EP1476661A1 - Pompe a vide - Google Patents

Pompe a vide

Info

Publication number
EP1476661A1
EP1476661A1 EP03702650A EP03702650A EP1476661A1 EP 1476661 A1 EP1476661 A1 EP 1476661A1 EP 03702650 A EP03702650 A EP 03702650A EP 03702650 A EP03702650 A EP 03702650A EP 1476661 A1 EP1476661 A1 EP 1476661A1
Authority
EP
European Patent Office
Prior art keywords
oil
seal
rotor
vacuum pump
bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP03702650A
Other languages
German (de)
English (en)
Other versions
EP1476661B1 (fr
Inventor
Thomas Dreifert
Wolfgang Giebmanns
Hans-Rochus Gross
Hartmut Kriehn
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH, Leybold Vacuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP1476661A1 publication Critical patent/EP1476661A1/fr
Application granted granted Critical
Publication of EP1476661B1 publication Critical patent/EP1476661B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
    • F04C27/009—Shaft sealings specially adapted for pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/40—Pumps with means for venting areas other than the working chamber, e.g. bearings, gear chambers, shaft seals

Definitions

  • the invention relates to a vacuum pump with at least one rotor shaft, which has a rotor section with a rotor, a bearing section with a bearing and a shaft seal arrangement axially between the rotor section and the bearing section.
  • Vacuum pumps of this type can be designed, inter alia, as screw pumps, side channel compressors and root pumps.
  • the vacuum pumps mentioned have in common that they are dry-compressing vacuum pumps with oil or grease lubricated bearings and / or gears. These pumps are generally used to create a pre-vacuum.
  • the task of the sealing arrangement between the actual rotor and the bearing or gearbox is, on the one hand, to avoid gas passage from the rotor section to the bearing section and, on the other hand, to prevent liquid passage from the bearing section into the rotor section.
  • relatively good sealing contact seals can be used, for example in the form of radial shaft seals, slide rings etc.
  • only non-contact shaft seals can be used, which, however, cannot completely exclude leaks due to the design.
  • a known contactless shaft seal arrangement consists of one or more piston sealing rings as a gas seal and an oil splash ring as an oil seal.
  • a reliable and high sealing effect cannot be achieved with this.
  • the gas compressed in the rotor section should not come into contact with the oil from the bearing section, since the oil may be decomposed thereby and thereby lose its lubricity.
  • the escaping oil, gas or gas mixture can also be toxic or explosive and therefore dangerous.
  • the object of the invention is therefore to improve the shaft seal having a gas seal and an oil seal in a vacuum pump.
  • the shaft seal arrangement is designed such that between the rotor-side gas seal and the bearing-side oil seal a separation chamber is provided which surrounds the rotor shaft and is ventilated by at least one separation chamber ventilation duct.
  • the separation chamber is set to a desired gas pressure through the ventilation duct. This ensures that the pressure drop across the gas seal and that across the oil gasket dropping pressure difference can be set.
  • the separation chamber can be subjected to atmospheric gas pressure or the storage-side gas pressure through the ventilation duct, so that the gas pressure in the separation chamber is not below the storage-side gas pressure. This can prevent the oil from migrating from the bearing side through the oil seal towards the separation chamber.
  • the separation chamber gas pressure can be set higher than the gas pressure on the rotor side of the gas seal, so that explosive and / or toxic gases cannot escape from the rotor section through the gas seal.
  • a shaft seal arrangement is realized, which prevents gas from the rotor section into the bearing section and oil from the bearing section into the rotor section in a simple and reliable manner, even in the case of gas and oil seals which are not completely sealed by design. Only a small amount of production and space is required for the separation chamber, so that a compact and effective shaft seal arrangement is realized with little means.
  • the separation chamber ventilation duct opens into the surrounding atmosphere outside the pump. In this way, there is always atmospheric pressure in the separation chamber and the same gas pressure as in the bearing housing, if this is also vented to the environment. The pressure drop across the oil seal is then practically zero, so that due to the lack of pressure difference, no oil is pressed from the bearing section in the direction of the separation chamber or rotor section.
  • the gas seal and the oil seal are each designed as non-contact seals.
  • the shaft seal arrangement can also be vacuum pumps with high speeds and high rotor shaft diameters are used.
  • the gas seal is preferably designed as a gap seal or as a labyrinth seal, with piston rings or with floating sealing rings.
  • the gas seal is a non-contact throttle seal, which reduces the gas passage to an unavoidable minimum.
