EP1259664A2 - Procede de croissance de retrecissement regule pour silicium monocristallin - Google Patents

Procede de croissance de retrecissement regule pour silicium monocristallin

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Publication number
EP1259664A2
EP1259664A2 EP01914414A EP01914414A EP1259664A2 EP 1259664 A2 EP1259664 A2 EP 1259664A2 EP 01914414 A EP01914414 A EP 01914414A EP 01914414 A EP01914414 A EP 01914414A EP 1259664 A2 EP1259664 A2 EP 1259664A2
Authority
EP
European Patent Office
Prior art keywords
neck
less
rate
diameter
length
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP01914414A
Other languages
German (de)
English (en)
Inventor
Hiroyo MEMC Electronic Materials Inc. HAGA
Makoto MEMC Electronic Materials Inc. KOJIMA
Shigemi MEMC Electronic Materials Inc. SAGA
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SunEdison Inc
Original Assignee
SunEdison Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SunEdison Inc filed Critical SunEdison Inc
Publication of EP1259664A2 publication Critical patent/EP1259664A2/fr
Withdrawn legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20—Controlling or regulating
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20—Controlling or regulating
    • C30B15/22—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal

Definitions

  • the present invention generally relates to the preparation of semiconductor grade single crystal silicon, used m the manufacture of electronic components. More particularly, the present invention relates to a process for preparing a single crystal silicon ingot having a large diameter, m accordance with the Czochralski method, wherein the pull rate is varied during growth of a neck portion of the ingot m order to achieve dislocation-free growth over a reduced axial length.
  • Czochralski Czochralski
  • the conventional method of eliminating dislocations within a silicon single crystal involves growing a neck having a small diameter (e.g., 2 to 4 mm) at a high crystal pull rate (e.g., as high as 6 mm/mm.), to completely eliminate dislocations before initiating growth of the mam body of crystal .
  • a small diameter e.g., 2 to 4 mm
  • a high crystal pull rate e.g., as high as 6 mm/mm.
  • dislocations can be eliminated m these small diameter necks after approximately 100 mm of neck is grown.
  • the diameter of the crystal is enlarged, forming a crown or taper portion, until reaching the desired diameter of the cylindrical main body.
  • the cylindrical mam body of the crystal is then grown to have an approximately constant diameter by controlling the pull rate and the melt temperature while compensating for the decreasing melt level.
  • the neck which is the weakest part of the silicon single crystal, can fracture during crystal growth, causing the body of crystal to drop into the crucible.
  • conventional crystals having a Dash neck are typically grown to a weight of 100 kg or less to minimize stress on the neck.
  • the semiconductor industry has created an ever- increasing demand for larger silicon wafers of a high quality.
  • more highly integrated semiconductor devices have resulted increased chip areas and a demand for the production of silicon wafers having a diameter of 200 mm (8 inches) to 300 mm (12 inches) or more. This has resulted the need for more effective neck growth processes which enable the elimination of dislocations and which prevent neck fractures, while supporting the growth of single crystal silicon ingots weighing up to 300 kg or more.
  • a general solution for preventing neck fractures m larger crystals is to increase the neck diameter.
  • large diameter necks are generally undesirable, as they require larger seed crystals, which m turn produce a higher density of slip dislocations when contacted with the silicon melt.
  • larger diameter neck portions require increased length, typically 150 mm or more, and thus additional process time, to effectively eliminate slip dislocations.
  • Japanese laid- open application (Kokai) No. 4-104988 proposes a process using a seed crystal having a unique, conical shape at its apex.
  • the unique seed crystal is complicated and expensive to process.
  • the seed crystal is unique, a new seed crystal is needed for each crystal pull, regardless of whether dislocation-free growth was achieved. Thus, changing the seed crystal requires excessive process downtime, which adversely affects productivity. Furthermore, the process employs a heater embedded m the seed crystal holder. Having such a heater makes it more difficult to form a temperature gradient between the seed crystal and the neck portion, which requires the single crystal to be pulled at an extremely slow rate.
  • Another process for eliminating dislocations m a larger diameter Dash neck is disclosed m Japanese laid-open application (Kokai) No. 11-199384. Specifically, the application discloses a process whereby the length of the neck required to eliminate slip dislocations is shortened by repeatedly changing the neck diameter. The neck therefore has alternating sections of increased and decreased diameter, the reference describing the increased portion as having a diameter at least twice that of the decreased portion.
  • this process is said to provide a shorter length neck for growing large diameter silicon single crystals, the process is complicated and difficult to control because of the large difference m diameter between the increased and decreased portions, and because the target diameter of the neck must be constantly changed.
  • a single crystal silicon mgot having a large diameter or mass as well as a process for the production thereof; the provision of such a process wherein the throughput and yield are increased; the provision of such process wherein the mgot has a large diameter neck; the provision of such a process wherein slip dislocations are eliminated m the neck over a substantially reduced length; the provision of such a process wherein the diameter of the neck is substantially constant; and, the provision of such a process wherein a standard seed crystal is used.
