EP2431613B1 - Pompe à vide avec joint d'arbre - Google Patents

Pompe à vide avec joint d'arbre Download PDF

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Publication number
EP2431613B1
EP2431613B1 EP11007002.6A EP11007002A EP2431613B1 EP 2431613 B1 EP2431613 B1 EP 2431613B1 EP 11007002 A EP11007002 A EP 11007002A EP 2431613 B1 EP2431613 B1 EP 2431613B1
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
lubricant
shaft
space
accordance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP11007002.6A
Other languages
German (de)
English (en)
Other versions
EP2431613A3 (fr
EP2431613A2 (fr
Inventor
Gerd Baitinger
Johannes Kümmel
Peter Huber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2431613A2 publication Critical patent/EP2431613A2/fr
Publication of EP2431613A3 publication Critical patent/EP2431613A3/fr
Application granted granted Critical
Publication of EP2431613B1 publication Critical patent/EP2431613B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F04C29/021—Control systems for the circulation of the lubricant
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
    • F04C27/009—Shaft sealings specially adapted for pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F04C29/028—Means for improving or restricting lubricant flow
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C17/00—Arrangements for drive of co-operating members, e.g. for rotary piston and casing
    • F01C17/02—Arrangements for drive of co-operating members, e.g. for rotary piston and casing of toothed-gearing type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/30—Casings or housings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/809—Lubricant sump
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/005—Means for transmitting movement from the prime mover to driven parts of the pump, e.g. clutches, couplings, transmissions
    • F04C29/0064—Magnetic couplings

Definitions

  • the invention relates to a vacuum pump according to the preamble of claim 1, as for example from the EP 1 476 661 B1 is known.
  • Vacuum pumps with two rooms separated by a wall, with a shaft passing through this wall, are common. As a rule, both rooms are at least temporarily at different absolute pressures.
  • a rolling bearing provided in the second room for supporting the shaft requires a lubricant supply in the second room.
  • a sealing arrangement is generally required in order to keep lubricant in the second room and to prevent the passage into the first room.
  • a solution known in the prior art provides for a plurality of piston rings to be arranged in the gap between the shaft and the wall, the piston rings no longer being in contact with the shaft in the operating state.
  • Another positive feature of this sealing arrangement is the possibility of pressure equalization between the first and second space.
  • the labyrinth only acts as a throttle.
  • the disadvantage of this arrangement is that small amounts of lubricant get into the first space.
  • the lubricant leakage i.e. the amount of lubricant entering the first space, is significantly reduced by a device with a catch groove open towards the shaft, the radial boundary surface of which is designed in such a way that lubricant impinging in the radial direction is deflected and brought together in a preferred direction.
  • lubricant thrown off the shaft does not strike the radial boundary surface perpendicularly, but at an angle. Lubricant is not only thrown off the shaft and collected in this device.
  • the lubricant is quickly calmed down and removed from the sealing area. Uncontrolled flying around and atomizing into droplets, which would increase the lubricant mist that can easily be carried in the gas flow, is prevented.
  • the lubricant leakage is significantly lower, the additional costs required for the manufacture are low.
  • the development according to claim 2 presents an essentially conical surface in which lubricant impinging from the radial direction is brought together along the cone.
  • the merging is effected and promoted on the one hand by the speed component along the lateral surface of the cone and the direction of flow of the gas flowing through the device. This geometry is also easy to manufacture.
  • the development according to claim 4 leads to a reduced lubricant leakage through a collecting chamber provided between the catch groove and the rolling bearing.
  • the collecting chamber provides a volume in which lubricant emerging from the roller bearing is collected and prevented from moving in the direction of the catch groove.
  • a step on the boundary wall in the direction of the catch groove reduces the creeping of the lubricant into the gap between the wall and the shaft and thus in turn the lubricant leakage.
  • the drain chamber is advantageously further developed by a drain channel extending below the surface of the lubricant.
  • the amount of lubricant that can form lubricant foam rising into the drain chamber is reduced by the drain channel.
  • the development according to claim 9 proposes to provide a filter in this ventilation channel and thereby reduce the amount of lubricant in the fluid supplied via the ventilation channel.
  • a vacuum pump according to claim 10
  • the advantages of a vacuum pump according to claim 10 are particularly pronounced.
  • the pressure level is exceeded in such a vacuum pump at which gas dissolved in the lubricant emerges from it and thereby forms a lubricant foam.
  • the device behaves particularly well in preventing the lubricant foam formed when the gas escapes from entering the first space.
  • synchronous gears are also used, and the total amount of lubricant required is therefore particularly high.
  • FIG. 1 A section through an exemplary vacuum pump is shown in Fig. 1 shown.
  • the vacuum pump 1 has a housing 2. Inside the housing, a scoop chamber 4 is provided, in which pistons 24 and 26 are arranged. These are mounted on shafts 10 and 18 and are rotated by them. The interaction of the rotating pistons creates the pumping action. The rotation is effected by a motor 30, which introduces a torque into the shaft 10. This introduction can take place directly or via a magnetic coupling 28 shown in the figure, which advantageously allows simple and tight separation of the pump interior and the surroundings.
  • the shafts 10 and 18 are rotatably supported on both sides of the pistons by roller bearings 12 and 22.
  • a wall 8 supports roller bearings 12 and separates the pumping chamber from a gear chamber 6.
  • lubricant which is used to lubricate the roller bearings and the synchronous gears 14 and 16.
  • the synchronous gears ensure that driving force is transmitted from the shaft 10 to the shaft 18 and that the pistons roll onto one another without contact.
  • the lubricant forms a liquid supply in the lower part of the transmission space in relation to gravity.
  • a centrifugal disc 20 is immersed, which swirls up the lubricant, thereby distributing it in the gear chamber and thus bringing it to synchronous gearwheels and roller bearings.
  • a centrifugal disc 20 ′ which, like the centrifugal disc 20, is immersed in a lubricant supply and distributes this lubricant, feeds the rolling bearings in particular.
  • the scoop space 4 now forms the first space, while the second space can be formed both by the gear space 6 and by the lubricant distribution space 32.
  • the area of one of the roller bearings 12 shows Fig. 2 on average along the line I-I '. It is advantageous to design the areas with the further rolling bearings according to the example of the solution presented in this area.
  • the shaft 10 has a shaft axis 38.
  • the direction of gravity is located vertically downwards in the drawing. Therefore, the area shown in the drawing below this shaft axis is also below the shaft axis in relation to gravity.
  • the wall 8 separates the first room 4 from the second room 6.
  • the wave penetrates an opening in the wall and extends from the first room to the second room.
  • a roller bearing 12 is provided there, which rotatably supports the shaft.
  • lubricant is present, which forms a liquid supply with a lubricant surface 100 in the lower part of the second space.
  • the centrifugal disc shown in the first figure dips into this lubricant and distributes it in the second space when the shaft rotates. As a result, lubricant is supplied to rolling bearings and gearboxes.
  • a collecting chamber 70 is provided on the side of the rolling bearing facing the first space. Lubricant which emerges from the rolling bearing first arrives in this collecting chamber and runs back through a collecting chamber outlet 76 into the liquid supply.
  • the boundary wall 72 of the collecting chamber located in the direction of the catch groove 50 has a step 74 narrowing the collecting chamber. This reduces the amount of lubricant coming from the collecting chamber onto the shaft because, on the one hand, the proportion of the moving boundary surfaces of the collecting chamber is reduced. On the other hand, the step reduces the boundary surface from which lubricant can get onto the shaft.
  • the collecting chamber can interact with a centrifugal edge 102 provided on the shaft, which is arranged between the step and the roller bearing with respect to the shaft axis.
  • the catch groove 50 is located on the side of the collecting chamber facing away from the roller bearing. At least one throttle can be provided between the catch groove and the collecting chamber, which is formed, for example, by a piston ring 44.
  • the catch groove surrounds the shaft and has a radial boundary surface designed in such a way that lubricant essentially coming from the radial direction is deflected and brought together in a preferred direction, lubricant thrown off the shaft not impinging on the radial boundary surface at an angle, but at an angle.
  • the radial direction here denotes the directions perpendicular to the shaft axis 38.
  • this type of design is achieved by a radial boundary surface 52, which in three dimensions essentially forms a cone surrounding the shaft, the axis of rotation of which can coincide with the shaft axis. In the section shown, this means that the section line is not parallel to the shaft axis.
  • the larger diameter of the cone is preferably directed in the direction of the first space 4. This has the effect that lubricant thrown off the shaft is not vertical but strikes the radial boundary surface at an angle. It therefore has a speed component that is parallel to the boundary surface, as a result of which the lubricant is both deflected and brought together in a preferred direction. This advantage is increased if a second centrifugal edge 104 is provided on the shaft, which is located at the level of the boundary surface with respect to the shaft axis.
  • the limiting surface 54 of the catch groove facing away from the rolling bearing can have a shoulder 56 that widens the catch groove in the direction of the shaft. This paragraph reduces the amount of lubricant that can get into the gap between the wall and the shaft along the boundary surface facing away from the rolling bearing.
  • the shoulder preferably has an essentially conical shape, this second cone widening in the direction of the first space. This creates an acute angle at the edge 108, from which lubricant is particularly easily detached. With this second cone, a third centrifugal edge 106 on the shaft can interact by being arranged at the level of the second cone with respect to the shaft axis.
  • lubricant is thrown off the shaft, strikes the second cone, runs along this to the edge 108 and detaches there in such a way that it reaches the shaft between the centrifugal edges 106 and 104. This effectively reduces the amount of lubricant that can get into the gap between the wall and the shaft.
  • piston rings 40 and 42 can be provided, which restrict the gas flow through it, but preferably do not seal it permanently. Between the piston rings 40 and 42 there can be a sealing gas groove 90 into which gas is admitted via a sealing gas channel 92, which prevents the entry of process gas from the first space into the second space.
  • the catch groove is provided with a catch groove channel 60 which is arranged such that lubricant is discharged from the catch groove in the direction of the lubricant supply.
  • a drain chamber 62 is preferably provided between the catch groove channel and the lubricant supply, in which the lubricant draining from the catch groove is initially collected.
  • This drain chamber has its own housing. Alternatively, it can be at least partially a recess in the wall 8. It can also form a single design element together with the catch groove channel.
  • a drain channel 64 leads the lubricant back into the lubricant supply from the drain chamber.
  • the mouth of the drain channel is located below the lubricant surface 100, preferably near the floor in the calmed area of the lubricant supply.
  • the volume of the drain channel is preferably significantly smaller than the volume of the drain chamber.
  • the volume ratios are dimensioned such that when foaming lubricant while the vacuum pump is being pumped down to pressures below 50 mbar, no foam reaches the catch groove 50.
  • the drain chamber is located entirely over the lubricant surface 100. Its bottom and the mouth of the drain channel are designed in such a way that the lubricant can drain completely from the drain chamber, for example by providing the mouth at the lowest point of the drain chamber.
  • a ventilation duct 80 through which gas from the second space 6 enters the catch groove 50.
  • This enables pressure equalization between the first and second room.
  • the first room is the scooping room and the second room is a gear room.
  • the gear chamber pressure is brought into the pressure area of the scoop chamber. Due to the then small pressure difference, the flow of lubricant-laden fluid from the second into the first space is comparatively greatly reduced. This is positive for the reduced leakage of lubricant in the Into the scooping chamber and for reaching the lowest possible final pressure of the vacuum pump.
  • a filter 82 in the ventilation duct, which filters out lubricant that occurs as a mist from the gas.
  • the pore size of the filter is adapted to the droplet size of the lubricant.
  • the inlet of the filter is shielded by a shield 84 such that lubricant cannot be thrown directly onto the filter from the centrifugal disc.
  • the conductance of the flow path with ventilation channel and filter is large compared to the conductance of the flow path through the roller bearing, in particular it is approximately ten times. This ensures that preferably filtered gas reaches the catch groove without the addition of lubricant.
  • the invention has been shown using a single-stage Roots vacuum pump.
  • the vacuum pump can also be designed in several stages with a plurality of pistons arranged one behind the other on the shafts 10 and 18, which cooperate in a number of delivery spaces.
  • No Roots profile has to be used.
  • Claw profiles, screw profiles and the like can also be used with the arrangement presented.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Claims (10)

