EP1474715A1 - Processus destine au polissage de finition de la surface d'extremite d'un connecteur a fibre optique - Google Patents

Processus destine au polissage de finition de la surface d'extremite d'un connecteur a fibre optique

Info

Publication number
EP1474715A1
EP1474715A1 EP03703931A EP03703931A EP1474715A1 EP 1474715 A1 EP1474715 A1 EP 1474715A1 EP 03703931 A EP03703931 A EP 03703931A EP 03703931 A EP03703931 A EP 03703931A EP 1474715 A1 EP1474715 A1 EP 1474715A1
Authority
EP
European Patent Office
Prior art keywords
abrasive
optical
fiber
abrading
connector end
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03703931A
Other languages
German (de)
English (en)
Inventor
Michihiro Ohishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of EP1474715A1 publication Critical patent/EP1474715A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B19/00—Single-purpose machines or devices for particular grinding operations not covered by any other main group
    • B24B19/22—Single-purpose machines or devices for particular grinding operations not covered by any other main group characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B19/226—Single-purpose machines or devices for particular grinding operations not covered by any other main group characterised by a special design with respect to properties of the material of non-metallic articles to be ground of the ends of optical fibres
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/25—Preparing the ends of light guides for coupling, e.g. cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B19/00—Single-purpose machines or devices for particular grinding operations not covered by any other main group
    • B24B19/22—Single-purpose machines or devices for particular grinding operations not covered by any other main group characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28—Resins or natural or synthetic macromolecular compounds
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/38—Mechanical coupling means having fibre to fibre mating means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/38—Mechanical coupling means having fibre to fibre mating means
    • G02B6/3807—Dismountable connectors, i.e. comprising plugs
    • G02B6/3833—Details of mounting fibres in ferrules; Assembly methods; Manufacture
    • G02B6/3863—Details of mounting fibres in ferrules; Assembly methods; Manufacture fabricated by using polishing techniques
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D2203/00—Tool surfaces formed with a pattern
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/38—Mechanical coupling means having fibre to fibre mating means
    • G02B6/3807—Dismountable connectors, i.e. comprising plugs
    • G02B6/381—Dismountable connectors, i.e. comprising plugs of the ferrule type, e.g. fibre ends embedded in ferrules, connecting a pair of fibres
    • G02B6/3818—Dismountable connectors, i.e. comprising plugs of the ferrule type, e.g. fibre ends embedded in ferrules, connecting a pair of fibres of a low-reflection-loss type

