EP1126514A2 - Ätzverfahren - Google Patents

Ätzverfahren Download PDF

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Publication number
EP1126514A2
EP1126514A2 EP01110287A EP01110287A EP1126514A2 EP 1126514 A2 EP1126514 A2 EP 1126514A2 EP 01110287 A EP01110287 A EP 01110287A EP 01110287 A EP01110287 A EP 01110287A EP 1126514 A2 EP1126514 A2 EP 1126514A2
Authority
EP
European Patent Office
Prior art keywords
gas
sample
etching
anticorrosion
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP01110287A
Other languages
English (en)
French (fr)
Other versions
EP1126514A3 (de
Inventor
Kotaro Fujimoto
Yoshie Tanaka
Hironobu Kawahara
Yoshiaki Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of EP1126514A2 publication Critical patent/EP1126514A2/de
Publication of EP1126514A3 publication Critical patent/EP1126514A3/de
Withdrawn legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F4/00—Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02057—Cleaning during device manufacture
    • H01L21/02068—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers
    • H01L21/02071—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers the processing being a delineation, e.g. RIE, of conductive layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
    • H01L21/02046—Dry cleaning only
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
    • H01L21/321—After treatment
    • H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
    • H01L21/32133—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only
    • H01L21/32135—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only
    • H01L21/32136—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only using plasmas
EP01110287A 1989-03-10 1990-03-09 Ätzverfahren Withdrawn EP1126514A3 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP5647389 1989-03-10
JP5647389 1989-03-10
EP90302566A EP0387097A1 (de) 1989-03-10 1990-03-09 Verfahren und Gerät zum Musterbehandeln

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
EP90302566A Division EP0387097A1 (de) 1989-03-10 1990-03-09 Verfahren und Gerät zum Musterbehandeln

Publications (2)

Publication Number Publication Date
EP1126514A2 true EP1126514A2 (de) 2001-08-22
EP1126514A3 EP1126514A3 (de) 2003-02-12

Family

ID=13028073

Family Applications (2)

Application Number Title Priority Date Filing Date
EP90302566A Withdrawn EP0387097A1 (de) 1989-03-10 1990-03-09 Verfahren und Gerät zum Musterbehandeln
EP01110287A Withdrawn EP1126514A3 (de) 1989-03-10 1990-03-09 Ätzverfahren

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP90302566A Withdrawn EP0387097A1 (de) 1989-03-10 1990-03-09 Verfahren und Gerät zum Musterbehandeln

Country Status (3)

Country Link
US (1) US4985113A (de)
EP (2) EP0387097A1 (de)
KR (1) KR0174814B1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7186659B2 (en) * 2004-10-25 2007-03-06 Hitachi High-Technologies Corporation Plasma etching method

