EP1201927B1 - Vacuum pump - Google Patents

Vacuum pump Download PDF

Info

Publication number
EP1201927B1
EP1201927B1 EP20010124365 EP01124365A EP1201927B1 EP 1201927 B1 EP1201927 B1 EP 1201927B1 EP 20010124365 EP20010124365 EP 20010124365 EP 01124365 A EP01124365 A EP 01124365A EP 1201927 B1 EP1201927 B1 EP 1201927B1
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
flow path
cover
bellows
piping mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP20010124365
Other languages
German (de)
English (en)
French (fr)
Other versions
EP1201927A2 (en
EP1201927A3 (en
Inventor
Shinya Yamamoto
Yuji Hashimoto
Masahiro Kawaguchi
Hitoshi Shoji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Industries Corp
Original Assignee
Toyota Industries Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Industries Corp filed Critical Toyota Industries Corp
Publication of EP1201927A2 publication Critical patent/EP1201927A2/en
Publication of EP1201927A3 publication Critical patent/EP1201927A3/en
Application granted granted Critical
Publication of EP1201927B1 publication Critical patent/EP1201927B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/06—Silencing
    • F04C29/065—Noise dampening volumes, e.g. muffler chambers

Definitions

  • the present invention relates to a flow path structure for a vacuum pump in which a gas delivering body in a pump chamber is activated based on rotation of a rotating shaft so that gas is caused to flow through the operation of the gas delivering body to thereby provide a sucking operation.
  • Vibrations of the main body of a vacuum pump are transmitted, by suction piping for sucking gas into the main body of the vacuum pump and discharge piping for discharging gas, from the main body of the vacuum pump.
  • the vibrations are then transmitted to auxiliary equipment to which the suction piping or discharging piping is connected, and the auxiliary equipment is vibrated, whereby the level of noise is increased.
  • a bellows is interposed on the suction piping or the discharge piping.
  • the bellows so interposed on the suction piping or discharge piping absorbs the transmitted vibrations.
  • the pressure within the suction piping varies from the atmospheric pressure to a negative pressure which is close to zero.
  • a check valve is disposed at the discharge piping.
  • the pressure within the discharge piping from the main body of the vacuum pump to the check valve varies from a positive pressure which is higher than the atmospheric pressure, to a negative pressure which is close to zero.
  • the pressure within the discharge piping downstream of the check valve varies from a positive pressure, which is higher than the atmospheric pressure, to the atmospheric pressure.
  • the bellows In a case where a bellows is used as part of the suction piping or discharge piping whose pressure varies as has been just described, the bellows is elastically deformed to extend or contract by virtue of the change in internal pressure of the bellows. A load from the elastic deformation extends to the auxiliary equipment and this may cause a risk that the auxiliary equipment is damaged.
  • An object of the present invention is to provide a flow path structure in which a load generated when a bellows constituting part of the gas flow path of a vacuum pump is elastically deformed by virtue of the change in the pressure in the bellows, does not extend to auxiliary equipment to which the vacuum pump is connected via the bellows.
  • a flow path structure for a vacuum pump in which a gas delivering mechanism in a pump chamber is activated based on rotation of a rotating shaft so that gas is delivered through operation of said gas delivering body to thereby provide a sucking operation
  • said flow path structure comprising a piping mechanism constituting a gas flow path for said gas and connected to a housing of a main body of said vacuum pump in such a manner to communicate with said pump chamber, a bellows constituting at least part of said piping mechanism, and a cover, incorporating therein said main body of said vacuum pump, and adapted to fix said piping mechanism, wherein said bellows is incorporated in said cover.
  • a load generated in association with the elastic deformation of the bellows in the cover is received and absorbed by the cover. Consequently, the load generated in association with the elastic deformation does not extend to auxiliary equipment of the vacuum pump.
  • the bellows is disposed so as to be inclined relative to the rotating shaft.
  • the construction in which the bellows is disposed so as to be inclined relative to the rotating shaft, is advantageous in making the overall length of the bellows as long as possible.
  • the piping mechanism is disposed linearly along an external wall surface of the housing of the main body of the vacuum pump.
  • the linear piping mechanism is advantageous in making the apparatus compact.
  • the piping mechanism is made substantially parallel to the rotating shaft.
  • Vibrations of the vacuum pump are mainly generated in a direction normal to the rotating shaft.
  • the bellows of the piping mechanism which is substantially parallel to the rotating shaft extends and/or contracts in axial directions of the rotating shaft, and consequently the disposition of the bellows is the most effective to absorb vibrations of the vacuum pump.
  • a through-hole is formed in the cover, the piping mechanism passes through the through-hole, and a seal means is disposed to be joined to the piping mechanism and the cover, to seal between the interior and exterior of the cover.
  • the through-hole does not constitute a portion which provides communication between the interior and exterior of the cover, whereby the sealing properties within the cover can be secured.
  • a front housing 13 is joined to a front end of a rotor housing 12 of a multi-stage Roots pump 11, and a seal body 36 is joined to the front housing 13.