Definitions

  • the present invention relates to a process for finish-abrading an end-surface of optical fiber equipped with a ferrule, that is, an optical-fiber-connector end-surface.
  • an optical-fiber-connector which can be easily removed is widely used for connection of optical fibers in optical fiber communication network.
  • end-surfaces of the optical-fiber-connector made of optical fiber and a covering portion (ferrule) for covering the optical fiber are allowed to directly abut each other. Therefore, the optical characteristics at the time of connection, particularly connection loss, depend on the processing properties and precision of an optical-fiber-connector end-surface.
  • An optical-fiber-connector end-surface is processed through several abrasion steps. Usually, the steps of removing adhesives, abrading to curved surface, secondary-abrading, and finish-abrading are conducted.
  • the finish-abrading means abrasion at the final stage conducted with using abrasive grains of the smallest size (a grain size of 5 to 1000 nm), thereby surface roughness Ra of not more than 5 nm is provided.
  • Quality of the optical-fiber-connector end-surface is influenced by processing properties and precision in the final finishing abrasion step.
  • major factors for connection loss of the optical fiber are degree of finishing roughness of the end-surface and its inclination.
  • Japanese Patent Laid-open Publication No. 248771/1997 discloses an abrasive tape for an optical-fiber-connector end-surface that has an abrasive layer containing abrasive grains and a binder on a substrate, the abrasive grains being silica particles having an average particle size of 5 to 30 nm.
  • Japanese Patent Laid-open Publication No. 71572/1998 discloses an abrasive tape for optical fiber that has a primer layer and an abrasive layer containing abrasive grains and a binder on a substrate, the abrasive grains being alumina-silica composite particles having an average particle size of 10 to 700 nm.
  • abrasive grains of fine size are employed, a long period of time for abrading is necessary. Further, an abrasive material of fine grade has a problem of loading.
  • loading means that spaces between abrasive grains are filled with abrasion dusts that protrude to inhibit abrasive ability.
  • 33372/1999 discloses an abrasive tape for an optical-fiber-connector end-surface which has an abrasive layer containing abrasive grains and a binder on a substrate, the abrasive grains being silica particles having an average particle size of 5 to 30 nm, the abrasive layer being formed with cracks of network structure, so that abrasion dusts can be recovered on the abrasive tape.
  • Japanese Patent Laid-open Publication No. 2001-179640 discloses an abrasive material for an optical-fiber-connector end-surface which has an abrasive layer containing abrasive grains and a binder on a substrate, the abrasive layer having three-dimensional structure constructed with a plurality of regularly arranged three-dimensional elements having a predetermined shape.
  • the abrasive layer of such three-dimensional structure easily let abrasion dusts out, and is resistant to loading and excellent in durability. Further, a smear hardly adheres on an abraded surface, and frequency in generation of abrasion scratch is also very low.
  • silica particles have to be used as abrasive grains, particle size have to be made small, and a binder contained in an abrasive layer have to be made soft.
  • generation of abrasion scratch was effectively controlled in this case, it was newly discovered that adherent substance was generated on an abraded surface of optical fiber with certain frequency.
  • connection loss becomes large, whereas a cleaning step for removing it, results in additional labor. Therefore, it is generally desired a process for finish-abrading an optical- fiber-connector end-surface without generating abrasion scratch on an abraded surface of optical fiber, nor generating adherent substance.
  • the present invention has been made to solve the aforesaid problems of the prior art and an object thereof is to provide a process for finish-abrading an optical-fiber- connector end-surface without generating abrasion scratch on an abraded surface of optical fiber, nor generating adherent substance.
  • the present invention provides a process for finish-abrading an optical-fiber- connector end-surface which comprises a step of abrading an optical-fiber-connector end-surface with using an abrasive film composed of abrasive grains fixed on a film-form substrate, in the presence of a lubricating liquid, wherein the lubricating liquid is an aqueous solution containing a hydrophilic surfactant.
  • a lubricating liquid is an aqueous solution containing a hydrophilic surfactant.
  • hydrophilic means that the surfactant has strong interaction with water.
  • hydrophilic surfactant examples include an anionic surfactant such as RCOONa, RSO 3 Na, and RSO Na, wherein R represents a lipophilic group, a nonionic surfactant having a HLB value of not less than 8, and the like.
  • Figure 1 is a perspective view showing an embodiment of an abrasive film used in a process of the present invention.
