EP1119709B1 - Reibungsvakuumpumpe mit stator und rotor - Google Patents

Reibungsvakuumpumpe mit stator und rotor Download PDF

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Publication number
EP1119709B1
EP1119709B1 EP99940068A EP99940068A EP1119709B1 EP 1119709 B1 EP1119709 B1 EP 1119709B1 EP 99940068 A EP99940068 A EP 99940068A EP 99940068 A EP99940068 A EP 99940068A EP 1119709 B1 EP1119709 B1 EP 1119709B1
Authority
EP
European Patent Office
Prior art keywords
rotor
stator
pump according
blades
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP99940068A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP1119709A1 (de
Inventor
Heinrich Engländer
Alexander Bosma
Hans-Rudolf Fischer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP1119709A1 publication Critical patent/EP1119709A1/de
Application granted granted Critical
Publication of EP1119709B1 publication Critical patent/EP1119709B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations

Definitions

  • the invention relates to a friction vacuum pump with a stator that is one of several rows of stator blades existing stator blade package includes, as well with a rotor that is one of several rows of rotor blades existing rotor blade package includes, the Stator blade rows and the rotor blade rows ready for operation intermeshed state.
  • the present invention is based on the object a friction vacuum pump of the type mentioned create which no longer have the disadvantages described Has.
  • this object is achieved in that the blades of one of the two blade packages Slots, their arrangement, depth and Width are selected so that the stator and rotor are in and are unscrewable.
  • a friction vacuum pump of this type it is no longer necessary
  • Stator and rotor can each be formed in one piece and are inexpensive to manufacture.
  • the handling of components of this type during assembly much easier.
  • the gap between rotor and Stator can be reduced drastically, as a result of the Reducing the number of parts significantly reduces the tolerance chain is smaller. This results in smaller ones Backflow losses or better pump properties.
  • the Tool costs for the manufacture of the stator are essential less, so more flexible stator designs no longer with particularly high cost increases are connected.
  • Blades on the inside of a rotor e.g. bell-shaped designed rotor can be provided correspond with stator blades of an inner stator.
  • Blade configurations of this type include the engine and the Storage room to protect against the use of aggressive media to evacuate. On separate sealing gas facilities can be dispensed with.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP99940068A 1998-10-07 1999-07-28 Reibungsvakuumpumpe mit stator und rotor Expired - Lifetime EP1119709B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19846188 1998-10-07
DE19846188A DE19846188A1 (de) 1998-10-07 1998-10-07 Reibungsvakuumpumpe mit Stator und Rotor
PCT/EP1999/005394 WO2000020762A1 (de) 1998-10-07 1999-07-28 Reibungsvakuumpumpe mit stator und rotor

Publications (2)

Publication Number Publication Date
EP1119709A1 EP1119709A1 (de) 2001-08-01
EP1119709B1 true EP1119709B1 (de) 2003-05-07

Family

ID=7883694

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99940068A Expired - Lifetime EP1119709B1 (de) 1998-10-07 1999-07-28 Reibungsvakuumpumpe mit stator und rotor

Country Status (5)

Country Link
US (1) US6619911B1 (ja)
EP (1) EP1119709B1 (ja)
JP (1) JP2002526720A (ja)
DE (2) DE19846188A1 (ja)
WO (1) WO2000020762A1 (ja)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10149366A1 (de) 2001-10-06 2003-04-17 Leybold Vakuum Gmbh Axial fördernde Reibungsvakuumpumpe
DE10210404A1 (de) * 2002-03-08 2003-09-18 Leybold Vakuum Gmbh Verfahren zur Herstellung des Rotors einer Reibungsvakuumpumpe sowie nach diesem Verfahren hergestellter Rotor
DE10256086A1 (de) * 2002-11-29 2004-06-17 Leybold Vakuum Gmbh Kugellager und mit einem Lager dieser Art ausgerüstete Vakuumpumpe
US7300261B2 (en) * 2003-07-18 2007-11-27 Applied Materials, Inc. Vibration damper with nested turbo molecular pump
DE102004047930A1 (de) * 2004-10-01 2006-04-06 Leybold Vacuum Gmbh Reibungsvakuumpumpe
DE102005003091A1 (de) * 2005-01-22 2006-07-27 Leybold Vacuum Gmbh Vakuum-Seitenkanalverdichter
EP4173677A1 (en) * 2014-12-04 2023-05-03 ResMed Pty Ltd A multistage blower
US9976561B2 (en) 2016-04-11 2018-05-22 Borgwarner Inc. Method for securing stator in high speed electric motors
GB2583938A (en) * 2019-05-14 2020-11-18 Edwards Ltd Vacuum rotor blade
JP7396209B2 (ja) * 2020-06-03 2023-12-12 株式会社島津製作所 ターボ分子ポンプ、ターボ分子ポンプのロータおよびステータ

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2224009A5 (ja) * 1973-03-30 1974-10-25 Cit Alcatel
IT1032818B (it) * 1975-05-06 1979-06-20 Rava E Perfezionamento alle pompe turbomo lecolari
DE3204750C2 (de) * 1982-02-11 1984-04-26 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Magnetisch gelagerte Turbomolekularpumpe
US4732529A (en) * 1984-02-29 1988-03-22 Shimadzu Corporation Turbomolecular pump
DE3728154C2 (de) * 1987-08-24 1996-04-18 Balzers Pfeiffer Gmbh Mehrstufige Molekularpumpe
WO1989006320A1 (en) * 1988-01-05 1989-07-13 Sholokhov Valery B Molecular vacuum pump
JPH031297U (ja) * 1989-05-30 1991-01-09
JPH05272488A (ja) * 1992-03-27 1993-10-19 Shimadzu Corp ターボ分子ポンプ
FR2735535B1 (fr) * 1995-06-16 1997-07-11 Cit Alcatel Pompe turbomoleculaire
DE19632375A1 (de) * 1996-08-10 1998-02-19 Pfeiffer Vacuum Gmbh Gasreibungspumpe

Also Published As

Publication number Publication date
EP1119709A1 (de) 2001-08-01
JP2002526720A (ja) 2002-08-20
DE59905492D1 (de) 2003-06-12
WO2000020762A1 (de) 2000-04-13
US6619911B1 (en) 2003-09-16
DE19846188A1 (de) 2000-04-13

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