EP1160609A2 - Vorrichtung zur präzisen Positionierung eines Bauteiles, insbesondere eines optischen Bauteiles - Google Patents
Vorrichtung zur präzisen Positionierung eines Bauteiles, insbesondere eines optischen Bauteiles Download PDFInfo
- Publication number
- EP1160609A2 EP1160609A2 EP01109997A EP01109997A EP1160609A2 EP 1160609 A2 EP1160609 A2 EP 1160609A2 EP 01109997 A EP01109997 A EP 01109997A EP 01109997 A EP01109997 A EP 01109997A EP 1160609 A2 EP1160609 A2 EP 1160609A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- ring
- tilting
- tilting part
- clamping
- component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/1822—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors comprising means for aligning the optical axis
- G02B7/1824—Manual alignment
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/023—Mountings, adjusting means, or light-tight connections, for optical elements for lenses permitting adjustment
Definitions
- the invention relates to a device for precise positioning a component, in particular an optical component, like lens group or mirror according to that in the preamble of Claim 1 defined art.
- Components are often very precise to position or align because they interact stand with other components or because of them very precise Measurements must be made. This applies e.g. in the Optics for lens groups or mirrors. For example, a very exact axial or height adjustment for mirrors, in particular also ellipsoid mirrors, for lighting systems, in particular required in the deep ultraviolet range (DUV range).
- DUV range deep ultraviolet range
- Normal Threads for storage and guidance are unsuitable for this, because of the inevitable thread flank play tilting and shifts of a mother wobble in the plane perpendicular to the screwing direction, namely the mother contact surface, produce.
- the lock nuts consist of a guide ring and a clamping ring, the two rings being elastic are interconnected. By two close to each other seated punctures from the inside and the outside of the Locking nut from creates an elastic in the axial direction Slat or a division into the guide ring and Clamping ring. By means of tension applied using screws the thread flank play is between the guide ring and the clamping ring eliminated, i.e. a backlash is created.
- a tilting device for an ellipsoid mirror known, this is adjusted with three screws and is fixed.
- the present invention is therefore based on the object to create a device of the type mentioned, by the above disadvantages of the prior art be eliminated, in particular by the exact adjustment possible without risk of seizure when adjusting in the axial direction and / or by emigration of the focal point or the axis of a component to be tilted is avoided.
- a precise Positioning a component especially an optical one Component, e.g. a lens group or a mirror, both reach in the axial as well as in the radial direction.
- an optical one Component e.g. a lens group or a mirror
- the Axialverstellinutter a spindle has, on which an adjusting nut can be screwed, wherein the adjusting nut from a guide ring and a clamping ring is composed and the two rings are connected elastically to one another are, using tendons to eliminate backlash the adjusting nut the clamping ring against the guide ring is braced, and wherein by incisions in the clamping ring individual jaws are formed, each over the Tendons are clamped to the guide ring.
- the device according to the invention can be used in particular for storage and adjustment of optical components, such as e.g. an ellipsoid mirror, with large thread diameters realize short overall length.
- optical components such as e.g. an ellipsoid mirror
- a very advantageous embodiment of a tilting device can consist in that the tilting device an inner and a has outer tilting part, the inner tilting part directly or is indirectly connected to the component to be tilted and connected on the outside via torsion joints to the outer tilting part which in turn is connected to a torsion joint Bearing part is connected.
- the torsion joints can be used as "normal" joints can be designed or they are more advantageous Formed as so-called solid joints, wherein e.g. a slice with fine cuts is divided in such a way that there are two rings, namely an inner ring and an outer ring, each connected by thin webs and are e.g. through opposite webs and a gimbal disk arranged at right angles to it form.
- the invention can be provided that the torsion joints are arranged so that when used for an ellipsoid mirror the neutral fibers of the torsion joints through the Show focal point of the ellipsoid. In this way, one simple and axis-independent adjustment achieved.
- the reflector of the ellipsoid is in the Inside of the inner ring.
- the tilting device according to the invention becomes a possibility of tilting through the focal point of an ellipsoid mirror created around two axes.
