EP1205964A4 - Plasma process device, electrode structure thereof, and stage structure - Google Patents

Plasma process device, electrode structure thereof, and stage structure

Info

Publication number
EP1205964A4
EP1205964A4 EP00937315A EP00937315A EP1205964A4 EP 1205964 A4 EP1205964 A4 EP 1205964A4 EP 00937315 A EP00937315 A EP 00937315A EP 00937315 A EP00937315 A EP 00937315A EP 1205964 A4 EP1205964 A4 EP 1205964A4
Authority
EP
European Patent Office
Prior art keywords
plasma process
process device
stage
electrode structure
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00937315A
Other languages
German (de)
French (fr)
Other versions
EP1205964A1 (en
EP1205964B1 (en
Inventor
Mitsuaki Komino
Yasuharu Sasaki
Kyo Tsuboi
Hideaki Amano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of EP1205964A1 publication Critical patent/EP1205964A1/en
Publication of EP1205964A4 publication Critical patent/EP1205964A4/en
Application granted granted Critical
Publication of EP1205964B1 publication Critical patent/EP1205964B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67109—Apparatus for thermal treatment mainly by convection
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2002—Controlling environment of sample

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Plasma & Fusion (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
EP00937315A 1999-06-21 2000-06-20 Plasma process device, electrode structure thereof, and stage structure Expired - Lifetime EP1205964B1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP17361399 1999-06-21
JP17361399 1999-06-21
JP2000168297A JP2001068538A (en) 1999-06-21 2000-06-05 Electrode structure, mounting base structure, plasma treatment system, and processing unit
JP2000168297 2000-06-05
PCT/JP2000/004011 WO2000079575A1 (en) 1999-06-21 2000-06-20 Plasma process device, electrode structure thereof, and stage structure

Publications (3)

Publication Number Publication Date
EP1205964A1 EP1205964A1 (en) 2002-05-15
EP1205964A4 true EP1205964A4 (en) 2005-02-02
EP1205964B1 EP1205964B1 (en) 2006-03-29

Family

ID=26495531

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00937315A Expired - Lifetime EP1205964B1 (en) 1999-06-21 2000-06-20 Plasma process device, electrode structure thereof, and stage structure

Country Status (7)

Country Link
US (1) US7033444B1 (en)
EP (1) EP1205964B1 (en)
JP (1) JP2001068538A (en)
KR (1) KR100452649B1 (en)
DE (1) DE60026996T2 (en)
TW (1) TW483087B (en)
WO (1) WO2000079575A1 (en)

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See also references of WO0079575A1 *

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DE60026996D1 (en) 2006-05-18
US7033444B1 (en) 2006-04-25
KR100452649B1 (en) 2004-10-12
WO2000079575A1 (en) 2000-12-28
DE60026996T2 (en) 2007-03-15
JP2001068538A (en) 2001-03-16
EP1205964A1 (en) 2002-05-15
EP1205964B1 (en) 2006-03-29
KR20020022072A (en) 2002-03-23

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