EP1100644A1 - Procede de brasage par refusion de composants electroniques et dispositif de brasage pour la mise en oeuvre d'un tel procede - Google Patents

Procede de brasage par refusion de composants electroniques et dispositif de brasage pour la mise en oeuvre d'un tel procede

Info

Publication number
EP1100644A1
EP1100644A1 EP99929437A EP99929437A EP1100644A1 EP 1100644 A1 EP1100644 A1 EP 1100644A1 EP 99929437 A EP99929437 A EP 99929437A EP 99929437 A EP99929437 A EP 99929437A EP 1100644 A1 EP1100644 A1 EP 1100644A1
Authority
EP
European Patent Office
Prior art keywords
support
components
brazing
fluxing
atmosphere
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP99929437A
Other languages
German (de)
English (en)
French (fr)
Inventor
Claude Carsac
Gilles Conor
Thierry Sindzingre
Denis Verbockhaven
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
LAir Liquide SA a Directoire et Conseil de Surveillance pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA, LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude, LAir Liquide SA a Directoire et Conseil de Surveillance pour lEtude et lExploitation des Procedes Georges Claude filed Critical Air Liquide SA
Publication of EP1100644A1 publication Critical patent/EP1100644A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/3494Heating methods for reflowing of solder
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00Soldering, e.g. brazing, or unsoldering
    • B23K1/012Soldering with the use of hot gas
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/08Treatments involving gases
    • H05K2203/087Using a reactive gas
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/09Treatments involving charged particles
    • H05K2203/095Plasma, e.g. for treating a substrate to improve adhesion with a conductor or for cleaning holes
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/11Treatments characterised by their effect, e.g. heating, cooling, roughening
    • H05K2203/1157Using means for chemical reduction

Definitions

  • the present invention relates to a soldering method by reflow of electronic components on a support such as a printed circuit board, and also relates to a soldering device for the implementation of such a method.
  • soldering consists in bringing the wafers carrying the electronic components to be soldered into contact with one or more waves of liquid solder alloy obtained by circulation of a solder bath contained in a tank, by means of a nozzle.
  • the wafers are previously fluxed in an upstream zone, using a flux spray or a flow foam, then preheated so as to activate the fluxes previously deposited, in order to clean the surfaces to be brazed, to elimination of oxides, organic contaminants, etc ...
  • brazing alloy there is a quantity of brazing alloy at the connection locations of the components on the circuit, for example by screen printing a solder paste containing a mixture of metallic alloy and flux on the printed circuit before depositing the components to be soldered on.
  • brazing alloy had been the object of pre-deposit (s) on the support, on locations of connection of the components, pre-deposit (s) remelt (s) ("reflow "), this being generally followed by an operation of planarizing the surface of the previously remelted pre-deposits (formation of" bumps "in English, we will refer to the SIPAD TM processes or still commercially available OPTIPAD TM), or even by the fact that the brazing alloy has been pre-deposited for certain components on the terminations of the components themselves. It is only then that the components are positioned on the support.
  • the support provided with the components is then inserted into a reflow oven so as to provide the amount of heat necessary to allow the melting of the metal alloy, as well as the activation of the fluxing element contained in the paste or pre-deposit.
  • the object of the invention is to provide a technical answer to the problems mentioned above.
  • the components are placed on support connection locations, and
  • an actual brazing operation of the components is carried out using the said brazing alloy, by heat treatment of the support, and is characterized in that said heat treatment of the support is carried out in order to perform the brazing of the components using using the brazing alloy, by bringing the support into contact, at a pressure close to atmospheric pressure, with a treatment atmosphere comprising excited or unstable chemical species, and substantially free of electrically charged species, the atmosphere being obtained by passing an initial treatment gas through an electrical discharge, and the heat treatment of the support being obtained by means of the chemical species thus heated under the action of the discharge.
  • the process according to the invention can also include one or more of the following steps:
  • polymerizable glue is deposited on the bonding locations of the support, and the said adhesive is polymerized in order to bond the components to the support at the bonding locations ;
  • brazing alloy is available by screen printing brazing paste on the support at the connection locations of the components;
  • the brazing alloy is available by the fact that the brazing alloy had been the object on the pre-deposition support (s), on the or the connection locations of the components, pre-deposition (s) then having undergone a reflow operation, then having then advantageously undergone an operation of planarizing their surface;
  • the brazing alloy is available by the fact that the brazing alloy had been pre-deposited (s) on locations / terminations of the components themselves, pre-deposit (s) having then undergone reflow operation; before or after the step of depositing adhesive on the bonding locations of the support, or even after depositing the components on the support, a fluxing operation is carried out prior to the support by treatment of the latter, at a pressure close to atmospheric pressure, by means of a fluxing atmosphere comprising excited or unstable chemical species and substantially free of electrically charged species; -
  • the fluxing atmosphere of the support is obtained by passing an initial fluxing gas through an electric discharge, the initial fluxing gas advantageously comprising a reducing gas mixture comprising hydrogen.
  • the initial treatment gas comprises a reducing gas mixture comprising hydrogen; the treatment atmosphere is obtained at a gas outlet from an apparatus for forming excited or unstable species, into which the initial treatment gas has been transformed;
  • the fluxing atmosphere is obtained at a gas outlet from an apparatus for forming excited or unstable species, in which the initial fluxing gas has been transformed; the component placement and soldering steps are carried out on the two large faces of the support, said treatment operation being carried out by means of two apparatuses for forming excited or unstable chemical species, each arranged opposite one of the faces support; the method further comprises a step of cooling the support, after said treatment, by passing the latter through a cooling atmosphere comprising a neutral gas.
  • the invention also relates to a device for brazing by reflow of electronic components on a support, for example a printed circuit board, for implementing a method as defined above, characterized in that comprises a device for conveying the supports carrying, on at least one of their faces the components to be brazed on connection locations, locations on which a brazing alloy is available, the conveying member ensuring the transfer of the supports opposite first means allowing the polymerization of glue dots present on the bonding locations of the support, and opposite the second means comprising at least one apparatus for forming a treatment atmosphere comprising excited or unstable chemical species and being substantially devoid of electrically charged species, treatment atmosphere the temperature of which makes it usable for producing, at a pressure close to the pressure atmospheric, heat treatment of the support, for the actual soldering of the components.
  • the device advantageously comprises, interposed along the conveyor upstream of the first means or between the first means and the second means, at least one apparatus for forming a fluxing atmosphere comprising excited or unstable chemical species and being substantially devoid of electrically charged species, fluxing atmosphere usable for carrying out gas phase fluxing of the support.
  • pressure close to atmospheric pressure is understood to mean a pressure advantageously situated in the range [0.1 ⁇ 10 ⁇ Pa, 3 ⁇
  • the "support” on which the components according to the invention are soldered can be very varied in nature, depending on the different supports used in the industry, as well on the electronic components to be soldered. By way of illustration, it may be supports of the printed circuit type (whatever their surface finish or finish), or even, for example, metallized ceramic supports such as hybrid circuits, or even housing bottoms on which must be soldered. circuits in a global encapsulation process.
  • the components concerned can be extremely varied, from traditional passive or active electronic components to more complex and delicate components for handling, whether they are encapsulated or bare chips (BGA, MCM, Flip Chips, etc.).
  • the “components” according to the invention may also consist of circuits which must be soldered on another support or on a bottom of the housing before encapsulation.
  • FIG. 1 is a diagrammatic view of a brazing device for implementing the method according to the invention.
  • FIG. 1 is shown a general view of a device brazing by reflow suitable for implementing the method according to the invention.
  • This device comprises a conveyor member 10 comprising a belt 12, shown in phantom, disposed in an enclosure 14 and extending between two guide rollers, 16 and 18, at least one of which is motor.
  • a set of printed circuit boards such as 20, on at least one of the large faces of which are arranged a set of electronic components, such as 22, which should be brazed.
  • the electronic components are arranged at connection locations to which solder paste, for example an alloy of tin and lead, is applied. Furthermore, points of a polymerizable adhesive suitable for the intended use have been deposited on suitable bonding points of the board (for example on polymeric surfaces of the printed circuit board, between two connection locations), ensuring keeping the components in place during their brazing.
  • solder paste for example an alloy of tin and lead
  • the mat 12 ensures the transfer of the printed circuit boards 20 carrying the components 22 opposite a first station 24 allowing, by thermal transfer, the polymerization of the adhesive deposited (for example by radiation), then through a second station 28 for heat treatment, at the level of which the actual soldering of the components 22 is carried out.
  • the belt 12 ensures the transfer of the wafers 20, downstream from the second heat treatment station 28 to a cooling station 30 at the level of which the wafers are arranged in a nitrogen atmosphere.
  • the second heat treatment station 28 can be considered to be confused with a fluxing station 26, both constituted by a module 32 for forming a treatment and fluxing gas comprising species excited or unstable chemicals and substantially free of electrically charged species.
  • the device can comprise two modules 32 for forming excited or unstable chemical species arranged each facing one of the large faces of the plate 20.
  • module 32 The function of module 32 is to pass an initial treatment gas, advantageously comprising a reducing gas mixture, for example based on nitrogen and hydrogen, supplemented, if necessary with water vapor, through an electric discharge , inside which the initial gas is transformed, so as to generate, at the gas outlet of the module, the treatment gas which comprises the excited or unstable gaseous species and which is substantially devoid of electrically charged species (situation of post-discharge).
  • the temperature of the species leaving the discharge will generally be directly sufficient (> 190 ° C.). However, in certain particular cases (certain metallic eutectics for example), it may be envisaged to preheat the initial gas somewhat before it enters the landfill.
  • FIG. 2 There is shown in Figure 2 a sectional view of an example of module 32 capable of generating such chemical species.
  • the module 32 comprises a first tubular electrode 34, formed for example by an internal face of a metal block 36, and in which is concentrically disposed an assembly formed of a tube made of dielectric material 38, for example made of ceramic, on the internal face of which is deposited, by metallization, a second electrode 40, excessively thickened in FIG. 2, in order to improve clarity.
  • the dielectric tube 38 and the second electrode 40 define, with the first electrode 34, a tubular gas passage 42, and, internally, an internal volume 44 in which a refrigerant is circulated.
  • the block 36 comprises, diametrically opposite, two longitudinal slots 46 and 48, respectively forming the inlet of the initial treatment gas to be transformed (excited) in the passage 42 and the outlet of the treatment atmosphere stream comprising the excited gaseous species or unstable but substantially devoid of electrically charged species.
  • the slots 46 and 48 extend over the entire axial length of the cavity 42.
  • the block 36 also advantageously comprises, at the periphery of the first electrode 34, a plurality of conduits, such as 50, for the passage of a cooling fluid, for example water.
  • a cooling fluid for example water.
  • the gas inlet slot 6 communicates with a homogenization chamber 52 formed in a housing 54 attached to the block 36 and comprising a pipe 56 for supplying initial gas.
  • the module is completed by an electric generator 58 at high voltage and high frequency intended to generate a discharge in the gas mixture circulating in the gas passage 42 so as to cause, by ionization, an excitation of the gas molecules entering into its constitution and to thus generating excited or unstable chemical species, in particular H * or H 2 " radicals, which deoxidize and decontaminate the external surface of the printed circuit boards 20 (FIG. 1).
  • the method of soldering electronic components on a wafer circuit board is done here as follows.
  • wafers 20 are used on which solder paste has been screen printed, at connection locations of the components. It would also have been possible to use a brazing alloy which has been the subject of pre-deposits on the wafer on locations for connection of the components, and of a pre-reflow, in general followed by an operation of flattening of the surface. pre-deposits thus obtained (industrially available processes well known to those skilled in the art of microelectronics). It could also be components having themselves locations / terminations on which a pre-deposit of brazing alloy has been carried out.
  • the latter transfers the wafers from the loading station to the first adhesive polymerization station 24, and the circuit is thus preheated.
  • the platelets are transferred to the module 32 for the formation of excited or unstable chemical species, described previously with reference to FIG. 3, at which level the platelets, on the one hand, undergo an operation of fluxing, under the action of the chemical species delivered by the module 32 and, on the other hand and at the same time, under the action of the heat transmitted to these excited species under the effect of the discharge, the components are brazed on the brochure.
  • the process is continued here by a step of cooling the wafers, under the action of a flow of nitrogen supplied at the level of the cooling station.
  • the first step of thermal treatment of polymerization and preheating of the wafer is carried out by means of a specific station 24.
  • the actual heat treatment for reflow is carried out with active species (cleaning, deoxidation, etc.) making it possible to avoid any oxidation phenomenon and therefore to substantially improve the wetting performance;
  • the method according to the invention makes it possible to combine completely satisfactory brazing performance, while making it possible to avoid the subsequent cleaning operation of the supports.
  • the invention has been particularly exemplified in the foregoing by positioning a module for forming the treatment or fluxing atmosphere on the path of the supports (or even one module per side), it is of course possible to envisage the presence of several modules in series and / or in parallel making it possible to obtain the required effect, but one can also consider (depending on the case of each user site) the fact of not installing, facing one or each face support, that a module (whether processing or fluxing), by performing successive ironings next to the module to obtain the desired effect.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
EP99929437A 1998-07-30 1999-07-08 Procede de brasage par refusion de composants electroniques et dispositif de brasage pour la mise en oeuvre d'un tel procede Withdrawn EP1100644A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR9809773A FR2781706B1 (fr) 1998-07-30 1998-07-30 Procede de brasage par refusion de composants electroniques et dispositif de brasage pour la mise en oeuvre d'un tel procede
FR9809773 1998-07-30
PCT/FR1999/001657 WO2000006333A1 (fr) 1998-07-30 1999-07-08 Procede de brasage par refusion de composants electroniques et dispositif de brasage pour la mise en oeuvre d'un tel procede

Publications (1)

Publication Number Publication Date
EP1100644A1 true EP1100644A1 (fr) 2001-05-23

Family

ID=9529206

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99929437A Withdrawn EP1100644A1 (fr) 1998-07-30 1999-07-08 Procede de brasage par refusion de composants electroniques et dispositif de brasage pour la mise en oeuvre d'un tel procede

Country Status (11)

Country Link
EP (1) EP1100644A1 (pt)
JP (1) JP2002521207A (pt)
KR (1) KR20010053616A (pt)
CN (1) CN1307508A (pt)
AU (1) AU4625399A (pt)
BR (1) BR9912560A (pt)
CA (1) CA2338157A1 (pt)
FR (1) FR2781706B1 (pt)
HU (1) HUP0104961A2 (pt)
TW (1) TW416881B (pt)
WO (1) WO2000006333A1 (pt)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6468833B2 (en) 2000-03-31 2002-10-22 American Air Liquide, Inc. Systems and methods for application of substantially dry atmospheric plasma surface treatment to various electronic component packaging and assembly methods
US6780225B2 (en) * 2002-05-24 2004-08-24 Vitronics Soltec, Inc. Reflow oven gas management system and method
CN100427273C (zh) * 2003-08-26 2008-10-22 宏达国际电子股份有限公司 电子元件载具
KR100975911B1 (ko) * 2008-03-17 2010-08-13 성안산업주식회사 황동과 태라스톤을 사용한 일체형 논 슬립부재
CN102173849B (zh) * 2011-02-18 2012-08-08 成都泰格微波技术股份有限公司 一种可靠的微波介质陶瓷与金属的焊接方法
CN106985564B (zh) * 2011-06-13 2019-03-08 千住金属工业株式会社 焊膏的印刷方法
ES2718380T3 (es) 2015-10-29 2019-07-01 Procter & Gamble Composición detergente líquida
FR3066935B1 (fr) * 2017-06-01 2019-06-28 Stiral Procede de brasage ou rechargement d'une piece a micro-interstices, et echangeur thermique obtenu par un tel procede.
KR102101455B1 (ko) * 2020-02-01 2020-04-16 김상군 셀렉티브 솔더링 장치
CN111360361B (zh) * 2020-03-26 2021-09-07 诚联电源股份有限公司 用于开关电源生产的电子线路板固定装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4921157A (en) * 1989-03-15 1990-05-01 Microelectronics Center Of North Carolina Fluxless soldering process
DE4032328A1 (de) * 1989-11-06 1991-09-19 Wls Karl Heinz Grasmann Weichl Verfahren und vorrichtung zur verarbeitung von zu verloetenden fuegepartnern
US5345056A (en) * 1991-12-12 1994-09-06 Motorola, Inc. Plasma based soldering by indirect heating

