EP1061262A2 - Turbomolekularpumpe - Google Patents

Turbomolekularpumpe Download PDF

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Publication number
EP1061262A2
EP1061262A2 EP00112625A EP00112625A EP1061262A2 EP 1061262 A2 EP1061262 A2 EP 1061262A2 EP 00112625 A EP00112625 A EP 00112625A EP 00112625 A EP00112625 A EP 00112625A EP 1061262 A2 EP1061262 A2 EP 1061262A2
Authority
EP
European Patent Office
Prior art keywords
turbo
molecular pump
rotor
prevention member
scattering prevention
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00112625A
Other languages
English (en)
French (fr)
Other versions
EP1061262A3 (de
EP1061262B1 (de
Inventor
Atsushi c/o Ebara Corporation Shiokawa
Hiroshi c/o Ebara Corporation Sobukawa
Hiroyuki c/o Ebara Corporation Kawasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of EP1061262A2 publication Critical patent/EP1061262A2/de
Publication of EP1061262A3 publication Critical patent/EP1061262A3/de
Application granted granted Critical
Publication of EP1061262B1 publication Critical patent/EP1061262B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
    • F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps

Definitions

  • the present invention relates to a turbo-molecular pump for evacuating gas with a rotor that rotates at a high speed.
  • FIG. 17 of the accompanying drawings shows a conventional turbo-molecular pump.
  • the conventional turbo-molecular pump comprises a rotor R and a stator S which are housed in a pump casing 14.
  • the rotor R and the stator S jointly make up a turbine blade pumping section L1 and a thread groove pumping section L2.
  • the stator S comprises a base 15, a stationary cylindrical sleeve 16 vertically mounted centrally on the base 15, and stationary components of the turbine blade pumping section L1 and the thread groove pumping section L2.
  • the rotor R mainly comprises a main shaft 10 inserted coaxially in the stationary cylindrical sleeve 16, and a rotary cylindrical sleeve 12 mounted on the main shaft 10 and disposed around the stationary cylindrical sleeve 16.
  • a drive motor 18 Between the main shaft 10 and the stationary cylindrical sleeve 16, there are provided a drive motor 18, an upper radial magnetic pole 20 disposed above the drive motor 18, and a lower radial magnetic pole 22 disposed below the drive motor 18.
  • An axial bearing 24 is disposed at a lower portion of the main shaft 10, and comprises a target disk 24a mounted on the lower end of the main shaft 10, and upper and lower electromagnets 24b provided on the stator side.
  • the rotary cylindrical sleeve 12 has rotor blades 30 integrally disposed on an upper outer circumferential portion thereof.
  • stator blades 32 disposed axially alternately with the rotor blades 30.
  • the rotor blades 30 and the stator blades 32 jointly make up the turbine blade pumping section L1 for evacuating gas by way of an interaction between the rotor blades 30 and the stator blades 32.
  • the thread groove pumping section L2 which is disposed downwardly of the turbine blade pumping section L1, includes a thread groove section 34 of the rotary cylindrical sleeve 12 which has thread grooves 34a defined in an outer circumferential surface thereof and surrounds the stationary cylindrical sleeve 16.
  • the stator S has a spacer 36 disposed around the thread groove section 34.
  • the thread groove pumping section L2 evacuates gas by way of a dragging action of the thread grooves 34a in the thread groove section 34 which rotates at a high speed in unison with the rotor R.
  • the stator blades 32 have outer edges clamped by either stator blade spacers 38 or the stator blade spacer 38 and the spacer 36.
  • the turbo-molecular pump With the thread groove pumping section L2 disposed downstream of the turbine blade pumping section L1, the turbo-molecular pump is of the wide range type capable of handing a wide range of rates of gas flows.
  • the thread grooves 34a of the thread groove pumping section L2 are defined in the rotor R.
  • the thread grooves of the thread groove pumping section L2 may be defined in the stator S.
  • a turbo-molecular pump comprising a casing having an intake port, a stator fixedly mounted in the casing, a rotor supported in the casing for rotation relatively to the stator, the stator and the rotor serving as at least one of a turbine blade pumping section and a thread groove pumping section for evacuating gas, and a scattering prevention member for preventing fragments of the rotor from being scattered through the intake port.
  • the scattering prevention member is effective to prevent those fragments from damaging the chamber in a processing apparatus connected to the intake port or devices and products being processed in the chamber.
  • the scattering prevention member may be mounted on a stationary member such as the casing, or the rotor.
  • the rotor comprises rotor blades and the stator comprises stator blades, and the scattering prevention member comprises at least part of the rotor blade or the stator blade. Therefore, at least part of the rotor blade or the stator blade has a fragment shield function.
  • the scattering prevention member includes at least one protrusion projecting radially inwardly from an inner surface of the intake port. If the rotor is broken, rotor fragments collide with the protrusion, and are prevented from being scattered through the intake port or kinetic energy of the rotor fragments is reduced.
  • the scattering prevention member is made of a high-strength material and/or a high-energy absorbing material.
  • the high-strength material may be stainless steel, titanium alloy, or the like which is stronger than aluminum.
  • the high-energy absorbing material may be made of a relatively soft metal material such as lead, a polymer material, or a composite material thereof, and shaped so as to be effective to absorb shocks, e.g., shaped into a honeycomb structure or an assembly of spherical members.
