EP1366296A1 - Screw vacuum pump comprising additional flow bodies - Google Patents

Screw vacuum pump comprising additional flow bodies

Info

Publication number
EP1366296A1
EP1366296A1 EP02710783A EP02710783A EP1366296A1 EP 1366296 A1 EP1366296 A1 EP 1366296A1 EP 02710783 A EP02710783 A EP 02710783A EP 02710783 A EP02710783 A EP 02710783A EP 1366296 A1 EP1366296 A1 EP 1366296A1
Authority
EP
European Patent Office
Prior art keywords
rotors
pump according
rotor
flow
cross sections
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP02710783A
Other languages
German (de)
French (fr)
Other versions
EP1366296B1 (en
Inventor
Wolfgang Giebmanns
Thomas Dreifert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP1366296A1 publication Critical patent/EP1366296A1/en
Application granted granted Critical
Publication of EP1366296B1 publication Critical patent/EP1366296B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F04C29/122—Arrangements for supercharging the working space
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/084—Toothed wheels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0021—Systems for the equilibration of forces acting on the pump
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type

Definitions

  • the invention relates to a screw vacuum pump with the features of the preamble of claim 1.
  • a pump of this type is known from international patent application WO / 00/12900.
  • interlocking threads form closed volumes which are conveyed from the inlet to the outlet during the synchronized rotation of the rotors.
  • Inlet and outlet are usually designed in such a way that the thread webs of the rotors - usually single-threaded threads - begin or end in a plane perpendicular to the rotor axes.
  • the effective inlet cross-section (or outlet cross-section) of the pump-active elements therefore corresponds to the sum of the areas that form the respective hub of the rotors, the housing or - depending on the position of the rotor - the adjacent rotor and the lateral boundaries of the respective thread web , With single-start threads, the inlet cross-section extends over 180 °.
  • Figures 1 and 2 show a rotor inlet according to the prior art, in which the rotors are equipped with single-start threads.
  • Figures 1 and 2 are the screw vacuum pump shown only partially with 1, its housing with 2, its inlet with 3, the rotors with 4 and 5, their rotor hubs with 6 and 7, their thread webs with 8 and 9 and the Rotor axes designated 10 and 11 respectively.
  • a development of the rotor 5 is shown in FIG.
  • the two thread webs 8, 9 begin in a plane extending perpendicular to the rotor axes 10, 11, which is designated 14 in both figures. This results in an inlet cross-section 15 or 16 for each rotor, which is formed by the components involved and which - in the case of single-thread webs 8.9 - extends over 180 °.
  • the present invention has for its object to improve the inflow and outflow conditions in a screw vacuum pump.
  • a "run-in booster" is realized by the invention.
  • the arrangement of the flow bodies upstream of the inlet cross-sections has the effect of improving the degree of filling of the volumes conveyed by the rotors from the inlet to the outlet, so that a pump designed according to the invention has better delivery properties, in particular improved suction capacity, Has.
  • similar flow bodies assigned to the outlet cross sections can improve the outflow conditions in such a way that flow losses in the exhaust system are reduced. Aerodynamically, the flow velocities and the residual swirl can be reduced by a flow body arranged on the outflow side, and the static pressure can be additionally increased with a cross-sectional expansion, so that lower flow losses due to deflection and friction occur in the downstream exhaust system. Since the back pressure in the exhaust area is always 1 bar anyway, the aerodynamic improvements can also be effective over the entire operating range of the screw pump. Finally, because of the advantages described above, it is also possible to use shorter rotors.
  • the invention can be used regardless of the screw geometry (single-start or multi-start screws, constant or variable pitch, variable pitch with constant pitch ranges, cylindrical, stepped or tapered rotors, single-flow or double-flow rotors, rotors with flying or double-sided bearings).
  • An advantageous development of the invention consists in providing the thread web of the respective neighboring rotor (second rotor) in the region which interacts with the flow body (s) of the first rotor with a recess.
  • Another advantage of the invention is that the flow bodies can be used as balancing masses at the same time. Imbalances in the rotors, which are unavoidable due to the design of the end regions of the threads, can be completely or at least largely eliminated by the flow bodies. Even with rotors made by casting, only fine balancing is necessary. In terms of rotor dynamics, the flow bodies on the outlet side offer the possibility of additionally reducing the unbalance of a screw rotor in a computational-constructive manner on a second level and then using this as a second compensation level for fine balancing, which minimizes the internal moments in the overall rotor.
