EP1078166B2 - Reibungsvakuumpumpe mit stator und rotor - Google Patents

Reibungsvakuumpumpe mit stator und rotor Download PDF

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Publication number
EP1078166B2
EP1078166B2 EP98946450A EP98946450A EP1078166B2 EP 1078166 B2 EP1078166 B2 EP 1078166B2 EP 98946450 A EP98946450 A EP 98946450A EP 98946450 A EP98946450 A EP 98946450A EP 1078166 B2 EP1078166 B2 EP 1078166B2
Authority
EP
European Patent Office
Prior art keywords
rotor
pump
vacuum pump
friction vacuum
stages
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP98946450A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP1078166A1 (de
EP1078166B1 (de
Inventor
Christian Beyer
Ralf Adamietz
Markus Henry
Günter Schütz
Heinrich Engländer
Gerhard Wilhelm Walter
Hans-Rudolf Fischer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
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Application filed by Leybold Vakuum GmbH, Leybold Vacuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP1078166A1 publication Critical patent/EP1078166A1/de
Application granted granted Critical
Publication of EP1078166B1 publication Critical patent/EP1078166B1/de
Publication of EP1078166B2 publication Critical patent/EP1078166B2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Definitions

  • the invention relates to a friction vacuum pump having the features of the preamble of patent claim 1.
  • a friction vacuum pump of this type is known. It is preferably used to evacuate corpuscular blasting devices (eg mass spectrometers) with chambers separated from each other by diaphragms, in which different pressures are to prevail during operation of the corpuscular blasting device. It is known per se to use separate vacuum pumps for generating these pressures.
  • the DE-A-43 31 589 discloses using only a vacuum pumping system to generate the various pressures required by the corpuscular blasting machine.
  • the pumping system includes two turbomolecular and one molecular (Holweck) pumping stage. These pumping stages are arranged axially one behind the other. Each pumping stage has a gas inlet (end-face gas passage surface), which is connected via connecting means with the associated chamber of the device to be evacuated.
  • connection means are used in the solution after the DE-A-34 31 589 the housing itself and a laterally arranged additional housing.
  • the housing itself is equipped with a frontally located connection opening for the connection of the gas inlet of the first pumping stage with the device to be evacuated.
  • connection lines are provided, which connect the associated inlets of the other pumping stages with other connection openings. These in turn are each connected to the associated chambers in the device to be evacuated. Since the connection openings in the additional housing with the connection opening of the first pumping stage lie in a common plane (perpendicular to the rotor axis), the connecting lines located in the additional housing must be relatively long. This results in relatively large conductance losses in the connecting lines, which is particularly disadvantageous when a high pumping speed is desired, especially in the area of an intermediate connection.
  • the state of the art also includes the content of the documents DE 18 09 102 A1 .
  • US 31 89 264 A and US 36 28 894 A Disclosed are turbomolecular and molecular pumps, each with only one suction side located port.
  • the DE 24 42 614 discloses a friction vacuum pump according to the preamble of claim 1.
  • the present invention has for its object to make a friction vacuum pump of the type mentioned above so that the pumping speed of the intermediate stages is not affected by high Leitwertmene in connecting lines.
  • the implementation of the measures according to the invention has the consequence that the gases to be delivered in the inlet region of the first pumping stage, ie just where the pressure is lowest, must be redirected.
  • the conductance loss caused thereby can be kept small, since the distance between the gas inlet and the plane of the connection opening is still relatively small and, moreover, nothing stands in the way of choosing larger diameters in this area.
  • particularly high pumping speed values in the region of the inlet of the first (high-vacuum-side) pumping stage are not required. Often there is even the need to throttle the suction at this point.
  • the essential purpose of the first pumping stage is to provide a high compression ratio.
  • the blade properties chosen for the first pumping stage (number of turbo stages, blade clearance, pitch angle, etc.) must take this function into account. It is essential to separate the two working pressure ranges of the two pumping stages. A high pumping speed is usually desired only at the or the intermediate inlets. This goal can also be achieved by choosing special blade geometries.