  • the scattering prevention member has a shock absorbing structure.
  • the shock absorbing structure is effective to absorb the kinetic energy of rotor fragments which collide with the scattering prevention member for better protection of the chamber in the processing apparatus that is connected to the intake port.
  • turbo-molecular pump according to embodiments of the present invention will be described below. Like or corresponding parts are denoted by like or corresponding reference characters throughout views. Those parts of turbo-molecular pumps according to the present invention which are identical to those of the conventional turbo-molecular pump shown in FIG. 17 are denoted by identical reference characters, and will not be described in detail below.
  • FIGS. 1 and 2 show a turbo-molecular pump according to a first embodiment of the present invention.
  • the turbo-molecular pump according to the first embodiment has a protective cover 50 serving as a scattering prevention member mounted on the flange 14b around the intake port 14a in the pump casing 14.
  • the protective cover 50 comprises a circular shield 52 disposed centrally in the intake port 14a in covering relationship to an area directly above the rotary cylindrical sleeve 12 of the rotor R, a ring-shaped rim 56 disposed concentrically with and radially outwardly of the circular shield 52 and having an opening whose size is the same as the size of the intake port 14a, and a plurality of (three in FIG.
  • the protective cover 50 has a step 56a on the lower surface of the rim 56 which is fitted over the flange 14b, so that the protective cover 50 is fixed to the pump casing 14.
  • the flange 14b may have a step, and the protective cover 50 may be fitted in the step and fastened to the flange 14b by bolts.
  • the protective cover 50 may be fitted in the step in the flange 14b and simply sandwiched between the pump casing 14 and the chamber in the processing apparatus to which the turbo-molecular pump is connected.
  • the axially uppermost stator blade 32a of all the stator blades 32 is made of a material stronger than aluminum, such as stainless steel, titanium alloy, or the like, and the remaining stator blades 32 are made of aluminum.
  • the stator blade 32a also serves as a scattering prevention member.
  • the turbo-molecular pump having the above structure, if the rotor R is broken due to corrosion or the like while it is rotating, fragments of the rotary cylindrical sleeve 12 or the rotor blades 30 in the rotor R collide with the shield 52 of the protective cover 50, thereby losing their kinetic energy toward the intake port 14a. Therefore, the chamber or the like connected to the intake port 14a of the pump casing 14 is prevented from being damaged, or the degree of damage of the chamber or the like is reduced.
  • the shield 52 covers only the rotary cylindrical sleeve 12. However, the shield 52 may cover not only the rotary cylindrical sleeve 12, but also part of the rotor blades 30.
  • stator blade 32a of the stator blades 32 Since the axially uppermost stator blade 32a of the stator blades 32 is made of a material stronger than aluminum, the stator blade 32a is not broken or is broken to a lesser degree when it is hit by fragments of the rotor blades 30 made of aluminum. The stator blade 32a thus effectively serves as a scattering prevention member for preventing fragments from being scattered through the intake port 14a.
  • stator blade 32a of the stator blades 32 is made of a high-strength material.
  • any other arbitrary stator blades 32 e.g., first- and fourth-stage stator blades 32 may be made of a high-strength material. This holds true for other embodiments of the present invention.
  • the protective cover 50 is provided as a scattering prevention member, and also the uppermost stator blade 32a of the stator blades 32 is made of a material stronger than aluminum as a scattering prevention member.
  • the uppermost stator blade 32a may be made of a material stronger than aluminum.
  • the turbo-molecular pump in other embodiments described later may have the same structure as the turbo-molecular pump in the first embodiment.
  • FIG. 3 shows a turbo-molecular pump according to a second embodiment of the present invention.
  • the circular shield 52 of the protective cover 50 according to the first embodiment is replaced with a substantially cylindrical shield 58.
  • the substantially cylindrical shield 58 has a substantially lower half disposed in a recess 13 defined centrally in the rotary cylindrical sleeve 12.
  • Other details of the turbo-molecular pump according to the second embodiment are identical to those of the turbo-molecular pump according to the first embodiment.
  • the gap between the shield 58 and the rotor R is reduced to lower the possibility of fragments to be scattered around for better protection of the chamber to which the turbo-molecular pump is connected.
  • the shield 58 also performs an attitude maintaining function to keep the rotor R in its proper attitude when the rotor R suffers abnormal rotation. Any unwanted contact between the rotor R and the stator W can therefore be minimized to reduce the possibility of fragment production.
  • FIGS. 4 and 5 shows a turbo-molecular pump according to a third embodiment of the present invention.
  • the turbo-molecular pump includes a scattering prevention member having a shock absorbing structure.
  • the protective cover 50 as a scattering prevention member has a substantially circular shield 70 disposed centrally therein and having a shank 70a projecting downwardly, and a shock absorbing member 74 comprising metal pipes 72 wound in two coil-like layers around the shank 70a.
  • the shock absorbing member 74 is surrounded by a cup-shaped cover 76 which is open upwardly.
  • the shield 70 has a peripheral edge fastened to a flange of the cover 76 by bolts 78.
  • the cover 76 is disposed so as to enter the recess 13 defined centrally in the rotary cylindrical sleeve 12.
  • the turbo-molecular pump of this embodiment if the rotor R is broken, then fragments of the rotor blades 30 or the rotary cylindrical sleeve 12 collide with the shield 70 and the cover 76. At this time, the shock absorbing member 74 can easily be deformed or broken in both axial and radial directions to absorb applied shocks. Therefore, the kinetic energy of the fragments is absorbed to protect the chamber to which the turbo-molecular pump is connected.
  • the shock absorbing member 74 may alternatively be made of a relatively soft metal material such as lead, a polymer material, or a composite material thereof, and shaped so as to be effective to absorb shocks, e.g., shaped into a honeycomb structure or an assembly of spherical members.
  • the shock absorbing member 74 should preferably be made of a corrosion-resistant material or be treated to provide a corrosion-resistant surface such as a nickel coating.
  • FIG. 6 and 7 show a turbo-molecular pump according to a fourth embodiment of the present invention.
  • the turbo-molecular pump according to the fourth embodiment differs from the turbo-molecular pump according to the first embodiment in the following:
  • a plurality of (three in FIG. 7) protrusions 60 which make up a scattering prevention member together with the protective cover 50, are disposed at predetermined intervals on an inner surface of the intake port 14a and project radially inwardly in covering relationship to the outer circumferential edges of the rotor blades 30 of the rotor R. While the protrusions 60 are shown as being disposed on the inner surface of the intake port 14a, the protrusions 60 may alternatively be disposed on the rim 56 of the protective cover 50.
  • FIG. 8 shows a turbo-molecular pump according to a fifth embodiment of the present invention.
  • the turbo-molecular pump according to the fifth embodiment has a scattering prevention member 62 mounted on the upper end of the main shaft 10 of the rotor R in covering relationship to the upper surface of the rotary cylindrical sleeve 12 that faces the intake port 14a.
  • the scattering prevention member 62 is of a cup shape complementary to the recess 13 in the rotary cylindrical sleeve 12 and has a flange 62a on its upper end which extends along the flat upper surface of the rotary cylindrical sleeve 12.
  • the scattering prevention member 62 has an internally threaded hole defined in a bottom thereof.
  • the main shaft 10 has a fixed portion 10a at the upper end thereof and having an externally threaded surface.
  • the scattering prevention member 62 is fastened to the main shaft 10 by the fixed portion 10a that is threaded into the internally threaded hole in the scattering prevention member 62.
  • the scattering prevention member 62 may alternatively be fastened to the main shaft 10 or the rotary cylindrical sleeve 12 by other fasteners such as bolts.
  • the scattering prevention member 62 is mounted on the rotor R, it is not necessary to provide an obstacle which would otherwise extend across the intake port 14a for installing the scattering prevention member 62. Therefore, the velocity of the gas that is evacuated by the turbo-molecular pump is not lowered. Furthermore, because the scattering prevention member 62 is disposed in covering relationship to the recess 13 where fragments of the rotor R tend to be scattered, the scattering prevention member 62 is effective to efficiently prevent fragments of the rotor R from being scattered. While the scattering prevention member 62 is disposed in covering relationship to the rotary cylindrical sleeve 12 in the illustrated embodiment, the scattering prevention member 62 may be disposed so as to cover part of the rotor blades 30.
  • FIGS. 9 through 11 show a turbo-molecular pump according to a sixth embodiment of the present invention.
  • the turbo-molecular pump according to the sixth embodiment differs from the turbo-molecular pump according to the fifth embodiment in that a shock absorbing structure is added to the scattering prevention member 62 according to the fifth embodiment.
  • Other details of the turbo-molecular pump according to the sixth embodiment are identical to those of the turbo-molecular pump according to the fifth embodiment.
  • the upwardly open scattering prevention member 62 houses therein a shock absorbing member 82 comprising a pair of vertical stacks of semiannular metal pipes 80 (see FIG. 11) in radially confronting relationship to each other.
  • the main shaft 10 has a vertical extension having an externally threaded upper end.
  • a nut 84 as a shock absorbing member holder is threaded over the externally threaded upper end of the extension of the main shaft 10, thus holding the shock absorbing member 82 against removal.
  • the nut 84 is fastened to cause the shock absorbing member 82 to press the lower surface of the flange 62a thereof against the rotary cylindrical sleeve 12 for thereby securing the scattering prevention member 62.
  • the shock absorbing member 82 can easily be deformed or broken in both axial and radial directions to absorb applied shocks. Therefore, the kinetic energy of the fragments is absorbed to protect the chamber or the like to which the turbo-molecular pump is connected.
  • the semiannular metal pipes 80 are used to make up the shock absorbing member 82 for the reason of better productivity.
  • fully circular metal pipes, annular metal pipes with open gaps, or coil-shaped metal pipes may also be employed.
  • the shock absorbing member 82 may alternatively be made of a relatively soft metal material, a polymer material, or a composite material thereof, and shaped so as to be effective to absorb shocks.
  • FIG. 12 shows a turbo-molecular pump according to a seventh embodiment of the present invention.
