EP1252802B1 - Dispositif de regulation d'une repartition de la densite de flux d'energie a micro-ondes dans un applicateur, et utilisation de ce dispositif - Google Patents

Dispositif de regulation d'une repartition de la densite de flux d'energie a micro-ondes dans un applicateur, et utilisation de ce dispositif Download PDF

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Publication number
EP1252802B1
EP1252802B1 EP01911377A EP01911377A EP1252802B1 EP 1252802 B1 EP1252802 B1 EP 1252802B1 EP 01911377 A EP01911377 A EP 01911377A EP 01911377 A EP01911377 A EP 01911377A EP 1252802 B1 EP1252802 B1 EP 1252802B1
Authority
EP
European Patent Office
Prior art keywords
waveguide
coupling
applicator
microwave
coupling pins
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP01911377A
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German (de)
English (en)
Other versions
EP1252802A1 (fr
Inventor
Thorsten Gerdes
Monika Willert-Porada
Klaus RÖDIGER
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Widia GmbH
Original Assignee
Widia GmbH
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Filing date
Publication date
Application filed by Widia GmbH filed Critical Widia GmbH
Publication of EP1252802A1 publication Critical patent/EP1252802A1/fr
Application granted granted Critical
Publication of EP1252802B1 publication Critical patent/EP1252802B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/64—Heating using microwaves
    • H05B6/72—Radiators or antennas
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/64—Heating using microwaves
    • H05B6/70—Feed lines
    • H05B6/705—Feed lines using microwave tuning
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/64—Heating using microwaves
    • H05B6/70—Feed lines
    • H05B6/707—Feed lines using waveguides

Definitions

  • the invention relates to a device for adjusting a microwave energy density distribution in a resonator forming an applicator, in which the radiation generated by microwave generators is guided via waveguides to the applicator and a use of this device.
  • the microwave generator which may for example be a magnetron, is arranged with its power supply separate from the applicator in which the microwave energy is to be effective.
  • waveguides possibly in addition to other components, are used, via which the microwave energy is fed into the applicator resonator chamber.
  • the applicator In order to produce several modes with different phase angles in an applicator, with which a homogeneous field distribution is to be achieved, the applicator often has dimensions which amount to a multiple of the wavelength of the fed-in microwave.
  • the waveguide can be flanged to one side of a cuboid applicator.
  • this has the disadvantage that, depending on the spatial extent of the sample groups located in the applicator due to the field distribution can achieve a sufficiently homogeneous field distribution only in individual areas.
  • Slotted graphite plates via which microwaves are guided from a waveguide into the interior of the oven, help to remedy this situation; the waveguides are then located at the corners of the applicator space, with the slots located at different angles.
  • the device according to claim 1 which is characterized according to the invention in that a plurality of electrically conductive coupling pins are provided, which preferably protrude in each case both vertically in the waveguide space and in the applicator.
  • Such pin-shaped antennas can produce a larger field homogeneity in the resonator chamber, which is also still separated from the waveguide, so that about gases generated in the resonator cavity can not penetrate into the waveguide.
  • This is particularly advantageous in the heat treatment of pre-pressed green compacts, which have been produced by powder metallurgy, for their dewaxing (debindering). The same applies to sintering processes that take place in a carburizing atmosphere.
  • the coupling pins are slidably disposed along its longitudinal axis, so that in the loaded with zuwdicdem good applicator, the desired field distribution is adjustable. Possibly. can be created by appropriate coupling pin arrays graduated fields, for example, with a rising space in the field, which is preferably required in the so-called flow principle, ie when translational movement of the material to be treated through the resonator. Field dependencies arise both by the length of the coupling pin and in particular the respective length portions of the coupling pin, which protrude into the waveguide and in the resonator.
  • the coupling pins can be inserted far enough from the broad side as well as from the narrow side in the waveguide.
  • the waveguide and the coupling surface of the resonator are arranged with their longitudinal axes parallel to each other, so that a plurality of equidistant spaced coupling pins protrude with its one end in the waveguide and with its other end in the resonator.
  • a dielectric is arranged to the wall bushing for the coupling pins.
  • each of the coupling pins can be displaceably guided in a sleeve of dielectric material projecting through the wall of the waveguide and / or the applicator.
  • the electrically conductive coupling pin is formed of a coupling rod and a surrounding sleeve, in which the coupling rod is arranged lijnsaxial displaced.
  • the coupling pin may have at its projecting into the waveguide end a pin extending this piece of a dielectric, which preferably extends through the waveguide diameter and is guided at a located at the opposite end waveguide opening to the outside.
  • the material used for the coupling pin is graphite, metal such as copper, aluminum, tungsten or molybdenum, metal alloys such as brass or steel or other alloys that However, must be correspondingly temperature resistant, or an insulator with an electrical coating, which preferably consists of TiN. Boron nitride or a ceramic such as aluminum oxide, silicon nitride or quartz are selected as the material for the dielectric.
  • the coupling pins protrude in each case in the region of the maxima of the microwave fed there.
  • the coupling of the microwave can be capacitive or inductive.
  • the geometry of the pin is cylindrical according to a further embodiment of the invention, wherein preferably the edges and corners of the pin are rounded.
  • the ratio of the opening diameter D in the waveguide through which the coupling pin is guided to the coupling pin diameter d is chosen so that the characteristic impedance is adjusted.
  • the product to be treated by the microwave is arranged in the applicator resonance space on gratings, which consist of round bars, which are preferably aligned perpendicular to the electric field of the microwave.
  • the adjacent or adjoining walls of the waveguide and the applicator are thermally insulated from each other.
  • the device described can be used for debindering green compacts from a binder and one of the following substances and / or for sintering hard metals, cermets, powder metallurgy steels or metallic or ceramic magnetic materials, in particular ferrites.
  • Specific application examples both with regard to the selection of the composites that can be produced by sintering in a microwave field and also procedural measures are named in WO 96/33830 and WO 97/26383.
  • said device can also be used for the production of a plasma, as required for example in CVD coatings.
  • FIG. 1 to 4 each schematically arranged differently arranged coupling pins and dielectrics
  • Fig. 5 is a schematic view of the device according to the invention.
  • a waveguide 10 having an upper wall 11 and a lower wall 12 are shown in cross section.
  • the wall 21 of the applicator resonator chamber On the wall 12 of the waveguide 10 is the wall 21 of the applicator resonator chamber, of which the section shown is designated 20.
  • the two walls 12 and 21 are each interrupted at equidistant distances a, wherein the distances a correspond to about half to the quarter wavelength of the microwave in the waveguide 10.
  • only one of the variants is used, each with arranged coupling pins.
  • a first variant (FIG. 1), the opening of the walls 12 and 21 is surrounded by a circular dielectric 30.
  • the central opening of the dielectric D, through which the electrically conductive coupling pin made of graphite 31 is passed, is selected relative to the diameter d of the cylindrical coupling pin so that the characteristic impedance is matched.
  • the coupling pin 31 protrudes with its two ends on the one hand into the resonator 20 of the applicator and the other in the waveguide interior 10.
  • the coupling pin is in the direction of the double arrow 32 lvinsaxial displaced.
  • the coupling pin 33 is displaceable in the direction of the double arrow 34 in a sleeve 40 made of a dielectric.
  • the sleeve 40 projects only into the resonator 20 of the applicator.
  • the coupling pin 35 consists of a coupling rod 36 which is longitudinally axially displaceable in the direction of the double arrow 37 in a surrounding sleeve 38 made of electrically conductive material in the direction of the double arrow 37.
  • the coupling pin 39 is provided at its end projecting into the waveguide 10 with an extension 41 made of a dielectric material.
  • the one common parts 39 and 41 formed rod is along the double arrow 42 longitudinally displaceable.
  • electrically conductive coupling pins 31, 33, 36 and 39 graphite rods are arranged with a diameter d of 3 mm at a distance of 10 mm.
  • Fig. 5 shows a schematic view of the structure of the device according to the invention, the essential parts of a short slide 49, a microwave generator 44, a waveguide 10 which is guided through an opening in the furnace wall 45 and the arrangement of the coupling pins 31 already described.
  • the furnace interior, in which hard metal parts 48 are arranged on gratings, is shielded by a thermal insulation 46 to the outside.

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Constitution Of High-Frequency Heating (AREA)
  • Plasma Technology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Electrotherapy Devices (AREA)
  • Radiation-Therapy Devices (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Powder Metallurgy (AREA)

Claims (10)

  1. Dispositif pour le réglage d'une répartition de densité d'énergie de micro-ondes dans un applicateur formant une chambre de résonateur (20) dans lequel le rayonnement généré par des générateurs de micro-ondes est guidé par des guides d'ondes (10) jusqu'à la paroi de l'applicateur,
    caractérisé par le fait
    que plusieurs broches de couplage (31, 33, 36, 38 ou 39) électriquement conductrices sont prévues dont chacune fait saillie radialement aussi bien dans la chambre de guide d'ondes que dans la chambre de résonateur de l'applicateur.
  2. Dispositif selon la revendication 1, caractérisé par le fait que lesdites broches de couplage sont disposées de manière à être déplaçables suivant leur axe longitudinal et/ou que le guide d'ondes (10) et la surface de couplage de la chambre de résonateur (20) sont disposés parallèlement l'un à l'autre avec leurs axes longitudinaux.
  3. Dispositif selon la revendication 1 ou 2, caractérisé par le fait qu'un diélectrique (30, 40) est disposé autour de l'ouverture de passage réalisée dans les parois pour les broches de couplage (31, 33, 38), et/ou que les broches de couplage (33) sont guidées à coulissement dans un manchon (40) en matériau diélectrique traversant la paroi (12) du guide d'ondes et/ou la paroi (21) de l'applicateur.
  4. Dispositif selon l'une des revendications 1 à 3, caractérisé par le fait que la broche de couplage électriquement conductrice (35) est formée d'un bâton de couplage (36) et d'un manchon (38) qui entoure ce dernier et dans lequel ledit bâton de couplage (36) est disposé de manière à être déplaçable suivant l'axe longitudinal, ou que la broche de couplage (39) présente, à son extrémité qui fait saillie dans le guide d'ondes (10), une pièce (41) en un diélectrique qui rallonge cette broche, s'étend de préférence à travers le diamètre du guide d'ondes et est menée vers l'extérieur par une ouverture de guide d'ondes située à l'extrémité opposée.
  5. Dispositif selon l'une des revendications 3 à 4, caractérisé par le fait que la broche de couplage est réalisée en graphite, en un métal tel que le cuivre, l'aluminium, le tungstène ou le molybdène, en un alliage métallique tel que le laiton ou l'acier, ou en un isolant ayant un revêtement électrique, de préférence de TiN, et/ou que le diélectrique (30, 40) est réalisé en nitrure de bore ou en une céramique, de préférence en oxyde d'aluminium, en nitrure de silicium ou en quartz.
  6. Dispositif selon l'une des revendications 1 à 5, caractérisé par le fait que les broches de couplage (31, 33, 38, 39) sont disposées chacune dans la zone des maxima du rayonnement micro-ondes dans le guide d'onde, et/ou par un couplage capacitif ou inductif du rayonnement micro-ondes par des broches de couplage.
  7. Dispositif selon l'une des revendications 1 à 6, caractérisé par le fait que les broches de couplage présente une configuration cylindrique, de préférence à bords et coins arrondis, et/ou que le diamètre (d) des broches de couplage est compris entre 1 mm et 30 mm, de préférence entre 5 mm et 15 mm, et/ou que la longueur (I) avec laquelle les broches de couplage (31, 33, 38, 36 et 39) font saillie dans la chambre de résonateur (20) est I = x · λ (avec 0 ≤ x ≤ 1 et λ = la longueur d'onde de la micro-onde dans le guide d'ondes (10)), de préférence I = λ/4 à λ/2.
  8. Dispositif selon l'une des revendications 3 à 7, caractérisé par le fait que le diamètre du diélectrique dans le guide d'ondes est adapté conformément à l'impédance électrique, et/ou que les distances (a) des broches de couplage sont comprises entre λ/4 et λ/2 (avec λ = la longueur d'onde de la micro-onde dans le guide d'ondes (10)).
  9. Dispositif selon l'une des revendications 1 à 8, caractérisé par le fait que des grilles réalisées en barres de treillis arrondies et servant de support pour les produits à traiter sont disposées dans la chambre de résonance (20) de l'applicateur, de préférence les barres de treillis étant orientées perpendiculairement au champ électrique de la micro-onde, et/ou que les parois voisines ou adjacentes (12, 21) du guide d'ondes (10) et de l'applicateur sont isolées thermiquement l'une de l'autre.
  10. Utilisation du dispositif selon l'une des revendications 1 à 9 pour l'enlèvement du liant de compacts verts se composant d'un liant et de l'un des matériaux mentionnés ci-dessous, et/ou pour le frittage de métaux durs, de cermets, d'aciers fabriqués par la voie de la métallurgie des poudres ou de matériaux magnétiques métalliques ou céramiques, en particulier de ferrites, ou pour la génération d'un plasma.
EP01911377A 2000-02-04 2001-01-19 Dispositif de regulation d'une repartition de la densite de flux d'energie a micro-ondes dans un applicateur, et utilisation de ce dispositif Expired - Lifetime EP1252802B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10005146 2000-02-04
DE10005146A DE10005146A1 (de) 2000-02-04 2000-02-04 Vorrichtung zur Einstellung einer Mikrowellen-Energiedichteverteilung in einem Applikator und Verwendung dieser Vorrichtung
PCT/DE2001/000259 WO2001058215A1 (fr) 2000-02-04 2001-01-19 Dispositif de regulation d'une repartition de la densite de flux d'energie a micro-ondes dans un applicateur, et utilisation de ce dispositif

Publications (2)

Publication Number Publication Date
EP1252802A1 EP1252802A1 (fr) 2002-10-30
EP1252802B1 true EP1252802B1 (fr) 2007-03-14

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ID=7629967

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EP01911377A Expired - Lifetime EP1252802B1 (fr) 2000-02-04 2001-01-19 Dispositif de regulation d'une repartition de la densite de flux d'energie a micro-ondes dans un applicateur, et utilisation de ce dispositif

Country Status (6)

Country Link
US (1) US6630653B2 (fr)
EP (1) EP1252802B1 (fr)
JP (1) JP2003522392A (fr)
AT (1) ATE357124T1 (fr)
DE (2) DE10005146A1 (fr)
WO (1) WO2001058215A1 (fr)

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US7189940B2 (en) * 2002-12-04 2007-03-13 Btu International Inc. Plasma-assisted melting
DE10326964B3 (de) * 2003-06-16 2004-12-09 Nexpress Solutions Llc Mikrowelleneinrichtung für das Befestigen von Toner an einem Bedruckstoff und dafür verwendbares Element
DE102004021016B4 (de) * 2004-04-29 2015-04-23 Neue Materialien Bayreuth Gmbh Vorrichtung zur Einspeisung von Mikrowellenstrahlung in heiße Prozessräume
EP1853094B1 (fr) * 2006-05-04 2008-07-02 Topinox Sarl Configuration d'antennes de micro-onde, accessoire avec une telle configuration d'antennes de micro-onde et appareil avec au moins un tel accessoire
DE102006046422B4 (de) * 2006-09-22 2021-01-14 Wiesheu Gmbh Ofen zur Wärmebehandlung von Lebensmitteln
WO2008115226A2 (fr) * 2007-03-15 2008-09-25 Capital Technologies, Inc. Appareil de traitement avec un lancement électromagnétique
US7518092B2 (en) * 2007-03-15 2009-04-14 Capital Technologies, Inc. Processing apparatus with an electromagnetic launch
DE202007019030U1 (de) 2007-09-19 2010-04-15 Neue Materialien Bayreuth Gmbh Hybridofen
US8451437B2 (en) 2011-02-17 2013-05-28 Global Oled Technology Llc Electroluminescent light output sensing for variation detection
DE102014211575A1 (de) * 2014-06-17 2015-12-17 Hauni Maschinenbau Ag Mikrowellenmessvorrichtung, Anordnung und Verfahren zur Überprüfung von stabförmigen Artikeln oder eines Materialstrangs der Tabak verarbeitenden Industrie sowie Maschine der Tabak verarbeitenden Industrie
CN111213433A (zh) * 2017-08-15 2020-05-29 高知有限公司 通过移动辐射体控制微波加热

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Also Published As

Publication number Publication date
EP1252802A1 (fr) 2002-10-30
US20020190061A1 (en) 2002-12-19
ATE357124T1 (de) 2007-04-15
DE50112190D1 (de) 2007-04-26
US6630653B2 (en) 2003-10-07
DE10005146A1 (de) 2001-08-09
JP2003522392A (ja) 2003-07-22
WO2001058215A1 (fr) 2001-08-09

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