DE50208778D1 - SCREW VACUUM PUMP WITH ADDITIONAL FLOW BODIES - Google Patents

SCREW VACUUM PUMP WITH ADDITIONAL FLOW BODIES

Info

Publication number
DE50208778D1
DE50208778D1 DE50208778T DE50208778T DE50208778D1 DE 50208778 D1 DE50208778 D1 DE 50208778D1 DE 50208778 T DE50208778 T DE 50208778T DE 50208778 T DE50208778 T DE 50208778T DE 50208778 D1 DE50208778 D1 DE 50208778D1
Authority
DE
Germany
Prior art keywords
vacuum pump
additional flow
screw vacuum
flow bodies
bodies
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE50208778T
Other languages
German (de)
Inventor
Wolfgang Giebmanns
Thomas Dreifert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Priority to DE50208778T priority Critical patent/DE50208778D1/en
Application granted granted Critical
Publication of DE50208778D1 publication Critical patent/DE50208778D1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F04C29/122—Arrangements for supercharging the working space
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/084—Toothed wheels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0021—Systems for the equilibration of forces acting on the pump
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
DE50208778T 2001-03-09 2002-01-09 SCREW VACUUM PUMP WITH ADDITIONAL FLOW BODIES Expired - Lifetime DE50208778D1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE50208778T DE50208778D1 (en) 2001-03-09 2002-01-09 SCREW VACUUM PUMP WITH ADDITIONAL FLOW BODIES

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10111525A DE10111525A1 (en) 2001-03-09 2001-03-09 Screw vacuum pump with rotor inlet and rotor outlet
DE50208778T DE50208778D1 (en) 2001-03-09 2002-01-09 SCREW VACUUM PUMP WITH ADDITIONAL FLOW BODIES
PCT/EP2002/000122 WO2002073037A1 (en) 2001-03-09 2002-01-09 Screw vacuum pump comprising additional flow bodies

Publications (1)

Publication Number Publication Date
DE50208778D1 true DE50208778D1 (en) 2007-01-04

Family

ID=7676962

Family Applications (2)

Application Number Title Priority Date Filing Date
DE10111525A Withdrawn DE10111525A1 (en) 2001-03-09 2001-03-09 Screw vacuum pump with rotor inlet and rotor outlet
DE50208778T Expired - Lifetime DE50208778D1 (en) 2001-03-09 2002-01-09 SCREW VACUUM PUMP WITH ADDITIONAL FLOW BODIES

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE10111525A Withdrawn DE10111525A1 (en) 2001-03-09 2001-03-09 Screw vacuum pump with rotor inlet and rotor outlet

Country Status (5)

Country Link
US (1) US20040067149A1 (en)
EP (1) EP1366296B1 (en)
JP (1) JP4200007B2 (en)
DE (2) DE10111525A1 (en)
WO (1) WO2002073037A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008018261A1 (en) 2006-08-07 2008-02-14 Seiko Instruments Inc. Method for manufacturing electroformed mold, electroformed mold, and method for manufacturing electroformed parts
DE102010019402A1 (en) * 2010-05-04 2011-11-10 Oerlikon Leybold Vacuum Gmbh Screw vacuum pump
US9057373B2 (en) * 2011-11-22 2015-06-16 Vilter Manufacturing Llc Single screw compressor with high output

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2994562A (en) * 1959-02-05 1961-08-01 Warren Pumps Inc Rotary screw pumping of thick fibrous liquid suspensions
DE7611162U1 (en) * 1976-04-09 1978-04-20 Kaeser Kompressoren Gmbh, 8630 Coburg DOUBLE SCREW SCREW COMPRESSOR
JPH02502743A (en) * 1987-12-25 1990-08-30 ショロホフ　ヴァレリイ　ボリソヴィチ molecular vacuum pump
CA2058325A1 (en) * 1990-12-24 1992-06-25 Mark E. Baran Positive displacement pumps
JPH04370379A (en) * 1991-06-17 1992-12-22 Seiko Seiki Co Ltd Dry vacuum pump
JPH05195957A (en) * 1992-01-23 1993-08-06 Matsushita Electric Ind Co Ltd Vacuum pump
JPH05272478A (en) * 1992-01-31 1993-10-19 Matsushita Electric Ind Co Ltd Vacuum pump
DE4242406C2 (en) * 1992-12-08 2002-10-31 Grasso Gmbh Refrigeration Tech Arrangement in a screw compressor
US5797735A (en) * 1995-04-03 1998-08-25 Tochigi Fuji Sangyo Kabushiki Kaisha Fluid machine having balance correction
CZ289289B6 (en) * 1995-12-11 2001-12-12 Ateliers Busch S. A. Double worm system
DE19632874A1 (en) * 1996-08-16 1998-02-19 Leybold Vakuum Gmbh Friction vacuum pump
DE19745616A1 (en) * 1997-10-10 1999-04-15 Leybold Vakuum Gmbh Cooling system for helical vacuum pump
DE19839501A1 (en) * 1998-08-29 2000-03-02 Leybold Vakuum Gmbh Dry compacting screw pump

Also Published As

Publication number Publication date
JP4200007B2 (en) 2008-12-24
DE10111525A1 (en) 2002-09-12
EP1366296A1 (en) 2003-12-03
WO2002073037A1 (en) 2002-09-19
EP1366296B1 (en) 2006-11-22
US20040067149A1 (en) 2004-04-08
JP2004522038A (en) 2004-07-22

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition