EP0975006A3 - Procédé de mesure de la densité de plasma, sonde pour la mesure de la densité de plasma et appareil pour la mesure de la densité de plasma - Google Patents

Procédé de mesure de la densité de plasma, sonde pour la mesure de la densité de plasma et appareil pour la mesure de la densité de plasma Download PDF

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Publication number
EP0975006A3
EP0975006A3 EP99114078A EP99114078A EP0975006A3 EP 0975006 A3 EP0975006 A3 EP 0975006A3 EP 99114078 A EP99114078 A EP 99114078A EP 99114078 A EP99114078 A EP 99114078A EP 0975006 A3 EP0975006 A3 EP 0975006A3
Authority
EP
European Patent Office
Prior art keywords
plasma density
measuring
plasma
frequency power
density information
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP99114078A
Other languages
German (de)
English (en)
Other versions
EP0975006A2 (fr
Inventor
Hideo Sugai
Seiichi Takasuga
Naoki Toyoda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nagoya University NUC
Nissin Inc
Original Assignee
Nagoya University NUC
Nissin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nagoya University NUC, Nissin Inc filed Critical Nagoya University NUC
Publication of EP0975006A2 publication Critical patent/EP0975006A2/fr
Publication of EP0975006A3 publication Critical patent/EP0975006A3/fr
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N22/00—Investigating or analysing materials by the use of microwaves or radio waves, i.e. electromagnetic waves with a wavelength of one millimetre or more
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
    • H05H1/0012—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry
    • H05H1/0062—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry by using microwaves

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Electromagnetism (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Plasma Technology (AREA)
  • Physical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
EP99114078A 1998-07-23 1999-07-20 Procédé de mesure de la densité de plasma, sonde pour la mesure de la densité de plasma et appareil pour la mesure de la densité de plasma Withdrawn EP0975006A3 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP20812998 1998-07-23
JP20812998 1998-07-23
JP5863699 1999-03-05
JP05863699A JP3497092B2 (ja) 1998-07-23 1999-03-05 プラズマ密度情報測定方法、および測定に用いられるプローブ、並びにプラズマ密度情報測定装置

Publications (2)

Publication Number Publication Date
EP0975006A2 EP0975006A2 (fr) 2000-01-26
EP0975006A3 true EP0975006A3 (fr) 2001-03-07

Family

ID=26399665

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99114078A Withdrawn EP0975006A3 (fr) 1998-07-23 1999-07-20 Procédé de mesure de la densité de plasma, sonde pour la mesure de la densité de plasma et appareil pour la mesure de la densité de plasma

Country Status (4)

Country Link
US (2) US6339297B1 (fr)
EP (1) EP0975006A3 (fr)
JP (1) JP3497092B2 (fr)
KR (1) KR20000011784A (fr)

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Also Published As

Publication number Publication date
KR20000011784A (ko) 2000-02-25
US6744211B2 (en) 2004-06-01
EP0975006A2 (fr) 2000-01-26
JP2000100599A (ja) 2000-04-07
US6339297B1 (en) 2002-01-15
US20020047543A1 (en) 2002-04-25
JP3497092B2 (ja) 2004-02-16

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