EP1234323A2 - Systeme de surveillance pour dispositif de transport de pieces plates, notamment de pastilles - Google Patents

Systeme de surveillance pour dispositif de transport de pieces plates, notamment de pastilles

Info

Publication number
EP1234323A2
EP1234323A2 EP00993283A EP00993283A EP1234323A2 EP 1234323 A2 EP1234323 A2 EP 1234323A2 EP 00993283 A EP00993283 A EP 00993283A EP 00993283 A EP00993283 A EP 00993283A EP 1234323 A2 EP1234323 A2 EP 1234323A2
Authority
EP
European Patent Office
Prior art keywords
light
monitoring system
carriage
movement
frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP00993283A
Other languages
German (de)
English (en)
Inventor
Hans Leitner
Xaver Kollmer
Günther SCHINDLER
Ernst Georg Frisch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Logitex Reinstmedientechnik GmbH
Original Assignee
Logitex Reinstmedientechnik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Logitex Reinstmedientechnik GmbH filed Critical Logitex Reinstmedientechnik GmbH
Publication of EP1234323A2 publication Critical patent/EP1234323A2/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/404—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for compensation, e.g. for backlash, overshoot, tool offset, tool wear, temperature, machine construction errors, load, inertia
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37555—Camera detects orientation, position workpiece, points of workpiece
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37571—Camera detecting reflected light from laser
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/137—Associated with semiconductor wafer handling including means for charging or discharging wafer cassette