  • the outlet contours can also be used for all screw geometries. Due to the reduced cross-sectional areas in the screw thread, only a small wall thickness is left for threads with a decreasing web width at the rotor end on the pressure side, which offers little scope for designing blade contours. Of course, almost any exit contour can be added using an additional part, but machining of an additional thread, as is possible on the entry side of a vacuum screw with variable pitch, can only be used on the exit side in rare cases. It would be conceivable that, after appropriate shiit zen along the hub diameter, the thin-walled residual contour is given a blade shape by targeted bending, which can then be fixed to the hub again via a material connection (such as welding, soldering or gluing). It is better to produce this geometry directly during thread production in order to obtain a cost-effective and reliable contour that can also be optimally adapted to the rotor dynamic requirements.
  • FIGS. 3, 4 and 8 solutions, each with a flow body
  • FIGS. 3 and 4 FIGS. 3 and 4
  • FIGS. 3 and 4 FIGS. 3 and 4
  • the rotor hubs 6, 7 are extended by one or two thread web widths over the plane 14 of the inlet cross sections 15, 16. They serve both to support a flow body 21, 22, which extends in each case above the inlet cross sections 15 and 16, and to delimit the delivery space on the hub side. It is approximately an extension of the thread webs 8, 9 with a reduced web width (about 1/3).
  • each flow body extends over a little less than half the rotor circumference and, consequently, a little more than half a rotor circumference is available to the open partial area. Twisted by 180 ° to each other, each of the flow bodies penetrates into the corresponding gap of the neighboring rotor without contact. The slope of the leading edges of the flow bodies 21, 22 increases somewhat towards the suction side. The end area is rounded.
  • the gases flowing into the still open delivery volume are identified by arrows in FIG.
  • the areas of the end faces of the thread webs 8, 9 that follow the flow body 21, 22 are equipped with cutouts 23 (rotor 4, not visible), 24. They delay the completion of the funding volumes and at the same time ensure that they are completely filled.
  • the respective flow body 21 or 22 can be manufactured together with its hub section as a separate part and subsequently attached to the cut-off screw face. surface mounted.
  • the integral production is particularly advantageous in the case of the hub section and flow body, for. B. are formed by milling, from the residual material that has remained in the manufacture of the screw profile (by milling, whirling, rolling, turning, etc.) (shown in dashed lines in Figure 4).
  • FIG. 5a shows an embodiment corresponding to FIG. 4, with the difference that the width and slope of the web 9 decrease in the direction of the pressure side.
  • the pressure side can be designed according to FIG. 5b.
  • the hub 7 is extended beyond the outlet cross section 29 by approximately four times the pressure-side thread web width and supports a blade-like extension 25 of the thread 9. This extends with an increase in the direction of the pressure side of the pitch and the web width approximately over 140 °.
  • FIG. 6a shows the rotor inlet of a further exemplary embodiment for the rotor 5 as a development.
  • the rotor 4, not shown, is designed accordingly.
  • the inlet cross section 16 is preceded by three flow bodies 26, 27, 28 which are independent of the threaded web 9. They are supported on the hub 7 and have approximately the shape of rotor blades, the gradient of which increases towards the suction side, starting with approximately the gradient of the threaded web 9.
  • FIGS. 6b and 6c show two designs for the rotor runout, depending on whether the thread 9 has a constant pitch and web width or a decreasing pitch and web width.
  • the hub is 7 on the pressure side each extends beyond the outlet cross section 29 and carries blades 31, 32, 33 and 34, 35, respectively. They are independent of the thread 9 and have an increasing slope toward the pressure side.
  • the blades are approximately mirror-symmetrical to the blades 26, 27, 28.
  • the web width of the blades 34, 35 increases in the direction of the pressure side.
  • the inlet-side and outlet-side blades together with their hub sections expediently consist of separately manufactured blade rings, which are components of the rotors 4 and 5 after their front-side mounting.
  • This solution allows the inflow and - under certain conditions - outflow conditions to be easily adapted to customer requirements by changing the blade rings.
  • the pressure-side flow bodies 25 (FIG. 5b) and 34 (FIG. 6c) have a relatively large volume. This means that there is enough mass available in the outlet area of the pump for balancing the rotors.
  • FIG. 7a shows the rotor outlet in an embodiment with a thread 9, the pitch and web width of which decrease in the direction of the pressure side. In the area of the extension of the hub 7 beyond the outlet cross section 29, the thread pitch increases sharply as the web width decreases further in the direction of the pressure side.
  • FIG. 8 shows in perspective an embodiment which essentially corresponds to the embodiment according to FIGS. 3, 4.
  • the difference is that the hubs 6, 7 are only extended in the area of the flow bodies 21, 22. They each extend only to the inner edges of the respective flow bodies 21 and 22.
  • the flow bodies can therefore also be regarded as balancing weights that are designed in such a way that they improve the inflow (or outflow) conditions of the gases to be conveyed, i.e. they have the shape of flow bodies.

