EP1252802B1 - Device for adjusting the distribution of microwave energy density in an applicator and use of this device - Google Patents
Device for adjusting the distribution of microwave energy density in an applicator and use of this device Download PDFInfo
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- EP1252802B1 EP1252802B1 EP01911377A EP01911377A EP1252802B1 EP 1252802 B1 EP1252802 B1 EP 1252802B1 EP 01911377 A EP01911377 A EP 01911377A EP 01911377 A EP01911377 A EP 01911377A EP 1252802 B1 EP1252802 B1 EP 1252802B1
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- Prior art keywords
- waveguide
- coupling
- applicator
- microwave
- coupling pins
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B6/00—Heating by electric, magnetic or electromagnetic fields
- H05B6/64—Heating using microwaves
- H05B6/72—Radiators or antennas
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B6/00—Heating by electric, magnetic or electromagnetic fields
- H05B6/64—Heating using microwaves
- H05B6/70—Feed lines
- H05B6/705—Feed lines using microwave tuning
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B6/00—Heating by electric, magnetic or electromagnetic fields
- H05B6/64—Heating using microwaves
- H05B6/70—Feed lines
- H05B6/707—Feed lines using waveguides
Definitions
- the invention relates to a device for adjusting a microwave energy density distribution in a resonator forming an applicator, in which the radiation generated by microwave generators is guided via waveguides to the applicator and a use of this device.
- the microwave generator which may for example be a magnetron, is arranged with its power supply separate from the applicator in which the microwave energy is to be effective.
- waveguides possibly in addition to other components, are used, via which the microwave energy is fed into the applicator resonator chamber.
- the applicator In order to produce several modes with different phase angles in an applicator, with which a homogeneous field distribution is to be achieved, the applicator often has dimensions which amount to a multiple of the wavelength of the fed-in microwave.
- the waveguide can be flanged to one side of a cuboid applicator.
- this has the disadvantage that, depending on the spatial extent of the sample groups located in the applicator due to the field distribution can achieve a sufficiently homogeneous field distribution only in individual areas.
- Slotted graphite plates via which microwaves are guided from a waveguide into the interior of the oven, help to remedy this situation; the waveguides are then located at the corners of the applicator space, with the slots located at different angles.
- the device according to claim 1 which is characterized according to the invention in that a plurality of electrically conductive coupling pins are provided, which preferably protrude in each case both vertically in the waveguide space and in the applicator.
- Such pin-shaped antennas can produce a larger field homogeneity in the resonator chamber, which is also still separated from the waveguide, so that about gases generated in the resonator cavity can not penetrate into the waveguide.
- This is particularly advantageous in the heat treatment of pre-pressed green compacts, which have been produced by powder metallurgy, for their dewaxing (debindering). The same applies to sintering processes that take place in a carburizing atmosphere.
- the coupling pins are slidably disposed along its longitudinal axis, so that in the loaded with zuwdicdem good applicator, the desired field distribution is adjustable. Possibly. can be created by appropriate coupling pin arrays graduated fields, for example, with a rising space in the field, which is preferably required in the so-called flow principle, ie when translational movement of the material to be treated through the resonator. Field dependencies arise both by the length of the coupling pin and in particular the respective length portions of the coupling pin, which protrude into the waveguide and in the resonator.
- the coupling pins can be inserted far enough from the broad side as well as from the narrow side in the waveguide.
- the waveguide and the coupling surface of the resonator are arranged with their longitudinal axes parallel to each other, so that a plurality of equidistant spaced coupling pins protrude with its one end in the waveguide and with its other end in the resonator.
- a dielectric is arranged to the wall bushing for the coupling pins.
- each of the coupling pins can be displaceably guided in a sleeve of dielectric material projecting through the wall of the waveguide and / or the applicator.
- the electrically conductive coupling pin is formed of a coupling rod and a surrounding sleeve, in which the coupling rod is arranged lijnsaxial displaced.
- the coupling pin may have at its projecting into the waveguide end a pin extending this piece of a dielectric, which preferably extends through the waveguide diameter and is guided at a located at the opposite end waveguide opening to the outside.
- the material used for the coupling pin is graphite, metal such as copper, aluminum, tungsten or molybdenum, metal alloys such as brass or steel or other alloys that However, must be correspondingly temperature resistant, or an insulator with an electrical coating, which preferably consists of TiN. Boron nitride or a ceramic such as aluminum oxide, silicon nitride or quartz are selected as the material for the dielectric.
- the coupling pins protrude in each case in the region of the maxima of the microwave fed there.
