US20040067149A1 - Screw vacuum pump comprising additional flow bodies - Google Patents

Screw vacuum pump comprising additional flow bodies Download PDF

Info

Publication number
US20040067149A1
US20040067149A1 US10/469,422 US46942203A US2004067149A1 US 20040067149 A1 US20040067149 A1 US 20040067149A1 US 46942203 A US46942203 A US 46942203A US 2004067149 A1 US2004067149 A1 US 2004067149A1
Authority
US
United States
Prior art keywords
rotors
inlet
thread
pump according
cross sections
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US10/469,422
Inventor
Wolfgang Giebmanns
Thomas Dreifert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Assigned to LEYBOLD VAKUUM GMBH reassignment LEYBOLD VAKUUM GMBH ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: DREIFERT, THOMAS, GIEBMANNS, WOLFGANG
Publication of US20040067149A1 publication Critical patent/US20040067149A1/en
Abandoned legal-status Critical Current

Links

Images

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F04C29/122Arrangements for supercharging the working space
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082Details specially related to intermeshing engagement type pumps
    • F04C18/084Toothed wheels
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0021Systems for the equilibration of forces acting on the pump
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type

Definitions

  • the present invention relates to a screw vacuum pump having the characteristics of patent claim 1.
  • a pump of this kind is known from the international patent application WO/00/12900.
  • FIGS. 1 and 2 depict a rotor inlet according to the state-of-the-art in which the rotors are equipped with single threads.
  • the only partially depicted screw vacuum pump is designated as 1 , its housing as 2 , its inlet as 3 , the rotors as 4 and 5 , the rotor hubs as 6 respectively 7 , their thread ridges as 8 respectively 9 , and the rotor axes as 10 respectively 11 .
  • FIG. 2 a developed view of the rotor 5 is depicted.
  • the two thread ridges 8 , 9 commence in a plane extending perpendicularly with respect to the rotor axes 10 , 11 , said plane being designated as 14 in both drawing figures.
  • an inlet cross-section 15 respectively 16 being created by the involved components, which extends—in the instance of single thread ridges 8 , 9 —over 180°.
  • an “inlet booster” is implemented.
  • the arrangement of flow bodies upstream of the inlet cross-sections has the effect of improving the filling degree of the volumes conveyed by the rotors from the inlet to the outlet, so that a pump designed in accordance with the present invention will have improved pumping properties, in particular an improved pumping capacity.
  • Also in the area of the rotor outlets likewise designed flow bodies assigned to the outlet cross-sections can improve the conditions of the outflow, such that the flow losses in the exhaust system can be reduced.
  • Aerodynamically, flow bodies arranged on the delivery side are capable of reducing the flow velocities and the residual swirl, and also the static pressure may be increased additionally through a widening cross-section, so that in the downstream exhaust system lower flow losses occur due to deflection and friction. Since in the exhaust area the back pressure is in any case continuously at 1 bar, the aerodynamic improvements may here be also effective across the entire operating range of the screw pump. Due to the aforementioned benefits, there finally also exists the possibility of employing shorter rotors.
  • the present invention may be implemented independently of the geometrical arrangement of the screw (single-thread or multi-thread screws, constant or variable pitch, variable pitch with areas of constant pitch, cylindrical, stepped or cone-shaped rotors, single or double flow rotors, cantilevered rotors or rotors with double sided bearings).
  • An advantageous further developed embodiment of the present invention is such, that the thread ridge of the adjacent rotor in each instance (second rotor) is equipped in the area which interacts with the flow body or flow bodies of the first rotor, with a recess.
  • a further advantage of the present invention is such, that the flow bodies may simultaneously be employed as masses for balancing. Imbalances of the rotors which are unavoidable owing to the design of the end areas of the threads, can be completely or at least to a substantial extent removed through the flow bodies. Even in the instance of the rotors being manufactured by casting, only fine balancing will be required.
  • flow bodies on the outlet side offer the possibility of reducing the initial imbalance 3 ) of a screw rotor additionally in a second plane by calculative/design means and to utilise these then also as the second compensation plane during fine balancing, such that the inner moments in the entire rotor may be minimised.
  • the outlet contours may also be applied to all screw geometries. Through the reduced cross-sectional areas in the thread of the screw, only a small wall thickness remains in the instance of threads in which the ridge width reduces at the pressure side of the rotor, whereby said small wall thickness does not leave much room for designing blade contours.
  • almost any outlet contour may be added through an additional part, but post-forming an additional thread by metal cutting, being viable in the instance of a vacuum screw with variable pitch owing to the large pitch on the inlet side, may be employed on the outlet side only in rare cases.
  • FIGS. 5, 6 and 7 solutions with several flow bodies in each instance.
  • FIG. 4 again depicts a developed view of the rotor 5
  • the rotor hubs 6 , 7 have been extended beyond the plane 14 of the inlet cross-sections 15 , 16 by an amount equivalent to the width of one or two thread ridges.
  • Said rotor hubs serve the purpose of supporting one each flow body 21 , 22 each located above the inlet cross-sections 15 respectively 16 , also limiting the pump chamber on the side of the hub. This is approximately an extension of the thread ridges 8 , 9 with reduced ridge width (approximately 1 ⁇ 3).
  • each flow body extends over just under less than half the rotor circumference and subsequently there is just over half the rotor circumference available to the open partial area.
  • each of the flow bodies engages in each instance in a non-contact manner into the corresponding gap of the adjacent rotor.
  • the slope of the in each instance forerunning edges of the flow bodies 21 , 22 increases slightly in the direction of the intake side.
  • the area of the ends is rounded off.
  • the flow body 21 respectively 22 in each instance may be manufactured with its hub section as a separate part, and may be retrofitted to the cut off face surface of the screw.
  • the hub section and the flow body are formed by milling, for example, and specifically from the remaining material which has been left over (depicted by dashed lines in drawing FIG. 4) in the production of the screw profile (by milling, spinning, rolling, turning etc.).
  • Drawing FIG. 5 a depicts an embodiment corresponding to that of drawing FIG. 4 with the difference, that the width and pitch of the ridge 9 decrease in the direction of the pressure side.
  • the pressure side may be designed in accordance with drawing FIG. 5 b .
  • the hub 7 extends beyond the outlet cross section 29 by about four times the width of the thread ridge on the pressure side and supports a blade-like extension 25 of the thread 9 . This extends with strongly increasing slope and ridge width in the direction of the pressure side over approximately 140°.
  • FIG. 6 a depicts by way of a developed view, the rotor inlet of a further example of an embodiment for the rotor 5 .
  • the not depicted rotor 4 is designed accordingly.
  • Ahead of the inlet cross section 16 there are located independent flow bodies 26 , 27 , 28 being independent of the thread ridge 9 .
  • These are supported at the hub 7 and exhibit approximately the shape of rotor blades, their slope increases in the direction of the intake side, specifically commencing approximately with the slope of thread ridge 9 .
  • FIGS. 6 b and 6 c depict two embodiments for the rotor outlet, depending on whether the thread 9 has a constant pitch and ridge width or a decreasing pitch and ridge width.
  • the hub 7 is in each instance extended beyond the outlet cross-section 29 and carries the blades 31 , 32 , 33 respectively 34 , 35 .
  • Said blades are independent of thread 9 and have a slope which increases in the direction of the pressure side.
  • the blades are designed to be approximately mirror symmetrical with respect to the blades 26 , 27 , 28 .
  • the ridge width of the blades 34 , 35 increases in the direction of the pressure side.
  • the blades on the inlet side and the outlet side with their hub sections consist expediently of separately manufactured rings, which after having been fitted to the face side, are components of the rotors 4 , 5 .
  • the flow bodies 25 (drawing FIG. 5 b ) and 34 (drawing FIG. 6 c ) on the pressure side have a relatively large volume. Thus in the outlet area of the pump a sufficient mass is available for balancing the rotors.
  • Flow body 36 is—substantially like in the embodiment in accordance with drawing FIGS. 3 , 4 —an extension of the thread ridge 8 but reduced in width (here approximately 1 ⁇ 5).
  • the base of the blade shaped flow body 37 is located approximately at the centre of the inlet cross section 16 .
  • the rotor outlet may be designed correspondingly (approximately a mirror image).
  • FIG. 7 b depicts the rotor outlet in an embodiment with a thread 9 , the pitch and ridge width of which decreases in the direction of the pressure side.
  • the pitch of the thread increases strongly whereby the ridge width is further reduced in the direction of the pressure side.
  • drawing FIG. 8 depicts by way of a perspective view an embodiment which substantially corresponds to the embodiment in accordance with drawing FIGS. 3, 4. The difference is, that the hubs 6 , 7 only extended in the area of the flow bodies 21 , 22 . They extend in each instance only up to the inside edges of the respective flow bodies 21 , 22 .
  • the flow bodies such that, be it with respect to their design, arrangement and/or mass, they simultaneously remove the imbalance of the screw rotors 4 , 5 .
  • it is required also to add balancing masses.
  • Great initial imbalances are thus avoided, involved balancing processes can be dispensed with.
  • the flow bodies may also be considered as balancing weights, being so designed that they improve the conditions for the inflow (respectively outflow) of the gases to be pumped, i.e. that they have the shape of flow bodies.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