  • a rear housing 14 is joined to a rear end of the rotor housing 12.
  • the rotor housing 12 comprises a cylinder block 15 and a plurality of partitions 16.
  • the cylinder block 15 comprises a pair of block pieces 17, 18, and the partition 16 comprises a pair of wall pieces 161, 162.
  • a space between the front housing 13 and the partition 16 spaces between the adjacent partitions 16 and a space between the rear housing 14 and the partitions 16 constitute pump chambers 66, 67, 68, 69, 70, respectively.
  • a rotating shaft 19 is rotatably supported on the front housing 13 and the rear housing 14 via radial bearings 21, 37.
  • a rotating shaft 20 is rotatably supported on the front housing 13 and the rear housing 14 via radial bearings 22, 38. Both the rotating shafts 19, 20 are disposed horizontally parallel to each other. The rotating shafts 19, 20 are passed through the partitions 16.
  • a plurality of rotors 23, 24, 25, 26, 27 are integrally formed on the rotating shaft 19, and a plurality of rotors 28, 29, 30, 31, 32 are integrally formed on the rotating shaft 20.
  • the rotors 23 to 32 are formed in the same configuration and size when viewed in a direction along axes 191, 201 of the rotating shafts 19, 20.
  • the thicknesses of the rotors 23, 24, 25, 26, 27 are reduced in that order, and the thicknesses of the rotors 28, 29, 30, 31, 32 are reduced in that order.
  • the rotors 23, 28 are accommodated in the pump chamber 66 in a state in which they mesh with each other
  • the rotors 24, 29 are accommodated in the pump chamber 67 in a state in which they mesh with each other
  • the rotors 25, 30 are accommodated in the pump chamber 68 in a state in which they mesh with each other
  • the rotors 26, 31 are accommodated in the pump chamber 69 in a state in which they mesh with each other
  • the rotors 27, 32 are accommodated in the pump chamber 70 in a state in which they mesh with each other.
  • a gear housing 33 is assembled to the rear housing 14.
  • the rotating shafts 19, 20 pass through the rear housing 14 and protrude into the gear housing 33, and gears 34, 35 are securely fastened to protruding ends of the rotating shafts 19, 20, respectively, in a state in which they mesh with each other.
  • An electric motor M is assembled to the gear housing 33.
  • the driving force of the electric motor M is transmitted to the rotating shaft 19 via an axial joint 10, and the rotating shaft 19 is rotated in a direction indicated by arrows R1 in Figs. 5A, 5B and Figs. 6A, 6B.
  • the rotating shaft 20 obtains the driving force from the electric motor M via the gears 34, 35 and rotates in a direction indicated by arrows R2 in Figs. 5A, 5B and Figs. 6A, 6B, which is an opposite direction to the rotating direction of the rotating shaft 19.
  • a passage 163 is formed in the partition 16.
  • an inlet 164 and an outlet 165 of the passage 163 are formed in the partition 16.
  • the adjacent pump chambers 66, 67, 68, 69, 70 are allowed to communicate with each other via the passages 163.
  • an introduction port 171 is formed in the block piece 17 in such a manner as to communicate with the pump chamber 66.
  • a discharge port 181 is formed in the block piece 18 in such a manner as to communicate with the pump chamber 70.
  • Gas introduced into the pump chamber 66 from the introduction port 171 is delivered into the passage 163 from the inlet 164 by virtue of rotation of the rotors 23, 28, and then is delivered out from the outlet 165 into the adjacent pump chamber 67 by way of the passage 163.
  • the gas is delivered in the order in which the capacities of the pump chambers are decreased, that is, in the order of the pump chambers 67, 68, 69, and 70.
  • the gas that has been delivered to the pump chamber 70 is then discharged to the outside from the discharge port 181.
  • the rotors 23 to 32 are a gas delivering mechanism for delivering the gas.
  • the rotor housing 12, the front housing 13, the rear housing 14 and the gear housing 33 constitute a housing of a main body of the multi-stage Roots pump. As shown in Figs. 1 and 2, the main body of the multi-stage Roots pump is incorporated in a cover 47, which is securely fastened to fixing portions of a place where the apparatus is installed.
  • a connecting flange 39 is connected to the discharge port 181.
  • a muffler 40 is connected to the connecting flange 39, and a cylindrical guide pipe 41 is connected to the muffler 40.
  • a discharge pipe 42 is connected to the guide pipe 41.
  • a through hole 471 is formed in an upper portion of a wall 473 of the cover 47 in front of the front housing 13, and the discharge pipe 42 is passed through the through hole 471.
  • the discharge pipe 42 passes through the cover 47 and then connects to an exhaust gas processing device, not shown.
  • a bellows 421 is incorporated in series with the discharge pipe 42.
  • the bellows 421 is spaced apart from the housing constituting the main body of the multi-stage Roots pump 11.
  • a mounting flange 422 is formed around an outer circumference of the discharge pipe 42. The mounting flange 422 is fixed to the cover 47 by tightening screws 57, and the bellows 421 is incorporated in the cover 47.
  • the connecting flange 39, the muffler 40, the guide pipe 41 and the discharge pipe 42 are disposed linearly along an external wall surface of the rotor housing 12 in such a manner as to become substantially parallel to the rotating shafts 19, 20.
  • the connecting flange 39, the muffler 40, the guide pipe 41 and the discharge pipe 42, which are disposed linearly, constitute a discharge piping mechanism 64 for delivering exhaust gas, that is discharged from the multi-stage Roots pump 11, to the exhaust gas processing device.