Abstract

The invention relates to a screw vacuum pump comprising two rotors (4, 5) which respectively have a hub (6, 7) and a thread (8, 9), additionally comprising a housing (2) wherein the rotors whose threads engage with each other are accommodated in such a way that they form, together with the housing, inlet cross sections (15, 16) on the suction side thereof and form outlet cross sections (29) on the pressure side thereof causing gas to be conveyed from the inlet side to the pressure side during rotation of the rotors (4, 5). According to the invention, in order to improve inflow and outflow ratios, the rotors (4, 5) are provided on the inlet side with flow bodies (21, 22; 26, 27, 28; 36, 37) which are arranged upstream from the inlet cross sections (15, 16) in such a way that the inflow ratios of the gas to be transported to the inlet cross sections (15, 16) are improved.

Description

SCHRAUBENVAKUUMPUMPE MIT ZUSATZLICHEN STROMUNGSKORPERNSCREW VACUUM PUMP WITH ADDITIONAL FLOW BODIES
Die Erfindung bezieht sich auf eine Schraubenvakuumpumpe mit den Merkmalen des Oberbegriffs des Patentanspruchs 1. Eine Pumpe dieser Art ist aus der internationalen Patent-Anmeldung WO/00/12900 bekannt.The invention relates to a screw vacuum pump with the features of the preamble of claim 1. A pump of this type is known from international patent application WO / 00/12900.
Bei einer Schraubenpumpe bilden ineinander greifende Gewinde abgeschlossene Volumina, die während der synchronisierten Drehung der Rotoren vom Einlauf zum Auslauf gefördert werden. Einlauf und Auslauf sind üblicherweise so gestaltet, dass die Gewindestege der Rotoren - in der Regel eingängige Gewinde - in einer Ebene senkrecht zu den Rotorachsen beginnen bzw. enden. Der effektive Eintrittsquerschnitt (bzw. Austrittsquerschnitt) der pump-aktiven Elemente entspricht deshalb jeweils der Summe der Flächen, die die jeweilige Nabe der Rotoren, das Gehäuse bzw. - je nach Stellung des Rotors - der benachbarte Rotor sowie die seitlichen Begrenzungen des jeweiligen Gewindesteges bilden. Bei eingängigen Gewinden erstreckt sich der Eintrittsquerschnitt jeweils über 180°. Die Figuren 1 und 2 zeigen einen Rotoreinlauf nach dem Stand der Technik, bei dem die Rotoren mit eingängigen Gewinden ausgerüstet sind. In den Figuren 1 und 2 sind die nur teilweise dargestellte Schraubenvakuumpumpe mit 1, ihr Gehäuse mit 2, ihr Einlaß mit 3, die Rotoren mit 4 bzw. 5, ihre Rotornaben mit 6 bzw. 7, ihre Gewindestege mit 8 bzw. 9 und die Rotorachsen mit 10 bzw. 11 bezeichnet . In Figur 2 ist eine Abwicklung des Rotors 5 dargestellt.In a screw pump, interlocking threads form closed volumes which are conveyed from the inlet to the outlet during the synchronized rotation of the rotors. Inlet and outlet are usually designed in such a way that the thread webs of the rotors - usually single-threaded threads - begin or end in a plane perpendicular to the rotor axes. The effective inlet cross-section (or outlet cross-section) of the pump-active elements therefore corresponds to the sum of the areas that form the respective hub of the rotors, the housing or - depending on the position of the rotor - the adjacent rotor and the lateral boundaries of the respective thread web , With single-start threads, the inlet cross-section extends over 180 °. Figures 1 and 2 show a rotor inlet according to the prior art, in which the rotors are equipped with single-start threads. In Figures 1 and 2 are the screw vacuum pump shown only partially with 1, its housing with 2, its inlet with 3, the rotors with 4 and 5, their rotor hubs with 6 and 7, their thread webs with 8 and 9 and the Rotor axes designated 10 and 11 respectively. A development of the rotor 5 is shown in FIG.
Die beiden Gewindestege 8,9 beginnen in einer sich senkrecht zu den Rotorachsen 10,11 erstreckenden Ebene, die in beiden Figuren mit 14 bezeichnet ist. Dadurch ergibt sich bei jedem Rotor ein Eintritts uerschnitt 15 bzw. 16, der von den beteiligten Bauteilen gebildet wird und der sich - bei eingängigen Gewindestegen 8,9 - über 180° erstreckt.The two thread webs 8, 9 begin in a plane extending perpendicular to the rotor axes 10, 11, which is designated 14 in both figures. This results in an inlet cross-section 15 or 16 for each rotor, which is formed by the components involved and which - in the case of single-thread webs 8.9 - extends over 180 °.
Der vorliegenden Erfindung liegt die Aufgabe zugrunde, die Ein- und auch Ausströmverhältnisse bei einer Schraubenvakuumpumpe zu verbessern.The present invention has for its object to improve the inflow and outflow conditions in a screw vacuum pump.
Erfindungsgemäß wird diese Aufgabe durch die kennzeichnenden Merkmale der Patentansprüche gelöst.According to the invention, this object is achieved by the characterizing features of the claims.
