EP1287372A2 - Verfahren zur herstellung einer wheatstonebrücke, beinhaltend brückenelemente bestehend aus einem spin-valve-system - Google Patents
Verfahren zur herstellung einer wheatstonebrücke, beinhaltend brückenelemente bestehend aus einem spin-valve-systemInfo
- Publication number
- EP1287372A2 EP1287372A2 EP01960282A EP01960282A EP1287372A2 EP 1287372 A2 EP1287372 A2 EP 1287372A2 EP 01960282 A EP01960282 A EP 01960282A EP 01960282 A EP01960282 A EP 01960282A EP 1287372 A2 EP1287372 A2 EP 1287372A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- bridge elements
- bridge
- surface areas
- adjacent
- elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/096—Magnetoresistive devices anisotropic magnetoresistance sensors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/01—Manufacture or treatment
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12375—All metal or with adjacent metals having member which crosses the plane of another member [e.g., T or X cross section, etc.]
Definitions
- Wheatstone bridge comprising bridge elements consisting of a spin valve system, and a method for their production
- the invention relates to a Wheatstone bridge, comprising conventionally connected bridge elements, consisting of a spin valve system, and to a method for their production.
- Such Wheatstone bridges are preferably used as sensors for measuring small magnetic fields and used as non-contact angle detectors.
- magnetoresistive strip conductors are used according to the prior art, which are anisotropically connected with respect to their magnetoresistive properties and generally as a Wheatstone bridge (cf. for example DD 256 628, DE 43 17 512 AI).
- the magnetoresistive strip conductors used here have anisotropic changes in resistance with respect to an external magnetic field, which is a desirable property for the intended use, for example as an angle encoder.
- such strip lines for example based on Permalloy, only show maximum changes in resistance of approximately 2-3%, which is why a relatively high level of electronic and manufacturing effort has to be carried out.
- Magnetoresistive sensors are designed in a known manner in the form of Wheatstone bridges in order to minimize or totally suppress environmental influences such as temperature changes on the measurement signal.
- the construction of such Wheatstone bridges presupposes that adjacent bridge branches of a half-bridge behave in the opposite direction to the magnetoresistive change in resistance when exposed to an external magnetic field.
- Layer systems with a so-called spin valve effect are also known, which are preferably used for the detection of small fields or also for angle detection (cf., for example, DE 43 01 704 AI).
- a common feature of these layer systems is that they consist of magnetic individual layers in which, ideally, a sensor layer can be easily rotated magnetically and a bias layer is magnetically immovable. So far, these layers can only be operated as individual magnetoresistive strip sensors, which means that they are comparatively high Signals can be obtained, but also all other disturbances, such as temperature fluctuations, influence the measurement signal.
- a solution to remedy this problem is described in DE 196 49 265 AI, which describes a GMR sensor with a Wheatstone bridge, in which spin valve layer systems are used for the individual bridge elements.
- this solution requires a relatively complicated layout of the Wheatstone bridges arranged on relatively large chip areas (1 ... 4 mmr). Due to the layout required there, further miniaturization is not possible with this solution.
- the layer structure of a spin valve system can be designed as a GMR layer system (using giant magnetoresistive materials) or as a TMR layer system (tunnel layer system).
- the layer system consists of at least one antiferromagnetic layer, a ferromagnetic layer pinned by the antiferromagnet via an exchange bias, which can itself be part of a so-called artificial antiferromagnet (AAF), at least one flux guide layer and a conductive layer arranged between these ferromagnetic layers GMR layer systems or oxide layer for tunnel arrangements, a magnetoresistive sensor system with at least two sensor elements being able to be formed by means of this layer structure. For applications, these sensor elements are usually arranged in Wheatstone bridges.
- bias magnetization direction (BMR) is usually set by applying a homogeneous magnetic field during the deposition of the magnetic layer system on a 3-6 "Si wafer. This has the consequence that the BMR is the same everywhere.
- patent DE 198 30 343 Cl shows how, in the case of the use of combinations of antiferromagnetic layers and layer systems which are designed as artificial antiferromagnets, an antiparallel orientation of the BMR can be achieved by a suitable choice of the layers.
- This proposal therefore proceeds from an identical layer structure for all sensor elements or for all areas that are to form sensor elements. This generally creates harmful asymmetries in terms of resistance and, above all, the temperature coefficient of resistance, which has a detrimental effect on operating behavior.
- a second possibility is to build the Wheatstone bridges hybrid in such a way that the bridge branches consist of elements that are rotated geometrically by 180 ° in order to achieve an anti-parallel position of the BMR.
- the former method requires suitable additional layers with suitable properties in the AAF.
- the latter solution means a considerable additional effort in the production of the Wheatstone bridges, namely additional assembly effort and additional effort for the wiring, which in addition to higher costs also results in a deterioration in reliability.
- the invention has for its object to provide a Wheatstone bridge, including bridge elements, consisting of a spin valve system, and a method for their production, which create a Wheatstone bridge while maintaining an initially uniform layer structure and a uniform bias magnetization (BMR), in which each adjacent half-bridges each have an anti-parallel BMR, the miniaturization of the Wheatstone bridge should not be limited by a circuitry complicated layout.
- bridge elements consisting of a spin valve system
- BMR uniform bias magnetization
- FIG. 1b shows a Wheatstone bridge with the specified direction of magnetization of the bridge elements during an ion implantation
- FIG. 1c shows a Wheatstone bridge with the specified direction of magnetization of the bridge elements after the ion implantation
- FIG Spin valve layer system of the same
- FIG. 2b shows a section of a wafer covered with
- FIG. 2c shows a detail from a wafer according to FIG. 2b with surface elements and the direction of magnetization according to FIG.
- a substrate S is initially assumed, which is initially provided with a spin valve layer system in the usual way.
- an exemplary layer sequence of permalloy 14, copper 13, cobalt 12, and an antiferromagnetic layer 11, which consists of FeMn, NiO, PtMn, NiMn or the like. can exist, a GMR spin valve layer system is formed.
- a homogeneous magnetic field is applied during the production of the layer pack, so that a uniformly oriented magnetization ml is "frozen" (pinned) in the boundary layer between the layers 11 and 12.
- a TMR spin valve layer system is implemented, in which the same layers 11, 12, 14 are provided, but the layer 13 is formed by a tunnel layer, for example made of Al2O3. It is also within the scope of the invention to form the layer 12 as an artificial antiferromagnet (AAF: artificial antiferromagnet) (cf. FIG. 3), so that an AF / AAF layer system is formed according to FIG. Further customary protective layers, for example made of Ta, which cover the layer systems mentioned, as well as any necessary adhesive layers, which are deposited directly on the substrate S before said layer systems are deposited, are not included for reasons of clarity.
- AAF artificial antiferromagnet
- 80,000 such surface areas are provided on a 6 "silicon wafer, so that 20,000 Wheatstone bridges, each taking up an area of 0.5 mm 2 , can be produced at the same time.
- the wiring of the individual Bridge elements can take place before the deposition of the spin valve layer systems mentioned, or in a later process step.
- the thicknesses of the individual layers 11, 12, 13, 14 are between 0.5 and 50 nm, depending on the embodiment.
- a silicon wafer provided with a 1.5 ⁇ m thick S1O2 and a 5 nm thick Ta layer can be a typical one 3 with a 5 nm thick Py layer, a 3 nm thick Cu layer, a 4 nm thick Co layer, a 20 nm thick FeMn layer (AF) and a 5 nm thick Ta protective layer, not shown be provided.
- AF FeMn layer
- Ta protective layer not shown be provided.
- the bridge elements 2, 4 or surface areas 20, 40 are provided with a cover 5, which is made of a structured photoresist with a thickness of 10 to be determined depending on the ion type and energy nm to 6 ⁇ m, in the example 1.5 ⁇ m (cf. FIG. 1b), or by a mask (not shown) which is provided with regions which are transparent and non-transparent for ions or a corresponding shadow mask, which in the example in each case represents the bridge elements 1, 3 or surface elements 10, 30 leaves free and only covers the areas 2, 4 or 20, 40, provided.