  • the labyrinth seal of the gas seal preferably has at least one piston ring which projects into an annular groove of the rotor shaft.
  • the piston ring is biased outwards and therefore fixed and stationary on the housing side.
  • the piston ring protrudes into the rotor shaft annular groove, as a result of which a labyrinth-like gap is formed between the piston ring and the annular groove, which acts as a throttle seal.
  • the gas seal can have a plurality of labyrinth seals of this type arranged axially one behind the other.
  • the oil seal on the rotor shaft preferably has an encircling oil centrifugal ring which projects into an annular centrifugal chamber on the housing side, which is connected to an oil return channel to the bearing housing. This creates an effective non-contact oil seal.
  • radial and / or axial non-conical or conical gaps are formed between the oil slinger and the centrifugal chamber walls on the housing.
  • the oil slinger and the opposite fixed walls are designed so that the incoming oil is thrown outwards while the rotor shaft is rotating and the oil that is not thrown off runs down into the return channel.
  • the oil seal on the axial rotor side of the oil centrifugal ring preferably has at least one annular catch chamber with an oil drain channel which opens into the bearing housing.
  • the oil seal therefore consists of two or more centrifugal or trap chambers with an oil drain channel.
  • the oil drainage channels can be combined in a single channel, but each centrifugal or collecting chamber can also be assigned its own separate oil drainage channel. This eliminates mutual malfunctions in the oil drain, so that the sealing effect of the oil seal is only slightly influenced even in the event of malfunctions in an oil drain channel.
  • Each centrifugal or trap chamber of the oil seal is preferably assigned at least one ventilation duct.
  • the ventilation duct can indeed lead outside to the atmosphere, but should preferably lead back to the bearing housing.
  • the centrifugal chambers can be ventilated via a single common ventilation duct or via at least one separate ventilation duct.
  • the ventilation through the ventilation channels ensures that there is no pressure difference within the oil seal, i.e. between the individual centrifugal chambers. A gas flow and thus an entrainment of oil in the direction of the separation chamber or rotor section is practically impossible. The passage of gases from the separation chamber towards the bearing housing is therefore largely prevented.
  • the separation chamber ventilation duct opens in the vicinity of the lowest point of the separation chamber and has a slope, so that any liquid that may escape can run out of the separation chamber. Even if oil or other liquids come from the bearing section or from the If the rotor section should reach the separation chamber, this could run outwards. This ensures that no liquid can collect in the separation chamber.
  • the bearing is preferably axially capped on the rotor side. As a result, a first barrier for oil or other liquids from the bearing is already realized between the bearing and the shaft seal arrangement.
  • a sealing gas source is connected to the separation chamber ventilation duct, through which a sealing gas is introduced into the separation chamber under excess pressure. This is necessary and useful if toxic and / or explosive gases are conveyed in the rotor section.
  • a sealing gas By feeding the separation gas, a small separation gas flow is generated from the separation chamber in the direction of the rotor section. In this way, the escape of gas from the rotor section can be prevented.
  • air or nitrogen can be used as the sealing gas.
  • a sealing gas line from the sealing gas source to the bearing housing or the bearing section can additionally be provided. This ensures that there is no significant pressure drop across the oil seal.
  • the sealing gas has a pressure of 1.3 bar, for example.
  • the rotor shaft is designed as a flying rotor shaft, which is mounted only on the pressure side of the rotor section, on the suction side of the rotor section.
  • Section of the rotor shaft is designed to be bearing-free. In this way, a bearing in the region of larger negative pressures is avoided, so that the shaft seal arrangement on the suction side of the rotor shaft, which is problematic with large pressure differences, is also avoided.
  • flying rotor shafts have a relatively large shaft diameter. It is only through the present shaft seal arrangement and the provision of a separation chamber between the gas seal and the oil seal that the high peripheral speeds associated with large rotor shaft diameters can be sealed without having to accept an unacceptably large leak.
  • FIG. 2 shows the housing of the screw vacuum pump of FIG. 1 in cross section
  • Fig. 3 is a detail of a longitudinal section along the section line X-III of the pump housing of Fig. 2, and
  • Fig. 4 is a longitudinal section of the pump housing of Fig. 2 along the section line X-IV.
  • the in Figs. 1 to 4 shown vacuum pump 10 is a screw vacuum pump for generating a backing vacuum.
  • the vacuum pump 10 is essentially formed by a housing in which two rotor shafts are rotatably mounted, of which only the main rotor shaft 12 is shown in FIGS. 1-4.