Durch die Erfindung wird ein "Einlauf-Booster" realisiert. Die Anordnung von den Eintrittsquerschnitten vorgelagerten Strömungskörpern hat die Wirkung einer Verbesserung des Füllungsgrades der von den Rotoren vom Einlauf zum Auslauf geförderten Volumina, so daß eine erfindungsgemäß ausgebildete Pumpe bessere Fördereigenschaften, insbesondere ein verbessertes Saugvermögen, hat. Auch im Bereich des Rotorauslaufs können ähnliche den Austrittsquerschnitten zugeordnete Strömungskörper die Abströmverhältnisse dahingehend verbessern, dass Strömungsverluste im Abgassystem verringert werden. Aerodynamisch können durch einen abströmseitig angeordneten Strömungskörper die Strömungsgeschwindigkeiten und der Restdrall reduziert sowie der statische Druck mit einer Querschnittserweiterung zusätzlich angehoben werden, so dass im nachfolgenden Abgassystem geringere Strömungsverluste infolge Umlenkung und Reibung auftreten. Da der Gegendruck im Abgasbereich ohnehin ständig bei 1 bar liegt, können hier die aerodynamischen Verbesserungen auch über den gesamten Betriebsbereich der Schraubenpumpe wirksam werden. Wegen der vorbeschriebenen Vorteile besteht schließlich auch die Möglichkeit, kürzere Rotoren einzusetzen.A "run-in booster" is realized by the invention. The arrangement of the flow bodies upstream of the inlet cross-sections has the effect of improving the degree of filling of the volumes conveyed by the rotors from the inlet to the outlet, so that a pump designed according to the invention has better delivery properties, in particular improved suction capacity, Has. Also in the area of the rotor outlet, similar flow bodies assigned to the outlet cross sections can improve the outflow conditions in such a way that flow losses in the exhaust system are reduced. Aerodynamically, the flow velocities and the residual swirl can be reduced by a flow body arranged on the outflow side, and the static pressure can be additionally increased with a cross-sectional expansion, so that lower flow losses due to deflection and friction occur in the downstream exhaust system. Since the back pressure in the exhaust area is always 1 bar anyway, the aerodynamic improvements can also be effective over the entire operating range of the screw pump. Finally, because of the advantages described above, it is also possible to use shorter rotors.
Die Erfindung ist unabhängig von der Schraubengeometrie (eingängige oder mehrgängige Schrauben, konstante oder variable Steigung, variable Steigung mit steigungskonstanten Bereichen, zylindrische, gestufte oder kegelige Rotoren, einflutige oder zweiflutige Rotoren, Rotoren mit fliegender oder doppelseitiger Lagerung) einsetzbar.The invention can be used regardless of the screw geometry (single-start or multi-start screws, constant or variable pitch, variable pitch with constant pitch ranges, cylindrical, stepped or tapered rotors, single-flow or double-flow rotors, rotors with flying or double-sided bearings).
Eine vorteilhafte Weiterbildung der Erfindung besteht darin, den Gewindesteg des jeweiligen Nachbarrotors (zweiter Rotor) in dem Bereich, der mit dem oder den Strömungskörpern des ersten Rotors zusammenwirkt, mit einer Aussparung zu versehen. Dadurch wird das Schließen des Eintrittsquerschnittes des ersten Rotors bei gleichzeitig sicherer Füllung des durch die Aussparung vergrößerten Eintrittsvolumens verzögert. Es findet eine Vorkompression statt, die den Wirkungsgrad der Pumpe verbessert und ihren Leitungsbedarf reduziert.An advantageous development of the invention consists in providing the thread web of the respective neighboring rotor (second rotor) in the region which interacts with the flow body (s) of the first rotor with a recess. As a result, the closing of the inlet cross-section of the first rotor with simultaneous safe filling of the through the recess increased entry volume delayed. Pre-compression takes place, which improves the efficiency of the pump and reduces its piping requirements.
Ein weiterer Vorteil der Erfindung besteht darin, dass die Strömungskörper gleichzeitig als Wuchtmassen verwendet werden können. Unwuchten der Rotoren, die infolge der Gestaltung der Endbereiche der Gewinde unvermeidbar sind, können durch die Strömungskörper vollständig oder zumindest weitestgehend beseitigt werden. Selbst bei durch Gießen hergestellten Rotoren ist nur noch ein Feinwuchten nötig. Rotordynamisch bieten aus- trittsseitige Strömungskörper die Möglichkeit, die U- runwucht eines Schraubenrotors zusätzlich in einer zweiten Ebene rechnerisch-konstruktiv zu reduzieren sowie diese dann auch als zweite Ausgleichsebene beim Feinwuchten zu nutzen, wodurch sich die inneren Momente im Gesamtrotor minimieren lassen.Another advantage of the invention is that the flow bodies can be used as balancing masses at the same time. Imbalances in the rotors, which are unavoidable due to the design of the end regions of the threads, can be completely or at least largely eliminated by the flow bodies. Even with rotors made by casting, only fine balancing is necessary. In terms of rotor dynamics, the flow bodies on the outlet side offer the possibility of additionally reducing the unbalance of a screw rotor in a computational-constructive manner on a second level and then using this as a second compensation level for fine balancing, which minimizes the internal moments in the overall rotor.