- a cover 5 which is made of a structured photoresist with a thickness of 10 to be determined depending on the ion type and energy nm to 6 ⁇ m, in the example 1.5 ⁇ m (cf. FIG. 1b), or by a mask (not shown) which is provided with regions which are transparent and non-transparent for ions or a corresponding shadow mask, which in the example in each case represents the bridge elements 1, 3 or surface elements 10, 30 leaves free and only covers the
- the special thickness of the cover layer or the masking areas of the shadow mask depends on the energy of the ions to be implanted, which can be predetermined in a specific system; Thicknesses mentioned can therefore be subject to greater fluctuations, but must be set at least so large that they are not penetrated by the ions.
- the wafers are then subjected to an ion implantation in an ion beam system with a dose of 10 12 to 10 16 atoms / cm 2 with, for example, noble gas ions (He, Ne, Ar), with other doping ions, such as Ga, P or B, used for semiconductor doping processes ions that are unusual for this purpose can also be considered, bombarded with an energy of .JOOO keV, a homogeneous magnetic field, in the example of a thickness of 0.2 T, being applied to the substrate at the same time, which changes the direction of magnetization in the pinned ferromagnetic layer 12 by 180 ° deflects or regarding Aligns the magnetization direction to be aligned ferromagnetic layer 12 (see. Fig.
- Non-adjacent bridge elements 1, 3 or 2, 4 are below the pinned ferromagnetic layer 12 and possibly into the substrate S, but not within the ferromagnetic layer 12, with a doping of implantable ions I with a proportion between 10 12 to 5 • 10 16 atoms / cm 2 , as is indicated schematically in FIGS. 3, 4 and 6.
- a scanned ion fine beam can also be used for ion implantation, which only detects the bridge elements or surface areas whose pinned magnetization direction ml is to be rotated.
Abstract
Description
Claims
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10028640A DE10028640B4 (de) | 2000-06-09 | 2000-06-09 | Wheatstonebrücke, beinhaltend Brückenelemente, bestehend aus einem Spin-Valve-System, sowie ein Verfahren zu deren Herstellung |
DE10028640 | 2000-06-09 | ||
PCT/EP2001/006486 WO2001094963A2 (de) | 2000-06-09 | 2001-06-07 | Wheatstonebrücke, beinhaltend brückenelemente, bestehend aus einem spin-valve-system, sowie ein verfahren zu deren herstellung |
Publications (1)
Publication Number | Publication Date |
---|---|
EP1287372A2 true EP1287372A2 (de) | 2003-03-05 |
Family
ID=7645271
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP01960282A Withdrawn EP1287372A2 (de) | 2000-06-09 | 2001-06-07 | Verfahren zur herstellung einer wheatstonebrücke, beinhaltend brückenelemente bestehend aus einem spin-valve-system |
Country Status (4)
Country | Link |
---|---|
US (1) | US6882145B2 (de) |
EP (1) | EP1287372A2 (de) |
DE (1) | DE10028640B4 (de) |
WO (1) | WO2001094963A2 (de) |
Families Citing this family (42)
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DE10214946B4 (de) | 2002-04-04 | 2006-01-19 | "Stiftung Caesar" (Center Of Advanced European Studies And Research) | TMR-Sensor |
DE10217593C1 (de) * | 2002-04-19 | 2003-10-16 | Siemens Ag | Schaltungsteil mit mindestens zwei magnetoresistiven Schichtelementen mit invertierten Ausgangssignalen |
DE10217598C1 (de) * | 2002-04-19 | 2003-10-16 | Siemens Ag | Schaltungseinrichtung mit mindestens zwei invertierte Ausgangssignale erzeugenden magnetoresistiven Schaltungselementen |
DE10222395B4 (de) * | 2002-05-21 | 2010-08-05 | Siemens Ag | Schaltungseinrichtung mit mehreren TMR-Sensorelementen |
JP4117175B2 (ja) * | 2002-10-03 | 2008-07-16 | アルプス電気株式会社 | 回転角検出装置 |
US7259545B2 (en) * | 2003-02-11 | 2007-08-21 | Allegro Microsystems, Inc. | Integrated sensor |
US7009268B2 (en) * | 2004-04-21 | 2006-03-07 | Hewlett-Packard Development Company, L.P. | Wheatstone bridge scheme for sensor |
US7777607B2 (en) * | 2004-10-12 | 2010-08-17 | Allegro Microsystems, Inc. | Resistor having a predetermined temperature coefficient |
SE529125C2 (sv) * | 2005-03-02 | 2007-05-08 | Tetra Laval Holdings & Finance | Sätt och anordning för att bestämma läget hos ett förpackningsmaterial med magnetiska markeringar |
JP2007024598A (ja) * | 2005-07-13 | 2007-02-01 | Denso Corp | 磁気センサ |
JP4573736B2 (ja) * | 2005-08-31 | 2010-11-04 | 三菱電機株式会社 | 磁界検出装置 |
US7768083B2 (en) * | 2006-01-20 | 2010-08-03 | Allegro Microsystems, Inc. | Arrangements for an integrated sensor |
FR2899377B1 (fr) * | 2006-03-30 | 2008-08-08 | Centre Nat Rech Scient | Procede de realisation de structures en multicouches a proprietes controlees |
DE102006039490A1 (de) * | 2006-08-21 | 2008-03-27 | Institut für Physikalische Hochtechnologie e.V. | Magnetischer Sensor und Verfahren zu dessen Herstellung |
WO2008039743A2 (en) * | 2006-09-25 | 2008-04-03 | Massachusetts Institute Of Technology | Wheatstone-bridge magnetoresistive device |
GB2446146B (en) * | 2007-01-31 | 2009-11-18 | Gm Global Tech Operations Inc | Arrangement of a two stage turbocharger system for an internal combustion engine |
US7795862B2 (en) | 2007-10-22 | 2010-09-14 | Allegro Microsystems, Inc. | Matching of GMR sensors in a bridge |
US7816905B2 (en) * | 2008-06-02 | 2010-10-19 | Allegro Microsystems, Inc. | Arrangements for a current sensing circuit and integrated current sensor |
JP5662357B2 (ja) * | 2009-03-10 | 2015-01-28 | ザ ボード オブ トラスティーズ オブ ザ レランド スタンフォード ジュニア ユニバーシティー | 磁気抵抗センサにおける温度及びドリフト補償 |
JP4947321B2 (ja) * | 2009-07-30 | 2012-06-06 | Tdk株式会社 | 回転角度検出装置 |
DE102010018874A1 (de) * | 2010-04-30 | 2011-11-03 | Siemens Aktiengesellschaft | Wheatstonebrücke mit XMR-Spinvalve-Systemen |
DE102010041646A1 (de) | 2010-09-29 | 2012-03-29 | Siemens Aktiengesellschaft | Schaltungsanordnung zum Erfassen eines Magnetfelds und Verfahren zum Ermitteln dessen magnetischer Feldstärke |
US8797024B2 (en) | 2011-02-01 | 2014-08-05 | Infineon Technologies Ag | Sensor |
US8416613B1 (en) | 2011-04-27 | 2013-04-09 | The United States Of America As Represented By The Secretary Of The Navy | Magnetoresistive bridge nonvolatile memory device |
US8952686B2 (en) * | 2011-10-25 | 2015-02-10 | Honeywell International Inc. | High current range magnetoresistive-based current sensor |
JP6064816B2 (ja) * | 2013-07-17 | 2017-01-25 | 株式会社デンソー | 回転センサ |
CN103592608B (zh) * | 2013-10-21 | 2015-12-23 | 江苏多维科技有限公司 | 一种用于高强度磁场的推挽桥式磁传感器 |
JP2015129700A (ja) * | 2014-01-08 | 2015-07-16 | アルプス電気株式会社 | 磁界回転検知センサ及び磁気エンコーダ |
US9625281B2 (en) * | 2014-12-23 | 2017-04-18 | Infineon Technologies Ag | Fail-safe operation of an angle sensor with mixed bridges having separate power supplies |
US9841469B2 (en) | 2016-01-26 | 2017-12-12 | Nxp Usa, Inc. | Magnetic field sensor with multiple sense layer magnetization orientations |
US9897667B2 (en) | 2016-01-26 | 2018-02-20 | Nxp Usa, Inc. | Magnetic field sensor with permanent magnet biasing |
US10545196B2 (en) | 2016-03-24 | 2020-01-28 | Nxp Usa, Inc. | Multiple axis magnetic sensor |
