as (the Network ロ same form) of hook-shaped beautiful bob type.
Below, with Fig. 6 the 5th embodiment is described, it is to be used as under the situation of adiabatic mechanism at material or brittle material with softness, at casing component with disposing and be furnished with the length supporting member also longer between the bearing housing of bearing, just can not be applied in the above-mentioned adiabatic mechanism by pretending firmly of being connected to form than the thickness of above-mentioned adiabatic mechanism.The 601st, with bearing or the fixing bearing housing of shaft sealing pad, 603 are to use the thermal insulation member of soft material or brittle material, and 605 and 607 is the casing components that form high temperature.The 609th, the retaining member of the drum made from materials such as high metal of hardness or potteries passes through bolt 611, and this bolt 611 is used for the bearing housing 601 of casing the 1st member, adiabatic mechanism 603, casing component 605 and 607 are fixed into one.Above-mentioned retaining member 609 preferably has the above axial length of thickness of thermal insulation member 603, and adiabatic mechanism is not limited to the material of ductility.By such structure, and when carrying out the connection of bolt, bearing housing 601 and casing component 605 just can not apply strong active force to thermal insulation member 603.
Also method that can be as described below, promptly, more longer than thermal insulation member slightly a plurality of pins are clamped between bearing housing 601 and the casing component 605; Or use can cover heat insulating construction 603 and with the casing shape circular retaining member that matches.
Utilizability on the industry
As mentioned above, according to the application's the 1st invention, it has vacuum exhaust chamber, and has Import to the indoor introducing mechanism of this vacuum exhaust, above-mentioned processing gas is discharged processing gas To the outdoor exhaust gear of above-mentioned vacuum exhaust with above-mentioned vacuum exhaust chamber and external isolation Casing, impeller can be fixed in this casing by bearing with rotating freely, wherein, above-mentioned true Between empty exhaust chamber and the bearing portion adiabatic mechanism is being set, is being made by such structure to be covered with casing Adiabatic mechanism or exhaust chamber in the heat that produces do not pass to casing, just can not make not to be formed on this Bearing on the casing or sealing pad become high temperature, can prevent that this bearing or this sealing pad from becoming High temperature and destroy, can also prevent the destruction that caused by thermal expansion.
According to the application's the 2nd invention, by the pyroconductivity with the thermal conductivity ratio case material Also low material just can obtain the big adiabatic mechanism of insulation effect as above-mentioned adiabatic mechanism.
According to the application's the 3rd invention, by the pyroconductivity with the thermal conductivity ratio case material Also low and resin material that corrosion resistance is high is used as above-mentioned adiabatic mechanism, just can be added Frock is joined all the easily big thermal insulation member of insulation effect, even and discharge rotten at pump During the high gas of erosion property, also can prevent from causing falling of heat-insulating material air-tightness or intensity by corrosion Low.
According to the application's the 4th invention, be used as above-mentioned exhausted by the thermal insulation member that makes hollow The structure of hot mechanism, gas that just can pyroconductivity is low or liquid-filled space to hollow bulb In or the thermal insulation member of packing into, this is effective to thermal insulation.
According to the application's the 5th invention, by the bearing housing fixed at above-mentioned bearing and above-mentioned Casing is disposing adiabatic mechanism, is being provided with the supporting member of this thermal insulation mechanism in this thermal insulation mechanism, Just can with flexible material as adiabatic mechanism, can increase the selection free degree of heat-insulating material.
According to the application's the 6th invention, by establishing in the periphery of said machine casing and/or casing Heat conduction mechanism is arranged, just can easily make near the temperature rise of adiabatic mechanism in the exhaust chamber, Can make the temperature in the exhaust chamber more even.
The 7th invention according to the application is provided with the 2nd thermal insulation by the periphery in said machine casing Mechanism, thereby can exhaust chamber be covered fully with heat-insulating material, even flow through reactant gas, Also the temperature in the exhaust chamber can be remained on can not the such degree of reaction of formation product high temperature.