Die Austrittskonturen sind ebenfalls für alle Schraubengeometrien anwendbar. Durch die im Schraubengang reduzierten Querschnittsflächen bleibt bei Gewinden mit abnehmender Stegbreite am druckseitigen Rotorende lediglich eine geringe Wandstärke übrig, die wenig Spielraum zur Gestaltung von Schaufelkonturen bietet. Natürlich kann über ein zusätzliches Teil nahezu jede Austrittskontur angefügt werden, doch ein spanendes Nachformen eines zusätzlichen Gewindeganges, wie es bei einer Vakuumschraube mit variabler Steigung aufgrund der großen Gangstärke eintrittsseitig möglich ist, kann austrittsseitig nur in seltenen Fällen angewendet werden. Es wäre denkbar, dass, nach entsprechendem Schiit- zen entlang des Nabendurchmessers, die dünnwandige Restkontur durch gezieltes Biegen eine Schaufelform erhält, die über eine Stoffschlüssige Verbindung (wie Schweißen, Löten oder Kleben) dann wieder mit der Nabe zu fixieren ist. Besser ist es, diese Geometrie direkt bei der Gewindefertigung herzustellen, um so eine kostengünstige und betriebssichere Kontur zu erhalten, die zudem den rotordynamischen Bedürfnissen optimal ange- passt werden kann.The outlet contours can also be used for all screw geometries. Due to the reduced cross-sectional areas in the screw thread, only a small wall thickness is left for threads with a decreasing web width at the rotor end on the pressure side, which offers little scope for designing blade contours. Of course, almost any exit contour can be added using an additional part, but machining of an additional thread, as is possible on the entry side of a vacuum screw with variable pitch, can only be used on the exit side in rare cases. It would be conceivable that, after appropriate shiit zen along the hub diameter, the thin-walled residual contour is given a blade shape by targeted bending, which can then be fixed to the hub again via a material connection (such as welding, soldering or gluing). It is better to produce this geometry directly during thread production in order to obtain a cost-effective and reliable contour that can also be optimally adapted to the rotor dynamic requirements.
Die integrale spanende Fertigung von Schraubengeometrie und Ein- und Austrittskonturen bietet einen weiteren Vorteil. Durch stirnseitiges Abplanen, senkrecht zur Rotorachse, entstehen bei einem herkömmlichen Schraubenrotor an beiden Enden scharfe Eintritts- und Austrittskanten, die häufig zurückgeschnitten werden müssen, um ein Verformen oder Abbrechen dieser dünnen Restmaterialien zu verhindern. Demgegenüber kann bei den integral hergestellten Konturen ein kontinuierlicher Übergang erzielt werden, der gleichzeitig eine Versteifung der Endkanten darstellt.The integral machining of screw geometry and entry and exit contours offers another advantage. By flattening the face, perpendicular to the rotor axis, a conventional screw rotor creates sharp entry and exit edges at both ends, which often have to be cut back to prevent deformation or breakage of these thin residual materials. In contrast, a continuous transition can be achieved with the integrally produced contours, which at the same time represents a stiffening of the end edges.
Weitere Vorteile und Einzelheiten der Erfindung sollen anhand von in den Figuren 3 bis 8 dargestellten Ausführungsbeispielen erläutert werden. Es zeigen:Further advantages and details of the invention will be explained on the basis of the exemplary embodiments illustrated in FIGS. 3 to 8. Show it:
Figuren 3, 4 und 8 Lösungen mit jeweils einem Strömungskörper,FIGS. 3, 4 and 8 solutions, each with a flow body,
Figuren 5, 6 und 7 Lösungen mit jeweils mehreren Strömungskörpern. Beim Ausführungsbeispiel nach den Figuren 3 und 4 (Figur 4 stellt wieder eine Abwicklung des Rotors 5 dar) sind die Rotornaben 6, 7 über die Ebene 14 der Eintrittsquerschnitte 15, 16 um ein bis zwei Gewindestegbreiten verlängert. Sie dienen sowohl der Abstützung jeweils eines Strömungskörpers 21, 22, der sich jeweils oberhalb der Eintrittsquerschnitte 15 bzw. 16 erstreckt, als auch der nabenseitigen Förderraum- Abgrenzung. Es handelt sich in etwa um eine Verlängerung der Gewindestege 8, 9 mit verminderter Stegbreite (etwa 1/3). Bei - wie dargestellt - eingängigen Schrauben erstreckt sich jeder Strömungskörper über etwas weniger als den halben Rotorumfang und demzufolge steht dem offenen Teilbereich etwas mehr als ein halber Rotorumfang zur Verfügung. Um 180° zueinander verdreht, dringt jeder der Strömungskörper jeweils berührungsfrei in die entsprechende Lücke des Nachbarrotors ein. Die Steigung der jeweils vorlaufenden Kanten der Strömungskörper 21, 22 nimmt in Richtung Saugseite etwas zu. Der Endbereich ist abgerundet. Die in das noch offene Fördervolumen einströmenden Gase sind in Figur 4 durch Pfeile gekennzeichnet.Figures 5, 6 and 7 solutions, each with several flow bodies. In the exemplary embodiment according to FIGS. 3 and 4 (FIG. 4 again represents a development of the rotor 5), the rotor hubs 6, 7 are extended by one or two thread web widths over the plane 14 of the inlet cross sections 15, 16. They serve both to support a flow body 21, 22, which extends in each case above the inlet cross sections 15 and 16, and to delimit the delivery space on the hub side. It is approximately an extension of the thread webs 8, 9 with a reduced web width (about 1/3). In the case of - as shown - single-start screws, each flow body extends over a little less than half the rotor circumference and, consequently, a little more than half a rotor circumference is available to the open partial area. Twisted by 180 ° to each other, each of the flow bodies penetrates into the corresponding gap of the neighboring rotor without contact. The slope of the leading edges of the flow bodies 21, 22 increases somewhat towards the suction side. The end area is rounded. The gases flowing into the still open delivery volume are identified by arrows in FIG.