- tilting device according to the invention is in the fact that only rough manufacturing and assembly tolerances required are. In addition, there is only a small installation space needed. In addition, only a low installation effort is required.
- the ellipsoid mirror shown in Figures 1 and 2 as Lighting module is basically of a known type, which is why below only the parts essential to the invention are described in more detail.
- the ellipsoidal mirror has a reflector 1, in which A lamp 2 is arranged along the longitudinal axis.
- the reflector 1 is stored in a version 3, the cooling fins with cooling fins 4 and cooling channels 5 can be provided.
- the version 3 is arranged over three distributed over the circumference Threaded feet 6 with an inner ring 7 as an inner tilting part a tilting device 8 connected.
- the inner ring has 7 corresponding to three holes 9, in the not shown Screws inserted and in threaded holes in the threaded feet 6 can be screwed in.
- the inner ring 7 is of an outer ring 10 surrounded as an outer tilting part, which in turn on the outside is connected to a bearing part 11.
- the bearing part 11 is formed by two opposite bearing webs 11a and 11b.
- the adjustment device can e.g. three superimposed adjustment plates 16, 17 and 18 have. With the upper plate 16 that is described Adjustment device with the screws 12 firmly connected. With the adjusting screw 19 and the resilient pressure pieces 20 plate 16 to plate 17 in one direction, e.g. in the y direction, postponed. The lateral guidance can be done by a Overlap using slices. The screw pulls 19 the adjustment plate 16 in one direction while the pressure pieces 20 reset the adjustment plate 16.
- the plate 17 is in the same way in a 90 ° to that above described adjustment device moved to plate 18 (x direction).
- the plate 18 rests against rotation the height adjustment device 23 and is thereby in a vertical Direction (z-direction) can be moved.
- An axial adjustment device is located below the adjustment device 15 or height adjustment device 23 for the Ellipsoid mirror.
- the height adjustment device 23 is shown in FIGS. 3 to 6 more apparent.
- the height adjustment device 23 has an adjustment nut 24 on, which is screwed onto a spindle 46.
- the spindle 46 is attached to a base plate 47 of the ellipsoid mirror.
- the adjusting nut 24 has a guide ring 25 and one Clamping ring 26 on. In the adjusting nut 24 are close to each other seated punctures 27 and 28 from the inside and the Introduced from the outside. This creates an elastic Connection or lamella 29 between the guide ring 25 and the clamping ring 26, with an elasticity in the axial direction is achieved.
- the ellipsoid mirror at a certain position must be set, this can be done by an appropriate backlash-free adjustment of the adjusting nut 24 can be achieved.
- the adjusting nut is used for exact positioning twisted, which due to the system of the adjusting nut on the Adjustment plate 18 of the entire ellipsoidal mirror axially or in the height is adjustable.
- FIGS. 7 and 8 together with FIG Operation of the tilting device 8 described in more detail.
- the tilting device 8 consists of one piece Unit, the separation between the inner ring 7, the outer ring 10 and the two bearing webs 11a and 11b thin cuts, e.g. by a laser or wire EDM, are created.
- the connection between the individual parts is in each case by two opposite narrow webs produced as a residual connection to form torsion joints.
- torsion joints located opposite each other 36 as connection points between the inner ring 7 and the outer ring 10 and 90 ° to it two are also offset opposite torsion joints 37 as solid-state joints between the outer ring 10 and the two bearing webs 11a and 11b.
- the position of the torsion joints 36 and 37 is chosen so that their lead neutral fibers through the focal point of the ellipsoid.
- the lamp 2 is in focus and therefore also in focus of the elliptical mirror.
- the reflector 1 With its Insert socket 3 into the free interior of inner ring 7 that part of the ellipsoid from apex to focal point is recorded in the free interior.
- the axial adjustment device according to the invention 23 and the tilting device 8 also for other components, where a highly precise setting is important. This applies e.g. for lens groups in a lens that also at defined points in one, as described above gimbal, to be hung to the desired To achieve adjustment effect. You can do individual Adjust the lenses or the entire group accordingly. Basically, the device can be used wherever you can adjust or clamp very precisely to a central axis must do so without wobbling.
- the lamp 2 is independent of the reflector in three axes (x, y, z) adjustable.
- the adjustment is inside the device built-in. By adjusting lamp 2 and reflector 1 can the second focus can be adjusted to a specific point.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
- Lens Barrels (AREA)
- Camera Bodies And Camera Details Or Accessories (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
Description
- Figur 1
- die Gesamtansicht eines Ellipsoidspiegels als Beleuchtungsmodul mit einer Lampe,
- Figur 2
- eine perspektivische Draufsicht auf den oberen Teil des Ellipsoidspiegels nach der Fig. 1,
- Figur 3
- eine perspektivische Ansicht einer Höhenverstelleinrichtung für den Ellipsoidspiegel nach den Figuren 1 und 2, wobei nur die Spannmutter dargestellt ist,
- Figur 4
- eine Ansicht der Spannmutter nach der Fig. 3 von unten,
- Figur 5
- einen Schnitt nach der Linie V-V der Fig. 4,
- Figur 6
- eine Ausschnittsvergrößerung der Einzelheit X der Fig. 5,
- Figur 7
- eine perspektivische Darstellung der Kippeinrichtung für den Ellipsoidspiegel nach den Figuren 1 und 2, und
- Figur 8
- eine Draufsicht auf die Kippeinrichtung nach der Fig. 7.
Claims (14)
- Vorrichtung zur präzisen Positionierung eines Bauteiles, insbesondere eines optischen Bauteiles, wie Linsengruppe oder Spiegel, in axialer Richtung und/oder zum Kippen des Bauteiles, gekennzeichnet durch eine Axialverstelleinrichtung (23) und/oder Kippeinrichtung (8).
- Vorrichtung nach Anspruch 1 mit einer Axialverstelleinrichtung, die eine Spindel aufweist, auf die eine Verstellmutter aufschraubbar ist, wobei die Verstellmutter aus einem Führungsring und einem Klemmring zusammengesetzt ist und beide Ringe elastisch miteinander verbunden sind, wobei über Spannglieder zur Beseitigung des Flankenspieles der Verstellmutter der Klemmring gegen den Führungsring verspannbar ist, dadurch gekennzeichnet, daß durch Einschnitte (30) in dem Klemmring einzelne Klemmbacken (31) gebildet sind, die jeweils über die Spannglieder (34) mit dem Führungsring (23) verspannbar sind.
- Vorrichtung nach Anspruch 1 oder 2, dadurch gekennzeichnet, daß die Kippeinrichtung (8) ein inneres (7) und ein äußeres Kippteil (10) aufweist, wobei das innere Kippteil (7) direkt oder indirekt mit dem zu kippenden Bauteil (1) verbunden ist und außenseitig über Torsionsgelenke (36) mit dem äußeren Kippteil (10) verbunden ist, welches wiederum über Torsionsgelenke (37) mit einem Lagerteil (11) verbunden ist.
- Vorrichtung nach Anspruch 2, dadurch gekennzeichnet, daß durch axiale Einschnitte (30) wenigstens drei über den Umfang des Klemmrings (26) verteilt angeordnete Klemmbacken (31) gebildet sind.
- Vorrichtung nach Anspruch 4, dadurch gekennzeichnet, daß die Klemmbacken (31) als Ringsegmente ausgebildet sind.
- Vorrichtung nach Anspruch 3, dadurch gekennzeichnet, daß das innere Kippteil als Innenring (7) ausgebildet ist, das von einem äußeren Ring (10) als äußeres Kippteil umschlossen ist.
- Vorrichtung nach Anspruch 6, dadurch gekennzeichnet, daß bei einem Ellipsoidspiegel als optisches Bauteil der Reflektor (1) des Ellipsoidspiegels im Inneren des Innenringes (7) vom Brennpunkt bis zum Scheitel ragt.
- Vorrichtung nach Anspruch 7, dadurch gekennzeichnet, daß die Torsionsgelenke (36,37) so angeordnet sind, daß deren neutrale Fasern durch den Brennpunkt des Ellipsoidspiegels zeigen.