- the coupling of the microwave can be capacitive or inductive.
- the geometry of the pin is cylindrical according to a further embodiment of the invention, wherein preferably the edges and corners of the pin are rounded.
- the ratio of the opening diameter D in the waveguide through which the coupling pin is guided to the coupling pin diameter d is chosen so that the characteristic impedance is adjusted.
- the product to be treated by the microwave is arranged in the applicator resonance space on gratings, which consist of round bars, which are preferably aligned perpendicular to the electric field of the microwave.
- the adjacent or adjoining walls of the waveguide and the applicator are thermally insulated from each other.
- the device described can be used for debindering green compacts from a binder and one of the following substances and / or for sintering hard metals, cermets, powder metallurgy steels or metallic or ceramic magnetic materials, in particular ferrites.
- Specific application examples both with regard to the selection of the composites that can be produced by sintering in a microwave field and also procedural measures are named in WO 96/33830 and WO 97/26383.
- said device can also be used for the production of a plasma, as required for example in CVD coatings.
- FIG. 1 to 4 each schematically arranged differently arranged coupling pins and dielectrics
- Fig. 5 is a schematic view of the device according to the invention.
- a waveguide 10 having an upper wall 11 and a lower wall 12 are shown in cross section.
- the wall 21 of the applicator resonator chamber On the wall 12 of the waveguide 10 is the wall 21 of the applicator resonator chamber, of which the section shown is designated 20.
- the two walls 12 and 21 are each interrupted at equidistant distances a, wherein the distances a correspond to about half to the quarter wavelength of the microwave in the waveguide 10.
- only one of the variants is used, each with arranged coupling pins.
- a first variant (FIG. 1), the opening of the walls 12 and 21 is surrounded by a circular dielectric 30.
- the central opening of the dielectric D, through which the electrically conductive coupling pin made of graphite 31 is passed, is selected relative to the diameter d of the cylindrical coupling pin so that the characteristic impedance is matched.
- the coupling pin 31 protrudes with its two ends on the one hand into the resonator 20 of the applicator and the other in the waveguide interior 10.
- the coupling pin is in the direction of the double arrow 32 lvinsaxial displaced.
- the coupling pin 33 is displaceable in the direction of the double arrow 34 in a sleeve 40 made of a dielectric.
- the sleeve 40 projects only into the resonator 20 of the applicator.
- the coupling pin 35 consists of a coupling rod 36 which is longitudinally axially displaceable in the direction of the double arrow 37 in a surrounding sleeve 38 made of electrically conductive material in the direction of the double arrow 37.
- the coupling pin 39 is provided at its end projecting into the waveguide 10 with an extension 41 made of a dielectric material.
- the one common parts 39 and 41 formed rod is along the double arrow 42 longitudinally displaceable.
- electrically conductive coupling pins 31, 33, 36 and 39 graphite rods are arranged with a diameter d of 3 mm at a distance of 10 mm.
- Fig. 5 shows a schematic view of the structure of the device according to the invention, the essential parts of a short slide 49, a microwave generator 44, a waveguide 10 which is guided through an opening in the furnace wall 45 and the arrangement of the coupling pins 31 already described.
- the furnace interior, in which hard metal parts 48 are arranged on gratings, is shielded by a thermal insulation 46 to the outside.
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- Electromagnetism (AREA)
- Constitution Of High-Frequency Heating (AREA)
- Plasma Technology (AREA)
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Abstract
Description
Die Erfindung betrifft eine Vorrichtung zur Einstellung einer Mikrowellen-Energiedichteverteilung in einem einen Resonatorraum bildenden Applikator, in dem die von Mikrowellengeneratoren erzeugte Strahlung über Hohlleiter bis zur Applikatorwand geführt wird und eine Verwendung dieser Vorrichtung.The invention relates to a device for adjusting a microwave energy density distribution in a resonator forming an applicator, in which the radiation generated by microwave generators is guided via waveguides to the applicator and a use of this device.
In einer typischen industriellen Fertigung, in der Mikrowellen eingesetzt werden, ist der Mikrowellengenerator, der beispielsweise ein Magnetron sein kann, mit seiner Stromversorgung getrennt von dem Applikator, in dem die Mikrowellenenergie wirksam werden soll, angeordnet. Hierzu werden Hohlleiter, ggf. neben weiteren Komponenten, verwendet, über die die Mikrowellenenergie in den Applikator-Resonatorraum eingespeist wird.In a typical industrial manufacturing, where microwaves are used, the microwave generator, which may for example be a magnetron, is arranged with its power supply separate from the applicator in which the microwave energy is to be effective. For this purpose, waveguides, possibly in addition to other components, are used, via which the microwave energy is fed into the applicator resonator chamber.
