CN103256224A - Screw rotor for screw vacuum pump - Google Patents

Screw rotor for screw vacuum pump Download PDF

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Publication number
CN103256224A
CN103256224A CN2013100102284A CN201310010228A CN103256224A CN 103256224 A CN103256224 A CN 103256224A CN 2013100102284 A CN2013100102284 A CN 2013100102284A CN 201310010228 A CN201310010228 A CN 201310010228A CN 103256224 A CN103256224 A CN 103256224A
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CN
China
Prior art keywords
rotor
core
shaft
screw
cover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2013100102284A
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Chinese (zh)
Inventor
J.迪尔舍尔
F.吉特曼斯
G.吕斯特
M.普拉泽
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vacuubrand GmbH and Co KG
Original Assignee
Vacuubrand GmbH and Co KG
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Filing date
Publication date
Application filed by Vacuubrand GmbH and Co KG filed Critical Vacuubrand GmbH and Co KG
Publication of CN103256224A publication Critical patent/CN103256224A/en
Pending legal-status Critical Current

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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2/00Rotary-piston machines or pumps
    • F04C2/08Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C2/12Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C2/14Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C2/16Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/0078Fixing rotors on shafts, e.g. by clamping together hub and shaft
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/0085Prime movers
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04Heating; Cooling; Heat insulation

Abstract

A screw rotor is for a screw type vacuum pump, preferably for a screw type vacuum pump having a pumping capacity less than 50 m3/h. The rotor has a rotor shaft, a rotor core which rests on the rotor shaft, and a rotor cover which rests on the rotor core and at least partially encloses the rotor core. The rotor core is made of a material having a thermal conductivity greater than 100 W/mK, preferably a thermal conductivity greater than 200 W/mK. A screw type vacuum pump has correspondingly designed rotors.