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO0006333A1 *

Also Published As

Publication number Publication date
CA2338157A1 (fr) 2000-02-10
JP2002521207A (ja) 2002-07-16
BR9912560A (pt) 2001-05-02
FR2781706A1 (fr) 2000-02-04
CN1307508A (zh) 2001-08-08
WO2000006333A1 (fr) 2000-02-10
FR2781706B1 (fr) 2000-08-25
TW416881B (en) 2001-01-01
KR20010053616A (ko) 2001-06-25
HUP0104961A2 (en) 2002-05-29
AU4625399A (en) 2000-02-21

Similar Documents

Publication Publication Date Title
CA2178465C (fr) Procede et dispositif de brasage a la vague integrant une operation de fluxage par voie seche
EP0879112B1 (en) Fluxless soldering method
EP1100644A1 (fr) Procede de brasage par refusion de composants electroniques et dispositif de brasage pour la mise en oeuvre d'un tel procede
KR100529489B1 (ko) 반도체 장치의 제조 방법 및 반도체 장치의 제조 장치
CN100455394C (zh) 焊接方法
US5345056A (en) Plasma based soldering by indirect heating
US8568535B2 (en) Systems and methods for exposing semiconductor workpieces to vapors for through-hole cleaning and/or other processes
US5433820A (en) Method and apparatus for dry process fluxing
MXPA96001752A (en) Wave welding procedure and device, integrating a dry pre-treatment operation
CN102960077A (zh) 接合构造体制造方法及加热熔融处理方法以及它们的系统
WO2010026822A1 (ja) 電気機器の分解方法、及び、電気機器の分解装置
JP2985806B2 (ja) フリップチップ実装方法
FR2759616A1 (fr) Appareil d'empilage et de brasage automatise pour dispositifs de modules empiles tridimensionnels et procede de fabrication de celui-ci
US20140027418A1 (en) Method and device for electrically contacting terminal faces of two substrates by laser soldering using a gaseous flux medium
JPH11163036A (ja) バンプ形成方法、はんだ接合用前処理方法、はんだ接合方法、バンプ形成装置、はんだ接合用前処理装置およびはんだ接合装置
US5992729A (en) Tacking processes and systems for soldering
WO2000007418A1 (fr) Procede de brasage par refusion de composants electroniques utilisant des pre-depots d'alliage de brasure et dispositif de brasage pour la mise en oeuvre d'un tel procede
KR100473432B1 (ko) 범프 형성 방법, 땜납 접합용 전처리 방법, 땜납 접합방법, 범프 형성 장치, 땜납 접합용 전처리 장치 및 땜납접합 장치
CA2178574C (fr) Procede de fluxage par voie seche de surfaces metalliques avant brasage ou etamage utilisant une atmosphere comportant de la vapeur d'eau
EP0996770A1 (fr) Procede et appareil de traitement de surfaces metalliques par voie seche
US20230067346A1 (en) Wafer bonding system and method of using the same
FR2473834A1 (fr) Procede de soudure automatique de microcomposants sur un circuit imprime, et circuit imprime equipe ainsi realise
MXPA96001753A (en) Procedure for dry pre-treatment metal disposals before their owned welding, using an atmosphere containing a vapor
JPS62148084A (ja) ベ−パ−リフロ−式はんだ付装置
JPH10199938A (ja) 半導体製造方法および装置

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20010228

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: L'AIR LIQUIDE, S.A. A DIRECTOIRE ET CONSEIL DE SUR

17Q First examination report despatched

Effective date: 20021219

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION HAS BEEN WITHDRAWN

18W Application withdrawn

Effective date: 20030210