Um in einem Applikator mehrere Moden mit unterschiedlichen Phasenlagen zu erzeugen, womit eine homogene Feldverteilung erreicht werden soll, besitzt der Applikator häufig Abmessungen, die ein Vielfaches der Wellenlänge der eingespeisten Mikrowelle betragen. Hierzu kann der Hohlleiter an einer Seite eines quaderförmigen Applikators angeflanscht werden. Dies hat allerdings den Nachteil, daß sich je nach räumlicher Ausdehnung der im Applikator befindlichen Probengruppen aufgrund der Feldverteilung nur in einzelnen Bereichen eine ausreichend homogene Feldverteilung erzielen läßt. Abhilfe schaffen geschlitzte Graphitplatten, über die Mikrowellen aus einem Hohlleiter ins Ofeninnere geführt werden; die Hohlleiter befinden sich dann an den Ecken des Applikatorraumes, wobei die Schlitze unter verschiedenen Winkeln angeordnet sind.In order to produce several modes with different phase angles in an applicator, with which a homogeneous field distribution is to be achieved, the applicator often has dimensions which amount to a multiple of the wavelength of the fed-in microwave. For this purpose, the waveguide can be flanged to one side of a cuboid applicator. However, this has the disadvantage that, depending on the spatial extent of the sample groups located in the applicator due to the field distribution can achieve a sufficiently homogeneous field distribution only in individual areas. Slotted graphite plates, via which microwaves are guided from a waveguide into the interior of the oven, help to remedy this situation; the waveguides are then located at the corners of the applicator space, with the slots located at different angles.
Bei stark absorbierenden Materialien in der Resonatorkammer ergeben sich jedoch bei großer Beladung dieser Kammer mit zu erwärmendem Gut große Änderungen der Mikrowellen-Verteilung. Wegen der fest vorgegebenen Anordnung der schlitzförmigen Antennen ist es auch nicht möglich, die Feldverteilung im Resonator-Innenraum in gewünschten Grenzen zu verändern.However, in the case of strongly absorbing materials in the resonator chamber large changes in the microwave distribution result when the chamber is to be heated with good material. Because of the fixed predetermined arrangement of the slot-shaped antennas, it is also not possible to change the field distribution in the resonator interior in desired limits.
Es ist daher Aufgabe der vorliegenden Erfindung, eine Vorrichtung der eingangs genannten Art zu schaffen, bei der die Mikrowelleneinspeisung möglichst verlustarm durchführbar ist und mit der eine Änderung der Feldverteilung im Resonatorraum möglich ist.It is therefore an object of the present invention to provide a device of the type mentioned, in which the microwave feed is possible with little loss feasible and with a change in the field distribution in the resonator is possible.
Diese Aufgabe wird durch die Vorrichtung nach Anspruch 1 gelöst, die erfindungsgemäß dadurch gekennzeichnet ist, daß mehrere elektrisch leitfähige Koppelstifte vorgesehen sind, die jeweils sowohl in den Hohlleiterraum als auch in den Applikatorraum vorzugsweise senkrecht hineinragen. Solche stiftförmigen Antennen lassen eine größere Feldhomogenität im Resonatorraum erzeugen, der zudem noch von dem Hohlleiter getrennt ist, so daß etwa im Resonatorraum entstehende Gase nicht in den Hohlleiter eindringen können. Dies ist insbesondere bei der Wärmebehandlung von vorgepreßten Grünlingen, die auf pulvermetallurgischem Weg hergestellt worden sind, zu deren Entwachsen (Entbindern) vorteilhaft. Entsprechendes gilt für Sinterprozesse, die in einer carburierenden Atmosphäre ablaufen.This object is achieved by the device according to claim 1, which is characterized according to the invention in that a plurality of electrically conductive coupling pins are provided, which preferably protrude in each case both vertically in the waveguide space and in the applicator. Such pin-shaped antennas can produce a larger field homogeneity in the resonator chamber, which is also still separated from the waveguide, so that about gases generated in the resonator cavity can not penetrate into the waveguide. This is particularly advantageous in the heat treatment of pre-pressed green compacts, which have been produced by powder metallurgy, for their dewaxing (debindering). The same applies to sintering processes that take place in a carburizing atmosphere.
Weiterbildungen der Erfindung sind in den Unteransprüchen beschrieben.Further developments of the invention are described in the subclaims.
So sind die Koppelstifte entlang ihrer Längsachse verschiebbar angeordnet, so daß in dem mit zu erwärmendem Gut beladenen Applikator die gewünschte Feldverteilung einstellbar ist. Ggf. lassen sich durch entsprechende Koppelstiftanordnungen graduierte Felder schaffen, beispielsweise mit einem im Raum ansteigenden Feld, das vorzugsweise im sogenannten Durchlaufprinzip benötigt wird, d.h. beim translatorischen Bewegen des zu behandelnden Gutes durch den Resonatorraum. Feldabhängigkeiten ergeben sich sowohl durch die Länge des Koppelstiftes und hier insbesondere die jeweiligen Längenanteile des Koppelstiftes, die in den Hohlleiter und in den Resonatorraum hineinragen. Die Koppelstifte können soweit von der Breit- als auch von der Schmalseite im Hohlleiter eingeführt werden.Thus, the coupling pins are slidably disposed along its longitudinal axis, so that in the loaded with zuwärendem good applicator, the desired field distribution is adjustable. Possibly. can be created by appropriate coupling pin arrays graduated fields, for example, with a rising space in the field, which is preferably required in the so-called flow principle, ie when translational movement of the material to be treated through the resonator. Field dependencies arise both by the length of the coupling pin and in particular the respective length portions of the coupling pin, which protrude into the waveguide and in the resonator. The coupling pins can be inserted far enough from the broad side as well as from the narrow side in the waveguide.
Bevorzugt werden der Hohlleiter und die Einkoppelfläche des Resonatorraums mit ihren Längsachsen parallel zueinander angeordnet, so daß mehrere in äquidistantem Abstand voneinander angeordnete Koppelstifte mit ihrem einen Ende in den Hohlleiter und mit ihrem anderen Ende in den Resonatorraum hineinragen. Um die Wanddurchführung für die Koppelstifte ist ein Dielektrikum angeordnet. Hierfür bieten sich verschiedene Ausführungsformen an. So kann in einer ersten Variante jeder der Koppelstifte in einer durch die Wand des Hohlleiters und/oder des Applikators ragenden Hülse aus dielektrischem Material verschiebbar geführt werden. In einer zweiten Variante wird der elektrisch leitfähige Koppelstift aus einem Koppelstab und einer diesen umgebenden Hülse gebildet, in der der Koppelstab längsaxial verschiebbar angeordnet ist. Schließlich kann der Koppelstift an seinem in den Hohlleiter ragenden Ende ein diesen Stift verlängerndes Stück aus einem Dielektrikum aufweisen, das vorzugsweise den Hohlleiterdurchmesser durchragt und an einer am gegenüberliegenden Ende befindlichen Hohlleiteröffnung nach außen geführt ist.Preferably, the waveguide and the coupling surface of the resonator are arranged with their longitudinal axes parallel to each other, so that a plurality of equidistant spaced coupling pins protrude with its one end in the waveguide and with its other end in the resonator. To the wall bushing for the coupling pins, a dielectric is arranged. For this purpose, various embodiments offer. Thus, in a first variant, each of the coupling pins can be displaceably guided in a sleeve of dielectric material projecting through the wall of the waveguide and / or the applicator. In a second variant of the electrically conductive coupling pin is formed of a coupling rod and a surrounding sleeve, in which the coupling rod is arranged längsaxial displaced. Finally, the coupling pin may have at its projecting into the waveguide end a pin extending this piece of a dielectric, which preferably extends through the waveguide diameter and is guided at a located at the opposite end waveguide opening to the outside.
Als Material für den Koppelstift bieten sich Graphit, Metall wie z.B. Kupfer, Aluminium, Wolfram oder Molybdän, Metallegierungen wie Messing oder Stahl oder andere Legierungen, die jedoch entsprechend temperaturbeständig sein müssen, oder ein Isolator mit einer elektrischen Beschichtung an, die vorzugsweise aus TiN besteht. Als Material für das Dielektrikum werden Bornitrid oder eine Keramik wie Aluminiumoxid, Siliciumnitrid oder Quarz gewählt.The material used for the coupling pin is graphite, metal such as copper, aluminum, tungsten or molybdenum, metal alloys such as brass or steel or other alloys that However, must be correspondingly temperature resistant, or an insulator with an electrical coating, which preferably consists of TiN. Boron nitride or a ceramic such as aluminum oxide, silicon nitride or quartz are selected as the material for the dielectric.
In längsaxialer Richtung des Hohlleiters gesehen ragen die Koppelstifte jeweils im Bereich der Maxima der dort eingespeisten Mikrowelle heraus.Seen in the longitudinal axial direction of the waveguide, the coupling pins protrude in each case in the region of the maxima of the microwave fed there.
