EP1119709B1 - Reibungsvakuumpumpe mit stator und rotor - Google Patents
Reibungsvakuumpumpe mit stator und rotor Download PDFInfo
- Publication number
- EP1119709B1 EP1119709B1 EP99940068A EP99940068A EP1119709B1 EP 1119709 B1 EP1119709 B1 EP 1119709B1 EP 99940068 A EP99940068 A EP 99940068A EP 99940068 A EP99940068 A EP 99940068A EP 1119709 B1 EP1119709 B1 EP 1119709B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- rotor
- stator
- pump according
- blades
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/60—Mounting; Assembling; Disassembling
- F04D29/64—Mounting; Assembling; Disassembling of axial pumps
- F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
- F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
- F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
Definitions
- the invention relates to a friction vacuum pump with a stator that is one of several rows of stator blades existing stator blade package includes, as well with a rotor that is one of several rows of rotor blades existing rotor blade package includes, the Stator blade rows and the rotor blade rows ready for operation intermeshed state.
- the present invention is based on the object a friction vacuum pump of the type mentioned create which no longer have the disadvantages described Has.
- this object is achieved in that the blades of one of the two blade packages Slots, their arrangement, depth and Width are selected so that the stator and rotor are in and are unscrewable.
- a friction vacuum pump of this type it is no longer necessary
- Stator and rotor can each be formed in one piece and are inexpensive to manufacture.
- the handling of components of this type during assembly much easier.
- the gap between rotor and Stator can be reduced drastically, as a result of the Reducing the number of parts significantly reduces the tolerance chain is smaller. This results in smaller ones Backflow losses or better pump properties.
- the Tool costs for the manufacture of the stator are essential less, so more flexible stator designs no longer with particularly high cost increases are connected.
- Blades on the inside of a rotor e.g. bell-shaped designed rotor can be provided correspond with stator blades of an inner stator.
- Blade configurations of this type include the engine and the Storage room to protect against the use of aggressive media to evacuate. On separate sealing gas facilities can be dispensed with.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19846188 | 1998-10-07 | ||
DE19846188A DE19846188A1 (de) | 1998-10-07 | 1998-10-07 | Reibungsvakuumpumpe mit Stator und Rotor |
PCT/EP1999/005394 WO2000020762A1 (de) | 1998-10-07 | 1999-07-28 | Reibungsvakuumpumpe mit stator und rotor |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1119709A1 EP1119709A1 (de) | 2001-08-01 |
EP1119709B1 true EP1119709B1 (de) | 2003-05-07 |
Family
ID=7883694
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP99940068A Expired - Lifetime EP1119709B1 (de) | 1998-10-07 | 1999-07-28 | Reibungsvakuumpumpe mit stator und rotor |
Country Status (5)
Country | Link |
---|---|
US (1) | US6619911B1 (ja) |
EP (1) | EP1119709B1 (ja) |
JP (1) | JP2002526720A (ja) |
DE (2) | DE19846188A1 (ja) |
WO (1) | WO2000020762A1 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10149366A1 (de) | 2001-10-06 | 2003-04-17 | Leybold Vakuum Gmbh | Axial fördernde Reibungsvakuumpumpe |
DE10210404A1 (de) * | 2002-03-08 | 2003-09-18 | Leybold Vakuum Gmbh | Verfahren zur Herstellung des Rotors einer Reibungsvakuumpumpe sowie nach diesem Verfahren hergestellter Rotor |
DE10256086A1 (de) * | 2002-11-29 | 2004-06-17 | Leybold Vakuum Gmbh | Kugellager und mit einem Lager dieser Art ausgerüstete Vakuumpumpe |
US7300261B2 (en) * | 2003-07-18 | 2007-11-27 | Applied Materials, Inc. | Vibration damper with nested turbo molecular pump |
DE102004047930A1 (de) * | 2004-10-01 | 2006-04-06 | Leybold Vacuum Gmbh | Reibungsvakuumpumpe |
DE102005003091A1 (de) * | 2005-01-22 | 2006-07-27 | Leybold Vacuum Gmbh | Vakuum-Seitenkanalverdichter |
EP3226981B1 (en) | 2014-12-04 | 2022-08-10 | ResMed Pty Ltd | Wearable device for delivering air |
US9976561B2 (en) | 2016-04-11 | 2018-05-22 | Borgwarner Inc. | Method for securing stator in high speed electric motors |
GB2583938A (en) * | 2019-05-14 | 2020-11-18 | Edwards Ltd | Vacuum rotor blade |
JP7396209B2 (ja) * | 2020-06-03 | 2023-12-12 | 株式会社島津製作所 | ターボ分子ポンプ、ターボ分子ポンプのロータおよびステータ |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2224009A5 (ja) * | 1973-03-30 | 1974-10-25 | Cit Alcatel | |
IT1032818B (it) * | 1975-05-06 | 1979-06-20 | Rava E | Perfezionamento alle pompe turbomo lecolari |
DE3204750C2 (de) * | 1982-02-11 | 1984-04-26 | Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar | Magnetisch gelagerte Turbomolekularpumpe |
US4732529A (en) * | 1984-02-29 | 1988-03-22 | Shimadzu Corporation | Turbomolecular pump |
DE3728154C2 (de) | 1987-08-24 | 1996-04-18 | Balzers Pfeiffer Gmbh | Mehrstufige Molekularpumpe |
WO1989006320A1 (en) | 1988-01-05 | 1989-07-13 | Sholokhov Valery B | Molecular vacuum pump |
JPH031297U (ja) * | 1989-05-30 | 1991-01-09 | ||
JPH05272488A (ja) * | 1992-03-27 | 1993-10-19 | Shimadzu Corp | ターボ分子ポンプ |
FR2735535B1 (fr) | 1995-06-16 | 1997-07-11 | Cit Alcatel | Pompe turbomoleculaire |
DE19632375A1 (de) | 1996-08-10 | 1998-02-19 | Pfeiffer Vacuum Gmbh | Gasreibungspumpe |
-
1998
- 1998-10-07 DE DE19846188A patent/DE19846188A1/de not_active Withdrawn
-
1999
- 1999-07-28 DE DE59905492T patent/DE59905492D1/de not_active Expired - Fee Related
- 1999-07-28 US US09/807,101 patent/US6619911B1/en not_active Expired - Fee Related
- 1999-07-28 EP EP99940068A patent/EP1119709B1/de not_active Expired - Lifetime
- 1999-07-28 JP JP2000574840A patent/JP2002526720A/ja not_active Ceased
- 1999-07-28 WO PCT/EP1999/005394 patent/WO2000020762A1/de active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
DE19846188A1 (de) | 2000-04-13 |
WO2000020762A1 (de) | 2000-04-13 |
JP2002526720A (ja) | 2002-08-20 |
EP1119709A1 (de) | 2001-08-01 |
US6619911B1 (en) | 2003-09-16 |
DE59905492D1 (de) | 2003-06-12 |
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