The invention relates to a screw vacuum pump comprising two rotors (4, 5) which respectively have a hub (6, 7) and a thread (8, 9), additionally comprising a housing (2) wherein the rotors whose threads engage with each other are accommodated in such a way that they form, together with the housing, inlet cross sections (15, 16) on the inlet side thereof and form outlet cross sections (29) on the pressure side thereof causing gas to be conveyed from the inlet side to the pressure side during rotation of the rotors (4, 5). According to the invention, in order to improve inflow and outflow conditions, the rotors (4, 5) are provided on the inlet side with flow bodies (21, 22; 26, 27, 28; 36, 37) which are arranged upstream from the inlet cross sections (15, 16) in such a way that the inflow conditions of the gas to be transported to the inlet cross sections (15, 16) are improved.

Description

  • The present invention relates to a screw vacuum pump having the characteristics of [0001] patent claim 1. A pump of this kind is known from the international patent application WO/00/12900.
  • In the instance of a screw pump, threads engaging into each other establish sealed off volumes, which during the synchronised rotation of the rotors are conveyed from the inlet to the outlet. Inlet and outlet are commonly so designed that the thread ridges of the rotors—generally single threads—commence, respectively terminate, in a plane perpendicular to the rotor axes. The effective inlet cross-section (respectively outlet cross-section) of the active pumping elements for this reason corresponds in each instance to the total of the surfaces which form the respective hub of the rotors, the housing, respectively—depending on the position of the rotor—the adjacent rotor, as well as the limits at the side of respective the thread's ridge. In single threads, the inlet cross-section extends in each instance over 180°. [0002]
  • Drawing FIGS. 1 and 2 depict a rotor inlet according to the state-of-the-art in which the rotors are equipped with single threads. In the drawing FIGS. 1 and 2, the only partially depicted screw vacuum pump is designated as [0003] 1, its housing as 2, its inlet as 3, the rotors as 4 and 5, the rotor hubs as 6 respectively 7, their thread ridges as 8 respectively 9, and the rotor axes as 10 respectively 11. In drawing FIG. 2, a developed view of the rotor 5 is depicted.
  • The two [0004] thread ridges 8, 9 commence in a plane extending perpendicularly with respect to the rotor axes 10, 11, said plane being designated as 14 in both drawing figures. Thus there results for each rotor an inlet cross-section 15 respectively 16, being created by the involved components, which extends—in the instance of single thread ridges 8, 9—over 180°.
  • It is the task of the present invention to improve the conditions for the inflow and also the outflow in the instance of a screw vacuum pump. [0005]
  • This task is solved through the present invention by the characterising features of the patent claims. [0006]
  • Through the present invention an “inlet booster” is implemented. The arrangement of flow bodies upstream of the inlet cross-sections has the effect of improving the filling degree of the volumes conveyed by the rotors from the inlet to the outlet, so that a pump designed in accordance with the present invention will have improved pumping properties, in particular an improved pumping capacity. Also in the area of the rotor outlets likewise designed flow bodies assigned to the outlet cross-sections can improve the conditions of the outflow, such that the flow losses in the exhaust system can be reduced. Aerodynamically, flow bodies arranged on the delivery side are capable of reducing the flow velocities and the residual swirl, and also the static pressure may be increased additionally through a widening cross-section, so that in the downstream exhaust system lower flow losses occur due to deflection and friction. Since in the exhaust area the back pressure is in any case continuously at 1 bar, the aerodynamic improvements may here be also effective across the entire operating range of the screw pump. Due to the aforementioned benefits, there finally also exists the possibility of employing shorter rotors. [0007]
  • The present invention may be implemented independently of the geometrical arrangement of the screw (single-thread or multi-thread screws, constant or variable pitch, variable pitch with areas of constant pitch, cylindrical, stepped or cone-shaped rotors, single or double flow rotors, cantilevered rotors or rotors with double sided bearings). [0008]
  • An advantageous further developed embodiment of the present invention is such, that the thread ridge of the adjacent rotor in each instance (second rotor) is equipped in the area which interacts with the flow body or flow bodies of the first rotor, with a recess. [0009]