Die Einkoppelung der Mikrowelle kann kapazitiv oder induktiv erfolgen.The coupling of the microwave can be capacitive or inductive.
Die Geometrie des Stiftes ist nach einer weiteren Ausgestaltung der Erfindung zylindrisch, wobei vorzugsweise die Kanten und Ecken des Stiftes abgerundet sind. In praktischen Anwendungsfällen ist der Durchmesser der Koppelstifte zwischen 1 mm bis 30 mm, vorzugsweise 5 mm bis 15 mm, gewählt worden; die Stiftlänge 1, mit der die Koppelstifte in den Resonatorraum hineinragen, beträgt 1 = x · λ (mit 0 ≤ x ≤ 1 und λ = Wellenlänge der Mikrowelle im Hohlleiter), vorzugsweise ist 1 = λ/4 bis λ/2.The geometry of the pin is cylindrical according to a further embodiment of the invention, wherein preferably the edges and corners of the pin are rounded. In practical applications, the diameter of the coupling pins has been chosen between 1 mm to 30 mm, preferably 5 mm to 15 mm; the pin length 1 with which the coupling pins protrude into the resonator chamber is 1 = x · λ (where 0≤x≤1 and λ = wavelength of the microwave in the waveguide), preferably 1 = λ / 4 to λ / 2.
Das Verhältnis des Öffnungsdurchmessers D im Hohlleiter, durch den der Koppelstift geführt wird, zum Koppelstiftdurchmesser d wird so gewählt, daß der Wellenwiderstand angepaßt ist. Die Abstände der Koppelstifte betragen λ/4 bis λ/2 (mit λ = Wellenlänge der Mikrowelle im Hohlleiter).The ratio of the opening diameter D in the waveguide through which the coupling pin is guided to the coupling pin diameter d is chosen so that the characteristic impedance is adjusted. The distances of the coupling pins are λ / 4 to λ / 2 (with λ = wavelength of the microwave in the waveguide).
Das durch die Mikrowelle zu behandelnde Stückgut wird im Applikator-Resonanzraum auf Gitterrosten angeordnet, die aus rundlichen Gitterstäben bestehen, die vorzugsweise senkrecht zum elektrischen Feld der Mikrowelle ausgerichtet sind.The product to be treated by the microwave is arranged in the applicator resonance space on gratings, which consist of round bars, which are preferably aligned perpendicular to the electric field of the microwave.
Nach einer weiteren Ausgestaltung der Erfindung sind die neben- oder aneinanderliegenden Wände des Hohlleiters und des Applikators thermisch gegeneinander isoliert.According to a further embodiment of the invention, the adjacent or adjoining walls of the waveguide and the applicator are thermally insulated from each other.
Die beschriebene Vorrichtung kann zur Entbinderung von Grünlingen aus einem Binder und einem der nachfolgend genannten Stoffe und/oder zur Sinterung von Hartmetallen, Cermets, pulvermetallurgisch hergestellten Stählen oder metallischen oder keramischen Magnetwerkstoffen, insbesondere Ferriten verwendet werden. Spezielle Anwendungsbeispiele sowohl im Hinblick auf die Auswahl der durch Sinterung in einem Mikrowellenfeld herstellbaren Verbundwerkstoffe als auch verfahrenstechnische Maßnahmen werden in der WO 96/33830 und der WO 97/26383 benannt.The device described can be used for debindering green compacts from a binder and one of the following substances and / or for sintering hard metals, cermets, powder metallurgy steels or metallic or ceramic magnetic materials, in particular ferrites. Specific application examples both with regard to the selection of the composites that can be produced by sintering in a microwave field and also procedural measures are named in WO 96/33830 and WO 97/26383.
Die genannte Vorrichtung läßt sich jedoch ebenso für die Erzeugung eines Plasma, wie es beispielsweise bei CVD-Beschichtungen benötigt wird, verwenden.However, said device can also be used for the production of a plasma, as required for example in CVD coatings.
Ausführungsbeispiele der Erfindung sind in den Zeichnungen dargestellt. Es zeigen Fig. 1 bis 4 jeweils in schematischer Weise verschieden angeordnete Koppelstifte und Dielektrika und Fig. 5 eine schematische Ansicht der erfindungsgemäßen Vorrichtung.Embodiments of the invention are illustrated in the drawings. 1 to 4 each schematically arranged differently arranged coupling pins and dielectrics and Fig. 5 is a schematic view of the device according to the invention.
