CN1656316A - 真空泵 - Google Patents

真空泵 Download PDF

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Publication number
CN1656316A
CN1656316A CN03811707.XA CN03811707A CN1656316A CN 1656316 A CN1656316 A CN 1656316A CN 03811707 A CN03811707 A CN 03811707A CN 1656316 A CN1656316 A CN 1656316A
Authority
CN
China
Prior art keywords
mentioned
casing
exhaust chamber
bearing
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN03811707.XA
Other languages
English (en)
Chinese (zh)
Inventor
舛重荣治
藤井理之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nabtesco Corp
Original Assignee
TS Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TS Corp filed Critical TS Corp
Publication of CN1656316A publication Critical patent/CN1656316A/zh
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/10—Stators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2225/00—Synthetic polymers, e.g. plastics; Rubber
    • F05C2225/04—PTFE [PolyTetraFluorEthylene]
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2251/00—Material properties
    • F05C2251/04—Thermal properties
    • F05C2251/048—Heat transfer

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
CN03811707.XA 2002-05-20 2003-05-20 真空泵 Pending CN1656316A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002145320 2002-05-20
JP145320/2002 2002-05-20

Publications (1)

Publication Number Publication Date
CN1656316A true CN1656316A (zh) 2005-08-17

Family

ID=29545082

Family Applications (1)

Application Number Title Priority Date Filing Date
CN03811707.XA Pending CN1656316A (zh) 2002-05-20 2003-05-20 真空泵

Country Status (7)

Country Link
US (1) US20050254969A1 (fr)
EP (1) EP1533526A1 (fr)
JP (1) JPWO2003098047A1 (fr)
CN (1) CN1656316A (fr)
AU (1) AU2003234835A1 (fr)
TW (1) TWI277696B (fr)
WO (1) WO2003098047A1 (fr)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103582761A (zh) * 2011-01-19 2014-02-12 爱德华兹有限公司 具有包括第一部分和第二部分的定子布置的泵
CN104632630A (zh) * 2013-11-13 2015-05-20 中国科学院沈阳科学仪器股份有限公司 一种罗茨干泵热膨胀的控制系统及方法
CN110753793A (zh) * 2017-06-19 2020-02-04 爱德华兹有限公司 双轴泵
CN112664460A (zh) * 2019-10-15 2021-04-16 株式会社荏原制作所 真空泵装置
CN112664453A (zh) * 2019-10-15 2021-04-16 株式会社荏原制作所 真空泵装置
CN114542425A (zh) * 2020-11-26 2022-05-27 中国科学院微电子研究所 半导体加工工艺、抽真空装置和半导体工艺设备

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008063281A1 (de) * 2008-12-29 2010-07-01 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
JP5502040B2 (ja) * 2011-09-09 2014-05-28 株式会社神戸製鋼所 タイヤ加硫方法、及びタイヤ加硫機
TWI586893B (zh) * 2011-11-30 2017-06-11 Edwards Japan Ltd Vacuum pump
CN113167274B (zh) 2018-10-19 2024-01-30 阮海 旋转式压缩机构、旋转式压缩机和旋转式发动机
JP2023083773A (ja) * 2021-12-06 2023-06-16 エドワーズ株式会社 真空ポンプおよび良熱伝導性部品

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1590964A (en) * 1925-07-14 1926-06-29 Edward T Street Pump
US3101171A (en) * 1961-02-27 1963-08-20 Ingersoll Rand Co Axial flow compressor
DE58904045D1 (de) * 1988-06-16 1993-05-19 Hydrid Wasserstofftech Verfahren zur erzeugung eines vakuums.
FR2637655B1 (fr) * 1988-10-07 1994-01-28 Alcatel Cit Machine rotative du type pompe a vis
US5101888A (en) * 1990-12-03 1992-04-07 Rockwell International Corporation Heat pipe systems
JP3275431B2 (ja) * 1993-03-25 2002-04-15 ダイキン工業株式会社 フッ素樹脂成形体およびその製法
JPH0717978U (ja) * 1993-08-27 1995-03-31 株式会社島津製作所 ドライ真空ポンプ
JPH0791387A (ja) * 1993-09-24 1995-04-04 Matsushita Electric Ind Co Ltd 真空ポンプ
JP2565468Y2 (ja) * 1993-12-20 1998-03-18 オリオン機械株式会社 無給油式回転ベーンポンプ
JPH10318168A (ja) * 1997-05-22 1998-12-02 T D Giken:Kk 容積移送型ポンプ
JPH11315794A (ja) * 1998-05-01 1999-11-16 Kashiyama Kogyo Kk 冷却機構付スクリュードライ真空ポンプ
JP2000314386A (ja) * 1999-04-30 2000-11-14 Tochigi Fuji Ind Co Ltd スクリュー式流体機械
DE10156180B4 (de) * 2001-11-15 2015-10-15 Oerlikon Leybold Vacuum Gmbh Gekühlte Schraubenvakuumpumpe
JP2003269367A (ja) * 2002-03-13 2003-09-25 Boc Edwards Technologies Ltd 真空ポンプ

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103582761A (zh) * 2011-01-19 2014-02-12 爱德华兹有限公司 具有包括第一部分和第二部分的定子布置的泵
CN103582761B (zh) * 2011-01-19 2016-09-07 爱德华兹有限公司 具有包括第一部分和第二部分的定子布置的泵
CN104632630A (zh) * 2013-11-13 2015-05-20 中国科学院沈阳科学仪器股份有限公司 一种罗茨干泵热膨胀的控制系统及方法
CN104632630B (zh) * 2013-11-13 2017-01-11 中国科学院沈阳科学仪器股份有限公司 一种罗茨干泵热膨胀的控制系统及方法
CN110753793A (zh) * 2017-06-19 2020-02-04 爱德华兹有限公司 双轴泵
CN110753793B (zh) * 2017-06-19 2022-03-22 爱德华兹有限公司 双轴泵
US11542946B2 (en) 2017-06-19 2023-01-03 Edwards Limited Twin-shaft pumps with thermal breaks
CN112664460A (zh) * 2019-10-15 2021-04-16 株式会社荏原制作所 真空泵装置
CN112664453A (zh) * 2019-10-15 2021-04-16 株式会社荏原制作所 真空泵装置
CN114542425A (zh) * 2020-11-26 2022-05-27 中国科学院微电子研究所 半导体加工工艺、抽真空装置和半导体工艺设备

Also Published As

Publication number Publication date
TWI277696B (en) 2007-04-01
WO2003098047A1 (fr) 2003-11-27
JPWO2003098047A1 (ja) 2005-09-15
AU2003234835A1 (en) 2003-12-02
US20050254969A1 (en) 2005-11-17
TW200403392A (en) 2004-03-01
EP1533526A1 (fr) 2005-05-25

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PB01 Publication
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SE01 Entry into force of request for substantive examination
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication