GB9901869D0 - Plasma processing apparatus - Google Patents

Plasma processing apparatus

Info

Publication number
GB9901869D0
GB9901869D0 GBGB9901869.9A GB9901869A GB9901869D0 GB 9901869 D0 GB9901869 D0 GB 9901869D0 GB 9901869 A GB9901869 A GB 9901869A GB 9901869 D0 GB9901869 D0 GB 9901869D0
Authority
GB
United Kingdom
Prior art keywords
processing apparatus
plasma processing
plasma
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB9901869.9A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Surface Technology Systems Ltd
Original Assignee
Surface Technology Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Surface Technology Systems Ltd filed Critical Surface Technology Systems Ltd
Priority to GBGB9901869.9A priority Critical patent/GB9901869D0/en
Publication of GB9901869D0 publication Critical patent/GB9901869D0/en
Priority to DE69942020T priority patent/DE69942020D1/en
Priority to PCT/GB1999/004168 priority patent/WO2000036631A1/en
Priority to JP2000588789A priority patent/JP4714309B2/en
Priority to KR1020077011424A priority patent/KR100829288B1/en
Priority to KR1020007008638A priority patent/KR100768610B1/en
Priority to EP99958406A priority patent/EP1055250B1/en
Priority to AT99958406T priority patent/ATE458261T1/en
Priority to US11/080,964 priority patent/US7491649B2/en
Ceased legal-status Critical Current

Links

GBGB9901869.9A 1998-12-11 1999-01-29 Plasma processing apparatus Ceased GB9901869D0 (en)

Priority Applications (9)

Application Number Priority Date Filing Date Title
GBGB9901869.9A GB9901869D0 (en) 1999-01-29 1999-01-29 Plasma processing apparatus
DE69942020T DE69942020D1 (en) 1998-12-11 1999-12-10 PLASMA TREATMENT DEVICE
PCT/GB1999/004168 WO2000036631A1 (en) 1998-12-11 1999-12-10 Plasma processing apparatus
JP2000588789A JP4714309B2 (en) 1998-12-11 1999-12-10 Plasma processing equipment
KR1020077011424A KR100829288B1 (en) 1998-12-11 1999-12-10 Plasma processing apparatus
KR1020007008638A KR100768610B1 (en) 1998-12-11 1999-12-10 Plasma processing apparatus
EP99958406A EP1055250B1 (en) 1998-12-11 1999-12-10 Plasma processing apparatus
AT99958406T ATE458261T1 (en) 1998-12-11 1999-12-10 PLASMA TREATMENT DEVICE
US11/080,964 US7491649B2 (en) 1998-12-11 2005-03-16 Plasma processing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9901869.9A GB9901869D0 (en) 1999-01-29 1999-01-29 Plasma processing apparatus

Publications (1)

Publication Number Publication Date
GB9901869D0 true GB9901869D0 (en) 1999-03-17

Family

ID=10846646

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB9901869.9A Ceased GB9901869D0 (en) 1998-12-11 1999-01-29 Plasma processing apparatus

Country Status (1)

Country Link
GB (1) GB9901869D0 (en)

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)