Die dem Strömungskörper 21, 22 nachlaufenden Bereiche der Stirnseiten der Gewindestege 8, 9 sind mit Aussparungen 23 (Rotor 4, nicht sichtbar), 24 ausgerüstet. Sie verzögern den Abschluss der Fördervolumina und sichern gleichzeitig deren vollständige Füllung.The areas of the end faces of the thread webs 8, 9 that follow the flow body 21, 22 are equipped with cutouts 23 (rotor 4, not visible), 24. They delay the completion of the funding volumes and at the same time ensure that they are completely filled.
Der jeweilige Strömungskörper 21 bzw. 22 kann zusammen mit seinem Nabenabschnitt als separates Teil gefertigt und nachträglich an die abgeschnittene Schraubenstirn- fläche montiert werden. Besonders vorteilhaft ist jedoch die integrale Fertigung, bei der Nabenabschnitt und Strömungskörper z. B. durch Fräsen geformt werden, und zwar aus dem Restmaterial, das bei der Herstellung des Schraubenprofils (durch Fräsen, Wirbeln, Walzen, Formdrehen usw.) stehen geblieben ist (in Figur 4 gestrichelt dargestellt) .The respective flow body 21 or 22 can be manufactured together with its hub section as a separate part and subsequently attached to the cut-off screw face. surface mounted. However, the integral production is particularly advantageous in the case of the hub section and flow body, for. B. are formed by milling, from the residual material that has remained in the manufacture of the screw profile (by milling, whirling, rolling, turning, etc.) (shown in dashed lines in Figure 4).
Figur 5a zeigt eine der Figur 4 entsprechende Ausführung mit dem Unterschied, dass Breite und Steigung des Steges 9 in Richtung Druckseite abnehmen. Bei einer Ausführung dieser Art kann die Druckseite gemäß Figur 5b gestaltet sein. Die Nabe 7 ist über den Austrittsquerschnitt 29 hinaus um etwa das Vierfache der druckseitigen Gewindestegbreite verlängert und stützt eine schaufelartige Verlängerung 25 des Gewindes 9. Diese erstreckt sich mit stark in Richtung Druckseite zunehmender Steigung und Stegbreite etwa über 140°.FIG. 5a shows an embodiment corresponding to FIG. 4, with the difference that the width and slope of the web 9 decrease in the direction of the pressure side. In an embodiment of this type, the pressure side can be designed according to FIG. 5b. The hub 7 is extended beyond the outlet cross section 29 by approximately four times the pressure-side thread web width and supports a blade-like extension 25 of the thread 9. This extends with an increase in the direction of the pressure side of the pitch and the web width approximately over 140 °.
Figur 6a zeigt als Abwicklung den Rotoreinlauf eines weiteren Ausführungsbeispieles für den Rotor 5. Der nicht dargestellte Rotor 4 ist entsprechend ausgebildet. Dem Eintrittsquerschnitt 16 sind drei vom Gewindesteg 9 unabhängige Strömungskörper 26, 27, 28 vorgelagert. Sie stützen sich an der Nabe 7 ab und haben etwa die Form von Rotorschaufeln, deren Steigung in Richtung Saugseite zunimmt, und zwar beginnend mit etwa der Steigung des Gewindesteges 9.FIG. 6a shows the rotor inlet of a further exemplary embodiment for the rotor 5 as a development. The rotor 4, not shown, is designed accordingly. The inlet cross section 16 is preceded by three flow bodies 26, 27, 28 which are independent of the threaded web 9. They are supported on the hub 7 and have approximately the shape of rotor blades, the gradient of which increases towards the suction side, starting with approximately the gradient of the threaded web 9.
Die Figuren 6b und 6c zeigen zwei Ausführungen für den Rotorauslauf, je nach dem, ob das Gewinde 9 eine konstante Steigung und Stegbreite oder eine abnehmende Steigung und Stegbreite hat. Druckseitig ist die Nabe 7 jeweils über den Austrittsquerschnitt 29 hinaus verlängert und trägt Schaufeln 31, 32, 33 bzw. 34, 35. Sie sind unabhängig vom Gewinde 9 und haben eine zur Druckseite zunehmende Steigung. Bei der Ausführung nach Fig. 6b sind die Schaufeln etwa spiegelsymmetrisch zu den Schaufeln 26, 27, 28 gestaltet. Bei der Ausführung nach Figur 6c nimmt die Stegbreite der Schaufeln 34, 35 in Richtung Druckseite zu. Bei diesen Ausführungen bestehen die einlaufseitigen und auslaufseitigen Schaufeln zusammen mit ihren Nabenabschnitten zweckmäßig aus separat hergestellten Schaufelringen, die nach ihrer stirnseitigen Montage Bestandteile der Rotoren 4 und 5 sind. Diese Lösung erlaubt es, die An- und - unter