  • the present invention is directed to a process for eliminating dislocations m a neck of a single crystal silicon mgot, grown m accordance with the Czochralski method.
  • the process comprises: (1) heating polycrystallme silicon m a crucible to form a silicon melt; (n) contacting a seed crystal to the melt until the seed begins to melt, forming dislocations therein; (in) withdrawing the seed crystal from the melt at a growth rate R- L to form a first segment of a neck having a diameter of at least about 5 mm; (iv) decreasing the growth rate R ⁇ to a growth rate R 2 to form a second segment of a neck having a diameter of at least about 5 mm; and, (v) increasing the growth rate R 2 to a growth rate R 3 to form an additional segment of a neck having a diameter of at least about 5 mm; wherein the rate R 2 is at least about 25% less than the rate R 17 and wherein dislocations are eliminated m the neck within an axial length
  • the present invention is further directed to a process for eliminating dislocations a neck of a single crystal silicon mgot, grown accordance with the Czochralski method.
  • the process comprises: (l) heating polycrystallme silicon m a crucible to form a silicon melt; (n) contacting a seed crystal to the melt until the seed crystal begins to melt, forming dislocations therein; (in) withdrawing the seed crystal from the melt to grow a neck portion of the mgot, the neck having a diameter of at least about 5 mm and a length of less than about 150 mm, at a growth rate which changes to cause a melt/solid interface shape to change from concave to convex at least once over the length of the neck, m order to eliminate dislocations therein; (iv) growing an outwardly flaring seed-cone adjacent the neck portion of the ingot; and, (v) growing a main body adjacent the outwardly flaring seed-cone, the body having a nominal diameter of at least about 150 mm,
  • the present invention is still further directed to a silicon single crystal which comprises: (i) a neck having an average diameter of at least about 5 mm, a length of less than about 150 mm, and comprising an upper portion having dislocations and a lower portion which is free of dislocations; (ii) a seed cone adjacent the lower portion of the neck; and, (iii) a main body adjacent the seed cone having a nominal diameter of at least about 150 mm.
  • Fig. 1 is a diagram generally illustrating the direction of slip dislocation growth as the shape of the melt/solid interface changes from concave (e.g., "normal
  • Fig. 2 is a vertical section illustrating the upper region of a single crystal generally embodying the present invention.
  • Fig. 3 is a graph showing the crystal growth rate
  • Figs. 4A and 4B are photographs of x-ray topographs of a neck portion of a silicon single crystal grown in accordance with one embodiment of the present invention and as further described in Example 1, Fig. 4B being a photograph of a magnified portion of 4A;
  • Fig. 5 is a graph showing the crystal growth rate ("S/L") and the neck diameter during a conventional necking process as described in Example 2; and, Figs. 6A and 6B are photographs of x-ray topographs of a neck portion of a silicon single crystal grown by a conventional necking process as described m Example 2, Fig. 6B being a photograph of a magnified portion of 6A.
  • the length over which slip dislocations are eliminated m the neck of a single crystal silicon mgot, even a neck having a large diameter can be significantly reduced by quickly changing the crystal pull rate from a high rate to a low rate; that is, dislocations can be removed by drastically reducing the pull rate at least once during neck growth.
  • Fig. 1 it is generally believed that, for standard growth processes wherein a normally high pull rate is employed during neck growth (e.g., greater than about 1 mm/mm.), dislocations grow vertically m a generally mward direction toward the center of the neck due to the concave nature of the melt/solid interface. As a result, these dislocations continue to grow along the length of the neck until the diameter of the neck is so small that the dislocations are eliminated. For large diameter necks, such as those needed for large diameter, heavy mgots, the length of the neck which must be grown to remove these dislocations is significant (e.g., about 150 mm or more) .
  • the length needed to achieve dislocation- free growth can be substantially reduced by briefly, and preferably repeatedly, changing the shape of the melt/solid interface from concave to convex, by means of substantially decreasing the pull rate.
  • the dislocations present at a generally vertical angle with the interface as described above, are more effectively concentrated at the circumferential edge of the neck as shown m Fig. 1, which facilitates dislocation removal.
  • changing the interface shape results m the elimination of dislocations over a much shorter axial distance or length (e.g., less than about 150 mm) for large diameter, heavy mgots.
  • the process of the present invention involves changing or cycling the pull rate at least once during neck growth m order to form a dislocation-free neck having a diameter of greater than about 5 mm (e.g., about 6 mm, 8 mm, 10 mm or more) and a length of less than about 150 mm (e.g., less than about 125 mm, 100 mm, 90 mm, 80 mm or less) , which is capable of supporting large diameter (e.g., about 200, 300 mm or more), heavy weight (e.g., about 100, 200, 300, 400 kilograms or more) single crystal silicon mgots.
  • large diameter e.g., about 200, 300 mm or more
  • heavy weight e.g., about 100, 200, 300, 400 kilograms or more
  • the largest diameter and shortest neck possible e.g., about 8 or 10 mm and 100 mm, respectively
  • the length may also need to be increased in order to eliminate dislocations (e.g., about 10 or 12 mm and about 125 mm or more, respectively)
  • process conditions can be optimized in order to achieve large diameter, dislocation-free necks (e.g., 10 mm, 12 mm or more) over relatively short lengths (e.g., less than 100 mm or even 80 mm. )
  • a single crystal 10 having a seed crystal 12, a neck 14, a seed cone 16, a shoulder 18 and a body 20.
  • a neck 14 is formed which typically has: (i) an upper portion 22, grown beneath the seed crystal having dislocations (not shown); (ii) an intermediate portion 24, grown beneath the upper portion, having fewer dislocations; and, (iii) a lower portion 26, grown beneath the intermediate portion, which is free of dislocations.
  • the diameter of the neck remains substantially constant over its length; that is, the diameter of the neck varies by less than about 15%, 10% or even 5% from the target or desired diameter over a length of the neck (e.g., over about the last 50%, 60%, 70%, 80%, 90%, 95% or more of the length of the neck) .
  • an initial pull rate will be established which is sufficient to form a neck of the desired diameter (the precise diameter being at least in part dependent upon the target diameter and/or weight of the ingot to be grown) .
  • this rate will range from greater than about 1 to less than about 6 mm/min., with rates ranging from about 2 to about 5 mm/min. or even from about 3 to about 4 mm/min. being preferred in some embodiments.
  • the pull rate is established to result in the melt/solid interface having a concave shape.
  • this growth rate is established, it is maintained for a time sufficient to form a segment or length of the neck. Typically, this initial rate is maintained for about 1 minute, 2 minutes, 5 minutes, 10 minutes or even more, while about the first 5%, 10%, 20% or more of the neck is formed. Stated another way, the initial rate is maintained while about 5, 10, 15, 20 or even 25 mm of the neck is grown.
  • the pull rate is rapidly decreased to a second pull rate which is sufficient to change the shape of the melt/solid interface from a concave to a convex shape.
  • this second or "reduced" pull rate is less than about 1 mm/min., with rates of about 0.8 mm/min., 0.6 mm/min., 0.5 mm/min., 0.3 mm/min. or even less than about 0.2 mm/min. being employed in some instances.
  • the pull rate is typically reduced by about 1 mm/min., 1.5 mm/min., 2 mm/min., 2.5 mm/min., 3 mm/min., 4 mm/min. or more.
  • the pull rate be reduced quickly. For example, in some cases the pull rate will be reduced such that the second pull rate is achieved within about 60 seconds or less (e.g., about 50, 40, 30, 20 or even 10 seconds) .
  • the above pull rates are at least in part dependent upon the operating conditions employed for a given crystal puller. For example, depending upon the type of silicon to be formed and the type of puller employed, growth rates as high as about 8 or even 10 mm/mm. may initially be used. Accordingly, the above rates (both high and low) should not be viewed m a limiting sense.
  • the reduced pull rate is maintained only for a short period of time; that is, order to maximize the throughput of the process, the reduced pull rate is maintained only for a time which is sufficient to change the melt/solid interface shape to produce the outward directional growth of slip dislocations within the neck.
  • this rate will be maintained while about 3%, 1% or less (e.g., less than about 0.5%, 0.2% or even 0.1%) of the overall neck is formed. Given the pull rates typically employed, this generally results m maintaining the reduced pull rate for less than about 5 minutes,
  • the pull rate is then rapidly increased, typically back to or near the initial pull rate. In some instances, the pull rate may then be maintained until neck growth is complete. However, m some instances, the pull rate may be maintained for a period of time, or a given length of neck, as described above, and then the rate is quickly reduced once again.
  • the rate increased and maintained once again for a few minutes (e.g., about 2 minutes, 5 minutes, 10 minutes or more), while another segment of the neck is formed (e.g., about 5%, 10%, 20% or more of neck length) .
  • the pull rate may then again be rapidly decreased to change the shape of the melt/solid interface, and to further concentrate slip dislocations at the circumferential edges of the neck, as described above.
  • the number of "cycles,” wherein the pull rate is changed from a high pull rate to a reduced pull rate and back to a high pull rate (which may be the same or different that the prior, high pull rate) in order to rapidly change the melt/solid interface shape, can be optimized for a given crystal pulling process, taking into consideration such things as ingot diameter, weight, etc., to ensure that only the minimum number of cycles is used to achieved dislocation-free growth at the earliest stage possible (i.e., the shortest neck length possible), thus maximizing the throughput.
  • the number of cycles will range from about 1 to about 10 (e.g., about 2, 4, 6 or 8) , from about 2 to about 8, or from about 4 to about 6.
  • the process of the present invention enables large diameter, dislocation-free ingots, of substantial weight, to be efficiently and safely produced by growing a neck of large diameter and comparably short length.
  • the present invention is particularly beneficial in that, due to (i) the short period of time over which the pull rate is maintained at a reduced rate, and (ii) the rapid or quick changes between the high and reduced pull rates, the diameter of the neck remains substantially constant throughout the growth process (which enables a stronger neck to be formed) .
  • the diameter of the neck at these reduced rate transition sites typically changes by less than about 5%, 3%, 2% or even 1%; that is, the diameter of the neck at those segments grown at a reduced rate, relative to the diameter of the segments grown at the higher or typical growth rate, is substantially unchanged, increasing by less than about 5%, 3%, 2% or even 1%.
