EP1421832B1 - Plasmabrenner mit mikrowellenanregung - Google Patents
Plasmabrenner mit mikrowellenanregung Download PDFInfo
- Publication number
- EP1421832B1 EP1421832B1 EP02762243A EP02762243A EP1421832B1 EP 1421832 B1 EP1421832 B1 EP 1421832B1 EP 02762243 A EP02762243 A EP 02762243A EP 02762243 A EP02762243 A EP 02762243A EP 1421832 B1 EP1421832 B1 EP 1421832B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- metallic tube
- plasma
- hollow
- hollow metallic
- waveguide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
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Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/48—Generating plasma using an arc
- H05H1/50—Generating plasma using an arc and using applied magnetic fields, e.g. for focusing or rotating the arc
Definitions
- the invention relates to a plasma torch with microwave excitation, in which a plasma is generated by acting with a gas microwaves.
- a plasma torch with a microwave generator which has a waveguide for guiding the microwaves generated by the microwave generator and a branched from the waveguide metallic hollow tube, wherein centrally within the metallic hollow tube from the waveguide in the metallic Hollow tube extending electrically conductive elongated nozzle, which has a nozzle tip at its projecting into the metallic hollow tube end, and the metallic hollow tube in height of the flame, preferably in the nozzle tip starting an increase in diameter, extending in the longitudinal direction of the plasma torch at least over the Area of the flame extends.
- the increase in diameter is intended to ensure that the propagation conditions for microwaves are also met in the area of the flame, so that a stable plasma is generated.
- the plasma gas serving process gas is guided through the nozzle in the range of high microwave power density at the nozzle tip.
- the improvement in the stability of the plasma achieved by means of this solution by improving the propagation conditions of the microwaves in the area of the flame has not proved sufficient in practical operation, in particular in the case of large pressure fluctuations of the process gas.
- Even in practical operation made constant adjustment of the microwave impedance of the waveguide and the metallic hollow tube has not led to a sufficient stabilization of the plasma at pressure fluctuations of the process gas, in particular to a stable ignition or re-ignition of the plasma.
- the invention is therefore based on the problem of providing a plasma torch with microwave excitation, which is sufficiently good even with large pressure fluctuations of the process gas for a stable plasma Ensures propagation conditions for the microwaves and ensures a stable ignition or re-ignition of the plasma without a constant adjustment of the microwave impedance of the waveguide and the metallic hollow tube is required.
- microwaves in this region of the metallic hollow tube can be well forwarded even in the event of pressure fluctuations of the process gas changing line conditions, without a constant adjustment of the microwave impedance of the waveguide or the metallic hollow tube is required.
- the invention is based on the finding that the plasma as a coaxial inner conductor with respect to its electrical properties not behave as previously assumed because of the free electrons therein as a metallic conductor, but that these electrical properties of the plasma to a considerable extent by the pressure of the supplied process gas depend.
- the inventive electrically conductive windings are designed in the form of a single-layer cylindrical coil or as a single conductor loops.
- the inventive electrically conductive windings are arranged floating or are in electrical contact with the metallic hollow tube.
- the number or spacing of the turns to each other can vary, without the effect significantly decreases.
- the turns should fill in the cavity of the hollow tube formed by the increase in diameter in its longitudinal direction, wherein the individual turns should be sufficiently spaced apart, ie spaced at least by the thickness of the line material used.
- it makes sense to cool the turns for example, by using tubular conduit material perform.
- the hollow conductor branches off from the branch of the metallic hollow tube, a further metallic hollow tube section and extending in the region of the diameter enlargement inner conductor extends through the waveguide in this opposite further metallic hollow tube section.
- the volumes of both hollow tube sections should be connected by a nonconducting hollow tube element which passes through the waveguide and is arranged sealingly therewith so that process gas introduced into this opposite hollow tube section does not flow into the waveguide but into the hollow tube having the diameter enlargement.
- the inner conductor terminating in the region of the increase in diameter is then arranged inside this nonconducting tubular element, so that the plasma is formed inside the nonconducting tubular element.
- the process gas is introduced in such a way that the process gas flows at the end of the inner conductor in the area of the diameter increase with low turbulence intensity. This is particularly important for a safe ignition or reignition of the plasma of particular importance. This is achieved, for example, by a previously described, as far as possible from the Duchmesserveriesrung and thus the end of the coaxial inner conductor was made introducing the process gas.