- Vorrichtung nach einem der Ansprüche 6 bis 8, dadurch gekennzeichnet, daß jeweils zwei Torsionsgelenke (36 bzw. 37) eines Ringes (7 bzw. 10) sich gegenüberliegend angeordnet sind, und daß die Torsionsgelenke (36 bzw. 37) der beiden Ringe (7 bzw. 10) um 90° versetzt zueinander liegen.
- Vorrichtung nach Anspruch 3 und einem der Ansprüche 6 bis 9, dadurch gekennzeichnet, daß das innere Kippteil (Innenring 7) und das äußere Kippteil (Außenring 10) jeweils durch Schrauben (40,41,44,45) gegeneinander kippbar sind.
- Vorrichtung nach Anspruch 10, dadurch gekennzeichnet, daß jede Schraubverbindung jeweils wenigstens eine Zugschraube (40,44) und eine Druckschraube (41,45) aufweist.
- Vorrichtung nach Anspruch 3 oder einem der Ansprüche 6 bis 11, dadurch gekennzeichnet, daß bei einem Reflektor (1) eines Ellipsoidspiegels als Bauteil dieser direkt oder indirekt mit dem inneren Kippteil (Innenring 7) verbunden ist.
- Vorrichtung nach Anspruch 3, dadurch gekennzeichnet, daß bei einer Linsengruppe als Bauteil das innere Kippteil (7) die Fassung einer Linse darstellt.
- Vorrichtung nach Anspruch 3 oder einem der Ansprüche 6 bis 13, dadurch gekennzeichnet, daß das äußere Kippteil (Aussenring 10) mit zwei sich gegenüberliegenden Lagerstegen (11a,11b) als Lagerteil (11) über Torsionsgelenke (37) verbunden ist.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10026541A DE10026541A1 (de) | 2000-05-27 | 2000-05-27 | Vorrichtung zur präzisen Positionierung eines Bauteils, insbesondere eines optischen Bauteiles |
DE10026541 | 2000-05-27 |
Publications (3)
Publication Number | Publication Date |
---|---|
EP1160609A2 true EP1160609A2 (de) | 2001-12-05 |
EP1160609A3 EP1160609A3 (de) | 2003-12-17 |
EP1160609B1 EP1160609B1 (de) | 2005-06-08 |
Family
ID=7643936
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP01109997A Expired - Lifetime EP1160609B1 (de) | 2000-05-27 | 2001-04-25 | Vorrichtung zur präzisen Positionierung eines Bauteiles, insbesondere eines optischen Bauteiles |
Country Status (4)
Country | Link |
---|---|
US (1) | US6603615B2 (de) |
EP (1) | EP1160609B1 (de) |
JP (1) | JP2002098872A (de) |
DE (2) | DE10026541A1 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106383397A (zh) * | 2016-12-08 | 2017-02-08 | 中国科学院长春光学精密机械与物理研究所 | 主镜安装调节机构 |
EP3505986A1 (de) * | 2017-12-28 | 2019-07-03 | Honeywell International Inc. | Systeme und verfahren zum einstellen von optischen sicherheitssensorspiegeln |
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US8486389B2 (en) | 1997-05-23 | 2013-07-16 | Oxthera, Inc. | Compositions and methods for treating or preventing oxalate-related disease |
DE10030495A1 (de) * | 2000-06-21 | 2002-01-03 | Zeiss Carl | Verfahren zum Verbinden einer Vielzahl von optischen Elementen mit einem Grundkörper |
DE10051706A1 (de) * | 2000-10-18 | 2002-05-02 | Zeiss Carl | Vorrichtung zur Lagerung eines optischen Elementes |
DE10136387A1 (de) * | 2001-07-26 | 2003-02-13 | Zeiss Carl | Objektiv, insbesondere Objektiv für die Halbleiter-Lithographie |