According to the application's the 8th invention, by making the periphery at said machine casing and/or casing Be provided with the structure of heat conduction mechanism, just heat can be passed from the high part of the temperature of casing periphery Deliver to the low part of temperature, even reactant gas flows through the section that the exhaust chamber with casing joins Divide, also can form the temperature of the equalization that is difficult to the reaction of formation product.
According to the application's the 9th invention, by forming heat pipe as above-mentioned heat conduction mechanism Structure, just can improve significantly the pyroconductivity of casing.
According to the application's the 10th invention, by forming the metal that pyroconductivity is good as upper State the structure of heat conduction mechanism, and cover casing with the metal of easily processing, just can easily pass Send heat.
According to the application's the 11st invention, it has vacuum exhaust chamber, and has processing gas Body imports to the indoor introducing mechanism of this vacuum exhaust, it is above-mentioned true that above-mentioned processing gas is discharged to The exhaust gear that empty exhaust chamber is outer and with the casing of above-mentioned vacuum exhaust chamber and external isolation, impeller Can be fixed in this casing by bearing with rotating freely, wherein, by said machine casing or/ Be provided with heat conduction mechanism with the periphery of casing, just heat can be passed from the high part of casing temperature Deliver to the low part of temperature, can make the temperature equalization of casing.
According to the application's the 12nd invention, by the heat conduction with the thermal conductivity ratio case material Rate also high metal just can easily be processed into heat conduction mechanism as above-mentioned heat conduction mechanism.
Claims (12)
1. rotary vacuum pump, it has the vacuum exhaust chamber, and have and import to the indoor introducing mechanism of this vacuum exhaust, above-mentioned processing gas be discharged to the outdoor exhaust gear of above-mentioned vacuum exhaust and the casing of above-mentioned vacuum exhaust chamber and external isolation with handling gas, impeller can be fixed in this casing by bearing with rotating freely, it is characterized in that, between above-mentioned vacuum exhaust chamber and above-mentioned bearing, adiabatic mechanism is being set.
2. rotary vacuum pump as claimed in claim 1 is characterized in that, the material also lower than the pyroconductivity of case material is used as above-mentioned adiabatic mechanism.
3. rotary vacuum pump as claimed in claim 1 is characterized in that, will be than the pyroconductivity of case material also low and resin material that corrosion resistance is high as above-mentioned adiabatic mechanism.
4. as claim 1,2 or 3 described rotary vacuum pumps, it is characterized in that, with the thermal insulation member of hollow as above-mentioned adiabatic mechanism.
5. as claim 1,2,3 or 4 described rotary vacuum pumps, it is characterized in that, said machine casing is to constitute by the bearing bearing housing that is provided with above-mentioned bearing with round the main case of above-mentioned impeller, is provided with the supporting member of above-mentioned adiabatic mechanism between this bearing housing and this main box body.
6. as claim 1,2,3,4 or 5 described rotary vacuum pumps, it is characterized in that, between above-mentioned adiabatic mechanism and above-mentioned vacuum exhaust chamber, be provided with the also high heat conduction mechanism of pyroconductivity of the above-mentioned adiabatic mechanism of thermal conductivity ratio.
7. as claim 1,2,3,4,5 or 6 described rotary vacuum pumps, it is characterized in that, be provided with the 2nd adiabatic mechanism at the atmospheric side of the periphery of said machine casing.
8. as claim 1,2,3,4,5,6 or 7 described rotary vacuum pumps, it is characterized in that, in said machine casing or/and be provided with heat conduction mechanism on the periphery of casing.
9. rotary vacuum pump as claimed in claim 8 is characterized in that, heat pipe is used as above-mentioned heat conduction mechanism.
10. rotary vacuum pump as claimed in claim 8 is characterized in that, the metal also higher than the pyroconductivity of case material is used as above-mentioned heat conduction mechanism.