  • the accessibility of the gas molecules to the gas inlet is decisive.
  • the pump itself is designated 1, its housing 2, its stator system 3 and its rotor system 4.
  • the rotor system includes the shaft 5, which in turn on the bearings 6, 7 in the bearing housing 8, connected to the pump housing 2, is supported.
  • the bearing housing is also still the drive motor 9, 10.
  • the axis of rotation of the rotor system 4 is denoted by 15.
  • a total of three pumping stages 12, 13, 14 are provided, of which two (12, 13) as Turbomolekularvakuumpumpgen and one (14) is a molecular (Holweck) pumping stage. At the molecular pumping stage 14, the outlet of the pump 17 connects.
  • the first, high-vacuum side pumping stage 12 consists of four pairs of rotor blade rows 21 and Statorschaufelschsch 22. Your inlet, the effective gas passage area is denoted by 23.
  • the first pumping stage 12 is followed by the second pumping stage 13, which consists of three pairs of one stator blade row 22 and one rotor blade row 21. Your inlet is labeled 28.
  • the second pumping stage 13 is spaced from the first pumping stage 12.
  • the selected distance (height) a ensures the free accessibility of the gas molecules to be delivered to the gas inlet 28. Expediently, the distance a is greater than a quarter, preferably greater than one third, of the diameter of the rotor system 4.
  • the adjoining Holweck pump comprises a rotating cylinder section 29, the outside and inside facing in a known manner, each with a threaded groove 30, 31 equipped with stator elements 32, 33.
  • the rotor-side parts of the pump stages 12, 13, 14, form a unit which is connected to the shaft 5 in the ready state.
  • the shaft 5 passes through a central bore 25, so that there is no direct connection between the storage space and the intermediate space and thus the risk of back diffusion of lubricant vapors is eliminated.
  • This purpose is also the flying support of the rotor system 4.
  • On high vacuum side mounted bearings with the conductance impairing components (bearing carrier) can be omitted.
  • the distance of the bearing 6, 7 is kept small from the center of gravity of the rotor.
  • the back diffusion of lubricant vapors can also be avoided by using magnetic bearings that can be placed in a more favorable location.
  • the housing 2 is formed such that the planes of all the connection openings 36, 37 are parallel to the rotor axis 15.
  • the distance of the connection 37 to the associated gas inlet 28 is very small, so that the pumping stage 13 impairing conductance losses are negligible.
  • the diameter of the connection opening 37 exceeds the height a by about twice. This measure also serves to reduce the conductance losses between inlet 28 and connection opening 37.
  • the illustrated pump 1 or its pump-effective elements are expediently designed such that in the region of the connection opening 36 a pressure of 10 -4 to 10 -7 , preferably 10 -5 to 10 -6 , and im Area of the connection opening 37, a pressure of about 10 -2 to 10 -4 mbar is generated.
  • a high pumping speed is to be generated (eg 200 l / s).
  • the subsequent, two-stage Holweck pumping stage (29, 30, 29, 31) ensures a high prevacuum resistance, so that usually the pumping speed of the second pumping stage is independent of the fore-vacuum pressure.
  • this goal can be achieved by appropriate design of the blades of the first pumping stage 12.
  • Another possibility is to arrange a diaphragm 38 in front of the inlet 23 of the first pumping stage, the inner diameter of which determines the desired pumping speed.
  • the exemplary embodiment of the invention according to FIG. 2 differs from the pump according to FIG. 1 in that the diameter of the pumping stages 13 and 14 following the first pumping stage 12 are greater than the diameter of the pumping stage 12.
  • This situation is the plane of the connection openings 36, 37 customized. It is inclined in such a way to the axis 15 of the rotor 4, that the distance of the connection openings 36, 37 to the associated gas inlets 23, 28 is as small as possible.
  • the inclination angle a of the plane of the connection openings 36, 37 to the rotor axis 15 corresponds to the increase in the diameter of the pumping stages. Optimal favorable distance ratios can be achieved. In the illustrated embodiment, the inclination angle is about 5 °.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP98946450A 1998-05-14 1998-09-11 Reibungsvakuumpumpe mit stator und rotor Expired - Lifetime EP1078166B2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19821634 1998-05-14
DE19821634A DE19821634A1 (de) 1998-05-14 1998-05-14 Reibungsvakuumpumpe mit Stator und Rotor
PCT/EP1998/005802 WO1999060275A1 (de) 1998-05-14 1998-09-11 Reibungsvakuumpumpe mit stator und rotor