  • the Rotor shaft 12 has a rotor section 14 with a helical rotor 16, a bearing section 18 with two roller bearings 20 and axially between the rotor section 14 and the bearing section 18 a section with a shaft seal arrangement 22. No roller bearing is provided on the rotor-side end 24 of the rotor shaft 12.
  • a gas is sucked in at the flying ends of the rotor sections 14 through a suction line (not shown) in order to generate a vacuum in a recipient connected to the suction line.
  • the sucked-in gas is compressed by the interaction of the rotor 16 shown with a second rotor of a second rotor shaft, not shown, toward the pressure side of the rotor section 14 and is discharged there with an atmospheric pressure via a gas outlet, not shown.
  • bearing section 18 of the rotor shaft 12 two roller bearings are provided for rotatable mounting, of which only the roller bearing 20 on the rotor side is shown. Furthermore, the rotor shaft 12 in the bearing section 18 has a gear 26, via which the rotor shaft 12 is driven.
  • the bearing housing interior 30 formed by the bearing housing 28 contains an oil supply for the lubrication and cooling of the roller bearings 20 and the gearwheel (s) 26.
  • the shaft seal arrangement essentially has three axial sections, namely a gas seal 32 on the rotor side, an oil seal 34 on the bearing side and a separating chamber 36 therebetween.
  • the shaft seal arrangement 22 is surrounded by a seal housing 66.
  • the gas seal 32 is formed by three piston rings 38 which are arranged axially one behind the other.
  • the piston rings 38 are prestressed to the outside and are therefore non-positively connected to the fixed housing.
  • the piston rings 38 each engage in an annular groove 40 of the rotor shaft 12, so that the three piston rings 38 in the annular grooves 40 result in a gap running in a longitudinal section in a meandering manner. In this way, a non-contact labyrinth seal is formed, which ensures a satisfactory gas seal at pressure differences of less than 0.5 bar.
  • the oil seal 34 consists of several parts.
  • the bearing-side section of the oil seal 34 has an oil thrower ring 42 on the rotor shaft side, which has a wave-like profile in longitudinal section.
  • This and the corresponding complementary shape of the housing 44 surrounding the oil slinger 42 ensures that the oil coming from the bearing section 18 is thrown outwards by the rotating oil slinger 42 while the rotor shaft 12 is rotating, and is drained downwards by a corresponding fixed groove, from where it has to drain back through an oil return channel 46 into the bearing housing.
  • the oil centrifuge ring 42 is surrounded on the housing side by an annular centrifugal chamber 48, which serves to receive and discharge the oil that is flung outwards by the oil centrifugal ring 42 through the oil return channel 46.
  • the oil seal 34 has on the oil centrifuge ring 42 on the rotor side axially two annular oil catch chambers 50, 52, to each of which a circumferential annular groove 58 is assigned on the rotor shaft side.
  • the oil centrifuge chamber 48 has a larger volume than the two axially adjoining oil trap chambers 50, 52.
  • Both the circular centrifugal chamber 48 and the likewise annular oil trap chambers 50, 52 each have their own ventilation duct 59 near their highest point, each of which leads into the bearing housing 28 in the axial direction.
  • the three ventilation ducts 59 are arranged offset to one another in the circumferential direction.
  • the two oil trapping chambers 50, 52 each have an oil return channel 54, 56 through which oil that has reached this point can possibly flow back into the bearing housing 28.
  • piston rings can also be inserted into the annular grooves 58 of the rotor shaft 12 in order to prevent oil from creeping further axially in the direction of the rotor, without one or both oil-collecting chambers 50, 52.
  • the annular and relatively large-volume separation chamber 36 between the gas seal 32 and the oil seal 34 has a separation chamber ventilation duct 60 near its highest point, through which the separation chamber is ventilated to the environment or through which it is connected to a sealing gas source.
  • the separation chamber ventilation duct 60 has an axial section on the separation chamber side and then at right angles therefrom a radial section which leads to the outside. There is no pressure difference and no oil is pressed through the oil seal by a pressure difference in the direction of the rotor, since the bearing housing is also vented to the environment or because it is also subjected to the same sealing gas pressure as the separation chamber.
  • a further separation chamber ventilation duct 62 is provided, which has a downward slope and opens into a vertical outlet 64.
  • the separation chamber ventilation duct 62 also serves as a drain for If necessary, 01 reached this far, or for liquids from the rotor section.
  • the provision of the separation chamber 36 ensures in a simple and compact manner that fluids can neither get from the rotor section 14 to the bearing section 18 nor from the bearing section 18 to the rotor section 14.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
  • Sealing Devices (AREA)