In den Fig. 1 bis 4 sind ein Hohlleiter 10 mit einer oberen Wand 11 und einer unteren Wand 12 im Querschnitt dargestellt. An der Wand 12 des Hohlleiters 10 liegt die Wand 21 des Applikator-Resonanzraumes, von dem der dargestellte Ausschnitt mit 20 bezeichnet ist. Die beiden Wände 12 und 21 sind jeweils in äquidistanten Abständen a durchbrochen, wobei die Abstände a etwa der halben bis der viertel Wellenlänge der Mikrowelle im Hohlleiter 10 entsprechen. In der Praxis wird nur eine der Varianten mit jeweils angeordneten Koppelstiften verwendet. In einer ersten Variante (Fig. 1) ist die Durchbrechung der Wände 12 und 21 von einem kreisrunden Dielektrikum 30 umgeben.In Figs. 1 to 4, a
Die mittlere Öffnung des Dielektrikums D, durch die der elektrisch leitfähige Koppelstift aus Graphit 31 hindurchgeführt ist, ist relativ zu dem Durchmesser d des zylindrischen Koppelstiftes so gewählt, daß der Wellenwiderstand angepaßt ist. Der Koppelstift 31 ragt mit seinen beiden Enden zum einen in den Resonatorraum 20 des Applikators und zum anderen in den Hohlleiterinnenraum 10. Der Koppelstift ist in Richtung des Doppelpfeiles 32 längsaxial verschiebbar.The central opening of the dielectric D, through which the electrically conductive coupling pin made of
In einer weiteren Ausführungsvariante gemäß Fig. 2 ist der Koppelstift 33 in Richtung des Doppelpfeiles 34 in einer Hülse 40 aus einem Dielektrikum verschiebbar. Die Hülse 40 ragt ausschließlich in den Resonatorraum 20 des Applikators hinein.In a further embodiment according to FIG. 2, the
Nach einer weiteren Variante gemäß Fig. 3 besteht der Koppelstift 35 aus einem Koppelstab 36, der in Richtung des Doppelpfeiles 37 in einer diesen umgebenden Hülse 38 aus elektrisch leitfähigem Material längsaxial in Richtung des Doppelpfeiles 37 verschiebbar ist.According to a further variant of FIG. 3, the
In einer letzten Variante gemäß Fig. 4 ist der Koppelstift 39 an seinem in den Hohlleiter 10 ragenden Ende mit einer Verlängerung 41 aus einem dielektrischen Material versehen. Der einen gemeinsamen aus Teilen 39 und 41 gebildete Stab ist entlang des Doppelpfeiles 42 längsaxial verschiebbar. Als elektrisch leitfähige Koppelstifte 31, 33, 36 und 39 werden Graphitstäbe mit einem Durchmesser d von 3 mm in einem Abstand von 10 mm angeordnet. Durch Verschieben der jeweilige Antennen bildenden Koppelstifte kann nicht nur die Mikrowelle aus dem Hohlleiter in den Applikator-Innenraum 20 übertragen werden, sondern auch durch Ausrichtung der Koppelstifte eine homogene Feldverteilung im Innenraum 20 erzeugt werden.In a last variant according to FIG. 4, the
Fig. 5 zeigt eine schematische Ansicht des Aufbaus der erfindungsgemäßen Vorrichtung, deren wesentlichen Teile ein Kurzschlußschieber 49, ein Mikrowellengenerator 44, ein Hohlleiter 10, der durch eine Öffnung in der Ofenwand 45 geführt ist und die bereits beschriebene Anordnung der Koppelstifte 31 sind. Der Ofeninnenraum, in dem Hartmetallteile 48 auf Gitterrosten angeordnet sind, ist durch eine thermische Isolation 46 nach außen abgeschirmt.Fig. 5 shows a schematic view of the structure of the device according to the invention, the essential parts of a short slide 49, a
Claims (10)
- Device for adjusting a microwave energy density distribution in an applicator forming a resonator chamber (20) in which the radiation generated by the microwave generators is fed up to the applicator wall via a waveguide (10), characterized in that a plurality of electrically-conductive coupling pins (31, 33, 36, 38 or 39) are provided which respectively project into the waveguide chamber as well as into the applicator resonator chamber radially.
- Device according to claim 1, characterized in that the coupling pins are shiftable long their longitudinal axes and / or that the waveguide (10) and the coupling surface of the resonator chamber (20) are arranged with their longitudinal axes parallel to one another.