- the plasma burner according to the invention has a rectangular waveguide 1, by means of which microwaves generated by a microwave generator (not shown) are conducted to the plasma torch.
- the rectangular waveguide 1 is provided at the end with an adjustable short circuit 2 in order to adapt its impedance to different applications.
- a metallic hollow tube 3 connects with a diameter D1, that has a stepped diameter increase 4 to a diameter D2, which extends at least over the region of the plasma 5.
- a likewise metallic hollow pipe section 3 'with a diameter D1 which is completed by an adjustable short circuit 6 for changing the impedance of the hollow tube 3, 3'.
- two gas supply ports 7 are arranged at the metallic hollow pipe section 3 '.
- the volumes of the hollow tube 3 and the hollow tube section 3 ' are connected to each other by an electrically non-conductive tube section 8, preferably made of quartz glass and delimited from the volume of the rectangular waveguide 1, so that in the hollow tube section 3' initiated process gas is not in the rectangular waveguide 1 can penetrate.
- sealing rings 9 are provided for sealing here sealing rings 9 .
- an electrically conductive inner conductor 10 is arranged, which ends at the beginning of the stepped diameter increase 4 of the hollow tube 3.
- the end of the inner conductor 10 is designed as a tip 11.
- a plurality of turns with winding spacing a having single-layer cylindrical coil 12 is arranged.
- the cylindrical coil 12 is electrically isolated from the metallic hollow tube 3. It is dimensioned with respect to its inner diameter D3 so that it encloses the resulting plasma 5 coaxial, without coming into contact with it.
- the diameter D1 of the hollow tube 3 or of the hollow tube section 3 ' is approximately 50 mm
- the diameter D2 of the stepped diameter increase 4 approximately 85 mm
- the inner diameter D3. the single-layer cylindrical coil 12 about 55 mm.
- the cross-sectional diameter of the conductor material used for the cylindrical coil 12 is about 6 mm, the winding spacing a about 20 mm.
- Plasma 5 As a result of the increase in the electric field strength at the tip 11 of the inner conductor 10 ignites a plasma 5, which extends with the flowing process gas in the cavity formed by the diameter increase 4.
- Plasma 5, enlarged diameter hollow tube 4 and inventively arranged Zylinderspuie 12 form an electrical Wellenieitungssystem, which is suitable in terms of its parameters impedance and transmission bandwidth in a special way for forwarding the microwaves in this region of the plasma torch.
- the electrical interaction between the cylindrical coil 12 and the diameter-enlarged hollow tube 4 as a coaxial outer conductor of this waveguide system on the one hand and the plasma 5 as a coaxial inner conductor on the other hand causes a sufficiently good transmission of microwaves even with changing pressure conditions of the process gas, the is called changing electrical properties of the plasma 5.
- FIG. 2 shows a modification of the described plasma burner to the effect that inside the hollow tube 3, 3 'a nonconductive tube 13, preferably of quartz glass, is arranged and the cylindrical coil 12 has been designed to be coolable and electrically connected to the enlarged diameter hollow tube 4.
- the nonconductive tube 13 is arranged such that it guides the process gas introduced via the gas supply connections 7 within the plasma burner. Possibly. Of course, this gas routing can extend beyond the plasma torch. This is important for applications where the process gas contains substances or where the process produces substances that must not escape into the environment.
- the coolability of the cylindrical coil 12 is advantageous when the plasma torch operates in continuous operation.