Description

The helical rotor that is used for screw vaccum pump
Technical field
The present invention relates to the screw vaccum pump that has corresponding helical rotor of the feature of a kind of helical rotor that is used for screw vaccum pump of feature of the preamble with claim 1 and a kind of preamble with claim 13.
Background technique
Numerous scientific researches and industrial process need 10 2Pa-10 -2Vacuum (high vacuum scope) in the Pa scope must be carried steam condensation and/or corrosive or gas toward contact.In order to produce the negative pressure in this scope, usually use liquid vacuum pump sealing or liquid lubrication, such as oil-tightening rotary air valve pump.The pump of this pump is inhaled medium and is contacted with oil or other liquid, uses this pump that a lot of shortcomings are arranged.Thereby pump inhale medium can the pollution lubricating material or with its reaction, this has reduced lubricated and sealing effect.Process there can disturb the gaseous component of greasing substance or decomposition product to be back in the processing equipment sensitively.
For this reason, so-called " dry type " vacuum pump has been developed in work for a long time, i.e. the pump of this pump suction medium does not contact with liquid.
Under high pressure, just 10 5Pa-10 2Under the pressure in the Pa scope, preferably adopt the diaphragm vacuum pump, this is to be separated by the diaphragm seal of tensioning airtightly ground because of drawing chamber and drive area.But the valve that utilizes limited compression factor and only handle by gas stream usually is difficult to reach the pressure below the 50Pa.
Except high vacuum pump such as reciprocating pump, vortex pump, pawl formula pump and the Roots pump, also known have a screw vaccum pump.
Two screw shaped rotors of screw vaccum pump (being abbreviated as volute pump) contactlessly are meshing with each other in the suitable volute pump stator of shape, thereby by their backward rotation gas are delivered to outlet from entrance.Whole designs here and following design all relate to volute pump compression contactlessly, that do not have oil.
The advantage of volute pump is, can realize high compactness, and this is because volute pump self can be quaternary structure, and wherein each pitch is as one-level.Volute pump can only can be realized less than the good ultimate vacuum in the 1Pa scope with a pair of rotor thus.
This of volute pump can what is called support rotor with suspending.Under the mount supports situation, only support from the right side of rotor.And do not support at the right opposite side of rotor.Can become no support unit to the volute pump stator design thus.This for example allow for safeguard and cleaning purpose and pull down the volute pump stator easily.
A common problem of volute pump is exactly to discharge a large amount of heats in the constricted zone of atmospheric side.If swabbing pressure is low, the gas that just has seldom is transported to atmospheric side from the suction side.Thereby only carry out a small amount of gas exchange in pump inside.In addition, to the last just produce negative pressure in the chamber drawing of forming of the pitch by engagement in the pitch of an atmospheric side.
If in the end the pitch place of an atmospheric side opens and draws the chamber in rotor rotation process, just have gas and flow back into this from outlet and draw the chamber.The gas that flows into is extruded away again rotor rotation process with taking over the gas of carrying from suction.This pulsation of gas in the outlet port causes that the driving power demand is big, and discharging a large amount of heats in the narrow space relatively.
Can utilize the end plate that is close on the helical rotor to reduce gas backstreaming, these end plates have opening in place.But because these end plates hinder the gas ejection simultaneously, so adopt this set scheme can realize hardly improving.
The another program that reduces backflow is the safety check on this end plate.But these safety check must open and close with the speed of rotor.Yet, common 6000-25000min -1Frequency often too high concerning this, that is to say that enough the reaction of big safety check is too late slow.
In order to reduce temperature problem and power problem, have the helical stator that draws the chamber volume that reduces towards outlet and widely adopt.For example can reduce pitch or reduce the screw rod radius towards outlet side, realize this point thus.This causes the internal compression rate of common 2-10.Can reduce the power demand of pump in this way, and make the heat that discharges at the place, end of the atmospheric side of screw rod for the suction capactity of pump, almost reduce this compression multiplying power.
The shortcoming of this method is, because the screw rod profile changes continuously, perhaps also may change suddenly, obviously increased the manufacture difficulty of rotor.Another shortcoming is that under the high situation of swabbing pressure, internal compression can cause internal over pressure.This can make and the drive motor overload pump be caused damage.Therefore, in drawing the chamber stator, in the internal compression zone, often need expensive excess pressure valve.Carry incompressible liquid-its may be drawn into or since internal condensation produce-time, can produce hydrostatic obstruction, the result is, pump is because overload and shutdown suddenly.This can cause expensive follow-up damage to unit and actuator.
Another solution is, in series use two volute pumps that separate, they have different suction capactities, in them any one itself all do not have internal compression (referring to EP 0 811 766 B1), wherein can be connected to excess pressure valve (referring to WO 2007/088989 A1) between these pumps.But these schemes also cause big constructions cost (two pump assemblys).
In order to control hot-fluid, known bigger volute pump often utilizes the liquid cooling to pump case.Bigger pump also utilizes the liquid internal cooling to rotor, but expensive.
Much is, also in the pitch zone of last atmospheric side gas is incorporated into from the outside and draws in the chamber.Purge gas should cool off in the zone, and last pitch zone is left in the conveying of the gas of heating.Disadvantageously, ultimate vacuum with high costs and pump worsens inevitably.
Compact volute pump has the rotor spacing of 20-100mm and usually less than 50m 3The suction capactity of/h for this volute pump, for the reason of position and cost, can't utilize the liquid internal cooling to rotor.With regard to this equipment, also be disadvantageous to the liquid cooling of housing, this is because these equipment should for example be installed in the scientific experiment chamber neatly, and usually obviously bigger pumping in the weight reason often be installed in the industry equipment to fixed-site.Compact screw vaccum pump thereby needs employing new tool are controlled the thorny hot situation at the place, end of the atmospheric side of rotor.
Compact screw vaccum pump be to select the material of rotor on the other hand.Helical rotor often designs integratedly with rotor shaft, and this helical rotor is made of cast-iron alloy or Steel Alloy usually, and this is because these alloys have high hardness (E-modulus) and good processability.The heat conductivity of this class material is very general, but generally just enough in conjunction with outside water cooling and the cooling of interior oil in case of necessity.The rotor surface temperature of this material also still can be accepted greater than 150 ℃.
Traditional steel and the shortcoming of cast-iron alloy are that chemical stability is very limited.Corrosive chemical must remove from this pump, and with situations such as coolings.In addition, handle with purge gas usually, this is expensive.Yet this pump but often shows the very short life-span when carrying Korrosionsmedium.
The Steel Alloy that chemical stability is high can only be handled usually such as Hastelloy difficultly, and this makes that the common screw rod profile complex-shaped and that tolerance is narrow of making is loaded down with trivial details and expensive.
Another shortcoming of steel rotor or cast-iron rotor is that weight is big, and this needed driving power when accelerating has adverse effect and causes rotor imbalance.Avoiding the scheme of this problem by means of the aluminum rotor on the steel axle is known (DE 100 39 006 A1).