bestimmten Voraussetzungen - auch Abströmbedingungen in einfacher Weise durch Wechsel der Schaufelringe den Kundenwünschen anzupassen.FIGS. 6b and 6c show two designs for the rotor runout, depending on whether the thread 9 has a constant pitch and web width or a decreasing pitch and web width. The hub is 7 on the pressure side each extends beyond the outlet cross section 29 and carries blades 31, 32, 33 and 34, 35, respectively. They are independent of the thread 9 and have an increasing slope toward the pressure side. In the embodiment according to FIG. 6b, the blades are approximately mirror-symmetrical to the blades 26, 27, 28. In the embodiment according to FIG. 6c, the web width of the blades 34, 35 increases in the direction of the pressure side. In these designs, the inlet-side and outlet-side blades together with their hub sections expediently consist of separately manufactured blade rings, which are components of the rotors 4 and 5 after their front-side mounting. This solution allows the inflow and - under certain conditions - outflow conditions to be easily adapted to customer requirements by changing the blade rings.
Die druckseitigen Strömungskörper 25 (Fig. 5b) und 34 (Fig. 6c) haben ein relativ großes Volumen. Dadurch steht im Austrittsbereich der Pumpe genügend Masse für das Wuchten der Rotoren zur Verfügung.The pressure-side flow bodies 25 (FIG. 5b) and 34 (FIG. 6c) have a relatively large volume. This means that there is enough mass available in the outlet area of the pump for balancing the rotors.
Bei der Ausführung nach Figur 7a sind zwei Strömungskörper 36, 37 vorgesehen. Strömungskörper 36 ist - im wesentlichen wie bei der Ausführung nach den Figuren 3, 4 - eine Verlängerung des Gewindesteges 8 mit verminderter Breite (hier etwa 1/5) . Der Fuß des schaufeiförmigen Strömungskörpers 37 befindet sich etwa in der Mitte des Eintrittsquerschnittes 16. Bei einer Ausführung mit einem Gewinde 9 konstanter Stegbreite und Steigung kann der Rotorauslauf entsprechend (etwa spiegelbildlich) gestaltet sein. Figur 7b zeigt den Rotorauslauf bei einer Ausführung mit einem Gewinde 9, dessen Steigung und Stegbreite in Richtung Druckseite abnehmen. Im Bereich der Verlängerung der Nabe 7 über den Austrittsquerschnitt 29 hinaus nimmt die Gewindesteigung bei weiterer Abnahme der Stegbreite in Richtung Druckseite stark zu.In the embodiment according to FIG. 7a, two flow bodies 36, 37 are provided. Flow body 36 is - essentially as in the embodiment according to FIGS. 3, 4 - an extension of the threaded web 8 with a reduced width (here about 1/5). The foot of the shovel-shaped flow body 37 is located approximately in the middle of the inlet cross section 16. In the case of an embodiment with a thread 9 of constant web width and pitch, the rotor outlet can be designed accordingly (approximately in mirror image). FIG. 7b shows the rotor outlet in an embodiment with a thread 9, the pitch and web width of which decrease in the direction of the pressure side. In the area of the extension of the hub 7 beyond the outlet cross section 29, the thread pitch increases sharply as the web width decreases further in the direction of the pressure side.
Schließlich zeigt Figur 8 perspektivisch eine Ausführungsform, die im wesentlichen der Ausführung nach den Figuren 3, 4 entspricht. Unterschiedlich ist, dass die Naben 6, 7 nur im Bereich der Strömungskörper 21, 22 verlängert sind. Sie erstrecken sich jeweils nur bis zu den Innenkanten der jeweiligen Strömungskörper 21 bzw. 22.Finally, FIG. 8 shows in perspective an embodiment which essentially corresponds to the embodiment according to FIGS. 3, 4. The difference is that the hubs 6, 7 are only extended in the area of the flow bodies 21, 22. They each extend only to the inner edges of the respective flow bodies 21 and 22.
Zweckmäßig ist es, die Strömungskörper so zu gestalten, sei es in Bezug auf ihre Ausbildung, Anordnung und/oder Masse, dass sie gleichzeitig die Unwucht der Schraubenrotoren 4, 5 beseitigen. Vorteilhafterweise ergibt sich, dass gerade dort, wo die Anordnung von aerodynamisch wirksamen Strömungskörpern zweckmäßig ist, auch Wucht- massen hinzugefügt werden müssen. Große Urunwuchten sind dadurch vermieden, aufwendige Wuchtverfahren können entfallen. Die Strömungskörper können deshalb auch als Wuchtgewichte angesehen werden, die so gestaltet sind, dass sie die Zu- (bzw. Ab-) Strömverhältnisse der zu fördernden Gase verbessern, d.h., dass sie die Form von Strömungskörpern haben. It is expedient to design the flow bodies, be it in terms of their design, arrangement and / or mass, that they simultaneously remove the unbalance of the screw rotors 4, 5. It advantageously results that balancing masses must also be added precisely where the arrangement of aerodynamically effective flow bodies is expedient. Large original unbalances are avoided, and complex balancing processes can be dispensed with. The flow bodies can therefore also be regarded as balancing weights that are designed in such a way that they improve the inflow (or outflow) conditions of the gases to be conveyed, i.e. they have the shape of flow bodies.