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Electromagnetism (AREA)
- Plasma Technology (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10143114 | 2001-08-28 | ||
DE10143114 | 2001-08-28 | ||
PCT/DE2002/003102 WO2003026365A1 (de) | 2001-08-28 | 2002-08-20 | Plasmabrenner mit mikrowellenanregung |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1421832A1 EP1421832A1 (de) | 2004-05-26 |
EP1421832B1 true EP1421832B1 (de) | 2006-10-04 |
Family
ID=7697538
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP02762243A Expired - Lifetime EP1421832B1 (de) | 2001-08-28 | 2002-08-20 | Plasmabrenner mit mikrowellenanregung |
Country Status (5)
Country | Link |
---|---|
US (1) | US20040262268A1 (zh) |
EP (1) | EP1421832B1 (zh) |
DE (1) | DE50208353D1 (zh) |
TW (1) | TWI313147B (zh) |
WO (1) | WO2003026365A1 (zh) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7164095B2 (en) * | 2004-07-07 | 2007-01-16 | Noritsu Koki Co., Ltd. | Microwave plasma nozzle with enhanced plume stability and heating efficiency |
US20060052883A1 (en) * | 2004-09-08 | 2006-03-09 | Lee Sang H | System and method for optimizing data acquisition of plasma using a feedback control module |
TW200742506A (en) * | 2006-02-17 | 2007-11-01 | Noritsu Koki Co Ltd | Plasma generation apparatus and work process apparatus |
DE102006019664B4 (de) * | 2006-04-27 | 2017-01-05 | Leibniz-Institut für Plasmaforschung und Technologie e.V. | Kaltplasma-Handgerät zur Plasma-Behandlung von Oberflächen |
US20100074810A1 (en) * | 2008-09-23 | 2010-03-25 | Sang Hun Lee | Plasma generating system having tunable plasma nozzle |
US7921804B2 (en) * | 2008-12-08 | 2011-04-12 | Amarante Technologies, Inc. | Plasma generating nozzle having impedance control mechanism |
US20100201272A1 (en) * | 2009-02-09 | 2010-08-12 | Sang Hun Lee | Plasma generating system having nozzle with electrical biasing |
US20100254853A1 (en) * | 2009-04-06 | 2010-10-07 | Sang Hun Lee | Method of sterilization using plasma generated sterilant gas |
US20150279626A1 (en) * | 2014-03-27 | 2015-10-01 | Mks Instruments, Inc. | Microwave plasma applicator with improved power uniformity |
US9653266B2 (en) * | 2014-03-27 | 2017-05-16 | Mks Instruments, Inc. | Microwave plasma applicator with improved power uniformity |
PL235377B1 (pl) | 2016-04-05 | 2020-07-13 | Edward Reszke | Adapter kształtujący mikrofalowe pole elektromagnetyczne nagrzewające toroidalne wyładowanie plazmowe |
RU2650197C1 (ru) * | 2017-03-09 | 2018-04-11 | Общество С Ограниченной Ответственностью "Твинн" | Многоступенчатый плазмотрон |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU415625B2 (en) * | 1965-11-02 | 1971-07-27 | Commonwealth Scientific And Industrial Research Organization | Production of metals from their halides |
US4297615A (en) * | 1979-03-19 | 1981-10-27 | The Regents Of The University Of California | High current density cathode structure |
DE3905303C2 (de) * | 1988-02-24 | 1996-07-04 | Hitachi Ltd | Vorrichtung zur Erzeugung eines Plasmas durch Mikrowellen |
JP2805009B2 (ja) * | 1988-05-11 | 1998-09-30 | 株式会社日立製作所 | プラズマ発生装置及びプラズマ元素分析装置 |
JPH02215038A (ja) * | 1989-02-15 | 1990-08-28 | Hitachi Ltd | マイクロ波プラズマ極微量元素分析装置 |
US5389153A (en) * | 1993-02-19 | 1995-02-14 | Texas Instruments Incorporated | Plasma processing system using surface wave plasma generating apparatus and method |
DE19511915C2 (de) * | 1995-03-31 | 1997-04-30 | Wu Jeng Ming Dipl Ing | Plasmabrenner mit einem Mikrowellengenerator |
DE19824077A1 (de) * | 1998-05-29 | 1999-12-02 | Leybold Systems Gmbh | Vorrichtung zur Erzeugung von Plasma |
-
2002
- 2002-08-20 DE DE50208353T patent/DE50208353D1/de not_active Expired - Lifetime
- 2002-08-20 EP EP02762243A patent/EP1421832B1/de not_active Expired - Lifetime
- 2002-08-20 WO PCT/DE2002/003102 patent/WO2003026365A1/de active IP Right Grant
- 2002-08-20 US US10/488,316 patent/US20040262268A1/en not_active Abandoned
- 2002-08-26 TW TW091119230A patent/TWI313147B/zh active
Also Published As
Publication number | Publication date |
---|---|
US20040262268A1 (en) | 2004-12-30 |
EP1421832A1 (de) | 2004-05-26 |
WO2003026365A1 (de) | 2003-03-27 |
DE50208353D1 (de) | 2006-11-16 |
TWI313147B (zh) | 2009-08-01 |
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