Families Citing this family (47)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5200017A (en) * 1989-02-27 1993-04-06 Hitachi, Ltd. Sample processing method and apparatus
EP0416774B1 (de) * 1989-08-28 2000-11-15 Hitachi, Ltd. Verfahren zur Behandlung eines Aluminium enthaltenden Musters
JP3078821B2 (ja) * 1990-05-30 2000-08-21 豊田合成株式会社 半導体のドライエッチング方法
KR950010044B1 (ko) * 1990-06-27 1995-09-06 후지쓰 가부시끼가이샤 반도체 집적회로의 제조방법 및 그에 사용된 제조장치
JP2663704B2 (ja) * 1990-10-30 1997-10-15 日本電気株式会社 Ａｌ合金の腐食防止法
JPH04311033A (ja) * 1991-02-20 1992-11-02 Micron Technol Inc 半導体デバイスのエッチング後処理方法
JP3185150B2 (ja) * 1991-03-15 2001-07-09 日本テキサス・インスツルメンツ株式会社 半導体装置の製造方法
FR2677668B1 (fr) * 1991-06-14 1993-10-15 France Telecom Procede de nettoyage de surfaces metalliques oxydees dans la fabrication de reseaux d'interconnexions et plaquettes pour de tels reseaux.
US5221424A (en) * 1991-11-21 1993-06-22 Applied Materials, Inc. Method for removal of photoresist over metal which also removes or inactivates corosion-forming materials remaining from previous metal etch
US5505780A (en) * 1992-03-18 1996-04-09 International Business Machines Corporation High-density plasma-processing tool with toroidal magnetic field
US5240555A (en) * 1992-04-16 1993-08-31 Eastman Kodak Company Method and apparatus for cleaning semiconductor etching machines
US5350488A (en) * 1992-12-10 1994-09-27 Applied Materials, Inc. Process for etching high copper content aluminum films
JP2674488B2 (ja) * 1993-12-01 1997-11-12 日本電気株式会社 ドライエッチング室のクリーニング方法
US5378312A (en) * 1993-12-07 1995-01-03 International Business Machines Corporation Process for fabricating a semiconductor structure having sidewalls
US5533635A (en) * 1994-10-11 1996-07-09 Chartered Semiconductor Manufacturing Pte. Ltd. Method of wafer cleaning after metal etch
US5780363A (en) * 1997-04-04 1998-07-14 International Business Machines Coporation Etching composition and use thereof
DE69727658T2 (de) * 1997-04-22 2005-04-28 Imec Vzw Kontinuierlicher Ofen mit hohem Durchsatz für Diffusionsbehandlung mit verschiedenen Diffusionsquellen
US6117266A (en) 1997-12-19 2000-09-12 Interuniversifair Micro-Elektronica Cenirum (Imec Vzw) Furnace for continuous, high throughput diffusion processes from various diffusion sources
US6209551B1 (en) 1997-06-11 2001-04-03 Lam Research Corporation Methods and compositions for post-etch layer stack treatment in semiconductor fabrication
US8779322B2 (en) 1997-06-26 2014-07-15 Mks Instruments Inc. Method and apparatus for processing metal bearing gases
US7569790B2 (en) * 1997-06-26 2009-08-04 Mks Instruments, Inc. Method and apparatus for processing metal bearing gases
US7166816B1 (en) 1997-06-26 2007-01-23 Mks Instruments, Inc. Inductively-coupled torodial plasma source
US6924455B1 (en) 1997-06-26 2005-08-02 Applied Science & Technology, Inc. Integrated plasma chamber and inductively-coupled toroidal plasma source
US6150628A (en) * 1997-06-26 2000-11-21 Applied Science And Technology, Inc. Toroidal low-field reactive gas source
US6815633B1 (en) 1997-06-26 2004-11-09 Applied Science & Technology, Inc. Inductively-coupled toroidal plasma source
US5965465A (en) * 1997-09-18 1999-10-12 International Business Machines Corporation Etching of silicon nitride
US6150282A (en) * 1997-11-13 2000-11-21 International Business Machines Corporation Selective removal of etching residues
US6033996A (en) * 1997-11-13 2000-03-07 International Business Machines Corporation Process for removing etching residues, etching mask and silicon nitride and/or silicon dioxide
US20020011215A1 (en) 1997-12-12 2002-01-31 Goushu Tei Plasma treatment apparatus and method of manufacturing optical parts using the same
WO2000003566A1 (fr) * 1998-07-13 2000-01-20 Toshiyuki Takamatsu Appareil a decharge pour micro-ondes
US6117796A (en) * 1998-08-13 2000-09-12 International Business Machines Corporation Removal of silicon oxide
US6200891B1 (en) 1998-08-13 2001-03-13 International Business Machines Corporation Removal of dielectric oxides
US6153530A (en) * 1999-03-16 2000-11-28 Applied Materials, Inc. Post-etch treatment of plasma-etched feature surfaces to prevent corrosion
US6852636B1 (en) 1999-12-27 2005-02-08 Lam Research Corporation Insitu post etch process to remove remaining photoresist and residual sidewall passivation
EP1137058A1 (de) * 2000-03-23 2001-09-26 Motorola, Inc. Verfahren zum Struktuiren von Schichten von Halbleitervorrichtungen
JP3285341B2 (ja) 2000-06-01 2002-05-27 士郎 酒井 窒化ガリウム系化合物半導体の製造方法
US6566270B1 (en) * 2000-09-15 2003-05-20 Applied Materials Inc. Integration of silicon etch and chamber cleaning processes
JP3466144B2 (ja) * 2000-09-22 2003-11-10 士郎 酒井 半導体の表面を荒くする方法
JP2002208541A (ja) * 2001-01-11 2002-07-26 Shiro Sakai 窒化物系半導体装置及びその製造方法
JP3520919B2 (ja) * 2001-03-27 2004-04-19 士郎 酒井 窒化物系半導体装置の製造方法
JP3548735B2 (ja) * 2001-06-29 2004-07-28 士郎 酒井 窒化ガリウム系化合物半導体の製造方法
US6943039B2 (en) * 2003-02-11 2005-09-13 Applied Materials Inc. Method of etching ferroelectric layers
US7078344B2 (en) * 2003-03-14 2006-07-18 Lam Research Corporation Stress free etch processing in combination with a dynamic liquid meniscus
US7232766B2 (en) * 2003-03-14 2007-06-19 Lam Research Corporation System and method for surface reduction, passivation, corrosion prevention and activation of copper surface
US7009281B2 (en) * 2003-03-14 2006-03-07 Lam Corporation Small volume process chamber with hot inner surfaces
US7217649B2 (en) * 2003-03-14 2007-05-15 Lam Research Corporation System and method for stress free conductor removal
US6841484B2 (en) * 2003-04-17 2005-01-11 Chentsau Ying Method of fabricating a magneto-resistive random access memory (MRAM) device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4668335A (en) * 1985-08-30 1987-05-26 Advanced Micro Devices, Inc. Anti-corrosion treatment for patterning of metallic layers
JPS63233533A (ja) * 1987-03-23 1988-09-29 Anelva Corp プラズマ処理装置
EP0305946A2 (de) * 1987-08-28 1989-03-08 Kabushiki Kaisha Toshiba PLasma-Entschichtungsverfahren für organische und anorganische Schichten