  • the discharge piping mechanism 64 is connected to the rotor housing 12 constituting the housing of the main body of the multi-stage Roots pump 11 in such a manner as to communicate with the pump chamber 70.
  • a valve body 43 and a return spring 44 are accommodated in the guide pipe 41.
  • a tapered valve hole 411 is formed in the guide pipe 41, and the valve body 43 is adapted to open/close the valve hole 411.
  • the guide pipe 41, the valve body 43 and the return spring 44 constitutes a reverse flow preventing means. Exhaust gas discharged from the pump chamber 70 having the smallest capacity of all the pump chambers to the connecting flange 39, by way of the discharge port 181, reaches the valve hole 411 by way of the muffler 40.
  • a connecting flange 58 is connected to an introduction port 171.
  • a suction pipe 59 is connected to the connecting flange 58.
  • a through hole 472 is provided in a lower portion of the wall 473 of the cover 47, and the suction pipe 59 is passed through the through hole 472.
  • the suction pipe 59 passes through the cover 47 to be connected to a target suction device, not shown.
  • a bellows 591 is incorporated in the suction pipe 59 in series. The bellows 591 is spaced apart from the housing constituting the main body of the multi-stage Roots pump 11.
  • a mounting flange 592 is formed around an outer circumference of the suction pipe 59. The mounting flange 592 is fixed to the cover 47 by tightening screws 60, the bellows 591 is incorporated in the cover 47.
  • the connecting flange 58 and the suction pipe 59 are disposed linearly along the external wall surface of the rotor housing 12 in such a manner as to become substantially parallel to the rotating shafts 19, 20.
  • the connecting flange 58 and the suction pipe 59 constitute a suction piping mechanism 65 for delivering exhaust gases sucked from the target suction device to the multi-stage Roots pump 11.
  • the suction piping mechanism 65 is connected to the rotor housing 12 constituting the housing of the main body of the multi-stage Roots pump 11 in such a manner as to communicate with the pump chamber 66.
  • the multi-stage Roots pump 11 is accommodated in the cover 47.
  • legs 111 are formed on a lower surface of the multi-stage Roots pump 11.
  • the legs 111 are connected to a bottom wall of the cover 47 via rubber cushions 61, respectively.
  • a controller 48 and an inverter 49 for controlling the electric motor M mounted in the cover 47 are a controller 48 and an inverter 49 for controlling the electric motor M.
  • a cooler 50 is placed on a lower surface of the rear housing 14.
  • a cooler 51 is placed on an upper surface of the controller 48, and a cooler 52 is placed on an upper surface of the inverter 49.
  • Cooling fluid is delivered to a main supply pipe 53 from a cooling fluid supply source, not shown.
  • the cooling fluid delivered to the main supply pipe 53 passes through the cooler 51 and the cooler 52 in that order.
  • an electromagnetic three-way valve 55 is in a deexcited state, the cooling fluid that has passed through the cooler 52 is refluxed to the cooling fluid supply source by way of the main supply pipe 53.
  • the cooling fluid that has passed through the cooler 51 flows to the cooler 50 side by way of a sub-supply pipe 54.
  • a temperature detector 56 attached to a surface of the rear housing 14 detects the temperature of the surface of the rear housing 14.
  • the controller 48 control excites and/or deexcites the electromagnetic three-way valve 55 based on temperature detection information obtained from the temperature detector 56. Namely, the controller 48 controls the exciting and/or de-exciting of the magnetic three-way valve 55 so that the temperature on the surface of the rear housing 14 reaches a predetermined temperature.
  • a seal member 62 is interposed between a mounting flange 422 and a wall 473, and a seal member 63 is interposed between a mounting flange 592 and the wall 473.
  • the seal member 62 is joined to the mounting flange 422 and the wall 473, and constitutes a seal means for cutting off communications between the interior and exterior of the cover 47 through a through hole 471.
  • the seal member 63 is joined to the mounting flange 592 and the wall 473, and constitutes a seal means for cutting off communications between the interior and exterior of the cover 47 through a through hole 472.
  • a bellows 421 which is part of a discharge pipe 42A constituting a discharge piping mechanism 64A is disposed in such a manner as to be inclined relative to rotating shafts 191, 201 (not shown).
  • a bellows 591 which is part of a suction pipe 59A constituting a suction piping mechanism 65A is disposed in such a manner as to be inclined relative to rotating shafts 191, 201 (not shown).
  • the construction in which the bellows 421, 591 are disposed in such a manner as to be inclined relative to the rotating shafts 191, 201 is advantageous in making the overall lengths of the bellows 421, 591 as long as possible without extending the length of the main body of the multi-stage Roots pump in the axial direction thereof. The more the bellows 421, 591 extend, the more advantageous it is in absorbing vibrations of the main body of the multi-stage Roots pump.
  • the bellows constituting at least part of the piping mechanisms are incorporated in the cover, and the piping mechanisms are connected to the cover.
  • the present invention provides a superior advantage that the loads generated when the bellows constituting part of the gas flow path of the vacuum pump are elastically deformed, by virtue of the change in internal pressures, can be prevented from extending to the auxiliary equipment.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
EP20010124365 2000-10-23 2001-10-23 Vacuum pump Expired - Lifetime EP1201927B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000322577 2000-10-23
JP2000322577A JP2002130170A (ja) 2000-10-23 2000-10-23 真空ポンプにおける流路構造