Abstract

L'invention concerne une pompe à vide (10) comprenant au moins un arbre rotor (12), lequel comprend une section de rotor (14) comportant un rotor (16), une section de palier (18) comportant un palier (20), ainsi qu'un système d'étanchéité (22) destiné à l'arbre, ce système étant disposé axialement entre la section de rotor (14) et la section de palier (18). Ledit système d'étanchéité (22) comprend axialement côté rotor un joint étanche au gaz (32) et côté palier un joint étanche à l'huile (34). Entre ces deux joints, le système d'étanchéité (22) comprend une chambre de séparation entourant l'arbre rotor (12), cette chambre étant ventilée au moyen d'au moins un canal de ventilation (60, 62). Cette configuration permet de régler la différence entre les pressions de part et d'autre du joint étanche au gaz et la différence entre les pressions de part et d'autre du joint étanche à l'huile. Ce réglage permet d'éviter que de l'huile côté palier ne se répande à travers le joint étanche à l'huile en direction de la chambre de séparation.
EP03702650A 2002-02-23 2003-02-18 Pompe a vide Expired - Lifetime EP1476661B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10207929A DE10207929A1 (de) 2002-02-23 2002-02-23 Vakuumpumpe
DE10207929 2002-02-23
PCT/EP2003/001598 WO2003071134A1 (fr) 2002-02-23 2003-02-18 Pompe a vide

Publications (2)

Publication Number Publication Date
EP1476661A1 true EP1476661A1 (fr) 2004-11-17
EP1476661B1 EP1476661B1 (fr) 2012-01-11

Family

ID=27674929

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03702650A Expired - Lifetime EP1476661B1 (fr) 2002-02-23 2003-02-18 Pompe a vide

Country Status (6)

Country Link
US (1) US7153093B2 (fr)
EP (1) EP1476661B1 (fr)
JP (2) JP2005517866A (fr)
AU (1) AU2003205775A1 (fr)
DE (1) DE10207929A1 (fr)
WO (1) WO2003071134A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2431613A3 (fr) * 2010-09-17 2016-04-06 Pfeiffer Vacuum GmbH Joint d'arbre pour une pompe à vide

