GB9930603D0 - Plasma process and apparatus - Google Patents

Plasma process and apparatus

Info

Publication number
GB9930603D0
GB9930603D0 GBGB9930603.7A GB9930603A GB9930603D0 GB 9930603 D0 GB9930603 D0 GB 9930603D0 GB 9930603 A GB9930603 A GB 9930603A GB 9930603 D0 GB9930603 D0 GB 9930603D0
Authority
GB
United Kingdom
Prior art keywords
plasma process
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB9930603.7A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Surface Technology Systems Ltd
Original Assignee
Surface Technology Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Surface Technology Systems Ltd filed Critical Surface Technology Systems Ltd
Priority to GBGB9930603.7A priority Critical patent/GB9930603D0/en
Publication of GB9930603D0 publication Critical patent/GB9930603D0/en
Priority to PCT/GB2000/004927 priority patent/WO2001048789A1/en
Ceased legal-status Critical Current

Links

GBGB9930603.7A 1999-12-24 1999-12-24 Plasma process and apparatus Ceased GB9930603D0 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GBGB9930603.7A GB9930603D0 (en) 1999-12-24 1999-12-24 Plasma process and apparatus
PCT/GB2000/004927 WO2001048789A1 (en) 1999-12-24 2000-12-22 Plasma processing methods

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9930603.7A GB9930603D0 (en) 1999-12-24 1999-12-24 Plasma process and apparatus

Publications (1)

Publication Number Publication Date
GB9930603D0 true GB9930603D0 (en) 2000-02-16

Family

ID=10867012

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB9930603.7A Ceased GB9930603D0 (en) 1999-12-24 1999-12-24 Plasma process and apparatus

Country Status (2)

Country Link
GB (1) GB9930603D0 (en)
WO (1) WO2001048789A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1444727A4 (en) * 2001-10-22 2007-07-18 Unaxis Usa Inc Process and apparatus for etching of thin, damage sensitive layers using high frequency pulsed plasma
US7517801B1 (en) 2003-12-23 2009-04-14 Lam Research Corporation Method for selectivity control in a plasma processing system
US8222155B2 (en) 2004-06-29 2012-07-17 Lam Research Corporation Selectivity control in a plasma processing system

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8629634D0 (en) * 1986-12-11 1987-01-21 Dobson C D Reactive ion & sputter etching
FR2646557B1 (en) * 1989-04-28 1997-07-18 Canon Kk PROCESS FOR FORMING A POLYCRYSTALLINE SEMICONDUCTOR FILM ON AN INSULATING SUBSTRATE
US5240554A (en) * 1991-01-22 1993-08-31 Kabushiki Kaisha Toshiba Method of manufacturing semiconductor device
US5312717A (en) * 1992-09-24 1994-05-17 International Business Machines Corporation Residue free vertical pattern transfer with top surface imaging resists

Also Published As

Publication number Publication date
WO2001048789A1 (en) 2001-07-05

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)