  1. Pompe à vide comportant une première chambre (4), une seconde chambre (6, 32), une cloison (8) disposée entre les chambres, un arbre (10) traversant une ouverture disposée dans la cloison, et un palier à roulement (12, 22) disposé dans la seconde chambre et supportant l'arbre, dans laquelle
    une rainure de capture (50) ouverte vers l'arbre est disposée entre la première et la seconde chambre, qui présente une surface de délimitation radiale (52) conçue de telle sorte qu'un lubrifiant provenant depuis une direction sensiblement radiale est renvoyé et recueilli dans une direction préférentielle,
    caractérisée en ce que
    le lubrifiant éjecté depuis l'arbre ne tombe pas perpendiculairement sur la surface de délimitation radiale (52), mais selon un angle.
  2. Pompe à vide selon la revendication 1,
    caractérisée en ce que
    la distance de la surface de délimitation radiale (52) par rapport à l'axe de l'arbre augmente au fur et à mesure que l'éloignement depuis le palier à roulement (12, 22) augmente.
  3. Pompe à vide selon la revendication 2,
    caractérisée en ce que
    la surface de délimitation (54), détournée du palier à roulement (12, 22), de la rainure de capture présente un talon (56) qui fait évaser la rainure de capture en direction de l'arbre.
  4. Pompe à vide selon la revendication 2 ou 3,
    caractérisée en ce que
    une chambre de collecte (70) est disposée sur le côté du palier à roulement tourné vers la rainure de capture.
  5. Pompe à vide selon la revendication 4,
    caractérisée en ce que
    la cloison de délimitation (72), située en direction de la rainure de capture, de la chambre de collecte présente un étage (74) qui rétrécit la chambre de collecte.
  6. Pompe à vide selon l'une des revendications 1 à 5,
    caractérisée en ce que
    la rainure de capture (50) est reliée à une chambre d'évacuation (62), de telle sorte qu'un liquide peut s'écouler depuis la rainure de capture jusque dans la chambre d'évacuation.
  7. Pompe à vide selon la revendication 6,
    caractérisée en ce que
    la chambre d'évacuation (62) est reliée à un canal d'évacuation (64) dont le volume est inférieur au volume de la chambre d'évacuation.
  8. Pompe à vide selon l'une des revendications 1 à 7,
    caractérisée en ce que
    la rainure de capture (50) est reliée à un canal de ventilation (80).
  9. Pompe à vide selon la revendication 8,
    caractérisée en ce que
    un filtre (82) est disposé dans le canal de ventilation (80), qui est approprié pour enlever un brouillard de lubrifiant hors d'un fluide qui le traverse.
  10. Pompe à vide à deux arbres (1),
    caractérisée en ce que
    elle comprend un dispositif selon l'une des revendications précédentes, la première chambre constituant une chambre d'aspiration et la seconde chambre constituant une chambre à mécanisme de transmission de la pompe à vide.
EP11007002.6A 2010-09-17 2011-08-27 Pompe à vide avec joint d'arbre Active EP2431613B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102010045881A DE102010045881A1 (de) 2010-09-17 2010-09-17 Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP2431613A2 EP2431613A2 (fr) 2012-03-21
EP2431613A3 EP2431613A3 (fr) 2016-04-06
EP2431613B1 true EP2431613B1 (fr) 2019-12-18