11. rotary vacuum pump, it has the vacuum exhaust chamber, and have and import to the indoor introducing mechanism of this vacuum exhaust, above-mentioned processing gas be discharged to the outdoor exhaust gear of above-mentioned vacuum exhaust and the casing of above-mentioned vacuum exhaust chamber and external isolation with handling gas, impeller can be fixed in this casing by bearing with rotating freely, it is characterized in that, in said machine casing or/and be provided with heat conduction mechanism on the periphery of casing.
12. want 11 described rotary vacuum pumps as right, it is characterized in that, the metal also higher than the pyroconductivity of case material is used as above-mentioned heat conduction mechanism.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002145320 | 2002-05-20 | ||
| JP145320/2002 | 2002-05-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1656316A true CN1656316A (en) | 2005-08-17 |
Family
ID=29545082
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN03811707.XA Pending CN1656316A (en) | 2002-05-20 | 2003-05-20 | Vacuum pump |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20050254969A1 (en) |
| EP (1) | EP1533526A1 (en) |
| JP (1) | JPWO2003098047A1 (en) |
| CN (1) | CN1656316A (en) |
| AU (1) | AU2003234835A1 (en) |
| TW (1) | TWI277696B (en) |
| WO (1) | WO2003098047A1 (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103582761A (en) * | 2011-01-19 | 2014-02-12 | 爱德华兹有限公司 | Pump with stator arrangement comprising first part and second part |
| CN104632630A (en) * | 2013-11-13 | 2015-05-20 | 中国科学院沈阳科学仪器股份有限公司 | System and method for controlling thermal expansion of Roots dry pump |
| CN110753793A (en) * | 2017-06-19 | 2020-02-04 | 爱德华兹有限公司 | Double-shaft pump |
| CN112664453A (en) * | 2019-10-15 | 2021-04-16 | 株式会社荏原制作所 | Vacuum pump device |
| CN112664460A (en) * | 2019-10-15 | 2021-04-16 | 株式会社荏原制作所 | Vacuum pump device |
| CN114542425A (en) * | 2020-11-26 | 2022-05-27 | 中国科学院微电子研究所 | Semiconductor processing technology, vacuumizing device and semiconductor processing equipment |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102008063281A1 (en) * | 2008-12-29 | 2010-07-01 | Oerlikon Leybold Vacuum Gmbh | vacuum pump |
| JP5502040B2 (en) * | 2011-09-09 | 2014-05-28 | 株式会社神戸製鋼所 | Tire vulcanizing method and tire vulcanizing machine |
| TWI586893B (en) * | 2011-11-30 | 2017-06-11 | Edwards Japan Ltd | Vacuum pump |
| EP3867530A2 (en) | 2018-10-19 | 2021-08-25 | NGUYEN, Hai | Suction/compression rotating mechanism, rotary compressor and rotary engine |
| JP2023083773A (en) * | 2021-12-06 | 2023-06-16 | エドワーズ株式会社 | Vacuum pump and good heat conductive component |
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| US1590964A (en) * | 1925-07-14 | 1926-06-29 | Edward T Street | Pump |
| US3101171A (en) * | 1961-02-27 | 1963-08-20 | Ingersoll Rand Co | Axial flow compressor |
| EP0347367B1 (en) * | 1988-06-16 | 1993-04-14 | Hwt Gesellschaft Für Hydrid- Und Wasserstofftechnik Mbh | Process for producing a vacuum |
| FR2637655B1 (en) * | 1988-10-07 | 1994-01-28 | Alcatel Cit | SCREW PUMP TYPE ROTARY MACHINE |