For the application that the chemical corrosivity material is arranged, rotor preferably is made of the chemical-resistant plastics.Because the hardness of plastics very limited (low E modulus) often needs the axle of internal rotor to be made of harder material.This device that is made of plastics rotor processed and internal steel rotor shaft is known (WO 2010/061939 A1).
The shortcoming of aforementioned means is, but the plastics of nearly all practical application all have low heat conductivity.Even being arranged, a large amount of packing materials also almost can't realize thermal conductivity greater than 1W/mK such as carbon fiber.For the application in the volute pump, this means, thorough discharges heat when discharging a large amount of heat at the place, end of the atmospheric side of rotor, the plastic materials becomes warm to high temperature rapidly partly.This can cause material height thermal expansion or even thermic damage (break, melt).The height thermal expansion is disadvantageous because so will make narrower (usually less than the 0.1mm) of spacing opposite to each other high speed rotating (usually greater than 6000min -1) rotor come in contact, thereby can cause serious follow-up damage.
The foregoing problems of the helical rotor of screw vaccum pump was mentioned (GB 2 243 189 A) in the prior art.At this, in conjunction with being applied in the screw vaccum pump with the chemical corrosivity material, be provided with two intermeshing rotors, these rotors are made of cast iron, but are provided with by the protectiveness material thin layer that constitutes of plastics particularly.The problem that discharges a large amount of heats and discharges heat is also not mentioned here.In fact, because the rotor core of rotor is made of cast iron, so being not enough to the real protection plastic materials, the size of heat conductivity avoids causing the damage heat pyrexia.Because rotor shaft separates at this and rotor core, thus rotor core by wedge to rotor shaft, here at textural definitely unexposed optimized project for discharges heat.
Summary of the invention
Based on aforementioned prior art, the problem of this instruction is, proposes a kind of helical rotor for screw vaccum pump, wherein under any circumstance can both but can solve the aforementioned hot problem in the textural laboratory that is applied to be under the chemical corrosivity condition.
Foregoing problems is solved in the feature that is used on the helical rotor of screw vaccum pump the characteristic by claim 1 of the feature of the preamble with claim 1.
Claim 2-12 is described to be decision design and the improvement of rotor of the present invention.
Screw vaccum pump draws volute pump stator suitably shaped has two oppositely intermeshing screw shaped rotors contactlessly in the chamber, with regard to this screw vaccum pump generally speaking, use the rotor of respective design to solve foregoing problems according to claim 13.Thus, other dependent claims 14 and 15 describedly is preferred design and improves.
In a word, obtained being applied to particularly having the following advantage of rotor of the volute pump of the scientific research of chemical corrosivity material and the compactness in the industry:
-cooled rotor effectively;
The thermal expansion degree of-rotor is low;
-rotor shaft has sufficiently high intensity (E modulus);
-under the material situation suitable for the use of rotor cover, rotor surface has high chemical stability, and the contact tolerance is arranged, and that is to say, when reverse helical rotor contact, be difficult for blocking;
-possible unbalance in order to reduce, rotor can be very light;
-for the rotor cover uses under the suitable material situation, owing to the good workability of rotor material, be convenient to make the narrow screw rod profile of the very big tolerance of common stress.
Starting point of the present invention is following understanding: at the volute pump of compact structure, must mainly emit heat from draw the chamber via rotor and rotor shaft, thus helical rotor be cooled off.Stipulate according to the present invention that for this reason the rotor core of rotor is made of the material of high thermal conductivity, this rotor core is surrounded by the rotor cover that preferably is made of the chemical-resistant plastics.As the material of high thermal conductivity, adopt heat conductivity to be preferably greater than the material of 200W/mK greater than 100W/mK, i.e. for example aluminium or copper or some alloys.Plastics and ferro-alloy (steel, cast iron) do not reach such value, so can't to inner or via rotor shaft up hill and dale discharges heat so that cooled rotor effectively.
According to a kind of preferred design, rotor shaft also is made of the material of high thermal conductivity, thereby the heat of rotor is exported from draw the chamber according to the heat conducting mode of solid via rotor shaft.Usefully especially at this be, rotor shaft and rotor core design integratedly, because so just carry out the solid thermal conduction in rotor core inside, outwards be transmitted on the rotor shaft always, and glitch-free interface.
According to a kind of alternative design, replace the solid rotor shaft of high conductivity material and use hollow axle, carry cooled gas such as air via this hollow shaft, cooled gas preferably is inhaled into by the rotation of axle itself, for example adopts the mode in the air blast of axle free end to suck.Cooled gas is guided in the maximum zone of release heat via rotor shaft always, and cools off the rotor core of high thermal conductivity there internally.The gas of heating for example is discharged into delivery side of pump, and can be used as purge gas there, perhaps draws back again via rotor shaft.Thereby in this design, rotor also is made of the rotor core that is surrounded by rotor cover of high thermal conductivity, and wherein rotor core contacts with hollow rotor shaft, perhaps directly contacts with cooled gas.The material of hollow rotor shafts also can be high thermal conductivity.
The decision sheath material is that the reason of the thickness of rotor cover is on the one hand, and layer is that non-proliferation and machinery are firm, is on the other hand, also will be enough to avoid surperficial overheated via layer towards the ability size of core material conduction heat.This means that according to the present invention the core material of high thermal conductivity is stretched in the pitch according to preferred design always, rather than as just the part existence of cylindricality basically.This means that the screw rod profile has the material (having reduced the jacket wall thickness) of high thermal conductivity at least in this section, wherein the preferred thickness of sheath material in these zones is 0.1-10mm.
Although rotor cover often has only quite little usually less than the specific guide heating rate (typically for example being used for plastics) of 5W/mK, because rotor cover thickness is little, can realize via this layer towards rotor core discharges heat fully.Because this application, the rotor core of high thermal conductivity preferably in the maximum zone of release heat, namely at the place, end of the atmospheric side of rotor-need give off a large amount of heats-outwards be stretched in the pitch via rotor here,
But according to preferred embodiment a kind of, rotor of the present invention has one or more sections, and in described section, the rotor core of high thermal conductivity or by halves outwards is not stretched in the pitch.When introducing, will investigate the possible material that is used for rotor core and rotor cover.
Can adopt multiple mode that rotor core is carried out jacket.If lay very thin layer (less than 0.1mm), then can save the follow-up machining to layer sometimes.But this layer is also incomplete non-proliferation usually, thereby layer can see through by pumped medium below, and then stays flat in vacuum.If layer is thicker, then must process screw rod profile shape with spending money afterwards.Thicker layer melts afterwards laying (for example adopting the electrostatic powder coating way) usually.This often causes edge circle blunt (Verrundung), thereby produces rejected region at outer edge after final processing.
Different with this coating process is to coat rotor core with thermoplastic plastic injecting.According to the method, bed thickness can almost be selected (but thereby also non-proliferation) and accurately moulding of edge arbitrarily.Simultaneously, this method also allows to fill a large amount of plastics.