  • the turbo-molecular pump according to the seventh embodiment differs from the turbo-molecular pump according to the fifth embodiment in that the cup-shaped scattering prevention member 62 is replaced with a disk-shaped scattering prevention member 64 that is housed in the recess 13 in the rotary cylindrical sleeve 12.
  • Other details of the turbo-molecular pump according to the seventh embodiment are identical to those of the turbo-molecular pump according to the fifth embodiment.
  • the rotary cylindrical sleeve 12 has an upper portion 12a integral with a hub 12b thereof. Therefore, only by simply holding the hub 12b with the disk-shaped scattering prevention member 64, rotor fragments is effectively prevented from being scattered.
  • the turbo-molecular pump according to the seventh embodiment is less costly than the turbo-molecular pump according to the fifth embodiment.
  • FIG. 13 shows a turbo-molecular pump according to an eighth embodiment of the present invention.
  • the turbo-molecular pump according to the eighth embodiment differs from the turbo-molecular pump according to the fifth embodiment in that the cup-shaped scattering prevention member 62 is fastened to the rotary cylindrical sleeve 12 by bolts 66 and also differs therefrom in the following:
  • a plurality of (three in the illustrated embodiment) protrusions 60, which make up a scattering prevention member together with the scattering prevention member 62, are disposed at predetermined intervals on an inner surface of the intake port 14a and project radially inwardly in covering relationship to the outer circumferential edges of the rotor blades 30 of the rotor R.
  • the scattering prevention member including the protrusions should preferably be made of a high-strength material such as stainless steel, titanium alloy, or the like.
  • FIGS. 14 and 15 show a turbo-molecular pump according to a ninth embodiment of the present invention.
  • the turbo-molecular pump according to the ninth embodiment differs from the turbo-molecular pump according to the eighth embodiment in that a shock absorbing structure is added to the scattering prevention member 62 fastened to the rotary cylindrical sleeve 12 according to the eighth embodiment.
  • Other details of the turbo-molecular pump according to the ninth embodiment are identical to those of the turbo-molecular pump according to the eighth embodiment.
  • a support 90 having a shank 90a is vertically mounted in the recess 13 in the rotary cylindrical sleeve 12 and fastened to the bottom of the recess 13 by bolts 92.
  • the scattering prevention member 62 houses therein a shock absorbing member 96 comprising a pair of vertical stacks of semiannular metal pipes 80 (see FIG. 11) in radially confronting relationship to each other and a plurality of O-rings 94 of fluororubber interposed between the pipes 80 and the scattering prevention member 62.
  • the shank 90a has a vertical extension having an externally threaded upper end.
  • a nut 98 as a shock absorbing member holder is threaded over the externally threaded upper end of the extension of the shank 90a, thus holding the shock absorbing member 96 against removal.
  • the scattering prevention member 62 is limited against its axial movement by the pipes 80 and limited against its radial movement by the O-rings 94.
  • the shock absorbing structure is capable of absorbing shocks due to collision with rotor fragments or stator fragments in both the axial and radial directions.
  • annular ledge 12c is disposed on the upper surface of the rotary cylindrical sleeve 12 around the recess 13, and an annular ridge 62c is disposed on the lower surface of a peripheral edge of the flange 62a of the scattering prevention member 62.
  • the annular ridge 62c define a recess 62b in the lower surface of the flange 62a.
  • the turbo-molecular pump according to the ninth embodiment, if the rotor R is broken, fragments of the rotor blades 30 or the rotary cylindrical sleeve 12 collide with the scattering prevention member 62. At this time, the shock absorbing member 96 is deformed or broken to absorb the kinetic energy of the fragments. Since fragments also collide with the protrusions 60, the kinetic energy of the fragments introduced into the intake port 14a can further be reduced.
  • FIG. 16 shows a turbo-molecular pump according to a tenth embodiment of the present invention.
  • the axially uppermost rotor blade 30a of all rotor blades 30 is separate from the other rotor blades 30 and is made of a material stronger than aluminum, such as stainless steel, titanium alloy, or the like, and the remaining rotor blades 30 are made of aluminum.
  • the uppermost rotor blade 30a is directly fastened to the main shaft 10 by bolts 100, and serves as a scattering prevention member.
  • the rotor blade 30a Since the uppermost rotor blade 30a is made of a material stronger than aluminum, the rotor blade 30a is not broken or is broken to a lesser degree when it is hit by fragments of the remaining rotor blades 30 made of aluminum. The rotor blade 30a thus effectively serves as a scattering prevention member for preventing fragments from being scattered through the intake port 14a.
  • the various embodiments of the present invention are applied to the wide-range turbo-molecular pump which has the turbine blade pumping section L1 and the thread groove pumping section L2.
  • the principles of the present invention are also applicable to a turbo-molecular pump having either the turbine blade pumping section L1 or the thread groove pumping section L2.
  • the various embodiments of the present invention may be used in any one of possible combinations.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP00112625A 1999-06-14 2000-06-14 Turbomolekularpumpe Expired - Lifetime EP1061262B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP16663799 1999-06-14
JP16663799 1999-06-14