  • Thus closing of the inlet cross-section of the first rotor is delayed while simultaneously reliably filling the increased inlet volume due to the recess. In this manner a pre-compression is effected which improves efficiency of the pump and reduces its power requirements[0010] 2).
  • A further advantage of the present invention is such, that the flow bodies may simultaneously be employed as masses for balancing. Imbalances of the rotors which are unavoidable owing to the design of the end areas of the threads, can be completely or at least to a substantial extent removed through the flow bodies. Even in the instance of the rotors being manufactured by casting, only fine balancing will be required. With regard to rotor dynamics, flow bodies on the outlet side offer the possibility of reducing the initial imbalance[0011] 3) of a screw rotor additionally in a second plane by calculative/design means and to utilise these then also as the second compensation plane during fine balancing, such that the inner moments in the entire rotor may be minimised.
  • The outlet contours may also be applied to all screw geometries. Through the reduced cross-sectional areas in the thread of the screw, only a small wall thickness remains in the instance of threads in which the ridge width reduces at the pressure side of the rotor, whereby said small wall thickness does not leave much room for designing blade contours. Of course almost any outlet contour may be added through an additional part, but post-forming an additional thread by metal cutting, being viable in the instance of a vacuum screw with variable pitch owing to the large pitch on the inlet side, may be employed on the outlet side only in rare cases. It might be conceivable, after providing corresponding slots along the diameter of the hub, to produce through well controlled bending of the remaining thin walled contour, the shape of the blade, which by means of a solid material joint (through welding, soldering or gluing) would then again have to be affixed to the hub. It is more advantageous to manufacture this geometry directly during the manufacture of the thread, so as to obtain a cost-effective and operationally reliable contour which, in addition, may be optimally adapted to rotor dynamic requirements. [0012]
  • The integral manufacture of screw geometry and inlet and outlet contours through metal cutting operations offers a further benefit. Through facing, perpendicularly with respect to the rotor axis, there result in the instance of a conventional screw rotor sharp inlet and outlet edges at both ends, which frequently need to be cut back in order to prevent the remaining thin materials from being deformed or breaking off. In contrast to this in the instance of integrally manufactured contours, a steady transition may be attained, which simultaneously improves stiffening of the edges at the ends.[0013]
  • Further advantages and details of the present invention shall be explained with reference to the examples of embodiments depicted in drawing FIGS. [0014] 3 to 8.
  • Depicted are in [0015]
  • drawing FIGS. 3, 4 and [0016] 8, solutions with one flow body in each instance,
  • drawing FIGS. 5, 6 and [0017] 7, solutions with several flow bodies in each instance.
  • In the example of an embodiment in accordance with drawing FIGS. 3 and 4 (drawing FIG. 4 again depicts a developed view of the rotor [0018] 5) the rotor hubs 6, 7 have been extended beyond the plane 14 of the inlet cross-sections 15, 16 by an amount equivalent to the width of one or two thread ridges. Said rotor hubs serve the purpose of supporting one each flow body 21, 22 each located above the inlet cross-sections 15 respectively 16, also limiting the pump chamber on the side of the hub. This is approximately an extension of the thread ridges 8, 9 with reduced ridge width (approximately ⅓). In the instance—as depicted—of single threads, each flow body extends over just under less than half the rotor circumference and subsequently there is just over half the rotor circumference available to the open partial area. Turned by 180° with respect to each other, each of the flow bodies engages in each instance in a non-contact manner into the corresponding gap of the adjacent rotor. The slope of the in each instance forerunning edges of the flow bodies 21, 22 increases slightly in the direction of the intake side. The area of the ends is rounded off. The gases flowing into the still open volume which is to be conveyed, are indicated in drawing FIG. 4 by arrows.
  • The areas of the face sides of the [0019] thread ridges 8, 9 running behind the flow body 21, 22, are equipped with the recesses 23 (rotor 4, not visible), 24. They delay sealing off of the pumped volumes and will ensure simultaneously that these are completely filled.