Relatively machinery and characteristic parameter heat of different materials will be known, in the material with very high heat conductivity greater than 100W/mK, it is very suitable that copper and some Cuprum alloys be it seems.Its reason is high heat conductivity, the acceptable E modulus of acceptable thermal expansion Buddhist monk still.Aspect these three parameters, aluminium and alloy thereof show obviously relatively poor value, but low weight at all.Because the E modulus is obviously less, aluminium is not suitable as the rotor shaft material very much, but can be used as the rotor core material, so rotor shaft must be made of such as copper another kind of material, perhaps the hollow shaft by the cooling of band gas interior constitutes.In order to protect material to corrosion-susceptible such as copper, can give these material coatings, for example carry out coating with Ni, Cr, Ag or Au.
Other metal with high thermal conductivity is such as gold, silver, alkalinous metal and alkaline-earth metal, zinc, molybdenum or tungsten and alloy thereof, owing to too high cost of material, relatively poor workability, reactivity or low E modulus are got rid of.New material such as CFK particularly have anisotropic unmanageable characteristic usually when forming entity (Volumenk rper).And make often expensive and loaded down with trivial details.Dedicated ceramic such as AIN have attractive material behavior, but are difficult to processing.But they are the material of attractive rotor core for rotor of the present invention or rotor core part in the future.
The shortcoming of copper is that proportion height and cost of material are quite high.Therefore, a second aspect of the present invention is, the core material of high thermal conductivity is essential part aspect hot only, and namely particularly in the zone of atmospheric side compression, just particularly advantageously outwards stretching, extension is below closely being in frosting.In other less zone of the heat load of rotor, core material need not to be deformed in the pitch, and at this, rotor can be made of relatively little cylindrical rotors core, and the plastics that this rotor core is used as the rotor cover surround.
As sheath material, preferably adopt very chemical-resistant plastics such as PPS, PEEK or fluoroplastic, they are preferably strengthened with packing material such as carbon fiber or glass fibre.For example, the density with carbon fiber reinforced PEEK only is about 16% of copper.Can adopt arrangement of the present invention obviously to reduce the weight of helical rotor thus, and then obviously reduce possible unbalance, wherein according to described arrangement, the core material of high thermal conductivity is essential part aspect hot only, namely particularly in the zone of atmospheric side compression, just outwards stretch below closely being in frosting.Unbalance due to the profile just can be eliminated on rotor core to a great extent, thereby still only needs repair slightly the rotor cover on whole rotor, can save bigger balance ring (Wuchtring) or hole thus.
Be good workability and contact tolerance (Ber ü hrungstoleranz) and namely be difficult for blocking such as other advantage of the material of PPS, PEEK or fluoroplastic.For example than very corrosion resistant stainless steel, obviously easy, quick to this processing of plastic, and then with low cost.
Arrangement of the present invention thereby obtained a kind of rotor, it has the surface of the high non-proliferation of chemical stability, simultaneously in the zone of a large amount of heats of the thermal conductivity of whole device-when work, discharge at least-very high, and manufacture cost makes us unexpectedly cheap.The reason that the latter produces is: only at the material that must part just adopts such as copper or aluminium; Manufacture method such as the injection moulding of saving material have been used; These materials are easy to processing.
In order reliably the rotor cover to be bonded on the rotor core, need to utilize the side recessed (Hinterschnitt) that is used for engagement to carry out the connection of form fit as far as possible, adhere to (Materialhaftung) if can't realize sufficient material.Can on rotor core, for example set out groove, hole or slit for this reason.For example adopt the sandblast mode to form the rough surface of rotor core, this also benefits to some extent.
According to preferred arrangement, the rotor of volute pump supports with suspending, and the advantage of rotor of the present invention is obvious especially thus.Under rotor suspended ground support situation, support and drive area preferably were under the external air pressure, and did not contact with pump suction medium.In order to utilize Simmer ring etc. to make this support and drive area with respect to drawing the chamber sealing, usually pump assembly on the pressure side is arranged in driving side.
This zone is subjected to dual heat load, and one is the heat load of rotor, and another is the heat of compression load at the place, helical rotor end of atmospheric side.But if use synchronous machine or driving component efficiently, and for example utilize blower that the drive area is effectively cooled off, then the drive area just can keep lower running temperature very easily.
Compression used heat can be many times of engine waste heat.Rotor structure of the present invention allows the rotor shaft by means of the high thermal conductivity that is made of solid material now, towards the drive area of standing good cooling, very effectively compression used heat is discharged from drawing the chamber.
According to a kind of preferred design, be positioned at rotor shaft for the mechanism that described heat is disposed to ambient air in the drive area.This mechanism for example can be such as the ventilation wheel or the wheel disc that together rotate that are made of copper or aluminium.They are disposed to air to heat from rotor shaft very effectively based on fast rotational.The cooling air stream that the air of heating can be introduced is from the outside taken away.The air stream that is produced by the ventilation wheel that together rotates also can be used for cooled engine.
Exactly for the suspension type of rotor supports importantly, at the place, end away from bearing of rotor as far as possible little quality is arranged.Mass movement quality away from bearing just can cause serious skew under unbalance slightly situation, and then causes the rotor collision.
Here, a second aspect of the present invention is particularly important, and accordingly, the rotor core of high thermal conductivity (density is big usually) does not extend to outside the high part of the heat load of rotor and closely is in below the frosting, but exactly, reduces as far as possible far.This has alleviated the moving-mass of exactly locating in the end away from bearing of rotor widely.
Accurately process the rotor that (in pump inside) is supported for size with suspending, decide on manufacture method, also need rotor is contained in the processing machine in a side that deviates from bearing.If the rotor cover is not suitable for this, the rotor core of high thermal conductivity also can stretch outside deviating from a side direction of bearing distolateral.If necessary, must protect later this zone to avoid corrosion, for example utilize to have such as the cover piece of the embolism that is constituted by PTFE and protect.Alternatively, distolaterally hold also and can carry out by means of the very corrosion resistant metal that is connected with core material securely such as Hastelloy.
In the alternate design of making at mount supports of rotor of the present invention, the rotor core that thermal conductivity is high and/or rotor shaft are not in the whole length range of helical rotor complete cross section to be arranged, but or hollow, or thoroughly do not have.So the part that deviates from bearing of rotor can be made of solid sheath material, perhaps has recessed.All these designs all cause obviously alleviating at the moving-mass away from the zone of bearing of rotor.
Perhaps preferably cored screw is fixed on the axle, perhaps solid screw and minor axis is coupled together, thus fully (aus dem Vollen) can Production Example as the rotor core of the high thermal conductivity that constituted by copper or aluminium or alloy.The two all reduced for the manufacture of material expend.Use material decision design still less according to a kind of, rotor core is by integral cast, and perhaps cored screw is cast, and perhaps the latter is made of the metal plate sections of respective curved.