  • Figure 2 is a microscope digital image showing an abraded surface with adherent substance of optical fiber.
  • Figure 3 is a microscope digital image showing an abraded surface without adherent substance of optical fiber.
  • finish-abrading of an optical-fiber-connector end-surface is conducted by applying the optical-fiber-connector end-surface to an abrasive surface of the abrasive film, and rubbing while applying a predetermined amount of pressure.
  • a non-limiting example of the abrasive film as used in the finish-abrading step is abrasive films comprising a three-dimensional structure. Specific examples of such an abrasive film are described in O92/13680, WO96/27189, Japanese Patent Laid-open Publication No. 2001-179640, and the like.
  • Figure 1 is a perspective view showing an embodiment of the abrasive film preferred to be used in a process of the present invention.
  • the abrasive film 100 is an abrasive material which has a substrate 101 and an abrasive layer 102 applied on a surface of the substrate.
  • the abrasive layer 102 contains matrix of a binder and abrasive grains 103 dispersed therein.
  • the abrasive layer is formed by shaping and solidifying a slurry containing a plurality of abrasive grains dispersed in the binder which is in an unhardened or ungelated state, i.e. the slurry is fixed to have a predetermined shape.
  • Size of the abrasive grains may vary depending on the type of the abrasive grains or the intended use of the abrasive material.
  • the grain size is 1 to 500 nm, preferably 5 to 200 nm for the finish-abrading.
  • Preferable material for the abrasive grains includes silica, aluminum oxide, and silicon carbide. Particularly preferable one among these is silica. This is because silica is the same in material as conventional optical fiber, and it hardly damages an abraded surface of the optical fiber.
  • the binder is hardened or gelated to form the abrasive layer. It is preferred that the abrasive layer is formed so as to become comparatively soft in case of the finish-abrading.
  • Young's modulus of the binder which forms matrix of the abrasive layer is adjusted to 0.1 to 50 kg/mm 2 , preferably 0.5 to 40 kg/mm 2 . If the Young's modulus of the binder is less than 0.1 kg/mm 2 , abrasive grains hardly inroad the surface to be abraded, and cutting ability becomes poor. If it is more than 50 kg/mm 2 , cushioning in contact between the abrasive grains fixed by the binder and the surface to be abraded becomes
  • the binder variety of resins, for example, a thermocurable resin, a thermoplastic resin, and a radiation curable resin may be employed.
  • Preferred examples of the binder include an epoxy resin, and a urethane resin.
  • the binder may be radiation curable.
  • the radiation curable binder is a binder that is at least partially hardened or is at least partially polymerized by radiation energy.
  • an energy source such as heat, infrared radiation, electron beam radiation, ultraviolet radiation, or visible light radiation is used.
  • these binders are polymerized by free radical mechanism.
  • Preferred examples of the radiation curable binder are selected from the group consisting of acrylated urethane, acrylated epoxy, aminoplast derivative having an , ⁇ -unsaturated carbonyl group, ethylenic unsaturated compound, isocyanurate derivative having at least one acrylate group, isocyanate having at least one acrylate group, and mixture thereof.
  • the abrasive layer 102 has three-dimensional structure constructed with a plurality of regularly arranged three-dimensional elements 104 having a predetermined shape.
  • the three-dimensional elements 104 each have a prismatic shape formed of a laterally-placed triangular prism. Top angle ⁇ of the three-dimensional element 104 is typically 30 to 150°, preferably 45 to 140°.
  • Ridges on the top of the three-dimensional elements 104 are located on a plane parallel to the surface of the substrate substantially over an entire region of the abrasive material.
  • the symbol h represents height of the three-dimensional element from a surface of the substrate.
  • the height h is typically 2 to 600 ⁇ m, preferably 4 to 300 ⁇ m.
  • Variation of height of the top lines is preferably less than 20%, more preferably less than 10%, of height of the three-dimensional element 104.
  • the three-dimensional element 104 preferably has two-layered structure including top portion 105 made of a layer containing abrasive grains and a binder, and foot portion 106 made of a binder.
  • the symbol s represents height of top portion of the three-dimensional element.
  • the height s is, for example, 5 to 95%, preferably 10 to 90%, of the height h of the three-dimensional element.
  • the three-dimensional elements 104 are arranged in a stripe pattern.
  • the symbol w represents length of short bottom side of the three-dimensional element (width of the three-dimensional element).
  • the symbol p represents distance between tops of adjacent three-dimensional elements.
  • the symbol u represents distance between long bottom sides of adjacent three-dimensional elements.
  • the length w is, for example, 2 to 2000 ⁇ m, preferably 4 to 1000 ⁇ m.
  • the distance p is, for example, 2 to 4000 ⁇ m, preferably 4 to 2000 ⁇ m.