  • The [0020] flow body 21 respectively 22 in each instance, may be manufactured with its hub section as a separate part, and may be retrofitted to the cut off face surface of the screw. However, especially advantageous is an integral manufacture in which the hub section and the flow body are formed by milling, for example, and specifically from the remaining material which has been left over (depicted by dashed lines in drawing FIG. 4) in the production of the screw profile (by milling, spinning, rolling, turning etc.).
  • Drawing FIG. 5[0021] a depicts an embodiment corresponding to that of drawing FIG. 4 with the difference, that the width and pitch of the ridge 9 decrease in the direction of the pressure side. In an embodiment of this kind, the pressure side may be designed in accordance with drawing FIG. 5b. The hub 7 extends beyond the outlet cross section 29 by about four times the width of the thread ridge on the pressure side and supports a blade-like extension 25 of the thread 9. This extends with strongly increasing slope and ridge width in the direction of the pressure side over approximately 140°.
  • Drawing FIG. 6[0022] a depicts by way of a developed view, the rotor inlet of a further example of an embodiment for the rotor 5. The not depicted rotor 4 is designed accordingly. Ahead of the inlet cross section 16 there are located independent flow bodies 26, 27, 28 being independent of the thread ridge 9. These are supported at the hub 7 and exhibit approximately the shape of rotor blades, their slope increases in the direction of the intake side, specifically commencing approximately with the slope of thread ridge 9.
  • The drawing FIGS. 6[0023] b and 6 c depict two embodiments for the rotor outlet, depending on whether the thread 9 has a constant pitch and ridge width or a decreasing pitch and ridge width. On the pressure side, the hub 7 is in each instance extended beyond the outlet cross-section 29 and carries the blades 31, 32, 33 respectively 34, 35. Said blades are independent of thread 9 and have a slope which increases in the direction of the pressure side. In the embodiment in accordance with drawing FIG. 6b, the blades are designed to be approximately mirror symmetrical with respect to the blades 26, 27, 28. In the embodiment in accordance with drawing FIG. 6c, the ridge width of the blades 34, 35 increases in the direction of the pressure side. In these embodiments, the blades on the inlet side and the outlet side with their hub sections consist expediently of separately manufactured rings, which after having been fitted to the face side, are components of the rotors 4, 5. This solution allows to adapt the conditions for the inflowing flow—and under certain conditions—also the conditions for the outgoing flow in a simple manner, by exchanging the blade rings in accordance with customers requirements.
  • The flow bodies [0024] 25 (drawing FIG. 5b) and 34 (drawing FIG. 6c) on the pressure side have a relatively large volume. Thus in the outlet area of the pump a sufficient mass is available for balancing the rotors.
  • In the embodiment in accordance with drawing FIG. 7[0025] a, two flow bodies 36, 37 are provided. Flow body 36 is—substantially like in the embodiment in accordance with drawing FIGS. 3, 4—an extension of the thread ridge 8 but reduced in width (here approximately ⅕). The base of the blade shaped flow body 37 is located approximately at the centre of the inlet cross section 16. In an embodiment with a thread 9 of constant ridge width and pitch, the rotor outlet may be designed correspondingly (approximately a mirror image).
  • Drawing FIG. 7[0026] b depicts the rotor outlet in an embodiment with a thread 9, the pitch and ridge width of which decreases in the direction of the pressure side. In the area of the extension of the hub 7 beyond the outlet cross section 29, the pitch of the thread increases strongly whereby the ridge width is further reduced in the direction of the pressure side.
  • Finally, drawing FIG. 8 depicts by way of a perspective view an embodiment which substantially corresponds to the embodiment in accordance with drawing FIGS. 3, 4. The difference is, that the [0027] hubs 6, 7 only extended in the area of the flow bodies 21, 22. They extend in each instance only up to the inside edges of the respective flow bodies 21, 22.
  • It is expedient to design the flow bodies such that, be it with respect to their design, arrangement and/or mass, they simultaneously remove the imbalance of the [0028] screw rotors 4, 5. Beneficially, especially at the location where the arrangement of aerodynamically effective flow bodies is expedient, it is required also to add balancing masses. Great initial imbalances are thus avoided, involved balancing processes can be dispensed with. For this reason, the flow bodies may also be considered as balancing weights, being so designed that they improve the conditions for the inflow (respectively outflow) of the gases to be pumped, i.e. that they have the shape of flow bodies.