Publications (3)

Publication Number Publication Date
EP1201927A2 EP1201927A2 (en) 2002-05-02
EP1201927A3 EP1201927A3 (en) 2003-01-22
EP1201927B1 true EP1201927B1 (en) 2004-09-01

Family

ID=18800431

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20010124365 Expired - Lifetime EP1201927B1 (en) 2000-10-23 2001-10-23 Vacuum pump

Country Status (3)

Country Link
EP (1) EP1201927B1 (ja)
JP (1) JP2002130170A (ja)
DE (1) DE60105249T2 (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3922140B2 (ja) 2002-09-06 2007-05-30 株式会社豊田自動織機 流体ポンプ装置
JP4007130B2 (ja) * 2002-09-10 2007-11-14 株式会社豊田自動織機 真空ポンプ
JP3896930B2 (ja) 2002-09-10 2007-03-22 株式会社豊田自動織機 流体ポンプ装置
JP3991918B2 (ja) * 2003-05-19 2007-10-17 株式会社豊田自動織機 ルーツポンプ
JP4702236B2 (ja) * 2006-09-12 2011-06-15 株式会社豊田自動織機 真空ポンプの運転停止制御方法及び運転停止制御装置
CN102297135B (zh) * 2010-06-25 2013-09-04 宝山钢铁股份有限公司 大功率双叶逆流冷却式罗茨真空泵非线性消声方法和消声器
CN104131962B (zh) * 2013-11-25 2017-05-24 东莞四唯微型水泵有限公司 真空抽气泵

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1137865A (en) * 1965-03-31 1968-12-27 English Electric Co Ltd Liquid-metal cooled nuclear reactors and rotary pump assemblies therefor
JPS5638598A (en) * 1979-09-05 1981-04-13 Hitachi Ltd Exhausting device of turbo-molecular pump
JPS618479A (ja) * 1984-06-25 1986-01-16 Fujitsu Ltd 真空装置
JPH0431675A (ja) * 1990-05-25 1992-02-03 Hitachi Ltd 真空用接続部材
US5411376A (en) * 1993-12-15 1995-05-02 Walbro Corporation Fuel pump with noise suppression

Also Published As

Publication number Publication date
DE60105249T2 (de) 2005-09-01
JP2002130170A (ja) 2002-05-09
DE60105249D1 (de) 2004-10-07
EP1201927A2 (en) 2002-05-02
EP1201927A3 (en) 2003-01-22

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