US10145907B2 (en) | 2016-04-07 | 2018-12-04 | Nxp Usa, Inc. | Magnetic field sensor with permanent magnet biasing |
US9933496B2 (en) * | 2016-04-21 | 2018-04-03 | Nxp Usa, Inc. | Magnetic field sensor with multiple axis sense capability |
US10901050B2 (en) | 2017-12-21 | 2021-01-26 | Isentek Inc. | Magnetic field sensing device including magnetoresistor wheatstone bridge |
US10935612B2 (en) | 2018-08-20 | 2021-03-02 | Allegro Microsystems, Llc | Current sensor having multiple sensitivity ranges |
CN210108386U (zh) * | 2019-06-12 | 2020-02-21 | 芯海科技(深圳)股份有限公司 | 一种传感装置和电子设备 |
US11385306B2 (en) | 2019-08-23 | 2022-07-12 | Western Digital Technologies, Inc. | TMR sensor with magnetic tunnel junctions with shape anisotropy |
US11169226B2 (en) * | 2019-08-27 | 2021-11-09 | Western Digital Technologies, Inc. | Magnetic sensor bias point adjustment method |
US11170806B2 (en) * | 2019-12-27 | 2021-11-09 | Western Digital Technologies, Inc. | Magnetic sensor array with single TMR film plus laser annealing and characterization |
US11187764B2 (en) | 2020-03-20 | 2021-11-30 | Allegro Microsystems, Llc | Layout of magnetoresistance element |
US11567108B2 (en) | 2021-03-31 | 2023-01-31 | Allegro Microsystems, Llc | Multi-gain channels for multi-range sensor |
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KR940004986B1 (ko) * | 1984-08-27 | 1994-06-09 | 가부시기가이샤 히다찌세이사꾸쇼 | 자성막의 제조방법 및 그것을 사용한 자기헤드 |
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DE19532674C1 (de) * | 1995-09-05 | 1996-11-07 | Inst Physikalische Hochtech Ev | Drehwinkelgeber unter Verwendung von Giant Magnetowiderstandsmaterialien |
WO1998001762A2 (en) | 1996-07-05 | 1998-01-15 | Philips Electronics N.V. | A magnetic field sensor and a method of manufacturing such a sensor |
DE19649265C2 (de) * | 1996-11-28 | 2001-03-15 | Inst Physikalische Hochtech Ev | GMR-Sensor mit einer Wheatstonebrücke |
EP0855599A3 (de) | 1997-01-24 | 2001-05-02 | Siemens Aktiengesellschaft | Elektronischer Kompass |
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DE19830343C1 (de) * | 1998-07-07 | 2000-04-06 | Siemens Ag | Verfahren zur Herstellung eines Schichtaufbaus umfassend ein AAF-System sowie magnetoresistive Sensorsysteme |
EP1046048A1 (de) * | 1998-08-14 | 2000-10-25 | Koninklijke Philips Electronics N.V. | Magnetfeldfühler mit einem spin-tunnel-sperrschichtelement |
DE60037790T2 (de) * | 1999-06-18 | 2009-01-08 | Koninklijke Philips Electronics N.V. | Magnetisches messsystem mit irreversibler charakteristik, sowie methode zur erzeugung, reparatur und verwendung eines solchen systems |
US6465053B1 (en) * | 1999-06-18 | 2002-10-15 | Koninkl Philips Electronics Nv | Method for manufacturing a magnetic device |
-
2000
- 2000-06-09 DE DE10028640A patent/DE10028640B4/de not_active Expired - Fee Related
-
2001
- 2001-06-07 WO PCT/EP2001/006486 patent/WO2001094963A2/de not_active Application Discontinuation
- 2001-06-07 EP EP01960282A patent/EP1287372A2/de not_active Withdrawn
- 2001-06-07 US US10/297,644 patent/US6882145B2/en not_active Expired - Fee Related
Non-Patent Citations (1)
Title |
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See references of WO0194963A2 * |
Also Published As
Publication number | Publication date |
---|---|
DE10028640A1 (de) | 2001-12-20 |
US20040023064A1 (en) | 2004-02-05 |
US6882145B2 (en) | 2005-04-19 |
WO2001094963A2 (de) | 2001-12-13 |
DE10028640B4 (de) | 2005-11-03 |
WO2001094963A3 (de) | 2002-04-04 |
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