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4372807A (en) * 1982-03-25 1983-02-08 Rca Corporation Plasma etching of aluminum
JPS59189633A (ja) * 1983-04-13 1984-10-27 Fujitsu Ltd 半導体装置の製造方法
JPS6037129A (ja) * 1983-08-10 1985-02-26 Hitachi Ltd 半導体製造装置
US4592800A (en) * 1984-11-02 1986-06-03 Oerlikon-Buhrle U.S.A. Inc. Method of inhibiting corrosion after aluminum etching
KR900007687B1 (ko) * 1986-10-17 1990-10-18 가부시기가이샤 히다찌세이사꾸쇼 플라즈마처리방법 및 장치

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4668335A (en) * 1985-08-30 1987-05-26 Advanced Micro Devices, Inc. Anti-corrosion treatment for patterning of metallic layers
JPS63233533A (ja) * 1987-03-23 1988-09-29 Anelva Corp プラズマ処理装置
EP0305946A2 (de) * 1987-08-28 1989-03-08 Kabushiki Kaisha Toshiba PLasma-Entschichtungsverfahren für organische und anorganische Schichten

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
LEE W-Y ET AL: "REACTIVE ION ETCHING INDUCED CORROSION OL AL AND L-CU FILMS" JOURNAL OF APPLIED PHYSICS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 52, no. 4, 1 April 1981 (1981-04-01), pages 2994-2999, XP002049325 ISSN: 0021-8979 *
PATENT ABSTRACTS OF JAPAN vol. 013, no. 034 (E-708), 25 January 1989 (1989-01-25) & JP 63 233533 A (ANELVA CORP), 29 September 1988 (1988-09-29) *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7186659B2 (en) * 2004-10-25 2007-03-06 Hitachi High-Technologies Corporation Plasma etching method

Also Published As

Publication number Publication date
US4985113A (en) 1991-01-15
EP1126514A3 (de) 2003-02-12
KR900014636A (ko) 1990-10-24
EP0387097A1 (de) 1990-09-12
KR0174814B1 (ko) 1999-02-18

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