Publications (3)

Publication Number Publication Date
EP1078166A1 EP1078166A1 (de) 2001-02-28
EP1078166B1 EP1078166B1 (de) 2003-06-11
EP1078166B2 true EP1078166B2 (de) 2007-09-05

Family

ID=7867761

Family Applications (1)

Application Number Title Priority Date Filing Date
EP98946450A Expired - Lifetime EP1078166B2 (de) 1998-05-14 1998-09-11 Reibungsvakuumpumpe mit stator und rotor

Country Status (10)

Country Link
US (1) US6435811B1 (zh)
EP (1) EP1078166B2 (zh)
JP (1) JP4173637B2 (zh)
KR (1) KR20010025024A (zh)
CN (1) CN1115488C (zh)
AU (1) AU754944B2 (zh)
CA (1) CA2332777C (zh)
DE (2) DE19821634A1 (zh)
TW (1) TW370594B (zh)
WO (1) WO1999060275A1 (zh)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6090100A (en) * 1992-10-01 2000-07-18 Chiron Technolas Gmbh Ophthalmologische Systeme Excimer laser system for correction of vision with reduced thermal effects
GB9921983D0 (en) * 1999-09-16 1999-11-17 Boc Group Plc Improvements in vacuum pumps
JP3777498B2 (ja) * 2000-06-23 2006-05-24 株式会社荏原製作所 ターボ分子ポンプ
JP2002138987A (ja) * 2000-10-31 2002-05-17 Seiko Instruments Inc 真空ポンプ
US7033142B2 (en) * 2003-01-24 2006-04-25 Pfeifer Vacuum Gmbh Vacuum pump system for light gases
GB0322883D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
GB0409139D0 (en) 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
DE10353034A1 (de) * 2003-11-13 2005-06-09 Leybold Vakuum Gmbh Mehrstufige Reibungsvakuumpumpe
GB0329839D0 (en) * 2003-12-23 2004-01-28 Boc Group Plc Vacuum pump
GB0414316D0 (en) * 2004-06-25 2004-07-28 Boc Group Plc Vacuum pump
GB0503946D0 (en) * 2005-02-25 2005-04-06 Boc Group Plc Vacuum pump
DE202005019644U1 (de) * 2005-12-16 2007-04-26 Leybold Vacuum Gmbh Turbomolekularpumpe
JP2007231938A (ja) * 2006-02-06 2007-09-13 Boc Edwards Kk 真空装置、真空装置における水蒸気分圧の急速低減方法、ロードロックチャンバー内の水蒸気分圧の上昇防止方法、および、真空装置用真空ポンプ
DE102008024764A1 (de) * 2008-05-23 2009-11-26 Oerlikon Leybold Vacuum Gmbh Mehrstufige Vakuumpumpe
DE202009003880U1 (de) * 2009-03-19 2010-08-05 Oerlikon Leybold Vacuum Gmbh Multi-Inlet-Vakuumpumpe
FR2984972A1 (fr) * 2011-12-26 2013-06-28 Adixen Vacuum Products Adaptateur pour pompes a vide et dispositif de pompage associe
EP2757266B1 (en) 2013-01-22 2016-03-16 Agilent Technologies, Inc. Rotary vacuum pump
DE102013109637A1 (de) * 2013-09-04 2015-03-05 Pfeiffer Vacuum Gmbh Vakuumpumpe sowie Anordnung mit einer Vakuumpumpe
DE102013114290A1 (de) 2013-12-18 2015-06-18 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP6488898B2 (ja) * 2015-06-09 2019-03-27 株式会社島津製作所 真空ポンプおよび質量分析装置
US10655638B2 (en) * 2018-03-15 2020-05-19 Lam Research Corporation Turbomolecular pump deposition control and particle management
US11519419B2 (en) 2020-04-15 2022-12-06 Kin-Chung Ray Chiu Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface
GB2601515B (en) * 2020-12-02 2022-12-28 Agilent Technologies Inc Vacuum pump with elastic spacer
EP4293232A1 (de) * 2023-10-17 2023-12-20 Pfeiffer Vacuum Technology AG Pumpe
EP4379216A1 (de) * 2024-04-22 2024-06-05 Pfeiffer Vacuum Technology AG Turbomolekularvakuumpumpe mit kompakter bauform

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2442614A1 (de) † 1974-09-04 1976-03-18 Siemens Ag Turbomolekularpumpe

Family Cites Families (10)

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US3189264A (en) 1963-06-04 1965-06-15 Arthur Pfeiffer Company Vacuum pump drive and seal arrangement
DE1809902C3 (de) * 1968-11-20 1973-11-15 Arthur Pfeiffer-Vakuumtechnik Gmbh, 6330 Wetzlar Mehrstufige Turbo Molekularhoch vakuumpumpe
US3628894A (en) * 1970-09-15 1971-12-21 Bendix Corp High-vacuum mechanical pump
DE3826710A1 (de) * 1987-08-07 1989-02-16 Japan Atomic Energy Res Inst Vakuumpumpe
DE4331589C2 (de) * 1992-12-24 2003-06-26 Pfeiffer Vacuum Gmbh Vakuumpumpsystem
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
EP0603694A1 (de) * 1992-12-24 1994-06-29 BALZERS-PFEIFFER GmbH Vakuumpumpsystem
DE29516599U1 (de) * 1995-10-20 1995-12-07 Leybold AG, 50968 Köln Reibungsvakuumpumpe mit Zwischeneinlaß
GB9725146D0 (en) * 1997-11-27 1998-01-28 Boc Group Plc Improvements in vacuum pumps
US6193461B1 (en) * 1999-02-02 2001-02-27 Varian Inc. Dual inlet vacuum pumps

Patent Citations (1)

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Publication number Priority date Publication date Assignee Title
DE2442614A1 (de) † 1974-09-04 1976-03-18 Siemens Ag Turbomolekularpumpe

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
"Vakuumtechnik-Grundlagen und Anwendungen", S. 77, Carl Hanser Verlag München-Wien, 1991 †

Also Published As

Publication number Publication date
CA2332777C (en) 2007-11-06
WO1999060275A1 (de) 1999-11-25
CN1115488C (zh) 2003-07-23
CA2332777A1 (en) 1999-11-25
AU9348198A (en) 1999-12-06
DE59808723D1 (de) 2003-07-17
JP4173637B2 (ja) 2008-10-29
JP2002515568A (ja) 2002-05-28
CN1292851A (zh) 2001-04-25
DE19821634A1 (de) 1999-11-18
AU754944B2 (en) 2002-11-28
KR20010025024A (ko) 2001-03-26
EP1078166A1 (de) 2001-02-28
TW370594B (en) 1999-09-21
US6435811B1 (en) 2002-08-20
EP1078166B1 (de) 2003-06-11

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