Claims (12)

1. Screw vacuum pump comprising two rotors (4, 5) which respectively have a hub (6, 7) and a thread (8, 9), additionally comprising a housing (2) wherein the rotors whose threads engage with each other are accommodated in such a way that they form, together with the housing, inlet cross sections (15, 16) on the inlet side thereof and form outlet cross sections (29) on the pressure side thereof causing gas to be conveyed from the inlet side to the pressure side during rotation of the rotors (4, 5), wherein the rotors (4, 5) are provided on the inlet side with flow bodies (21, 22; 26, 27, 28; 36, 37) which are arranged upstream from the inlet cross sections (15, 16) in such a manner that the conditions for the inflow of the gases to be conveyed to the inlet cross sections (15, 16) are improved.
2. Pump according to claim 1, wherein in the instance of multi-thread screws, at least one thread ridge is equipped with a flow body.
3. Pump according to claim 1, wherein the flow body extends in the instance of a single thread screw over 90° to 180°.
4. Pump according to one of the claims 1, 2 or 3, wherein the flow body (21, 22) substantially is an extension of the ridge (8, 9) with reduced ridge width.
5. Pump according to one of the claims 1 to 4, wherein there is located in the area of the respective inlet cross-sections at least one further flow body independent of thread ridge (8, 9), said flow body having the shape of the blade.
6. Pump according to claim 5, wherein the blades are curved such that they extend on the pressure side approximately in the direction of the thread ridges (8, 9) and are designed to be steeper on the intake side.
7. Pump according to one of the above claims, wherein in the area running behind the face side of the thread ridge (8, 9) there is present a recess (23, 24).
8. Pump according to one of the above claims, wherein the rotor outlet is equipped with corresponding flow bodies.
9. Pump according to one of the above claims, wherein the flow body/bodies (21, 22; 26, 27, 28; 31, 32, 33; 34, 35; 36, 37) and the corresponding hub section (6, 7) are fitted by way of a separate component to the face side respectively the rear side of the rotor (4, 5).
10. Pump according to one of the above claims, wherein the flow bodies with respect to their design, arrangement and/or mass are so designed that they substantially remove the imbalance of the related rotor (4, 5)
11. Screw vacuum pump comprising two rotors (4, 5) which respectively have a hub (6, 7) and a thread (8, 9), additionally comprising a housing (2) wherein the rotors whose threads engage with each other are accommodated in such a way that they form, together with the housing, inlet cross sections (15, 16) on the inlet side thereof and form outlet cross sections (29) on the pressure side thereof causing gas to be conveyed from the inlet side to the pressure side during rotation of the rotors (4, 5), wherein the rotors (4, 5) are provided on the pressure side and/or inlet side with balancing weights (21, 22; 26, 27, 28; 31, 32, 33; 34, 35; 36, 37) which are designed in such a manner that they improve the conditions for the inflow (respectively outflow) of the gases to be conveyed.
12. Pump according to claim 11 wherein the balancing weights exhibit the shape of flow bodies in accordance with one of the claims 1 to 10.
US10/469,422 2001-03-09 2002-01-09 Screw vacuum pump comprising additional flow bodies Abandoned US20040067149A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10111525A DE10111525A1 (en) 2001-03-09 2001-03-09 Screw vacuum pump with rotor inlet and rotor outlet
DE10111525.3 2001-03-09
PCT/EP2002/000122 WO2002073037A1 (en) 2001-03-09 2002-01-09 Screw vacuum pump comprising additional flow bodies