According to another preferred embodiment, other functional part of rotor is built in the rotor cover.These functional parts for example can be the balancer weights of screw rod one or both sides, perhaps also can be the purge gas ventilators, as disclosed among DE 10 2,010 055 798 A1.
According to another preferred embodiment, utilize a kind of twin shaft synchronous drive part that volute pump is driven, this actuator is made of the magnetized cylinder on each rotor shaft that is arranged in two rotor shafts, and these cylinders make that by their mutual magnetic interaction effects reverse rotor is synchronous.Two magnetized cylinders are surrounded by one or more coils, and these coils produce alternating magnetic fields by suitable energising, thereby two magnetized cylinders and then rotor shaft oppositely rotate synchronously.
Description of drawings
Below with reference to the accompanying drawing that embodiment only is shown in detail the present invention is described in detail now.In the accompanying drawing:
Fig. 1 is the sectional view that is used for the helical rotor of the present invention of screw vaccum pump; With
Fig. 2 is the sectional view that has the screw vaccum pump of two rotors of the present invention.
Embodiment
Figure 1 shows that the sectional view of helical rotor 1 of the present invention.This rotor 1 is specified and is used in the screw vaccum pump, preferably is used in suction capactity and is lower than 50m 3In the screw vaccum pump of/h.
Among Fig. 1 schematically with the rotor 1 shown in the sectional view mainly by rotor shaft 2, be positioned at the rotor core 3 on the rotor shaft 2 and the rotor cover 4 that is positioned on the rotor core 3 constitutes.According to shown in, rotor shaft 2 separates with rotor core 3.Rotor shaft 2 also can be constructed in principle each other integratedly with rotor core 3.
Rotor cover 4 holds rotor core 3 at least in part.In the embodiment shown in fig. 1, namely do not reclining on all outsides all faces of rotor shaft 2 of rotor cover 4 hold rotor core 3 on the rotor shaft 2.
Shown in preferred embodiment in, rotor core 3 constitutes by having the material that high thermal conductivity greater than 100W/mK is preferably greater than the heat conductivity of 200W/mK.Rotor shaft 2 is preferred also to be constituted by having the material that high thermal conductivity also is preferably greater than the heat conductivity of 100W/mK here.
Alternatively or additionally, rotor shaft 2 can have one or more passages that its axis stretches that are parallel to, and be used for carrying gases towards rotor core 3, thereby rotor 1 is cooled on the whole internally.
According to the present invention, rotor core 3 is stretched in its pitch in each section of rotor 1, shown in the zone 5 among Fig. 1.So rotor core 3 just has a thin layer that forms rotor cover 4 at this outside dimension that also almost has rotor 1 on the whole.In this zone, can overlap 4 thickness of considering to adopt between 0.1mm-10mm for rotor.Especially in the work of rotor 1 in screw vaccum pump near screw vaccum pump draws chamber outlet the tangible adstante febre of appearance, thereby realize this design when particularly under atmospheric pressure, compressing.
In the less zone of stress, rotor core 3 can save fully, rotor cover 4 thereby form complete rotor 1 except the rotor shaft 2.Referring to zone 7 top among Fig. 1.
According to the present invention, all rotors that relates to overlap 4 parts, and it is just preferably made by a kind of material, and this material has the less heat conductivity of heat conductivity than rotor core 3 and rotor shaft 2, preferably has the heat conductivity less than 5W/mK.What especially recommend here is, rotor cover 4 is made of plastics, particularly is made of thermoplastic.If correspondingly be applied to chemical purposes, then recommend to select for use chemically stable plastics, for example PPS, PEEK or fluoroplastic.The plastics hardness of rotor cover 4 can utilize filler to improve such as glass fibre or carbon fiber.
Preferred rotor cover 4 adopts injection moulding process to be connected with rotor core 3, namely is applied on this rotor core.As the material of rotor core 3 or its part and/or rotor shaft 2, recommend to adopt the alloy of copper or aluminium or these materials.
Fig. 1 illustrates, and the two ends projection of the rotor shaft 2 of rotor 1 is come out, namely with respect to rotor core 3 and rotor cover 4 in the axial direction significantly projection come out.This be a kind of at two ends supported rotors 1 all.
By contrast, be installed in the one-sided support of rotor 1,1 in the screw vaccum pump ' be designed at one end carry out shown in Fig. 2.Here, rotor shaft 2 only in its end of be used for supporting with respect to rotor core 3 and rotor cover 4 in the axial direction significantly projection come out, namely extend in the supporting zone.
The rotor 1,1 of Fig. 2 ' on also can find out, rotor shaft 2 and/or rotor core 3 rotor 1,1 ' end-this end back from the end of be used for supporting-the zone, on deciding at a distance of the distance of the end that is used for supporting, has the cross section that reduces, have recessed or do not have fully, wherein with respect to rotor 1,1 ' the space of whole outside dimension deficiency filled up by rotor cover 4.
Figure 2 shows that the schematic sectional view of screw vaccum pump, its have be installed on wherein according to the present invention the design screw shaped rotor 1,1 ', these rotors contactlessly are meshing with each other each other.The screw vaccum pump of Fig. 2 at first has volute pump stator 8, and in fact this stator has formed the housing of screw vaccum pump.In volute pump stator 8, have one with rotor 1,1 ' shape adaptive with at least one entrance 10 and export 11 draw chamber 9.Two rotors 1,1 ' shape suitable draw in the chamber 9 backscrolling contactlessly, thus gaseous medium is delivered to outlet 11 from entrance 10.Rotor 1,1 ' be equipped with as top rotor shaft 2, rotor core 3 and the rotor that described in detail in conjunction with rotor shown in Figure 11 and overlap 4.
Rotor 1,1 among the embodiment of Fig. 2 ' be with the difference of rotor 1 among Fig. 1, rotor 1,1 ' suspend at this, just only supported in a side.Rotor 1,1 ' the opposite end, namely on Fig. 2, do not have bearing.
Drawing below the chamber 9 in the volute pump stator 8 of Fig. 2 has one to support and the drive area, in this zone, supporting rotor 1,1 ' rotor shaft 2.As can be seen, the outlet 11 of drawing chamber 9 is arranged on the end of drawing chamber 9, this end face to rotor 1,1 ' supported end.
This support and drive area preferably are under the external air pressure.It is useful on support rotor 1,1 ' mechanism 12,12 '; 13,13 ' and be used for rotor 1,1 ' synchronously and/or the mechanism that drives.In the example shown here, latter mechanism is by by magnetized cylinder 14,14 suitably ' constitute, and these cylinders make reverse rotor 1,1 ' synchronously by their mutual magnetic interaction effects.These two magnetized cylinders 14,14 ' by one or more coils 15,15 ' encirclement, described coil produces alternating magnetic fields by suitable energising, thus two magnetized cylinders 14,14 ' and then rotor 1,1 ' rotor shaft 2 oppositely rotate synchronously.The actuator of screw vaccum pump thus this be twin shaft synchronous drive part 14,14 '; 15,15 '.This design itself is known in the prior art.
In the drive area, axle be useful on the heat discharging mechanism 16,16 of discharges heat ', described heat is passed to ambient air via rotor shaft 2.Described heat discharging mechanism for example can be ventilation wheel or the wheel disc that together rotates.The cooling air stream that the air of heating can be introduced is from the outside taken away (not shown).By the air stream of heat discharging mechanism 16,16 ' generations of together rotating also can be used for cooling off actuator 14,14 '; 15,15 '.
In Fig. 2, also show other functional part 17,17 ', they for example can be used for balance.Perhaps, they are purge gas ventilators, so that from supporting zone suction purge gas and and then purge bearing.
In the end regions 18 shown on Fig. 2, corresponding rotor 1,1 ' rotor cover 4 have embed in the axial direction recessed.Two rotors 1,1 ' rotor cover 4 below these are recessed respectively transverse to rotor 1,1 ' axis extend across rotor 1,1 ' entire cross section, this is because corresponding rotor shaft 2 nearby stops below this zone.