Publications (3)

Publication Number Publication Date
EP1061262A2 true EP1061262A2 (de) 2000-12-20
EP1061262A3 EP1061262A3 (de) 2002-03-06
EP1061262B1 EP1061262B1 (de) 2007-12-26

Family

ID=15834982

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00112625A Expired - Lifetime EP1061262B1 (de) 1999-06-14 2000-06-14 Turbomolekularpumpe

Country Status (3)

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EP (1) EP1061262B1 (de)
KR (1) KR20010007349A (de)
DE (1) DE60037554T2 (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1992822A1 (de) * 2007-05-15 2008-11-19 Agilent Technologies Inc Vakuumverteiler für Differentialpumpen eines Unterdrucksystems
WO2008151979A1 (de) * 2007-06-11 2008-12-18 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
CN109185588A (zh) * 2018-10-10 2019-01-11 北京遥感设备研究所 一种双层定子结构的气路旋转关节结构

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5412239B2 (ja) 2009-02-24 2014-02-12 株式会社島津製作所 ターボ分子ポンプおよびターボ分子ポンプ用パーティクルトラップ

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62261696A (ja) * 1986-05-08 1987-11-13 Mitsubishi Electric Corp タ−ボ分子ポンプ装置
US4926648A (en) * 1988-03-07 1990-05-22 Toshiba Corp. Turbomolecular pump and method of operating the same
WO1994007033A1 (en) * 1992-09-23 1994-03-31 United States Of America As Represented By The Secretary Of The Air Force Turbo-molecular blower

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1992822A1 (de) * 2007-05-15 2008-11-19 Agilent Technologies Inc Vakuumverteiler für Differentialpumpen eines Unterdrucksystems
WO2008151979A1 (de) * 2007-06-11 2008-12-18 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
CN109185588A (zh) * 2018-10-10 2019-01-11 北京遥感设备研究所 一种双层定子结构的气路旋转关节结构
CN109185588B (zh) * 2018-10-10 2020-05-15 北京遥感设备研究所 一种双层定子结构的气路旋转关节结构

Also Published As

Publication number Publication date
EP1061262A3 (de) 2002-03-06
EP1061262B1 (de) 2007-12-26
DE60037554T2 (de) 2009-01-08
DE60037554D1 (de) 2008-02-07
KR20010007349A (ko) 2001-01-26

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