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0326613D0 (en) * 2003-11-14 2003-12-17 Boc Group Plc Vacuum pump
US7543822B2 (en) * 2004-07-12 2009-06-09 A.W. Chesterton Company Composite rotary seal assembly
DE102005015212A1 (de) * 2005-04-02 2006-10-05 Leybold Vacuum Gmbh Wellendichtung
DE102005041003A1 (de) * 2005-08-29 2007-03-01 Man Turbo Ag Wellendichtung für einen Getriebeexpander oder -kompressor
US20080044279A1 (en) * 2006-08-17 2008-02-21 Orlowski David C Adaptor Frame
JP2008255797A (ja) * 2007-03-30 2008-10-23 Anest Iwata Corp オイルフリーロータリコンプレッサのロータ軸シール装置
JP2008255796A (ja) * 2007-03-30 2008-10-23 Anest Iwata Corp オイルフリーロータリ圧縮機の軸封装置
JP5046379B2 (ja) * 2007-03-30 2012-10-10 アネスト岩田株式会社 オイルフリーロータリコンプレッサのロータ軸シール装置
DE102007039237A1 (de) 2007-08-20 2009-02-26 Daimler Ag Pumpe und Brennstoffzellensystem mit einer derartigen Pumpe
DE102008055793B3 (de) * 2008-11-04 2010-09-02 Voith Patent Gmbh Vorrichtung zur Abdichtung einer mit einem flüssigen Schmiermittel geschmierten Lagerung
DE102010041939A1 (de) * 2010-10-04 2012-04-05 Robert Bosch Gmbh Pumpengehäuse sowie Pumpe
JP5425049B2 (ja) * 2010-12-17 2014-02-26 株式会社神戸製鋼所 水噴射式スクリュ圧縮機
CN102654127A (zh) * 2011-03-04 2012-09-05 中国科学院沈阳科学仪器研制中心有限公司 一种真空泵用轴封结构
JP2013002590A (ja) * 2011-06-20 2013-01-07 Ulvac Japan Ltd 真空装置
DE102011108092A1 (de) 2011-07-19 2013-01-24 Multivac Sepp Haggenmüller Gmbh & Co. Kg Reinigungsverfahren und -system für Vakuumpumpe
EP2570673B1 (fr) * 2011-09-13 2014-05-07 Pierburg Pump Technology GmbH Pompe à vide électrique pour véhicule automobile
CN102661280A (zh) * 2012-04-28 2012-09-12 山东三牛机械有限公司 罗茨风机主动轴轴端密封系统
EP2941566B1 (fr) * 2012-12-31 2018-10-17 Thermo King Corporation Dispositif et procédé pour prolonger la durée de vie d'un joint pour arbre tournant pour un compresseur ouvert
WO2014164830A1 (fr) * 2013-03-11 2014-10-09 Eaton Corporation Compresseur de suralimentation
CN103883357B (zh) * 2014-03-20 2016-04-13 泸州市长江液压件装备有限公司 一种齿轮分流马达的旋转密封机构、齿轮分流马达
CN105065276A (zh) * 2015-07-22 2015-11-18 宋东方 干式螺杆真空泵组合式密封装置
ITUB20152676A1 (it) * 2015-07-30 2017-01-30 Nuovo Pignone Tecnologie Srl Disposizione di raffreddamento di tenute a gas secco e metodo
KR101721933B1 (ko) * 2015-11-06 2017-04-03 홍우산업기계(주) 오일 밀봉장치 및 이를 포함하는 블로어