- Device according to claim 1 or 2, characterized in that a dielectric (30, 40) is arranged around the wall passthrough for the coupling pins (31, 33, 38) and /or that the coupling pins (33) are shiftable guided in a sleeve (40) of dielectric material passing through the wall (12) of the waveguide and / or the applicator (21).
- Device according to claims 1 to 3, characterized in that the electrically conductive coupling pin (35) is formed from a coupling rod (36) and a sleeve (38) surrounding it in which the coupling rod (36) is longitudinally axially shiftable or that the coupling pin (39) at its end projecting into the waveguide (10) has a pin extending piece (41) of a dielectric which preferably extends through the waveguide along a waveguide diameter and at its opposite end passes outwardly through an opening in the waveguide.
- Device according to claims 3 to 4, characterized in that the coupling pin is composed of graphite, a metal like copper, aluminium, tungsten or molybdenum, a metal alloy like brass or steel, or an insulator with an electric coating, preferably TiN, and / or the dielectric (30, 40) is comprised of boron nitride or ceramic, preferably aluminium oxide, silicon nitride or quartz.
- Device according to claims 1 to 5, characterized in that the coupling pins (31, 33, 38, 39) are each arranged in regions in the maxima of the microwave radiation in the waveguide and / or by a capacitative or inductive coupling of the microwave radiation through coupling pins.
- Device according to claims 1 to 6, characterized in that the coupling pins are of cylindrical configuration, preferably with rounded edges and corners and / or that the diameter (d) of the coupling pins is 1 mm to 30 mm, preferably 5 mm to 15 mm, and / or the lengths (1) with which the coupling pins (31, 33, 38, 36 and 39) project into the resonator chamber (20) are 1 = x . X (with 0 ≤x ≤1 and λ = the wavelength of the microwave in waveguide (10)), preferably 1 = λ/4 to λ/2.
- Device according to one of the claims 3 to 7, characterized in that the diameter of the dielectric in the waveguide is matched to the wave resonance and / or that the spacing (a) of the coupling pins is λ/4 to λ/2 with λ = wavelength of the microwave in the waveguide (10).
- Device according to one of the claims 1 to 8, characterized in that a grate with rounded grate bars as support for the material to be treated is provided in the applicator resonance chamber, whereby preferably the grate bars are perpendicular to the electric field of the microwave and / or that the neighboring or adjacent walls (12, 21) of the waveguide (10) and the applicator are thermally insulated from one another.
- Use of the device according to one of claims 1 to 9 for removing binder from green bodies composed of a binder and one of the following materials and / or for sintering of hard metals, cermets, powder metallurgically produced steels or metallic or ceramic magnetic materials especially ferrites, or for generating plasma.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10005146 | 2000-02-04 | ||
| DE10005146A DE10005146A1 (en) | 2000-02-04 | 2000-02-04 | Device for setting a microwave energy density distribution in an applicator and use of this device |
| PCT/DE2001/000259 WO2001058215A1 (en) | 2000-02-04 | 2001-01-19 | Device for adjusting the distribution of microwave energy density in an applicator and use of this device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| EP1252802A1 EP1252802A1 (en) | 2002-10-30 |
| EP1252802B1 true EP1252802B1 (en) | 2007-03-14 |
Family
ID=7629967
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP01911377A Expired - Lifetime EP1252802B1 (en) | 2000-02-04 | 2001-01-19 | Device for adjusting the distribution of microwave energy density in an applicator and use of this device |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6630653B2 (en) |
| EP (1) | EP1252802B1 (en) |
| JP (1) | JP2003522392A (en) |
| AT (1) | ATE357124T1 (en) |
| DE (2) | DE10005146A1 (en) |
| WO (1) | WO2001058215A1 (en) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7189940B2 (en) * | 2002-12-04 | 2007-03-13 | Btu International Inc. | Plasma-assisted melting |
