EP1421832B1 - Plasmabrenner mit mikrowellenanregung - Google Patents

Plasmabrenner mit mikrowellenanregung Download PDF

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Publication number
EP1421832B1
EP1421832B1 EP02762243A EP02762243A EP1421832B1 EP 1421832 B1 EP1421832 B1 EP 1421832B1 EP 02762243 A EP02762243 A EP 02762243A EP 02762243 A EP02762243 A EP 02762243A EP 1421832 B1 EP1421832 B1 EP 1421832B1
Authority
EP
European Patent Office
Prior art keywords
metallic tube
plasma
hollow
hollow metallic
waveguide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP02762243A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP1421832A1 (de
Inventor
Jeng-Ming Wu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of EP1421832A1 publication Critical patent/EP1421832A1/de
Application granted granted Critical
Publication of EP1421832B1 publication Critical patent/EP1421832B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/48—Generating plasma using an arc
    • H05H1/50—Generating plasma using an arc and using applied magnetic fields, e.g. for focusing or rotating the arc

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electromagnetism (AREA)
  • Plasma Technology (AREA)
EP02762243A 2001-08-28 2002-08-20 Plasmabrenner mit mikrowellenanregung Expired - Lifetime EP1421832B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10143114 2001-08-28
DE10143114 2001-08-28
PCT/DE2002/003102 WO2003026365A1 (de) 2001-08-28 2002-08-20 Plasmabrenner mit mikrowellenanregung

Publications (2)

Publication Number Publication Date
EP1421832A1 EP1421832A1 (de) 2004-05-26
EP1421832B1 true EP1421832B1 (de) 2006-10-04

Family

ID=7697538

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02762243A Expired - Lifetime EP1421832B1 (de) 2001-08-28 2002-08-20 Plasmabrenner mit mikrowellenanregung

Country Status (5)

Country Link
US (1) US20040262268A1 (zh)
EP (1) EP1421832B1 (zh)
DE (1) DE50208353D1 (zh)
TW (1) TWI313147B (zh)
WO (1) WO2003026365A1 (zh)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7164095B2 (en) * 2004-07-07 2007-01-16 Noritsu Koki Co., Ltd. Microwave plasma nozzle with enhanced plume stability and heating efficiency
US20060052883A1 (en) * 2004-09-08 2006-03-09 Lee Sang H System and method for optimizing data acquisition of plasma using a feedback control module
TW200742506A (en) * 2006-02-17 2007-11-01 Noritsu Koki Co Ltd Plasma generation apparatus and work process apparatus
DE102006019664B4 (de) * 2006-04-27 2017-01-05 Leibniz-Institut für Plasmaforschung und Technologie e.V. Kaltplasma-Handgerät zur Plasma-Behandlung von Oberflächen
US20100074810A1 (en) * 2008-09-23 2010-03-25 Sang Hun Lee Plasma generating system having tunable plasma nozzle
US7921804B2 (en) * 2008-12-08 2011-04-12 Amarante Technologies, Inc. Plasma generating nozzle having impedance control mechanism
US20100201272A1 (en) * 2009-02-09 2010-08-12 Sang Hun Lee Plasma generating system having nozzle with electrical biasing
US20100254853A1 (en) * 2009-04-06 2010-10-07 Sang Hun Lee Method of sterilization using plasma generated sterilant gas
US9653266B2 (en) * 2014-03-27 2017-05-16 Mks Instruments, Inc. Microwave plasma applicator with improved power uniformity
US20150279626A1 (en) * 2014-03-27 2015-10-01 Mks Instruments, Inc. Microwave plasma applicator with improved power uniformity
PL235377B1 (pl) 2016-04-05 2020-07-13 Edward Reszke Adapter kształtujący mikrofalowe pole elektromagnetyczne nagrzewające toroidalne wyładowanie plazmowe
RU2650197C1 (ru) * 2017-03-09 2018-04-11 Общество С Ограниченной Ответственностью "Твинн" Многоступенчатый плазмотрон

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU415625B2 (en) * 1965-11-02 1971-07-27 Commonwealth Scientific And Industrial Research Organization Production of metals from their halides
US4297615A (en) * 1979-03-19 1981-10-27 The Regents Of The University Of California High current density cathode structure
DE3905303C2 (de) * 1988-02-24 1996-07-04 Hitachi Ltd Vorrichtung zur Erzeugung eines Plasmas durch Mikrowellen
JP2805009B2 (ja) * 1988-05-11 1998-09-30 株式会社日立製作所 プラズマ発生装置及びプラズマ元素分析装置
JPH02215038A (ja) * 1989-02-15 1990-08-28 Hitachi Ltd マイクロ波プラズマ極微量元素分析装置
US5389153A (en) * 1993-02-19 1995-02-14 Texas Instruments Incorporated Plasma processing system using surface wave plasma generating apparatus and method
DE19511915C2 (de) * 1995-03-31 1997-04-30 Wu Jeng Ming Dipl Ing Plasmabrenner mit einem Mikrowellengenerator
DE19824077A1 (de) * 1998-05-29 1999-12-02 Leybold Systems Gmbh Vorrichtung zur Erzeugung von Plasma

Also Published As

Publication number Publication date
EP1421832A1 (de) 2004-05-26
US20040262268A1 (en) 2004-12-30
DE50208353D1 (de) 2006-11-16
WO2003026365A1 (de) 2003-03-27
TWI313147B (zh) 2009-08-01

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