| US5101888A (en) * | 1990-12-03 | 1992-04-07 | Rockwell International Corporation | Heat pipe systems |
| JP3275431B2 (en) * | 1993-03-25 | 2002-04-15 | ダイキン工業株式会社 | Fluororesin molded article and method for producing the same |
| JPH0717978U (en) * | 1993-08-27 | 1995-03-31 | 株式会社島津製作所 | Dry vacuum pump |
| JPH0791387A (en) * | 1993-09-24 | 1995-04-04 | Matsushita Electric Ind Co Ltd | Vacuum pump |
| JP2565468Y2 (en) * | 1993-12-20 | 1998-03-18 | オリオン機械株式会社 | Oil-free rotary vane pump |
| JPH10318168A (en) * | 1997-05-22 | 1998-12-02 | T D Giken:Kk | Positive displacement pump |
| JPH11315794A (en) * | 1998-05-01 | 1999-11-16 | Kashiyama Kogyo Kk | Screw dry vacuum pump with cooling mechanism |
| JP2000314386A (en) * | 1999-04-30 | 2000-11-14 | Tochigi Fuji Ind Co Ltd | Screw fluid machine |
| DE10156180B4 (en) * | 2001-11-15 | 2015-10-15 | Oerlikon Leybold Vacuum Gmbh | Cooled screw vacuum pump |
| JP2003269367A (en) * | 2002-03-13 | 2003-09-25 | Boc Edwards Technologies Ltd | Vacuum pump |
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2003
- 2003-05-20 JP JP2004505543A patent/JPWO2003098047A1/en not_active Ceased
- 2003-05-20 WO PCT/JP2003/006260 patent/WO2003098047A1/en active Application Filing
- 2003-05-20 AU AU2003234835A patent/AU2003234835A1/en not_active Abandoned
- 2003-05-20 EP EP03728116A patent/EP1533526A1/en not_active Withdrawn
- 2003-05-20 TW TW092113601A patent/TWI277696B/en not_active IP Right Cessation
- 2003-05-20 CN CN03811707.XA patent/CN1656316A/en active Pending
- 2003-05-20 US US10/515,221 patent/US20050254969A1/en not_active Abandoned
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103582761A (en) * | 2011-01-19 | 2014-02-12 | 爱德华兹有限公司 | Pump with stator arrangement comprising first part and second part |
| CN103582761B (en) * | 2011-01-19 | 2016-09-07 | 爱德华兹有限公司 | There is the pump of the stator arrangement including Part I and Part II |
| CN104632630A (en) * | 2013-11-13 | 2015-05-20 | 中国科学院沈阳科学仪器股份有限公司 | System and method for controlling thermal expansion of Roots dry pump |
| CN104632630B (en) * | 2013-11-13 | 2017-01-11 | 中国科学院沈阳科学仪器股份有限公司 | System and method for controlling thermal expansion of Roots dry pump |
| CN110753793A (en) * | 2017-06-19 | 2020-02-04 | 爱德华兹有限公司 | Double-shaft pump |
| CN110753793B (en) * | 2017-06-19 | 2022-03-22 | 爱德华兹有限公司 | Double-shaft pump |
| US11542946B2 (en) | 2017-06-19 | 2023-01-03 | Edwards Limited | Twin-shaft pumps with thermal breaks |
| CN112664453A (en) * | 2019-10-15 | 2021-04-16 | 株式会社荏原制作所 | Vacuum pump device |
| CN112664460A (en) * | 2019-10-15 | 2021-04-16 | 株式会社荏原制作所 | Vacuum pump device |
| CN114542425A (en) * | 2020-11-26 | 2022-05-27 | 中国科学院微电子研究所 | Semiconductor processing technology, vacuumizing device and semiconductor processing equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| US20050254969A1 (en) | 2005-11-17 |
| AU2003234835A1 (en) | 2003-12-02 |
| WO2003098047A1 (en) | 2003-11-27 |
| EP1533526A1 (en) | 2005-05-25 |
| TWI277696B (en) | 2007-04-01 |
| JPWO2003098047A1 (en) | 2005-09-15 |
| TW200403392A (en) | 2004-03-01 |
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