FR2876536B1 - Dispositif et procede de caracterisation de plasma - Google Patents

Dispositif et procede de caracterisation de plasma

Info

Publication number
FR2876536B1
FR2876536B1 FR0410574A FR0410574A FR2876536B1 FR 2876536 B1 FR2876536 B1 FR 2876536B1 FR 0410574 A FR0410574 A FR 0410574A FR 0410574 A FR0410574 A FR 0410574A FR 2876536 B1 FR2876536 B1 FR 2876536B1
Authority
FR
France
Prior art keywords
characterizing plasma
characterizing
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0410574A
Other languages
English (en)
Other versions
FR2876536A1 (fr
Inventor
Sebastien Dine
Jean Paul Booth
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Ecole Polytechnique
Original Assignee
Centre National de la Recherche Scientifique CNRS
Ecole Polytechnique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS, Ecole Polytechnique filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR0410574A priority Critical patent/FR2876536B1/fr
Priority to PCT/EP2005/054317 priority patent/WO2006037704A1/fr
Publication of FR2876536A1 publication Critical patent/FR2876536A1/fr
Application granted granted Critical
Publication of FR2876536B1 publication Critical patent/FR2876536B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • H01J37/32954—Electron temperature measurement
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
    • H05H1/0012—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry
    • H05H1/0062—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry by using microwaves

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Electromagnetism (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
FR0410574A 2004-10-07 2004-10-07 Dispositif et procede de caracterisation de plasma Expired - Fee Related FR2876536B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR0410574A FR2876536B1 (fr) 2004-10-07 2004-10-07 Dispositif et procede de caracterisation de plasma
PCT/EP2005/054317 WO2006037704A1 (fr) 2004-10-07 2005-09-01 Dispositif et procede de caracterisation de plasma

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0410574A FR2876536B1 (fr) 2004-10-07 2004-10-07 Dispositif et procede de caracterisation de plasma

Publications (2)

Publication Number Publication Date
FR2876536A1 FR2876536A1 (fr) 2006-04-14
FR2876536B1 true FR2876536B1 (fr) 2007-01-26

Family

ID=34954417

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0410574A Expired - Fee Related FR2876536B1 (fr) 2004-10-07 2004-10-07 Dispositif et procede de caracterisation de plasma

Country Status (2)

Country Link
FR (1) FR2876536B1 (fr)
WO (1) WO2006037704A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7085690B2 (ja) * 2019-01-31 2022-06-16 コリア リサーチ インスティテュート オブ スタンダーズ アンド サイエンス 平面型プラズマ診断装置、平面型プラズマ診断装置が埋め立てられたウエハー型プラズマ診断装置、平面型プラズマ診断装置が埋め立てられた静電チャック
CN113380429B (zh) * 2021-05-18 2022-09-20 清华大学 一种等离子体信号采集装置及采集方法
CN115243438B (zh) * 2022-07-08 2024-03-26 哈尔滨工业大学 一种大气压下低温射流等离子体的诊断系统及方法
CN117285210B (zh) * 2023-11-27 2024-04-05 黎明职业大学 一种基于多频等离子技术的印染废水处理装置及方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3497092B2 (ja) * 1998-07-23 2004-02-16 名古屋大学長 プラズマ密度情報測定方法、および測定に用いられるプローブ、並びにプラズマ密度情報測定装置
JP2001203097A (ja) * 2000-01-17 2001-07-27 Canon Inc プラズマ密度計測装置および方法並びにこれを利用したプラズマ処理装置および方法

Also Published As

Publication number Publication date
WO2006037704A1 (fr) 2006-04-13
FR2876536A1 (fr) 2006-04-14

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20100630