DE102016007672A1 (de) 2016-06-24 2017-12-28 Vacuubrand Gmbh + Co Kg Vakuumpumpe mit Sperrgaszufuhr
DE202016003924U1 (de) 2016-06-24 2017-09-27 Vacuubrand Gmbh + Co Kg Vakuumpumpe mit Sperrgaszufuhr
GB2558954B (en) 2017-01-24 2019-10-30 Edwards Ltd Pump sealing
CN112969857B (zh) * 2018-11-08 2023-09-12 埃尔吉设备有限责任公司 无油注水式螺杆空气压缩机
JP7436345B2 (ja) 2020-10-30 2024-02-21 株式会社荏原製作所 軸封装置、回転機械、および軸封装置の組み立て方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4196910A (en) * 1977-05-19 1980-04-08 Ishikawajima-Harima Jukogyo Kabushiki Kaisha Shaft sealing device for turbocharger
JPS61104187A (ja) * 1984-10-29 1986-05-22 Hitachi Ltd 真空ポンプ用軸封装置
JPS62153597A (ja) * 1985-12-27 1987-07-08 Hitachi Ltd 真空ポンプ
DE3720250A1 (de) * 1986-06-27 1988-01-14 Battelle Institut E V Pumpe zum transport gasfoermiger medien, insbesondere fuer einen gaslaser
JPS63285279A (ja) * 1987-05-15 1988-11-22 Hitachi Ltd 真空ポンプの軸封装置
JP3493850B2 (ja) * 1995-11-22 2004-02-03 石川島播磨重工業株式会社 機械駆動式過給機のシール構造
DE29522263U1 (de) 1995-12-02 2001-08-02 Pfeiffer Vacuum Gmbh Mehrwellenvakuumpumpe
JPH1061671A (ja) * 1996-08-22 1998-03-06 Nippon Seiko Kk 密封装置
BE1010821A3 (nl) * 1996-12-23 1999-02-02 Atlas Copco Airpower Nv Droge compressor met asafdichtingen en werkwijze om een asafdichting in dergelijke compressor aan te brengen.
BE1010915A3 (nl) * 1997-02-12 1999-03-02 Atlas Copco Airpower Nv Inrichting voor het afdichten van een rotoras en schroefcompressor voorzien van dergelijke inrichting.
GB9708397D0 (en) * 1997-04-25 1997-06-18 Boc Group Plc Improvements in vacuum pumps
BE1011349A3 (nl) * 1997-09-04 1999-07-06 Atlas Copco Airpower Nv Compressoreenheid met minstens een olievrij compressorelement voorzien van een asafdichting.
DE29807796U1 (de) * 1998-04-30 1999-09-09 Ghh Rand Schraubenkompressoren Dichtungsanordnung für einen Wellenzapfen eines trockenlaufenden Rotationsschraubenverdichters
JP2001207984A (ja) * 1999-11-17 2001-08-03 Teijin Seiki Co Ltd 真空排気装置
DE19963170A1 (de) * 1999-12-27 2001-06-28 Leybold Vakuum Gmbh Vakuumpumpe mit Wellendichtmitteln
ITMI20021222A1 (it) * 2002-06-05 2003-12-05 Nuovo Pignone Spa Sistema di tenuta per compressori centrifughi che eleborano gas letali