  • the distance u is, for example, 0 to 2000 ⁇ m, preferably 0 to 1000 ⁇ m.
  • Length of the three-dimensional element may extend substantially over an entire region of the abrasive material. Alternatively, length of the three-dimensional element may be cut to suitable length. Ends of the three-dimensional elements may be either aligned or non-aligned. The ends of the prismatic three-dimensional elements may be cut at an acute angle from its bottom to form house shape having four inclined surfaces in case that stronger cutting ability is required.
  • the abrading step may be conducted according to a conventional method under conventional conditions. For example, an abrasive machine in which edge-abrasion is automatically conducted in case that an optical-fiber-connector and an abrasive film are mounted, is commercially available.
  • Water is conventionally employed as a lubricating liquid in conducting abrasion. This is because abrasion dusts are easily removed by water flow, and a cooling effect is also obtained.
  • an aqueous solution containing a surfactant is employed as a lubricating liquid instead of water, so that generation of adherent substance on an abraded surface of optical fiber is controlled.
  • a hydrophobic group of the surfactant is oriented to surfaces of the abrasive layer and the abrasion dusts, a hydrophilic group thereof is oriented to the contrary when a surfactant is added to the water to be used as a lubricating liquid, therefore a layer of the surfactant in molecular order is formed. Due to layers made of the surfactant and water, directly contacting area during abrasion between abrasive grains and the surface to be abraded is reduced, dispersion of abrasion dusts into the lubricating liquid is improved, re- adhering to the surface to be abraded is controlled, and an abraded surface is kept clean.
  • hydrophilic surfactants particularly an anionic surfactant and a nonionic surfactant are employed.
  • Preferred nonionic surfactant includes those having a HLB value of 8 to 20, particularly 10 to 20. If the HLB value of the surfactant is less than 8, the above described advantage is not obtained because the lubricating liquid tends to form without emulsion.
  • Preferred examples of the anionic surfactant include alkylbenzene sulfonate.
  • sodium dodecylbenzene sulfonate is preferred.
  • the preferred examples of the nonionic surfactant include polyoxyalkylene nonyl phenyl ether, such as polyoxyethylene nonyl phenyl ether and oxyethylene oxypropylene block copolymer.
  • the surfactant is contained in the lubricating liquid in an amount of 0.5 to 20% by weight, preferably 1.0 to 15% by weight, more preferably 1.0 to 10% by weight. If the content of the surfactant is less than 0.5% by weight, the effect of controlling adherence becomes poor. If it is more than 20%) by weight, the lubricating liquid becomes viscous, and abrasion error may occur.
  • An abrasive material coating liquid was prepared by mixing the components shown in Table 1. Table 1
  • a lamination binder was prepared by mixing the components shown in Table 2.
  • a mold sheet made of polypropylene and having recesses with a shape of inverted three-dimensional elements shown in Fig. 1 was prepared ("OFF-50" available from Minnesota Mining and Manufacturing Company).
  • the abrasive material coating liquid was applied onto the mold sheet by means of a roll coater and dried at 50° for 5 minutes.
  • the lamination binder was applied thereon.
  • a transparent polyester film having a thickness of 75 ⁇ m (“HPE POLYESTER FILM” available from Teijin Dupon Film K.K.) was superposed and pressed by a roll for lamination. Ultraviolet rays were radiated to harden the lamination binder.
  • the hardened binder had a Young's modulus of about 8 kg/mm 2 .
  • the mold sheet was removed and the resultant was cooled to room temperature to produce an abrasive film.
  • the abrasive layer of the abrasive film has three-dimensional structure having a prismatic shape arranged in a stripe pattern as shown in Fig. 1. The dimensions thereof are shown in Table 3.
  • This abrasive film was stamped out into a circular shape having a diameter of 110 mm to prepare an abrasive disk.
  • the optical-fiber-connector that is a sample to be abraded, was previously subjected to secondary-abrading by using "TRIZACT DIAMOND LAPPING FILM (3 mil, 0.5 micron)", before conducting finish-abrading. After the finish-abrading is conducted, an abraded surface of the optical fiber was observed by using a laser microscope, and checked whether the adherent substance was present or not. The results were shown in Table 5. Yield as shown in Table 5 means a proportion (%) of count of samples without adherent substance to 12 samples simultaneously abraded.
  • Fig. 2 is a microscope photograph showing an abraded surface with adherent substance of the optical fiber (Run 1).
  • Fig. 3 is a microscope photograph showing an abraded surface without adherent substance of the optical fiber (Run 7). This results show that adherent substance was hardly generated on an abraded surface of optical fiber and yield for good article is improved by adding a surfactant to a lubricating liquid.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