DE10146863A1 (de) * | 2001-09-22 | 2003-04-10 | Zeiss Carl | Fassung für ein optisches Element in einer optischen Abbildungseinrichtung |
WO2003042380A2 (en) * | 2001-10-05 | 2003-05-22 | Ixion Biotechnology, Inc. | Materials and methods for reducing oxalate concentrations in fluids |
DE10219514A1 (de) * | 2002-04-30 | 2003-11-13 | Zeiss Carl Smt Ag | Beleuchtungssystem, insbesondere für die EUV-Lithographie |
WO2004002678A1 (de) * | 2002-06-28 | 2004-01-08 | Carl-Zeiss-Stiftung Trading As Carl Zeiss | Verfahren und vorrichtung zum ausrichten von optischen elementen |
JP2005534998A (ja) * | 2002-08-08 | 2005-11-17 | カール・ツァイス・エスエムティー・アーゲー | イメージングデバイスにおける光学式アセンブリを保持するための装置 |
DE10246828A1 (de) * | 2002-10-08 | 2004-04-22 | Carl Zeiss Smt Ag | Objektiv, insbesondere Projektionsobjektiv in der Mikrolithographie |
DE10331390A1 (de) * | 2003-07-11 | 2005-01-27 | Carl Zeiss Smt Ag | Verfahren zur Herstellung von asphärischen optischen Flächen |
US6816325B1 (en) | 2003-09-11 | 2004-11-09 | Carl Zeiss Smt Ag | Mounting apparatus for an optical element |
DE10344178B4 (de) * | 2003-09-24 | 2006-08-10 | Carl Zeiss Smt Ag | Halte- und Positioniervorrichtung für ein optisches Element |
US7085080B2 (en) * | 2003-12-06 | 2006-08-01 | Carl Zeiss Smt Ag | Low-deformation support device of an optical element |
DE10359576A1 (de) * | 2003-12-18 | 2005-07-28 | Carl Zeiss Smt Ag | Verfahren zur Herstellung einer optischen Einheit |
US7265917B2 (en) * | 2003-12-23 | 2007-09-04 | Carl Zeiss Smt Ag | Replacement apparatus for an optical element |
US20080317810A1 (en) * | 2004-05-07 | 2008-12-25 | Harmeet Sidhu | Methods and Compositions for Reducing Oxalate Concentrations |
PL1962873T3 (pl) * | 2005-12-14 | 2014-03-31 | Oxthera Intellectual Property Ab | Kompozycje farmaceutyczne zawierające bakterie zmniejszające ilość szczawianu |
DE102008000967B4 (de) | 2008-04-03 | 2015-04-09 | Carl Zeiss Smt Gmbh | Projektionsbelichtungsanlage für die EUV-Mikrolithographie |
CN103529528B (zh) * | 2012-07-06 | 2016-01-06 | 华晶科技股份有限公司 | 调校装置及其调校方法 |
EP2811328B1 (de) * | 2013-06-04 | 2024-04-10 | Leica Geosystems AG | Positionierungsvorrichtung, insbesondere zur Verstellung von Linsen oder Linsensystemen in optischen Geräten |
JP6445577B2 (ja) | 2013-11-08 | 2018-12-26 | アンスティチュ・ナシオナル・ドプティーク | 鏡筒内の光学要素の自動芯出し |
US9470870B2 (en) | 2014-07-25 | 2016-10-18 | Institut National D'optique | Optical assemblies with tilt-controlled mounting of an optical element in a barrel |
WO2016044927A1 (en) * | 2014-09-22 | 2016-03-31 | Institut National D'optique | Mounting of an optical element in a barrel using a flexible ring |
WO2016154755A1 (en) | 2015-03-31 | 2016-10-06 | Institut National D'optique | Optical assembly with translatable centered sleeve |
CN106371192B (zh) * | 2016-09-21 | 2019-01-29 | 南京航空航天大学 | 一种大型天文望远镜面板促动器及其控制方法 |
CN107315191B (zh) * | 2017-08-21 | 2023-09-26 | 南方科技大学 | 一种地震仪自动调平锁紧装置 |
AU2020315707A1 (en) * | 2019-06-05 | 2022-01-06 | Sheltered Wings, Inc. D/B/A Vortex Optics | Diopter adjustment mechanism |
CN113391417B (zh) * | 2021-05-14 | 2022-09-20 | 中国科学院长春光学精密机械与物理研究所 | 一种光学元件支撑结构 |