  • a neck ranging from about 5 to about 7 mm is grown at an initial or typical rate of from about 2 to about 5 mm/min.
  • the interface between the silicon melt and the seed crystal changes from a concave to a convex shape when the pull rate is reduced to about 0.8 mm/min. or less.
  • the neck is grown at a typical growth rate of from about 2 to about 5 mm/min. for a period of time which is sufficient to form a neck segment at least about 10 mm long, preferably at least about 15 mm long, and more preferably at least about 20 mm long.
  • the pull rate is quickly decreased, typically in less than about 60 seconds and preferably in less than about 20 or even 10 seconds.
  • the pull rate is reduced by at least about 1.5 mm/min., preferably about 2.5 mm/min., and most preferably about 3 mm/min. from the initial pull rate.
  • the reduced growth rate should be about 0.8 mm/min. or less, preferably 0.5 mm/min. or less, and most preferably 0.3 mm/min. or less.
  • the reduced growth rate is maintained for about 1 to 5 minutes, and preferably from about 2 to 3 minutes, before returning to the high pull rate (i.e., back to the previous rate, or some rate within the "high" range) .
  • the growth process according to the present invention can be applied to essentially any standard Cz growth method, as well as a magnetic field-applied Cz (MCz) method, wherein for example a lateral magnetic field or a magnetic cusp field is applied during crystal growth.
  • the crystal orientation of the seed crystal is not narrowly critical (e.g., a crystal orientation of ⁇ 100> or ⁇ 111> may be used, for example) .
  • seed crystals described as having an apex of at least about 7 mm in diameter at the beginning of the crystal pulling operation are preferred, in some embodiments.
  • seed crystals less than about 7 mm in diameter may be used, provided that the diameter thereof is increased to at least about 7 mm before pulling (for example, by melting the apex of the seed crystal m the melt); that is, according to the present invention, it is preferred that the diameter of the apex of the seed crystal be not less than about 7 mm when the pulling operation is initiated.
  • references to "first,” “typical” or “initial” pull rates should not be construed as only limited to pull rates employed at the initiation of the crystal growth process. Rather, such terms are intended to refer to any pull rate employed during the crystal growth process other than the "reduced" pull rate, which is specifically employed when altering the melt/solid interface from a concave to a convex shape. More specifically, generally speaking, it is to be noted that the process of the present invention utilized a rapid change m pull rate during neck growth in order to change the melt/solid interface shape and eliminate dislocations from the neck. While typically this approach involves rapidly decreasing the pull rate from a high rate to a low rate and back to a high rate, in some embodiments neck growth may initially be at a low rate and then rapidly increased to a high rate .
  • Example 1 This Example demonstrates the effect of eliminating dislocations when the neck portion of a silicon single crystal is grown in accordance with the present invention.
  • the growth of the single crystal was performed using a crucible 600 mm (24 inches) in diameter having a starting material capacity of 140 kg.
  • the growth of the neck portion was begun using a seed crystal having a bottom of 12 mm by 12 mm.
  • a silicon single crystal of 200 mm in diameter was pulled at a growth rate of 4 mm/min., which was sufficient to form a neck portion greater than 5.7 mm in diameter as shown in Fig. 3.
  • the growth rate was reduced to 0.2 mm/min. for 1 minute. This procedure (growing 20 mm of crystal at 4 mm/min. and then growing the neck at a reduced growth rate of 0.2 mm/min. for 1 minute) was repeated a total of ten times.
  • Example 2 For comparison purposes, this Example shows a conventional operation for forming a neck portion of a silicon single crystal .
  • the Example was performed using a crucible of 600 mm (24 inches) in diameter having a starting material capacity of 140 kg and a seed crystal having a bottom of 12 mm by 12 mm as in Example 1.
  • a 200 mm diameter silicon single crystal was grown at a growth rate of approximately 4 mm/min. to form a neck portion having a diameter greater than 5.2 mm as shown in Fig. 5.
  • the length of the neck portion was required to be between 150 to 200 mm before slip dislocations were eliminated.
  • Example 3 A silicon single crystal was grown as in the above Examples except that a magnetic field of 3,000 gauss was applied laterally to the surface of the crucible during crystal growth.
  • the silicon single crystal of 200 mm in diameter was pulled at a growth rate ranging from 2 to 5 mm/min., which was sufficient to form a neck portion of approximately 6.5 mm in diameter at the apex of the seed crystal .
  • the growth rate was reduced to 0.2 mm/min. for 2 minutes.
  • This procedure (growing 20 mm of neck at a typical growth rate of from 2 to 5 mm/min. followed by growing the neck at a reduced growth rate of 0.2 mm/min. for 2 minutes) was repeated a total of five times. In this process, the growth rate was changed between the typical or initial growth rate and the reduced growth rate in 15 seconds or less.
  • the results obtained were as follows :
  • the process of the present invention can remove dislocations from a large diameter neck m a comparably short length, thereby producing dislocation-free silicon single crystals having a large diameter and heavy weight .
  • the process of the present invention can remove dislocations from a large diameter neck m a comparably short length, thereby producing dislocation-free silicon single crystals having a large diameter and heavy weight .

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

L'invention concerne un procédé de préparation de silicium monocristallin selon la méthode de Czochralski. Plus précisément, en réduisant rapidement la vitesse de tirage au moins une fois durant la croissance d'un rétrécissement du lingot de silicium monocristallin, afin de changer la forme d'interface fonte/solide d'une forme concave à une forme convexe, le présent procédé permet d'obtenir une croissance à dislocation nulle dans un rétrécissement à grand diamètre dans une longueur courte en comparaison, de façon que des lingots de grand diamètre et de poids sensible puissent être produits avec un rendement élevé.
EP01914414A 2000-02-22 2001-02-20 Procede de croissance de retrecissement regule pour silicium monocristallin Withdrawn EP1259664A2 (fr)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2000044369 2000-02-22
JP2000044369 2000-02-22
JP2000136811 2000-05-10
JP2000136811A JP4521933B2 (ja) 2000-02-22 2000-05-10 シリコン単結晶の成長方法
PCT/US2001/005379 WO2001063022A2 (fr) 2000-02-22 2001-02-20 Procede de croissance de retrecissement regule pour silicium monocristallin

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EP1259664A2 true EP1259664A2 (fr) 2002-11-27

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EP (1) EP1259664A2 (fr)
JP (1) JP4521933B2 (fr)
KR (1) KR20020081343A (fr)
TW (1) TW500841B (fr)
WO (1) WO2001063022A2 (fr)

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JP2001316198A (ja) 2001-11-13
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TW500841B (en) 2002-09-01
KR20020081343A (ko) 2002-10-26
JP4521933B2 (ja) 2010-08-11

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