Claims

PATENTANSPRUCHEPATENT CLAIMS
Schraubenvakuumpumpe mit zwei Rotoren (4, 5) , die jeweils eine Nabe (6, 7) und ein Gewinde (8, 9) aufweisen, sowie mit einem Gehäuse Screw vacuum pump with two rotors (4, 5), each of which has a hub (6, 7) and a thread (8, 9), and with a housing
(2) , in dem die Rotoren mit ineinander greifenden Gewinden derart untergebracht sind, dass sie gemeinsam mit dem Gehäuse saugseitig angeordnete Eintrittsquerschnitte(2), in which the rotors are accommodated with interlocking threads in such a way that they have inlet cross sections arranged on the suction side together with the housing
(15, 16) sowie druckseitig angeordnete Auslaßquerschnitte (29) bilden und während der Drehbewegung der Rotoren (4, 5) eine Förderung von Gasen von der Saugseite zur Druckseite bewirken, dadurch gekennzeichnet, dass die Rotoren (4, 5) saugseitig mit Strömungskörpern (21, 22; 26, 27, 28; 36, 37) ausgerüstet sind, die den Eintrittsquerschnitten(15, 16) and outlet cross-sections (29) arranged on the pressure side and effect a conveyance of gases from the suction side to the pressure side during the rotational movement of the rotors (4, 5), characterized in that the rotors (4, 5) are equipped with flow bodies (on the suction side) 21, 22; 26, 27, 28; 36, 37) are equipped with the entry cross sections
(15, 16) vorgelagert und derart ausgebildet sind, dass sie die Zuströmverhältnisse der zu fördernden Gase zu den Eintrittsquerschnitten (15, 16) verbessern.(15, 16) are arranged upstream and designed in such a way that they improve the inflow conditions of the gases to be conveyed to the inlet cross sections (15, 16).
Pumpe nach Anspruch 1, dadurch gekennzeichnet, dass bei mehrgängigen Schrauben mindestens jeweils ein Gewindesteg mit einem Strömungskörper ausgerüstet ist.Pump according to claim 1, characterized in that in the case of multi-start screws at least a threaded web is equipped with a flow body.
3. Pumpe nach Anspruch 1, dadurch gekennzeichnet, dass sich der Strömungskörper bei einer eingängigen Schraube über 90° bis 180° erstreckt.3. Pump according to claim 1, characterized in that the flow body extends over 90° to 180° with a single-start screw.
4. Pumpe nach einem der Ansprüche 1 , 2 oder 3 , dadurch gekennzeichnet, dass der Strömungskörper (21, 22) im wesentlichen eine Verlängerung eines Steges (8, 9) mit verminderter Stegbreite ist.4. Pump according to one of claims 1, 2 or 3, characterized in that the flow body (21, 22) is essentially an extension of a web (8, 9) with a reduced web width.
5. Pumpe nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, dass im Bereich der jeweiligen Eintrittsquerschnitte mindestens ein weiterer, vom Gewindesteg (8, 9) unabhängigen Strömungskörper vorhanden ist, der die Form einer Schaufel hat.5. Pump according to one of claims 1 to 4, characterized in that in the area of the respective inlet cross sections there is at least one further flow body which is independent of the threaded web (8, 9) and has the shape of a blade.
6. Pumpe nach Anspruch 5 , dadurch gekennzeichnet, dass die Schaufeln derart gekrümmt sind, dass sie sich druckseitig etwa in Richtung der Gewindestege (8, 9) erstrecken und saugseitig steiler ausgebildet sind.6. Pump according to claim 5, characterized in that the blades are curved in such a way that they extend approximately in the direction of the threaded webs (8, 9) on the pressure side and are designed to be steeper on the suction side.
7. Pumpe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass im nachlaufenden Bereich der Stirnseite des Gewindesteges (8, 9) eine Aussparung (23, 24) vorhanden ist.7. Pump according to one of the preceding claims, characterized in that a recess (23, 24) is present in the trailing area of the end face of the threaded web (8, 9).
8. Pumpe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass der Rotorauslauf mit korrespondierenden Strömungskörpern ausgerüstet ist.8. Pump according to one of the preceding claims, characterized in that the rotor outlet with corresponding flow bodies is equipped.
9. Pumpe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass der/die Strömungskörper (21, 22; 26, 27, 28; 31, 32, 33; 34, 35; 36, 37) und der zugehörige Nabenabschnitt (6, 7) als separates Bauteil auf der Stirnseite bzw. Rückseite des Rotors (4, 5) montiert ist.9. Pump according to one of the preceding claims, characterized in that the flow body (s) (21, 22; 26, 27, 28; 31, 32, 33; 34, 35; 36, 37) and the associated hub section (6, 7 ) is mounted as a separate component on the front or back of the rotor (4, 5).
10. Pumpe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Strömungskörper in Bezug auf ihre Ausbildung, Anordnung und/oder Masse so gestaltet sind, dass die Unwucht des zugehörigen Rotors (4, 5) zumindest weitestgehend beseitigt ist.10. Pump according to one of the preceding claims, characterized in that the flow bodies are designed in terms of their design, arrangement and / or mass so that the imbalance of the associated rotor (4, 5) is at least largely eliminated.
11. Schraubenvakuumpumpe mit zwei Rotoren (4, 5), die jeweils eine Nabe (6, 7) und ein Gewinde (8, 9) aufweisen, sowie mit einem Gehäuse (2), in dem die Rotoren mit ineinander greifenden Gewinden derart untergebracht sind, dass sie gemeinsam mit dem Gehäuse saugseitig angeordnete Eintrittsquerschnitte11. Screw vacuum pump with two rotors (4, 5), each of which has a hub (6, 7) and a thread (8, 9), and with a housing (2) in which the rotors with interlocking threads are housed in this way that they have inlet cross sections arranged on the suction side together with the housing
(15, 16) sowie druckseitig angeordnete Auslassquerschnitte (29) bilden und während der Drehbewegung der Rotoren (4, 5) eine Förderung von Gasen von der Saugseite zur Druckseite bewirken, dadurch gekennzeichnet, dass die Rotoren (4, 5) druck- und/oder saugseitig mit Wuchtgewichten (21, 22; 26, 27, 28; 31, 32, 33; 34, 35; 36, 37) ausgerüstet sind, die derart gestaltet sind, dass sie die Zu- (bzw. Ab-) Strömverhältnisse der zu fördernden Gase verbessern.(15, 16) and outlet cross-sections (29) arranged on the pressure side and effect a conveyance of gases from the suction side to the pressure side during the rotational movement of the rotors (4, 5), characterized in that the rotors (4, 5) are pressure and/or or are equipped on the suction side with balancing weights (21, 22; 26, 27, 28; 31, 32, 33; 34, 35; 36, 37) which are designed in such a way that they Improve inflow (or outflow) flow conditions of the gases to be conveyed.
12. Pumpe nach Anspruch 11, dadurch gekennzeichnet, dass die Wuchtgewichte die Form von Strömungskörpern nach einem der Ansprüche 1 bis 10 haben. 12. Pump according to claim 11, characterized in that the balancing weights have the shape of flow bodies according to one of claims 1 to 10.
EP02710783A 2001-03-09 2002-01-09 Screw vacuum pump comprising additional flow bodies Expired - Lifetime EP1366296B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10111525A DE10111525A1 (en) 2001-03-09 2001-03-09 Screw vacuum pump with rotor inlet and rotor outlet
DE10111525 2001-03-09
PCT/EP2002/000122 WO2002073037A1 (en) 2001-03-09 2002-01-09 Screw vacuum pump comprising additional flow bodies

Publications (2)

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EP1366296A1 true EP1366296A1 (en) 2003-12-03
EP1366296B1 EP1366296B1 (en) 2006-11-22

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US (1) US20040067149A1 (en)
EP (1) EP1366296B1 (en)
JP (1) JP4200007B2 (en)
DE (2) DE10111525A1 (en)
WO (1) WO2002073037A1 (en)

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WO2008018261A1 (en) 2006-08-07 2008-02-14 Seiko Instruments Inc. Method for manufacturing electroformed mold, electroformed mold, and method for manufacturing electroformed parts
DE102010019402A1 (en) * 2010-05-04 2011-11-10 Oerlikon Leybold Vacuum Gmbh Screw vacuum pump
US9057373B2 (en) * 2011-11-22 2015-06-16 Vilter Manufacturing Llc Single screw compressor with high output

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JP4200007B2 (en) 2008-12-24
DE10111525A1 (en) 2002-09-12
WO2002073037A1 (en) 2002-09-19
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US20040067149A1 (en) 2004-04-08
DE50208778D1 (en) 2007-01-04
JP2004522038A (en) 2004-07-22

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