Family

ID=44674068

Family Applications (1)

Application Number Title Priority Date Filing Date
EP11007002.6A Active EP2431613B1 (fr) 2010-09-17 2011-08-27 Pompe à vide avec joint d'arbre

Country Status (2)

Country Link
EP (1) EP2431613B1 (fr)
DE (1) DE102010045881A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014107536A1 (de) * 2014-05-28 2015-12-03 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP3061973B1 (fr) * 2015-02-25 2017-12-13 Ebara Corporation Pompe à vide
JP6240229B2 (ja) * 2015-02-25 2017-11-29 株式会社荏原製作所 真空ポンプ
DE202015007606U1 (de) * 2015-11-03 2017-02-06 Leybold Gmbh Trockenvakuumpumpe
EP3396171B1 (fr) * 2017-04-26 2021-11-10 Pfeiffer Vacuum Gmbh Appareil à vide avec joint d'arbre

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE471012C (de) * 1925-06-06 1929-03-19 Der Maschinenfabriken Escher A Einrichtung zum Abdichten von insbesondere zum Foerdern von Gasen und Daempfen bestimmten Maschinen mit umlaufenden Wellen
GB1484994A (en) * 1973-09-03 1977-09-08 Svenska Rotor Maskiner Ab Shaft seal system for screw compressors
US4009972A (en) * 1975-07-10 1977-03-01 Wallace-Murray Corporation Turbocharger lubrication and exhaust system
DE2948993A1 (de) * 1979-12-05 1981-06-11 Karl Prof.Dr.-Ing. 3000 Hannover Bammert Verdichter, insbesondere schraubenverdichter, mit schmiermittelkreislauf
DE19744466C2 (de) * 1997-10-08 1999-08-19 Kt Kirsten Technologie Entwick Schraubenverdichter
DE10207929A1 (de) * 2002-02-23 2003-09-04 Leybold Vakuum Gmbh Vakuumpumpe
DE102010064422B3 (de) * 2009-03-03 2012-11-22 Sew-Eurodrive Gmbh & Co. Kg Anordnung zur berührungslosen Abdichtung einer drehbar gelagerten Welle zu einem Gehäuse hin und Getriebe

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

Also Published As

Publication number Publication date
EP2431613A3 (fr) 2016-04-06
DE102010045881A1 (de) 2012-03-22
EP2431613A2 (fr) 2012-03-21

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