Publications (1)

Publication Number Publication Date
US20040067149A1 true US20040067149A1 (en) 2004-04-08

Family

ID=7676962

Family Applications (1)

Application Number Title Priority Date Filing Date
US10/469,422 Abandoned US20040067149A1 (en) 2001-03-09 2002-01-09 Screw vacuum pump comprising additional flow bodies

Country Status (5)

Country Link
US (1) US20040067149A1 (en)
EP (1) EP1366296B1 (en)
JP (1) JP4200007B2 (en)
DE (2) DE10111525A1 (en)
WO (1) WO2002073037A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130129553A1 (en) * 2011-11-22 2013-05-23 Vilter Manufacturing Llc Single screw compressor with high output

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2053146B1 (en) 2006-08-07 2016-08-31 Seiko Instruments Inc. Method for manufacturing electroformed mold, electroformed mold, and method for manufacturing electroformed parts
DE102010019402A1 (en) * 2010-05-04 2011-11-10 Oerlikon Leybold Vacuum Gmbh Screw vacuum pump

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2994562A (en) * 1959-02-05 1961-08-01 Warren Pumps Inc Rotary screw pumping of thick fibrous liquid suspensions
US5352097A (en) * 1992-01-23 1994-10-04 Matsushita Electric Industrial Co., Ltd. Vacuum pump
US5478210A (en) * 1992-01-31 1995-12-26 Matsushita Electric Industrial Co., Ltd. Multi-stage vacuum pump
US5797735A (en) * 1995-04-03 1998-08-25 Tochigi Fuji Sangyo Kabushiki Kaisha Fluid machine having balance correction
US6139297A (en) * 1995-12-11 2000-10-31 Ateliers Busch S.A. Double worm system
US6168374B1 (en) * 1996-08-16 2001-01-02 Leybold Vakuum Gmbh Friction vacuum pump
US6497563B1 (en) * 1998-08-29 2002-12-24 Ralf Steffens Dry-compressing screw pump having cooling medium through hollow rotor spindles
US6544020B1 (en) * 1997-10-10 2003-04-08 Leybold Vakuum Gmbh Cooled screw vacuum pump

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE7611162U1 (en) * 1976-04-09 1978-04-20 Kaeser Kompressoren Gmbh, 8630 Coburg DOUBLE SCREW SCREW COMPRESSOR
DE3791053T1 (en) * 1987-12-25 1989-12-21 Valerij Borisovic Solochov VACUUM MOLECULAR PUMP
CA2058325A1 (en) * 1990-12-24 1992-06-25 Mark E. Baran Positive displacement pumps
JPH04370379A (en) * 1991-06-17 1992-12-22 Seiko Seiki Co Ltd Dry vacuum pump
DE4242406C2 (en) * 1992-12-08 2002-10-31 Grasso Gmbh Refrigeration Tech Arrangement in a screw compressor