Definitions

  • the invention relates to a monitoring system for a transport device for flat parts, in particular wafer slices.
  • Wafer wafers are thin wafers made of silicon, such as those used for the production of integrated circuits, solar cells, etc. Such wafer slices have to be handled with extreme care in clean rooms if they are transported from one processing step to another processing step in the course of the production of the integrated circuit, the solar cell, etc.
  • FIG. 3 shows a schematic plan view of a device for carrying out various processing steps of a wafer wafer.
  • a housing 2 forming a storage chamber is arranged with two frames 4, 6, which have compartments 8 (FIG. 5) one above the other, in which wafer slices 10 can be stored.
  • the housing 2 can be pushed back and forth by means of a motor 11 via a device (not shown in detail) on a fixed rail 12 in the direction of the double arrow 14, so that in one setting the one frame 4 and in the other setting the other frame 6 one Opening 16 of a housing 18 is opposite, which has further openings 20 to which working chambers 22 are connected.
  • a robot 24 (FIG. 4) is arranged in the housing 18 and has a support arm 26 on which a carriage 28 is arranged.
  • the carriage 28 has a depression 30, the bottom 32 of which is provided with vacuum slots 34 and capacitive proximity sensors 36.
  • Motors 38 and 40 are provided for moving the support arm 26, by means of which the support arm 26 is in a movement perpendicular to a central axis of rotation of the robot 24. swung plane and its distance from the axis of rotation can be changed.
  • the carriage 28 can be rigidly attached to the support arm 26 or be displaceable on the support arm 26 by means of a further drive, not shown.
  • Fig. 5 shows a perspective front view of the partially cut or basically open to the front housing 2, two rooms are visible, of which only the left is equipped with the frame 4.
  • the motor 10 is used for the back and forth movement of the housing 2 on the rail 12.
  • the housing 2 cannot be moved directly on the rail 12, but is arranged on a frame part 42, which together with the housing 2 can be moved along the rail 12 is.
  • the housing 2 can be displaced in height relative to the frame part 42 by means of a servomotor 44 in the direction of the double arrow 46, so that the individual compartments 8 with wafer disks 10 accommodated therein and not shown in FIG. 5 can be successively positioned at the same height.
  • the basic function is such that, according to FIG. 3, the robot 24 inserts the slide 28 in a once-adjusted, horizontal plane out of the opening 16 into an opposite compartment of the frame 4.
  • the frame 4 is then slightly lowered vertically with the aid of the servomotor 44 until the proximity sensors 36 determine the approach of a wafer 10 lying on a shelf of a shelf 8.
  • the wafer disk 10 comes to rest on the bottom 32 of the depression 30 and is held there when the vacuum slots 34 are activated.
  • the carriage 28 then moves out of the frame 4 into the interior of the housing 18 and through a first of the openings 20 into a first of the working chambers 22, in order to be stored and processed there.
  • the wafer 10 is fetched from the carriage 28 and brought into a next working chamber, etc., until after the processing steps in the individual working chambers 22 have been completed, it is deposited by the carriage 28 in the right frame 6 according to FIG. 3, the housing 2 3 is moved to the left. The carriage 28 is then moved out of the frame 6, the housing is moved to the right and the next wafer is removed from the housing.
  • Stell 4 picked up by first lowering it by the height of a compartment, so that after the carriage 28 has been moved into the next compartment and then the frame 4 has been lowered further, the next wafer 10 comes to rest on the carriage 28.
  • the individual openings 16 and 20 of the housing 18 can be closed by means of a vacuum-tight slide, so that work can be carried out under vacuum overall.
  • a problem that arises when processing by means of the described device is that the carriage 28 moved by the robot 24 changes its horizontal plane of movement, be it due to wear or high thermal stresses when it enters the partially high temperature Working chambers 22.
  • the vertical distance between the individual compartments 8 in the frames 4 and 6 is relatively small, so that even a slight deformation or deflection of the slide from its desired path of movement entails the risk that the slide will already be in its retraction touches a wafer in the frame 4 and damages it or that the wafer is then no longer properly placed on the carriage.
  • the invention has for its object to provide a remedy for the problem mentioned.
  • the monitoring system according to the invention is suitable for transport devices in accordance with the main claim of various types of flat parts, such as sensitive mica platelets, ceramic platelets, printed circuit boards, etc.
  • the monitoring system according to the invention is particularly well suited for transport devices from Wafer slices, the handling of which is particularly demanding.
  • 1 is a block diagram of the monitoring system
  • FIG. 4 shows a perspective view of a robot used in the device of FIG. 3,
  • FIG. 5 is a front perspective view of the device of FIG. 3,
  • Fig. 6 is a perspective view of a modified embodiment of a wafer processing device
  • FIG. 7 shows a section through a storage chamber of the device according to FIG. 5.
  • the monitoring system contains a light source 50 and a light receiver 52 arranged at a distance from the light source 50, which are connected to a control unit 54 to which a display unit 56 is connected.
  • the light source 50 advantageously contains a laser light source, the light of which is influenced by optics in such a way that a parallel light bundle 60 (shown in broken lines) emerges from an exit window 58 in the form of a vertical slot.
  • the light bundle 60 enters an entry window 62 of the light receiver 52 which is opposite the exit window 58 and which is advantageously designed in accordance with the exit slot.
  • the light entering the entry window 62 is imaged on a photodiode, the output signal of which is fed to the control unit 54.
  • the control unit 54 contains, in a manner known per se, a microprocessor and an evaluation device 64, the function of which is explained further below.
  • the light receiver 50 is attached to the fixed housing 18 on one side of the opening 16 and the light receiver 52 on the other side of the opening 16.
  • the desired plane of movement in which the carriage 28 moves as it moves into the frame 4 and out of the frame 4, is such that the underside 66 of the carriage 28 intersects the light beam 60 at a predetermined height, so that a corresponding predetermined height of the entrance window 62 is shadowed and the output signal of the light receiver 52 decreases accordingly.
  • curve K represents a measurement curve which represents the exit signal of light receiver 52.