Claims (15)

1. the suction capactity that is preferred for that is used for screw vaccum pump is lower than 50m 3The helical rotor of the screw vaccum pump of/h, its rotor (1,1 ') by rotor shaft (2), be positioned at the rotor core (3) on the rotor shaft (2) and the rotor cover (4) that is positioned on the rotor core (3) constitutes, this rotor cover holds rotor core (3) at least in part,
It is characterized in that,
Rotor core (3) is made of a kind of material, and this material has the heat conductivity greater than 100W/mK, preferably has the heat conductivity greater than 200W/mK.
2. rotor as claimed in claim 1 is characterized in that, rotor shaft (2) is had the material that high thermal conductivity is preferably greater than the heat conductivity of 100W/mK and constituted by a kind of.
3. rotor as claimed in claim 2 is characterized in that, rotor shaft (2) and rotor core (3) design integratedly.
4. each described rotor in the claim as described above is characterized in that rotor shaft (2) has one or more passages that its axis stretches that are parallel to, and is used for carrying gas towards rotor core (3).
5. each described rotor in the claim as described above, it is characterized in that, rotor core (3) is stretched in the pitch of rotor (1,1 ') at least piecemeal, namely only reduce the size of the thickness of rotor cover (4) in this profile that in this zone, has the rotor (1,1 ') with respect to screw shaped, wherein, preferred rotor cover (4) has the thickness of 0.1mm-10mm in this zone.
6. rotor as claimed in claim 5, it is characterized in that, only in the zone that when rotor (1,1 ') is worked, in screw vaccum pump, occurs obviously generating heat of rotor (1,1 '), namely preferably rotor (1,1 ') when work the time in the zone of drawing chamber outlet, rotor core (3) is stretched in the pitch of rotor.
7. each described rotor in the claim as described above is characterized in that, rotor cover (4) by a kind of have than the little heat conductivity of the heat conductivity of rotor core (3) and rotor shaft (2) preferably constitute less than the material of the heat conductivity of 5W/mK.
8. rotor as claimed in claim 7, it is characterized in that, rotor cover (4) is made of plastics preferred thermoplastic plastics, wherein preferably, described plastics are chemical-resistant plastics such as PPS, PEEK or fluoroplastic, and/or preferably, and described plastics are strengthened with packing material such as carbon fiber or glass fibre, wherein, preferred rotor cover (4) adopts injection moulding process to be laid on the rotor core (3).
9. rotor as claimed in claim 8 is characterized in that, rotor core (3) or its part and/or rotor shaft (2) are made of the alloy of copper or aluminium or described material.
10. each described rotor in the claim as described above is characterized in that, rotor (1,1 ') for one-sided support only in an end of rotor shaft (2) through design.
11. rotor as claimed in claim 10, it is characterized in that, rotor shaft (2) and/or rotor core (3) are in the zone for the end of the end of supporting of deviating from of rotor (1,1 '), on deciding at a distance of the spacing of the end that is used for supporting, have the cross section that reduces, have recessed or do not have fully, wherein, filled up by rotor cover (4) with respect to the space of the whole outside dimension deficiency of rotor (1,1 ').
12. each described rotor in the claim as described above, it is characterized in that, on rotor shaft (2), between rotor core (3) and rotor cover (4) in case of necessity and the end for support thereof, be provided with for the heat discharging mechanism (16,16 ') that described heat is disposed to ambient atmosphere; And/or in rotor cover (4), be built-in with functional part (17,17 ').
13. one kind preferably has the 50m of being lower than 3The screw vaccum pump of the suction capactity of/h comprises:
The volute pump stator (8) that has at least one entrance (10) and outlet (11); With
The rotor (1,1 ') of two screw shaped that oppositely contactlessly mesh, described rotor rotates with adaptive the drawing in the chamber (9) of rotor (1,1 ') shape volute pump stator (8), thus gaseous medium is delivered to outlet (11) from entrance (10)
It is characterized in that according to one among the claim 1-12 or multinomial rotor (1,1 ').
14. screw vaccum pump as claimed in claim 13 is characterized in that, the outlet (11) of drawing chamber (9) be arranged in draw chamber (9) on the end of the supported end of rotor (1,1 ').
15. as claim 13 or 14 described screw vaccum pumps, it is characterized in that, in order to drive rotor (1,1 '), be provided with twin shaft synchronous drive part (14,14 '; 15,15 ').
CN2013100102284A 2012-01-12 2013-01-11 Screw rotor for screw vacuum pump Pending CN103256224A (en)

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EP12000151.6A EP2615307B1 (en) 2012-01-12 2012-01-12 Screw vacuum pump

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107448384A (en) * 2016-05-31 2017-12-08 苏州艾柏特精密机械有限公司 Double-screw compressor rotor preparation method
CN109642575A (en) * 2016-08-30 2019-04-16 莱宝有限公司 Vacuum pump screw rotor
CN109690088A (en) * 2016-08-30 2019-04-26 莱宝有限公司 Vacuum pump rotor
CN110114962A (en) * 2017-02-14 2019-08-09 宝马股份公司 Armature spindle and motor for motor
CN110621880A (en) * 2017-05-03 2019-12-27 凯撒空压机股份有限公司 Screw compressor with multilayer coated rotor screw
CN111550406A (en) * 2019-02-12 2020-08-18 阿特拉斯·科普柯空气动力股份有限公司 Screw rotor and method for producing a screw rotor
CN113039346A (en) * 2018-11-30 2021-06-25 尼得科盖普美有限责任公司 Screw pump for cooling battery pack

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9435220B2 (en) * 2010-01-16 2016-09-06 Borgwarner Inc. Turbocharger control linkage with reduced heat flow
DE102016100957A1 (en) * 2016-01-20 2017-07-20 FRISTAM Pumpen Schaumburg GmbH displacement
DE202016005209U1 (en) * 2016-08-30 2017-12-01 Leybold Gmbh Screw vacuum pump
US10491071B2 (en) 2017-02-16 2019-11-26 General Electric Company Method of manufacturing an electric machine with a conformal stator coating
TWI624596B (en) * 2017-03-15 2018-05-21 亞台富士精機股份有限公司 Pump apparatus with remote monitoring function and pump apparatus monitoring system
FR3076582B1 (en) * 2018-01-09 2020-01-24 Pfeiffer Vacuum DRY TYPE VACUUM PUMP AND METHOD FOR CONTROLLING A SYNCHRONOUS VACUUM PUMP MOTOR
IT201800009944A1 (en) 2018-10-31 2020-05-01 Nova Rotors Srl "VOLUMETRIC PUMP"
DE102020119335A1 (en) * 2020-03-31 2021-09-30 Vacuubrand Gmbh + Co Kg Electric motor and vacuum pump

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4415316A (en) * 1980-05-21 1983-11-15 Christensen, Inc. Down hole motor
US5165881A (en) * 1991-09-16 1992-11-24 Opcon Autorotor Ab Rotor for a screw rotor machine
US5638600A (en) * 1994-10-07 1997-06-17 Ford Motor Company Method of making an efficiency enhanced fluid pump or compressor
US6739851B1 (en) * 2002-12-30 2004-05-25 Carrier Corporation Coated end wall and method of manufacture
CN1585860A (en) * 2001-11-15 2005-02-23 莱博尔德真空技术有限责任公司 Cooled screw-type vacuum pump
US20050069446A1 (en) * 1999-12-27 2005-03-31 Hartmut Kriehn Cooled screw vacuum pump
CN101375063A (en) * 2006-01-31 2009-02-25 株式会社荏原电产 Vacuum pump unit

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2868442A (en) * 1953-10-27 1959-01-13 Svenska Rotor Maskiner Ab Rotary device
US3452843A (en) * 1967-08-18 1969-07-01 Berwick Forge & Fabricating Co Rotary impeller and reinforcing means therefor
US3918838A (en) * 1974-01-04 1975-11-11 Dunham Bush Inc Metal reinforced plastic helical screw compressor rotor
SE463829B (en) * 1985-03-15 1991-01-28 Svenska Rotor Maskiner Ab AATMINSTONE SCREWING MACHINE A ROTOR CONTAINING PLASTIC MATERIAL
SE470337B (en) * 1986-09-05 1994-01-24 Svenska Rotor Maskiner Ab Rotor for a screw rotor machine and the procedure for its manufacture
DE3712354A1 (en) * 1986-11-08 1988-05-11 Wankel Gmbh ROTARY PISTON BLOWER
JPH03290086A (en) * 1990-04-06 1991-12-19 Hitachi Ltd Screw type rotary machine, its rotor surface treatment, and dry system screw type rotary machine and its rotor surface treatment
SE468122B (en) * 1990-04-27 1992-11-09 Svenska Rotor Maskiner Ab ROTOR OPERATES A SCREW ROTOR, A SCREW ROTOR, AND A PROCEDURE FOR MANUFACTURING A ROTOR
SE502265C2 (en) * 1991-09-03 1995-09-25 Opcon Autorotor Ab Rotor for a screw rotor machine
US5290150A (en) * 1991-10-17 1994-03-01 Ebara Corporation Screw rotor comprising a plurality of thin plates
JP2873888B2 (en) * 1991-12-27 1999-03-24 本田技研工業株式会社 Screw pump rotor
JP3432679B2 (en) 1996-06-03 2003-08-04 株式会社荏原製作所 Positive displacement vacuum pump
DE19745615A1 (en) * 1997-10-10 1999-04-15 Leybold Vakuum Gmbh Screw vacuum pump with rotors
DE10039006A1 (en) 2000-08-10 2002-02-21 Leybold Vakuum Gmbh Two-shaft vacuum pump
US6688867B2 (en) * 2001-10-04 2004-02-10 Eaton Corporation Rotary blower with an abradable coating
DE10156179A1 (en) * 2001-11-15 2003-05-28 Leybold Vakuum Gmbh Cooling a screw vacuum pump
US7717684B2 (en) * 2003-08-21 2010-05-18 Ebara Corporation Turbo vacuum pump and semiconductor manufacturing apparatus having the same
WO2006024818A1 (en) * 2004-09-02 2006-03-09 The Boc Group Plc Cooling of pump rotors
GB0426959D0 (en) * 2004-12-08 2005-01-12 Boc Group Plc Vacuum pump
US20080175739A1 (en) * 2007-01-23 2008-07-24 Prior Gregory P Supercharger with heat insulated gear case
NO329714B1 (en) * 2008-08-21 2010-12-06 Agr Subsea As External rotor in eccentric screw pump with an inner and an outer rotor
WO2010061939A1 (en) 2008-11-25 2010-06-03 株式会社 荏原製作所 Dry vacuum pump unit
DE102010055798A1 (en) 2010-08-26 2012-03-01 Vacuubrand Gmbh + Co Kg vacuum pump
GB2487376A (en) * 2011-01-19 2012-07-25 Edwards Ltd Two material pump stator for corrosion resistance and thermal conductivity
US20130309076A1 (en) * 2011-02-04 2013-11-21 Edwards Japan Limited Rotating Body of Vacuum Pump, Fixed Member Disposed Opposite Rotating Body, and Vacuum Pump Provided with Rotating Body and Fixed Member
JP5793004B2 (en) * 2011-06-02 2015-10-14 株式会社荏原製作所 Vacuum pump

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4415316A (en) * 1980-05-21 1983-11-15 Christensen, Inc. Down hole motor
US5165881A (en) * 1991-09-16 1992-11-24 Opcon Autorotor Ab Rotor for a screw rotor machine
US5638600A (en) * 1994-10-07 1997-06-17 Ford Motor Company Method of making an efficiency enhanced fluid pump or compressor
US20050069446A1 (en) * 1999-12-27 2005-03-31 Hartmut Kriehn Cooled screw vacuum pump
CN1585860A (en) * 2001-11-15 2005-02-23 莱博尔德真空技术有限责任公司 Cooled screw-type vacuum pump
US6739851B1 (en) * 2002-12-30 2004-05-25 Carrier Corporation Coated end wall and method of manufacture
CN101375063A (en) * 2006-01-31 2009-02-25 株式会社荏原电产 Vacuum pump unit

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107448384A (en) * 2016-05-31 2017-12-08 苏州艾柏特精密机械有限公司 Double-screw compressor rotor preparation method
CN109642575A (en) * 2016-08-30 2019-04-16 莱宝有限公司 Vacuum pump screw rotor
CN109690088A (en) * 2016-08-30 2019-04-26 莱宝有限公司 Vacuum pump rotor
CN110114962A (en) * 2017-02-14 2019-08-09 宝马股份公司 Armature spindle and motor for motor
CN110621880A (en) * 2017-05-03 2019-12-27 凯撒空压机股份有限公司 Screw compressor with multilayer coated rotor screw
CN113039346A (en) * 2018-11-30 2021-06-25 尼得科盖普美有限责任公司 Screw pump for cooling battery pack
CN111550406A (en) * 2019-02-12 2020-08-18 阿特拉斯·科普柯空气动力股份有限公司 Screw rotor and method for producing a screw rotor
CN111550406B (en) * 2019-02-12 2023-10-24 阿特拉斯·科普柯空气动力股份有限公司 Screw rotor and method for producing a screw rotor

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Application publication date: 20130821