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2994562A (en) * 1959-02-05 1961-08-01 Warren Pumps Inc Rotary screw pumping of thick fibrous liquid suspensions
US5352097A (en) * 1992-01-23 1994-10-04 Matsushita Electric Industrial Co., Ltd. Vacuum pump
US5478210A (en) * 1992-01-31 1995-12-26 Matsushita Electric Industrial Co., Ltd. Multi-stage vacuum pump
US5797735A (en) * 1995-04-03 1998-08-25 Tochigi Fuji Sangyo Kabushiki Kaisha Fluid machine having balance correction
US6139297A (en) * 1995-12-11 2000-10-31 Ateliers Busch S.A. Double worm system
US6168374B1 (en) * 1996-08-16 2001-01-02 Leybold Vakuum Gmbh Friction vacuum pump
US6544020B1 (en) * 1997-10-10 2003-04-08 Leybold Vakuum Gmbh Cooled screw vacuum pump
US6497563B1 (en) * 1998-08-29 2002-12-24 Ralf Steffens Dry-compressing screw pump having cooling medium through hollow rotor spindles

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130129553A1 (en) * 2011-11-22 2013-05-23 Vilter Manufacturing Llc Single screw compressor with high output
CN103133348A (en) * 2011-11-22 2013-06-05 爱尔特制造有限公司 Single screw compressor with high output
US9057373B2 (en) * 2011-11-22 2015-06-16 Vilter Manufacturing Llc Single screw compressor with high output

Also Published As

Publication number Publication date
EP1366296A1 (en) 2003-12-03
EP1366296B1 (en) 2006-11-22
DE50208778D1 (en) 2007-01-04
WO2002073037A1 (en) 2002-09-19
JP2004522038A (en) 2004-07-22
DE10111525A1 (en) 2002-09-12
JP4200007B2 (en) 2008-12-24

Similar Documents

Publication Publication Date Title
US8128356B2 (en) Mixed flow turbine
CN102333961B (en) Impeller of centrifugal compressor
CN107304774B (en) Compressor
US9897101B2 (en) Impeller for centrifugal rotary machine, and centrifugal rotary machine
KR100730840B1 (en) Centrifugal compressor and method of manufacturing impeller
JP4668413B2 (en) Turbomachine impeller
JP5762641B2 (en) Mixed flow turbine
US7604458B2 (en) Axial flow pump and diagonal flow pump
RU2580237C2 (en) Impeller for centrifugal pumps
RU2363861C2 (en) Axial fan
KR102674948B1 (en) Steam turbine stator blade, steam turbine and steam turbine stator blade manufacturing method
US20040067149A1 (en) Screw vacuum pump comprising additional flow bodies
JP3048583B2 (en) Pump stage for high vacuum pump
JPWO2020012648A1 (en) Centrifugal compressor and turbocharger
US4527964A (en) Scroll-type pump
JP3957761B2 (en) Friction vacuum pump
US20200386241A1 (en) Diffuser vane and centrifugal compressor
CN109804148B (en) Variable nozzle unit and supercharger
US20070274846A1 (en) Fuel Pump
US8469669B2 (en) Cover disk for a closed impeller
JPH01318790A (en) Flashing vane of multistage pump
JP2568209Y2 (en) Pump with spiral wings
EP3312428B1 (en) Inducer and pump
JP2012102745A (en) Diagonal flow turbine
US5342168A (en) Adjustable radial-flow diffuser

Legal Events

Date Code Title Description
AS Assignment

Owner name: LEYBOLD VAKUUM GMBH, GERMANY

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:GIEBMANNS, WOLFGANG;DREIFERT, THOMAS;REEL/FRAME:014806/0904

Effective date: 20030827

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION