EP1020645A1 - Mehrstufige Rootspumpe und Verfahren zur Herstellung des Gehäuses - Google Patents

Mehrstufige Rootspumpe und Verfahren zur Herstellung des Gehäuses Download PDF

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Publication number
EP1020645A1
EP1020645A1 EP99124197A EP99124197A EP1020645A1 EP 1020645 A1 EP1020645 A1 EP 1020645A1 EP 99124197 A EP99124197 A EP 99124197A EP 99124197 A EP99124197 A EP 99124197A EP 1020645 A1 EP1020645 A1 EP 1020645A1
Authority
EP
European Patent Office
Prior art keywords
block
shafts
rotor housing
stage roots
plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP99124197A
Other languages
English (en)
French (fr)
Inventor
Kunifumi Goto
Satoshi Furuhashi
Shinya Saito
Naoki Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Industries Corp
Original Assignee
Toyoda Jidoshokki Seisakusho KK
Toyoda Automatic Loom Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyoda Jidoshokki Seisakusho KK, Toyoda Automatic Loom Works Ltd filed Critical Toyoda Jidoshokki Seisakusho KK
Publication of EP1020645A1 publication Critical patent/EP1020645A1/de
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C11/00—Combinations of two or more machines or pumps, each being of rotary-piston or oscillating-piston type; Pumping installations
    • F04C11/001—Combinations of two or more machines or pumps, each being of rotary-piston or oscillating-piston type; Pumping installations of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/18—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with similar tooth forms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2/00—Rotary-piston machines or pumps
    • F04C2/08—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C2/082—Details specially related to intermeshing engagement type machines or pumps
    • F04C2/086—Carter

Definitions

  • the present invention relates to a multi-stage Roots pump in which a plurality of rotatable shafts are arranged in parallel, rotors are arranged on said rotatable shafts with rotors on the neighboring rotary shafts brought in mesh with each other, and axially spaced pump chambers accommodating respective sets of rotors in mesh with each other are formed in a rotor housing.
  • the present invention also relates to a method of producing a rotor housing therefor.
  • a rotor housing forming a plurality of pump chambers arranged in the axial direction of the pair of rotary shafts is formed by joining a pair of outer shells.
  • Each outer shell has a plurality of partitioning walls formed as a unitary structure.
  • One outer shell and the other outer shell are joined together with their partitioning walls being opposed to each other.
  • the partitioning walls joined together being opposed to each other, sectionalize a plurality of pump chambers in the axial direction of the rotary shafts.
  • Rotors accommodated in the pump chambers rotate in the pump chambers to deliver the fluid under pressure.
  • the inner peripheral surfaces of the outer shells forming the partitioning walls integrally together must be machined for each of the pair of outer shells.
  • Circumferential surfaces are formed on some of the inner peripheral surfaces of the pump chambers accommodating the rotors, and the pair of outer shells are joined together at portions of the circumferential surfaces.
  • a first object of the present invention is to highly precisely form the wall surfaces of pump chambers in the multi-stage Roots pump.
  • a second object of the present invention is to produce the rotor housing in a decreased period of time.
  • the present invention provides a multi-stage Roots pump comprising: a rotor housing having a plurality of axially spaced pump chambers formed therein; a plurality of shafts parallely and rotatably arranged in said rotor housing, said shafts having respective axes; a plurality of sets of rotors arranged on said shafts, each set of rotors being arranged on adjacent shafts in mesh with each other and accommodated in each of said pump chambers; and said rotor housing comprising a cylinder block including a plurality of block elements parted along at least one plane extending parallel to the axes of said shafts and joined together so as to form inner circumferential surfaces of said pump chambers, and a plurality of partition walls formed separately from and coupled to said cylinder block to divide said cylinder block into said pump chambers, whereby said block elements and said partition walls form, in combination, said rotor housing.
  • the constitution in which the cylinder block constituted by a plurality of block pieces is separate from the partitioning walls, makes it possible to highly precisely machine the wall surfaces in the pump chambers and to produce the rotor housing in a decreased period of time.
  • the axes of said shafts lie in a first plane
  • said cylinder block comprises a pair of block elements having parting surfaces joined together in a second plane passing through a line located at a middle position between said axes of said shafts and lying in said first plane.
  • the cylinder block is parted into two and comprises a pair of block pieces that are joined together in the second plane.
  • the constitution in which the cylinder block is parted into two is the simplest from the standpoint of production.
  • the second plane is the same as said first plane.
  • the constitution in which the second plane is the same as the first plane makes it easy to set the shape of the pump chambers for enhancing the pumping efficiency.
  • the second plane can be perpendicular to the first plane.
  • the cylinder block comprises a pair of block elements having inner circumferential surfaces identical to each other.
  • the pair of such block pieces are effective in enhancing the efficiency for producing the block pieces.
  • each of said partition walls comprises a pair of wall elements having parting surfaces joined together in said second plane passing through said line.
  • the partitioning wall has a two-part constitution comprising a pair of wall pieces that are joined on the second plane.
  • the partitioning walls of the two-part constitution are the simplest even from the standpoint of production.
  • a plurality of positioning grooves are formed in parallel in the inner surfaces of said plurality of block pieces, and said partitioning walls are fitted into said positioning grooves.
  • the constitution in which the partitioning walls are fitted into the positioning grooves makes it possible to highly precisely guarantee a very small clearance between the rotors and the wall surfaces of the pump chambers formed by the partitioning walls.
  • the partitioning walls are forcibly introduced into said positioning grooves.
  • the present invention also provides a method of producing a rotor housing of a multi-stage Roots pump which includes said rotor housing having a plurality of axially spaced pump chambers formed therein, a plurality of shafts parallely and rotatably arranged in said rotor housing, said shafts having respective axes, and a plurality of sets of rotors arranged on said shafts, each set of rotors being arranged on adjacent shafts in mesh with each other and accommodated in each of said pump chambers.
  • the method comprising the steps of: preparing rough block elements constituting a plurality of block elements for forming a cylinder block having an inner surface forming inner circumferential surfaces of said pump chambers; provisionally joining said rough block elements together; grinding the inner circumferential surfaces of said rough block elements while maintaining said provisional joining; releasing said provisional joining; and joining together said block elements constituted by said rough block elements.
  • the wall surfaces of a partly circular shape of the pump chambers can be highly precisely machined at one time.
  • the method further comprises the step of forming positioning grooves in the block elements in which partition walls dividing the inner space in the cylinder block into said pump chambers are to be fitted, prior to or after the step of grinding the inner circumferential surfaces.
  • the method further comprises the step of press fitting wall elements constituting said partition walls in the positioning grooves in said block elements, after the step of grinding the inner circumferential surfaces and after the step of forming said positioning grooves.
  • the rotors are incorporated in the assembly of the block pieces and the wall pieces after the wall pieces have been press fitted into the positioning grooves of the block pieces.
  • a multi-stage Roots pump 10 has a rotor housing 12, a front housing 13 joined to the front end of the rotor housing 12 via a compartment plate 14, and a rear housing 15 joined to the rear end of the rotor housing 12 via a compartment plate 16.
  • the rotor housing 12 comprises a cylinder block 11 and a plurality of partitioning walls 33, 34, 35 and 36.
  • the cylinder block 11 comprises a pair of block pieces 17 and 18, and each of partitioning walls 33, 34, 35 and 36 comprises a pair of wall pieces 37 and 38.
  • Inner space in the cylinder block 11 is divided such that a first pump chamber 39 is formed between the compartment plate 14 and the partitioning wall 33, a second pump chamber 40 is formed between the partitioning walls 33 and 34, a third pump chamber 41 is formed between the partitioning walls 34 and 35 and a fourth pump chamber 42 is formed between the partitioning walls 35 and 36.
  • a fifth pump chamber 43 is formed between the partitioning wall 36 and the compartment plate 16.
  • a pair of rotary shafts 19 and 20 are rotatably supported by the front housing 13 and the rear housing 15 via bearings 21 and 22.
  • the two rotary shafts 19 and 20 are arranged in parallel with each other.
  • the rotary shaft 19 is inserted in an insertion holes 49 formed by hole-forming walls 376 and 386 of the wall pieces 37 and 38, and the rotary shaft 20 is inserted in insertion holes 50 formed by hole-forming walls 377 and 387 of the wall pieces 37 and 38.
  • a plurality of rotors 23, 24, 25, 26 and 27 are integrally formed on the rotary shaft 19, and the same number of rotors 28, 29, 30, 31 and 32 are integrally formed on the rotary shaft 20.
  • the rotors 23 to 32 have the same shape and the same size, as viewed in the direction of axes 191 and 201 of the rotary shafts 19, 20.
  • the rotors 23, 24, 25, 26 and 27 have thicknesses decreasing in this order, and the rotors 28, 29, 30, 31 and 32 have thicknesses decreasing in this order.
  • the rotors 23 and 28 have the same thickness
  • the rotors 24 and 29 have the same thickness
  • the rotors 25 and 30 have the same thickness
  • the rotors 26 and 31 have the same thickness.
  • the rotors 27 and 32 have the same thickness.
  • the rotors 23 and 28 are accommodated in the first pump chamber 39 in mesh with each other, and the rotors 24 and 29 are accommodated in the second pump chamber 40 in mesh with each other.
  • the rotors 25 and 30 are accommodated in the third pump chamber 41 in mesh with each other, and the rotors 26 and 31 are accommodated in the fourth pump chamber 42 in mesh with each other.
  • the rotors 27 and 32 are accommodated in the fifth pump chamber 43 in mesh with each other.
  • a drive unit 44 is incorporated in the rear housing 15.
  • the rotary shafts 19 and 20 protrude into the drive unit 44 penetrating through the rear housing 15.
  • Gears 45 and 46 are fixed to the protruded ends of the rotary shafts 19 and 20 in mesh with each other.
  • the rotary shaft 19 is rotated by a motor (not shown) in the drive unit 44 in the direction of an arrow R1 in Figs. 2 to 5.
  • the rotation of the rotary shaft 19 is transmitted to the rotary shaft 20 through the gears 45 and 46, and the rotary shaft 20 is rotated in the direction opposite to the rotary shaft 19 as indicated by an arrow R2 in Figs. 2 to 5.
  • a passage 371 is formed in the wall piece 37, and an inlet 373 of the passage 371 is formed in the end surface 372 of the wall piece 37.
  • Pair of partly circular circumferential surfaces 174 and 175 are formed in the inner surface of the block piece 17.
  • a plurality of positioning grooves 172 are formed in parallel in the inner surface of the block piece 17, and the wall pieces 37 are press-fitted in the positioning grooves 172.
  • a passage 381 is formed in the wall piece 38, and an outlet 383 of the passage 381 is formed in the end surface 382 of the wall piece 38.
  • Pair of partly circular circumferential surfaces 184 and 185 are formed in the inner surface of the block piece 18.
  • a plurality of positioning grooves 182 are formed in parallel in the inner surface of the block piece 18, and the wall pieces 38 are press-fitted in the positioning grooves 182.
  • the rotors 23 to 27 rotate with a very small clearance relative to the circular circumferential surfaces 174 and 184, and the rotors 28 to 32 rotate with a very small clearance relative to the circular circumferential surfaces 175 and 185.
  • the block pieces 17 and 18 have the same shape, and have the circular circumferential wall surfaces 174, 175, 184 and 185 of the same shape.
  • the parting surfaces 171 and 181 of the block pieces 17 and 18 are joined in a plane S1
  • the parting surfaces 374 and 384 of the wall pieces 37 and 38 are joined in the plane S1.
  • the passages 371 and 381 of the wall pieces 37 and 38 joined to each other, are continuous to one another.
  • a fluid introduction port 183 is formed in the block piece 18 in communication with the first pump chamber 39.
  • a fluid exhaust port 173 is formed in the block piece 17 in communication with the fifth pump chamber 43.
  • the fluid introduced into the first pump chamber 39 through the fluid introduction port 183 is delivered under pressure into the second pump chamber 40 due to the rotation of the rotors 23 and 28, passing through the inlet 373 of the partitioning wall 33, passages 371 and 381, and the outlet 383.
  • the fluid introduced into the second pump chamber 40 is delivered under pressure to the third pump chamber 41 due to the rotation of the rotors 24 and 29, passing through the inlet 373 of the partitioning wall 34, passages 371 and 381 and the outlet 383.
  • the fluid delivered under pressure from the third pump chamber 41 to the fourth pump chamber 42, and from the fourth pump chamber 42 to the fifth pump chamber 43 i.e., pumped in order of decreasing volumes of the pump chambers through the passages 371, 381 in the partitioning walls 35 and 36.
  • the fluid pumped into the fifth pump chamber 43 is discharged to the external side through the fluid discharge port 173.
  • the rotor housing 12 is produced in the manner as described below.
  • rough block pieces 47 and 48 shown in Fig. 6, that are bases of the block pieces 17 and 18, are molded.
  • the molded rough block pieces 47 and 48 are provisionally joined, as indicted by solid lines in Fig. 6.
  • the rough, circular circumferential surfaces 471, 472, 481 and 482 and the rough positioning grooves 473 and 483 are finished by grinding.
  • the circular circumferential surfaces 174, 175, 184 and 185 and the positioning grooves 172 and 182 are formed, as shown in Figs. 7 and 8.
  • the wall pieces 37 and 38 which are formed separately from the block pieces 17 and 18, are press fitted into the positioning grooves 172 and 182, after the provisional joining is released, as shown in Fig. 9.
  • the wall pieces 37 are incorporated in the block pieces 17 and the wall pieces 38 are incorporated in the block piece 18.
  • the parting surfaces 171 and 181 of the block pieces 17 and 18 as well as the parting surfaces 374 and 384 of the wall pieces 37 and 38 are finished by grinding.
  • the fluid introduction port 183 and the fluid discharge port 173 are formed thereafter.
  • the first embodiment exhibits the following effects.
  • pins 51 are press fitted into the boundaries between the parting surfaces 171 and 181 of the block pieces 17, 18 and the parting surfaces 374 and 384 of the wall pieces 37 and 38 fitted in the positioning grooves 172, 182.
  • the wall pieces 37 and 38 fitted in the positioning grooves 172 and 282 are secured to the positioning grooves 172 and 182 as the pins 51 are press fitted therein.
  • the wall pieces 37 and 38 are easily secured to the block pieces 17 and 18 by forcibly introducing the pins 51.
  • the cylinder block 53 forming the rotor housing 52 is constituted by a pair of block pieces 54 and 55 that are joined in a second plane S2 that intersects the first plane S1 at right angles and passes through the straight line L.
  • the wall pieces 37 and 38 constitute partitioning walls as the recessed portions 378 and 389 thereof and the protruded portions 388 and 379 thereof are press fitted to each other.
  • the wall pieces 37 and 38 are fitted to the positioning grooves 541 and 551 in a state where the wall pieces 37 and 38 are coupled together permitting the rotary shafts 19 and 20 to pass through.
  • This embodiment too, exhibits the same effects as those mentioned in (1-1) to (1-4), (1-6), (1-7) and (1-9) to (1-11) of the first embodiment.
  • the cylinder block forming the circumferential surfaces of the pump chambers is formed separately from a plurality of partitioning walls that sectionalize the neighboring pump chambers, the cylinder block being constituted by joining a plurality of block pieces in a direction to surround the axes of the rotatable shafts, and the rotor housing being constituted by combining the plurality of block pieces and the plurality of partitioning walls together. Therefore, the wall surfaces of the pump chambers of the multi-stage Roots pump are formed highly precisely, and the rotor housing is produced in a decreased period of time.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Rotary Pumps (AREA)
  • Details And Applications Of Rotary Liquid Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
EP99124197A 1999-01-11 1999-12-03 Mehrstufige Rootspumpe und Verfahren zur Herstellung des Gehäuses Withdrawn EP1020645A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP413699 1999-01-11
JP11004136A JP2000205148A (ja) 1999-01-11 1999-01-11 多段ル―ツポンプ及び多段ル―ツポンプのロ―タハウジング製作方法

Publications (1)

Publication Number Publication Date
EP1020645A1 true EP1020645A1 (de) 2000-07-19

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EP99124197A Withdrawn EP1020645A1 (de) 1999-01-11 1999-12-03 Mehrstufige Rootspumpe und Verfahren zur Herstellung des Gehäuses

Country Status (3)

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EP (1) EP1020645A1 (de)
JP (1) JP2000205148A (de)
KR (1) KR20000052324A (de)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2813104A1 (fr) * 2000-08-21 2002-02-22 Cit Alcatel Joint etancheite pour pompe a vide
WO2004013386A2 (de) * 2002-07-24 2004-02-12 Saurer Gmbh & Co. Kg Vorrichtung und verfahren zum einspeisen einer flüssigen farbe in eine polymerschmelze
CN104329172A (zh) * 2014-11-19 2015-02-04 哈尔滨广瀚燃气轮机有限公司 燃气轮机滑油组件
RU2562825C1 (ru) * 2014-11-25 2015-09-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Казанский государственный энергетический университет" (ФГБОУ ВПО "КГЭУ") Способ разделения потока жидкости
DE202014007117U1 (de) * 2014-09-05 2015-12-09 Oerlikon Leybold Vacuum Gmbh Klauenpumpe
DE202017001029U1 (de) * 2017-02-17 2018-05-18 Leybold Gmbh Mehrstufige Wälzkolbenpumpe
WO2018134598A3 (en) * 2017-01-20 2018-10-04 Edwards Limited Multi-stage vacuum booster pump coupling
US11578722B2 (en) 2017-01-20 2023-02-14 Edwards Limited Multi-stage vacuum booster pump coupling