CN115790548A (zh) * | 2023-02-01 | 2023-03-14 | 上海米度测控科技有限公司 | 一种远程控制的地埋式棱镜装置、全站仪测量系统及方法 |
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DE1675685B1 (de) * | 1962-12-03 | 1970-01-29 | Rudolf Spieth | Gewindering |
DE3030549A1 (de) * | 1980-08-13 | 1982-02-25 | Fa. Carl Zeiss, 7920 Heidenheim | Gewindespielregelung |
DE4136580A1 (de) * | 1991-11-07 | 1993-05-13 | Zeiss Carl Fa | Objektivverstelleinrichtung und schraubengetriebe |
EP0597209A1 (de) * | 1992-11-09 | 1994-05-18 | Optische Werke G. Rodenstock | Optisches System mit einem Linsensystem und einer Lichtquelle |
US5537262A (en) * | 1993-10-19 | 1996-07-16 | Asahi Kogaku Kogyo Kabushiki Kaisha | Rotational torque setting apparatus for screw mechanism |
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US3888563A (en) * | 1970-07-07 | 1975-06-10 | Rheinstahl Henschel Ag | Observation and measuring stand for optronic devices in a vehicle |
US5136433A (en) * | 1990-05-29 | 1992-08-04 | Durell William E | Optical positioner and connector |
JPH0727099B2 (ja) * | 1990-10-02 | 1995-03-29 | キヤノン株式会社 | レンズ駆動装置を有する光学機器 |
US5069654A (en) * | 1990-11-30 | 1991-12-03 | Jepmar Research | System for drivingly connecting gears, pulleys, wheels, rollers and other apertured components to shafts |
JPH11308174A (ja) | 1998-04-20 | 1999-11-05 | Sony Corp | ミラー保持体とこれを用いた光軸補正装置 |
-
2000
- 2000-05-27 DE DE10026541A patent/DE10026541A1/de not_active Withdrawn
-
2001
- 2001-04-25 DE DE50106430T patent/DE50106430D1/de not_active Expired - Fee Related
- 2001-04-25 EP EP01109997A patent/EP1160609B1/de not_active Expired - Lifetime
- 2001-05-25 US US09/866,089 patent/US6603615B2/en not_active Expired - Fee Related
- 2001-05-25 JP JP2001195529A patent/JP2002098872A/ja not_active Withdrawn
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1675685B1 (de) * | 1962-12-03 | 1970-01-29 | Rudolf Spieth | Gewindering |
DE3030549A1 (de) * | 1980-08-13 | 1982-02-25 | Fa. Carl Zeiss, 7920 Heidenheim | Gewindespielregelung |
DE4136580A1 (de) * | 1991-11-07 | 1993-05-13 | Zeiss Carl Fa | Objektivverstelleinrichtung und schraubengetriebe |
EP0597209A1 (de) * | 1992-11-09 | 1994-05-18 | Optische Werke G. Rodenstock | Optisches System mit einem Linsensystem und einer Lichtquelle |
US5537262A (en) * | 1993-10-19 | 1996-07-16 | Asahi Kogaku Kogyo Kabushiki Kaisha | Rotational torque setting apparatus for screw mechanism |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106383397A (zh) * | 2016-12-08 | 2017-02-08 | 中国科学院长春光学精密机械与物理研究所 | 主镜安装调节机构 |
EP3505986A1 (de) * | 2017-12-28 | 2019-07-03 | Honeywell International Inc. | Systeme und verfahren zum einstellen von optischen sicherheitssensorspiegeln |
Also Published As
Publication number | Publication date |
---|---|
US6603615B2 (en) | 2003-08-05 |
JP2002098872A (ja) | 2002-04-05 |
DE10026541A1 (de) | 2001-11-29 |
US20020021504A1 (en) | 2002-02-21 |
EP1160609A3 (de) | 2003-12-17 |
DE50106430D1 (de) | 2005-07-14 |
EP1160609B1 (de) | 2005-06-08 |
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