L'invention vise à mettre en place un processus destiné au polissage de finition d'une surface d'extrémité d'un connecteur à fibre optique sans provoquer de rayures à la surface d'abrasion d'une fibre optique ni générer de substance adhérente. Un processus de polissage de finition d'une surface d'extrémité d'un connecteur à fibre optique comprend le polissage d'une surface d'extrémité d'un connecteur à fibre optique en utilisant un film de polissage (100) composé de grains abrasifs (103) fixés sur un substrat en forme de film (101), en présence d'un liquide lubrifiant, ledit liquide lubrifiant étant une solution aqueuse contenant un surfactant hydrophile.
EP03703931A 2002-02-08 2003-01-21 Processus destine au polissage de finition de la surface d'extremite d'un connecteur a fibre optique Withdrawn EP1474715A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002032675A JP2003231047A (ja) 2002-02-08 2002-02-08 光ファイバーコネクター端面を仕上げ研磨する方法
JP2002032675 2002-02-08
PCT/US2003/001765 WO2003067299A1 (fr) 2002-02-08 2003-01-21 Processus destine au polissage de finition de la surface d'extremite d'un connecteur a fibre optique

Publications (1)

Publication Number Publication Date
EP1474715A1 true EP1474715A1 (fr) 2004-11-10

Family

ID=27677977

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03703931A Withdrawn EP1474715A1 (fr) 2002-02-08 2003-01-21 Processus destine au polissage de finition de la surface d'extremite d'un connecteur a fibre optique

Country Status (6)

Country Link
EP (1) EP1474715A1 (fr)
JP (1) JP2003231047A (fr)
KR (1) KR20040081187A (fr)
CN (1) CN1703640A (fr)
AU (1) AU2003205259A1 (fr)
WO (1) WO2003067299A1 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105834888A (zh) * 2016-04-12 2016-08-10 苏州胜信大成光网科技有限公司 一种光纤研磨抛光方法
CN105945740B (zh) * 2016-05-16 2017-10-13 衢州学院 一种具有蜂窝状贝纳特花纹效果的抛光薄膜及其制备方法
CN106000983B (zh) * 2016-05-16 2018-09-28 宁波大学 一种硫系玻璃光纤端面的抛光方法
KR20180072285A (ko) 2016-12-21 2018-06-29 주식회사 옵텔라 광결합장치 및 그 제조방법
CN107907238B (zh) * 2017-09-28 2020-01-17 天津大学 基于光纤末端倾角的大范围温度传感器及制作方法
JP7158147B2 (ja) * 2018-01-05 2022-10-21 スリーエム イノベイティブ プロパティズ カンパニー 研磨シート及び研磨方法
CN109794863A (zh) * 2019-03-05 2019-05-24 北京国瑞升精机科技有限公司 一种亲水性抛光膜及其制备方法
JP2021098250A (ja) * 2019-12-20 2021-07-01 スリーエム イノベイティブ プロパティズ カンパニー 研磨シート及び研磨方法
CN115091269A (zh) * 2022-07-04 2022-09-23 东莞市新美洋技术有限公司 光纤段的双端面研磨方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5307593A (en) * 1992-08-31 1994-05-03 Minnesota Mining And Manufacturing Company Method of texturing rigid memory disks using an abrasive article
US6280489B1 (en) * 1999-10-29 2001-08-28 Nihon Micro Coating Co., Ltd. Polishing compositions

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US5756161A (en) * 1995-11-14 1998-05-26 The Dial Corporation Scouring pad and process for making same
US6165239A (en) * 1997-07-28 2000-12-26 3M Innovative Properties Company Aqueous sulfopolyurea colloidal dispersions, films and abrasive articles
US5914299A (en) * 1997-09-19 1999-06-22 Minnesota Mining And Manufacturing Company Abrasive articles including a polymeric additive
JP2000354970A (ja) * 1999-06-15 2000-12-26 Fuji Photo Film Co Ltd 研磨体及び研磨体の製造方法
JP4519970B2 (ja) * 1999-12-21 2010-08-04 スリーエム イノベイティブ プロパティズ カンパニー 研磨層が立体構造を有する研磨材料

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5307593A (en) * 1992-08-31 1994-05-03 Minnesota Mining And Manufacturing Company Method of texturing rigid memory disks using an abrasive article
US6280489B1 (en) * 1999-10-29 2001-08-28 Nihon Micro Coating Co., Ltd. Polishing compositions

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO03067299A1 *

Also Published As

Publication number Publication date
KR20040081187A (ko) 2004-09-20
JP2003231047A (ja) 2003-08-19
WO2003067299A1 (fr) 2003-08-14
AU2003205259A1 (en) 2003-09-02
CN1703640A (zh) 2005-11-30

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