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008152713A1 (ja) * 2007-06-13 2008-12-18 Kashiyama Industries, Ltd. ルーツ式ポンプおよびルーツ式ポンプ製造方法
GB0719394D0 (en) * 2007-10-04 2007-11-14 Edwards Ltd A multi stage clam shell vacuum pump
DE202009012158U1 (de) * 2009-09-08 2011-02-03 Hugo Vogelsang Maschinenbau Gmbh Drehkolbenpumpe
KR102003985B1 (ko) 2018-07-03 2019-07-25 한국원자력연구원 유체 이송 장치

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4328824A (en) * 1979-12-10 1982-05-11 General Electric Company Flow divider with plural metering gears, unrestrained spacers there-between and lubricated end roller bearings
US4531535A (en) * 1982-11-26 1985-07-30 General Electric Co. Flow divider
EP0480629A1 (de) * 1990-10-06 1992-04-15 The BOC Group plc Verbesserungen an mechanischen Pumpen

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4328824A (en) * 1979-12-10 1982-05-11 General Electric Company Flow divider with plural metering gears, unrestrained spacers there-between and lubricated end roller bearings
US4531535A (en) * 1982-11-26 1985-07-30 General Electric Co. Flow divider
EP0480629A1 (de) * 1990-10-06 1992-04-15 The BOC Group plc Verbesserungen an mechanischen Pumpen

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2813104A1 (fr) * 2000-08-21 2002-02-22 Cit Alcatel Joint etancheite pour pompe a vide
WO2002016773A1 (fr) * 2000-08-21 2002-02-28 Alcatel Joint d'etancheite pour pompe a vide
US6572351B2 (en) 2000-08-21 2003-06-03 Alcatel Pressure seal for a vacuum pump
WO2004013386A2 (de) * 2002-07-24 2004-02-12 Saurer Gmbh & Co. Kg Vorrichtung und verfahren zum einspeisen einer flüssigen farbe in eine polymerschmelze
WO2004013386A3 (de) * 2002-07-24 2005-05-26 Saurer Gmbh & Co Kg Vorrichtung und verfahren zum einspeisen einer flüssigen farbe in eine polymerschmelze
US7278776B2 (en) 2002-07-24 2007-10-09 Saurer Gmbh & Co. Kg Apparatus and method for injecting a liquid dye into a polymer melt
DE202014007117U1 (de) * 2014-09-05 2015-12-09 Oerlikon Leybold Vacuum Gmbh Klauenpumpe
CN106662107A (zh) * 2014-09-05 2017-05-10 莱宝有限公司 爪型泵
EP3189236A2 (de) * 2014-09-05 2017-07-12 Leybold GmbH Klauenpumpe
CN104329172A (zh) * 2014-11-19 2015-02-04 哈尔滨广瀚燃气轮机有限公司 燃气轮机滑油组件
RU2562825C1 (ru) * 2014-11-25 2015-09-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Казанский государственный энергетический университет" (ФГБОУ ВПО "КГЭУ") Способ разделения потока жидкости
WO2018134598A3 (en) * 2017-01-20 2018-10-04 Edwards Limited Multi-stage vacuum booster pump coupling
CN110177947A (zh) * 2017-01-20 2019-08-27 爱德华兹有限公司 多级真空增压泵联接件
US11578722B2 (en) 2017-01-20 2023-02-14 Edwards Limited Multi-stage vacuum booster pump coupling
DE202017001029U1 (de) * 2017-02-17 2018-05-18 Leybold Gmbh Mehrstufige Wälzkolbenpumpe
US11255328B2 (en) 2017-02-17 2022-02-22 Leybold Gmbh Multi-stage rotary lobe pump

Also Published As

Publication number Publication date
JP2000205148A (ja) 2000-07-25
KR20000052324A (ko) 2000-08-16

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