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO03071134A1 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2431613A3 (fr) * 2010-09-17 2016-04-06 Pfeiffer Vacuum GmbH Joint d'arbre pour une pompe à vide

Also Published As

Publication number Publication date
JP5135301B2 (ja) 2013-02-06
WO2003071134A1 (fr) 2003-08-28
US7153093B2 (en) 2006-12-26
EP1476661B1 (fr) 2012-01-11
JP2009270581A (ja) 2009-11-19
US20050147517A1 (en) 2005-07-07
AU2003205775A1 (en) 2003-09-09
DE10207929A1 (de) 2003-09-04
JP2005517866A (ja) 2005-06-16

Similar Documents

Publication Publication Date Title
EP1476661A1 (fr) Pompe a vide
DE3781482T2 (de) Vakuumerzeugungssystem.
EP1957797B1 (fr) Compresseur à vis pourvu d'une chemise de refroidissement
DE68905026T2 (de) Mehrstufige roots-vakuumpumpe.
EP0290662B1 (fr) Pompe à vide à déplacement positif avec deux arbres
EP2192272A1 (fr) Dispositif pour étanchéifier un boîtier de palier de turbocompresseur
DE3326910A1 (de) Oelfreier rotationsverdraengungskompressor
EP1394365A1 (fr) Système d'étanchéité d'arbre pour turbosoufflante
DE60220247T2 (de) Horizontaler spiralverdichter
DE102010061916B4 (de) Pumpe zum Fördern eines Mediums und Schmiermittelsystem
EP2431613B1 (fr) Pompe à vide avec joint d'arbre
CH628709A5 (en) Roots pump
EP3371458B1 (fr) Pompe à vide sèche
DE102022103193A1 (de) Spiralverdichter mit einer Zentrifugalölpumpe
DE4327506A1 (de) Turbovakuumpumpe
EP0569424B1 (fr) Pompe a vide du type a marche a sec
DE4201486A1 (de) Oelfreie schraubenkompressoranlage
DE20302989U1 (de) Drehkolbenpumpe
EP0942172B1 (fr) Pompe à vide à arbres d'entraínements multiples
DE68903822T2 (de) Vakuumpumpe mit mehreren abschnitten.
DE102004050415A1 (de) Gaskompressionseinrichtung, die einen Schmiermittelaustritt verhindern kann
DE19849237C2 (de) Dichtsystem für eine aus Motor und Getriebe bestehende Antriebseinheit
DE60207153T3 (de) Dichtung für drehende Vakuumpumpe
DE102010019940B4 (de) Vakuumpumpstufe
DE10303419B4 (de) Baueinheit mit einem ölgefüllten Gehäuse und einer durch das Gehäuse hindurchgeführten Welle

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20040807

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT SE SI SK TR

AX Request for extension of the european patent

Extension state: AL LT LV MK RO

17Q First examination report despatched

Effective date: 20061012

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): CH DE FR GB IT LI

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

Ref country code: DE

Ref legal event code: R081

Ref document number: 50314167

Country of ref document: DE

Owner name: LEYBOLD GMBH, DE

Free format text: FORMER OWNER: LEYBOLD VAKUUM GMBH, 50968 KOELN, DE

RAP2 Party data changed (patent owner data changed or rights of a patent transferred)

Owner name: OERLIKON LEYBOLD VACUUM GMBH

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 50314167

Country of ref document: DE

Effective date: 20120308

REG Reference to a national code

Ref country code: DE

Ref legal event code: R081

Ref document number: 50314167

Country of ref document: DE

Owner name: LEYBOLD GMBH, DE

Free format text: FORMER OWNER: LEYBOLD VACUUM GMBH, 50968 KOELN, DE

Ref country code: DE

Ref legal event code: R082

Ref document number: 50314167

Country of ref document: DE

Representative=s name: VON KREISLER SELTING WERNER, DE

Ref country code: DE

Ref legal event code: R082

Ref document number: 50314167

Country of ref document: DE

Representative=s name: VON KREISLER SELTING WERNER - PARTNERSCHAFT VO, DE

Ref country code: DE

Ref legal event code: R082

Ref document number: 50314167

Country of ref document: DE

Representative=s name: DOMPATENT VON KREISLER SELTING WERNER - PARTNE, DE

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20120229

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20120229

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20120111

26N No opposition filed

Effective date: 20121012

REG Reference to a national code

Ref country code: DE

Ref legal event code: R097

Ref document number: 50314167

Country of ref document: DE

Effective date: 20121012

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20140218

Year of fee payment: 12

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20140220

Year of fee payment: 12

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20150218

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

Effective date: 20151030

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20150218

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20150302

REG Reference to a national code

Ref country code: DE

Ref legal event code: R081

Ref document number: 50314167

Country of ref document: DE

Owner name: LEYBOLD GMBH, DE

Free format text: FORMER OWNER: OERLIKON LEYBOLD VACUUM GMBH, 50968 KOELN, DE

Ref country code: DE

Ref legal event code: R082

Ref document number: 50314167

Country of ref document: DE

Representative=s name: DOMPATENT VON KREISLER SELTING WERNER - PARTNE, DE

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20220225

Year of fee payment: 20

REG Reference to a national code

Ref country code: DE

Ref legal event code: R071

Ref document number: 50314167

Country of ref document: DE