  • area A there is no object between the light source 50 and the light receiver 52, so that the latter receives the full light intensity which is set to one hundred in the evaluation unit 64.
  • the intensity of the light falling on the light receiver 52 suddenly decreases depending on the contour of the carriage, which is recognized by the evaluation device 64 and sets a time or count signal to zero.
  • the curve K assumes a characteristic course when the carriage 28 is moved through the light beam 60 (the short-term deviation from the horizontal course in the form of the decrease M is shown, for example, by one from the underside 66 of the carriage 28 protruding screw) to then increase again depending on the contour of the carriage until the carriage has completely moved through the light beam 60 and the output signal in region A resumes its original value.
  • the curve K can be recorded with a different clock frequency and evaluated in different ways.
  • the area I between the dashed lines indicates a very narrow precision area within which an average value of the output signal formed, for example, between the counting points tl and t2 must lie so that the carriage movement is recognized as being in a very good order.
  • the measured value lies between the dash-dotted curves II, the movement of the carriage is considered to be still tolerable. Outside of area II, it is considered to be intolerable and leads to an error message.
  • the display can follow directly on a screen similar to FIG. 2 and / or the display can take place by means of diodes, whereby green diodes mean "IO”, yellow diodes mean “still tolerable” and red diodes indicate insufficient movement accuracy that require readjustment or the like of the carriage.
  • the monitoring device can be installed as a separate, independent system or can be integrated in the control system of the motors for the robot and the drive of the housing 2 in a horizontal and vertical direction, for example by corresponding time stamps are supplied from the control device of the electric motors to the control device 54 and so on.
  • a drift of the measurement result can be detected so that systematic changes can be observed and extrapolated, whereby errors can be predicted.
  • a diode bar can be arranged behind the entrance window 62, so that the absolute value of the height of the underside 66 can be detected directly within the light beam 60.
  • the arrangement can also be designed such that the top of the carriage 28 is scanned so that first the top of the carriage outside the depression 30 is detected and then a wafer disc lying in the depression 30 is detected, so that with the Monitoring the flawless movement of the carriage, the flawless positioning of a wafer and even the flawless quality of the wafer itself can be monitored.
  • FIG. 6 shows a modified embodiment of a wafer wafer processing device, the same reference numerals as in FIGS. 3 to 5 being used for functionally similar components.
  • the view of FIG. 6 corresponds with respect to the viewing direction of a view of the arrangement according to FIG. 5 obliquely from behind.
  • the housing 2 which receives the frames 4 and 6, not shown, contains two hermetically closable housing parts 2a and 2b, which contain vacuum chambers in which holders 67 for the magazines or frames 4 and 6 (FIGS. 3 and 5) are accommodated.
  • the brackets 67 can be moved vertically by means of servomotors 68.
  • the entire housing 2 is rigidly attached to a base frame (not shown).
  • a base frame not shown.
  • a light source 50 and a light receiver 52 are arranged within each housing part 2a and 2b , which are connected via cable 68 to the control unit 54 (FIG. 1).
  • the receiving chambers formed in the housing parts 2a and 2b are open in FIG. 6 and can be closed air-tight with slides 72a and 72b. With the slides 72a and 72b open, frames equipped with wafer disks can be inserted or removed from the holders 67.
  • FIG. 7 represents a horizontal section through the housing part 2a.
  • the light source 50, the light receiver 52, the slide 28, the frame 6 and a wafer disk 10 are visible.
  • the arrangement of the light source 50 and the light receiver 52 and the dimensions are such that the light bundle 60 (FIG. 1) freely shines through a space between two compartments equipped with wafer disks 10 when the carriage 28 is not within the frame 6 and the frame in a predetermined step position located.
  • the function sequence of the monitoring system when using the embodiment according to FIGS. 6 and 7 is as follows:
  • the magazines are each in a position by actuating the stepping motors 68, in which the light beam shines through the space between two compartments without being covered, i.e. in the diagram of FIG. 2 there is a signal value in the area A, that is to say a maximum value of the output signal of the light receiver (s) 52.
  • the function is only for one of the magazines, for example that in the right housing part 2b according to FIG. 6 described magazine, not shown. If the maximum value of the light intensity is not measured in the position of the slide 28 outside the housing part 2b, this indicates an error in the associated stepping motor 68 or in its control.
  • the monitoring system can be used to control the actuation of stepper motor 68 by actuating it until maximum light intensity is reached. This can be done on a trial basis for an entire newly inserted magazine, possibly loaded with wafer disks, so that magazine inaccuracies can be compensated for by the stepping motor 68 always being actuated in such a way that the space between two shelves is arranged in such a way that it is completely separated from that Beam of light 60 is shone through. It goes without saying that it is advantageous to dimension the height dimension of the light beam 60 somewhat smaller than the distance between two shelves, so that the maximum output signal is guaranteed.
  • the transport arm 28 is now moved into the housing part 2b into the space between two compartment bases or two wafer disks received at their edges by the compartment bases, this movement being monitored according to FIG. 2 becomes.
  • the monitoring differs somewhat from the illustration in FIG. 2 in that the carriage moves from the left area A only in the area B and does not move completely through the light beam.
  • the frame is lowered, whereby the lowering takes place by a predetermined amount, or, if the proximity sensors 36 (FIG. 4) are provided, the lowering is controlled via the proximity sensors 36.
  • the wafer disk lying on the carriage is then held in place by means of vacuum application of the vacuum slots 34 and moved out of the housing part 2a.
  • the monitoring system according to the invention described by way of example thus makes it possible, with extremely little equipment (light transmitter and light receiver) in the production facility, to carry out targeted monitoring which monitors the vertical movement of the frame formed with the compartments for receiving the wafer disks and the movement of the Wafer slices transporting carriage uses only one light receiver and light transmitter, the light receiver only generating a simple output signal corresponding to an overall irradiation intensity.

Abstract

L"invention concerne un système de surveillance pour un dispositif de transport de pièces plates, notamment de pastilles. Ce système de transport présente un chariot (28) pouvant être déplacé le long d"une trajectoire prédéterminée à proximité d"une pièce plate (10) située en un point de prélèvement prédéterminé, ledit chariot comportant un dispositif de réception pour loger ladite pièce plate (10). Le système de surveillance comprend une source lumineuse (50) avec une fenêtre de sortie de lumière et un récepteur de lumière (52) avec une fenêtre d"entrée de lumière. La fenêtre de sortie de lumière et la fenêtre d"entrée de lumière sont positionnées de manière qu"un faisceau lumineux provenant de la fenêtre de sortie de lumière et dirigé vers la fenêtre d"entrée de lumière soit en partie recouvert par le chariot (28) pendant son déplacement à travers ledit faisceau lumineux. Le système de surveillance comprend en outre un dispositif d"évaluation raccordé au récepteur de lumière, qui compare un signal théorique dérivé du déplacement du chariot le long d"une trajectoire théorique, avec un signal réel dérivé d"un déplacement réel du chariot, et indique un éventuel écart.
EP00993283A 1999-12-02 2000-12-01 Systeme de surveillance pour dispositif de transport de pieces plates, notamment de pastilles Withdrawn EP1234323A2 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19958082 1999-12-02
DE19958082A DE19958082A1 (de) 1999-12-02 1999-12-02 Überwachungssystem für eine Transportvorrichtung von Flachteilen, insbesondere Wafer-Scheiben
PCT/EP2000/012103 WO2001040884A2 (fr) 1999-12-02 2000-12-01 Systeme de surveillance pour dispositif de transport de pieces plates, notamment de pastilles

Publications (1)

Publication Number Publication Date
EP1234323A2 true EP1234323A2 (fr) 2002-08-28

Family

ID=7931162

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00993283A Withdrawn EP1234323A2 (fr) 1999-12-02 2000-12-01 Systeme de surveillance pour dispositif de transport de pieces plates, notamment de pastilles

Country Status (4)

Country Link
US (1) US6681148B2 (fr)
EP (1) EP1234323A2 (fr)
DE (1) DE19958082A1 (fr)
WO (1) WO2001040884A2 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7489779B2 (en) * 2001-03-22 2009-02-10 Qstholdings, Llc Hardware implementation of the secure hash standard
KR100568867B1 (ko) * 2004-03-18 2006-04-10 삼성전자주식회사 웨이퍼 좌표감지장치 및 그 웨이퍼 좌표감지 기능을 갖는반도체 제조설비

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JPH07115773B2 (ja) 1986-01-29 1995-12-13 株式会社ニコン 基板搬送装置
US5605428A (en) * 1993-03-05 1997-02-25 Jenoptik Gmbh Device for indexing magazine compartments and wafer-shaped objects in the compartments
DE4310149C2 (de) * 1993-03-29 1996-05-02 Jenoptik Jena Gmbh Einrichtung zur Handhabung von scheibenförmigen Objekten in einer Handhabungsebene eines lokalen Reinraumes
DE4326309C1 (de) * 1993-08-05 1994-09-15 Jenoptik Jena Gmbh Vorrichtung zum Transport von Wafermagazinen
US5466945A (en) * 1994-03-23 1995-11-14 Eaton Corporation Apparatus for detecting proper positioning of objects in a holder
KR100213991B1 (ko) * 1994-05-23 1999-08-02 히가시 데쓰로 프로우브 장치
KR100315007B1 (ko) * 1995-11-22 2002-02-28 이시다 아키라 카세트내의 기판 검출 및 반송장치와 그 방법
JP3327130B2 (ja) * 1996-07-24 2002-09-24 ウシオ電機株式会社 物体検出方法およびウエハ搬送アームの検出装置
JPH11150078A (ja) * 1997-11-17 1999-06-02 Ulvac Corp 縦型熱処理炉
JPH11179692A (ja) * 1997-12-16 1999-07-06 Shin Meiwa Ind Co Ltd 産業用ロボットのハンド異常検出装置及びハンド異常検出方法
JPH11254359A (ja) * 1998-03-12 1999-09-21 Toyota Autom Loom Works Ltd 部材搬送システム
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Title
See references of WO0140884A3 *

Also Published As

Publication number Publication date
WO2001040884A9 (fr) 2002-09-19
WO2001040884A3 (fr) 2002-02-14
US20020182052A1 (en) 2002-12-05
WO2001040884A2 (fr) 2001-06-07
DE19958082A1 (de) 2001-06-07
US6681148B2 (en) 2004-01-20

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