| DE10326964B3 (en) * | 2003-06-16 | 2004-12-09 | Nexpress Solutions Llc | Microwave absorption swivel-mounted blade for photocopier microwave resonance chamber is made of two types of material with different absorption characteristics |
| DE102004021016B4 (en) * | 2004-04-29 | 2015-04-23 | Neue Materialien Bayreuth Gmbh | Device for feeding microwave radiation into hot process spaces |
| EP1853094B1 (en) * | 2006-05-04 | 2008-07-02 | Topinox Sarl | Microwave antennas configuration, accessory with such a microwave antennas configuration and equipment with at least such an accessory |
| DE102006046422B4 (en) * | 2006-09-22 | 2021-01-14 | Wiesheu Gmbh | Oven for heat treatment of food |
| WO2008115226A2 (en) * | 2007-03-15 | 2008-09-25 | Capital Technologies, Inc. | Processing apparatus with an electromagnetic launch |
| US7518092B2 (en) * | 2007-03-15 | 2009-04-14 | Capital Technologies, Inc. | Processing apparatus with an electromagnetic launch |
| DE202007019030U1 (en) | 2007-09-19 | 2010-04-15 | Neue Materialien Bayreuth Gmbh | hybrid oven |
| US8451437B2 (en) | 2011-02-17 | 2013-05-28 | Global Oled Technology Llc | Electroluminescent light output sensing for variation detection |
| DE102014211575A1 (en) * | 2014-06-17 | 2015-12-17 | Hauni Maschinenbau Ag | Microwave measuring device, arrangement and method for checking rod-shaped articles or a material strand of the tobacco-processing industry and machine of the tobacco-processing industry |
| CN111213433A (en) * | 2017-08-15 | 2020-05-29 | 高知有限公司 | Controlling microwave heating by moving radiators |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1615463C3 (en) * | 1967-11-16 | 1975-07-03 | Bowmar/Tic, Inc., Newbury Park, Calif. (V.St.A.) | Oven with radiation of microwave energy and with a resistance heated metal element |
| JPS523142Y2 (en) * | 1972-05-25 | 1977-01-24 | ||
| US3993886A (en) * | 1974-08-30 | 1976-11-23 | U.S. Philips Corporation | Supply wave guide system in microwave ovens |
| GB1543980A (en) * | 1975-05-19 | 1979-04-11 | Matsushita Electric Ind Co Ltd | Microwave heating apparatus |
| JPS5211447A (en) * | 1975-07-18 | 1977-01-28 | Matsushita Electric Ind Co Ltd | High frequency heating apparatus |
| JPS5472534A (en) * | 1977-11-18 | 1979-06-11 | Matsushita Electric Ind Co Ltd | High frequency heating device |
| US4689459A (en) * | 1985-09-09 | 1987-08-25 | Gerling John E | Variable Q microwave applicator and method |
| DE3641063A1 (en) * | 1986-12-01 | 1988-06-16 | Bosch Siemens Hausgeraete | Microwave oven for treating foodstuffs |
| DE3811063A1 (en) * | 1988-03-31 | 1989-10-19 | Berstorff Gmbh Masch Hermann | DEVICE FOR CONTINUOUSLY HEATING, PASTEURIZING OR STERILIZING FOOD OR THE LIKE |
| US4851630A (en) * | 1988-06-23 | 1989-07-25 | Applied Science & Technology, Inc. | Microwave reactive gas generator |
| DE4235410C2 (en) | 1992-10-21 | 1995-06-14 | Troester Maschf Paul | Adjustment device for microwave transmission in a waveguide |
| JP2627730B2 (en) * | 1993-09-23 | 1997-07-09 | エルジー電子株式会社 | Automatic matching device for microwave oven |
| DE4340652C2 (en) * | 1993-11-30 | 2003-10-16 | Widia Gmbh | Composite and process for its manufacture |
| DE19601234A1 (en) | 1996-01-15 | 1997-07-17 | Widia Gmbh | Composite body and process for its manufacture |
| US5816445A (en) * | 1996-01-25 | 1998-10-06 | Stainless Steel Coatings, Inc. | Method of and apparatus for controlled dispensing of two-part bonding, casting and similar fluids and the like |
-
2000
- 2000-02-04 DE DE10005146A patent/DE10005146A1/en not_active Withdrawn
-
2001
- 2001-01-19 DE DE50112190T patent/DE50112190D1/en not_active Expired - Lifetime
- 2001-01-19 AT AT01911377T patent/ATE357124T1/en active
- 2001-01-19 US US10/168,786 patent/US6630653B2/en not_active Expired - Fee Related
- 2001-01-19 EP EP01911377A patent/EP1252802B1/en not_active Expired - Lifetime
- 2001-01-19 WO PCT/DE2001/000259 patent/WO2001058215A1/en active IP Right Grant
- 2001-01-19 JP JP2001557337A patent/JP2003522392A/en not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| EP1252802A1 (en) | 2002-10-30 |
| US20020190061A1 (en) | 2002-12-19 |
| ATE357124T1 (en) | 2007-04-15 |
| DE50112190D1 (en) | 2007-04-26 |
| US6630653B2 (en) | 2003-10-07 |
| DE10005146A1 (en) | 2001-08-09 |
| JP2003522392A (en) | 2003-07-22 |
| WO2001058215A1 (en) | 2001-08-09 |
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